磁过滤真空弧沉积中过滤管道的第二阳极作用研究

利用一台磁过滤真空弧沉积装置,初步研究了磁过滤管道对系统弧放电的影响。实验证明,磁过滤管道在阴极真空弧沉积中不仅起到消除大颗粒的作用,还作为阴极真空弧放电的第二阳极对弧放电产生影响。给出了磁过滤阴极真空弧放电的等效电路,并用此电路对磁过滤阴极真空弧放电中的部分实验现象进行了解释。     

低能高束流氩离子源的结构及性能

离子源技术是等离子体研究中的一项重要内容,而低能大束流源则是离子源技术研究中的一个重要方向,因为这样的源在离子束刻蚀、离子束溅射镀膜以及荷能粒子与物质相互作用方面都有广泛的应用;本文采用空心阴极空心阳极结构,用热阴极电子发射弧放电驱动并用磁场约束产生等离子体,用曲面发射引出离子束,研制成了氩气放电溅射离子源;研究了灯丝加热电流、弧压对弧流的影响和弧流与工作气体压力对离子束引出的影响规律.离子源的引出电压在0-4.0 kV之间连续可调,最大引出束流为100 mA,束斑面积为φ6.0 cm,以Ti为溅射靶时的最大溅射沉积率为0.45 nm/s,离子源可连续工作160 h.     

真空弧离子源的电阻触发工作方式

介绍了真空弧离子源的一种电阻触发工作方式。有别于典型金属蒸汽真空弧(Metal vapor vacuum arc,MEVVA)离子源的触发工作方式,该方式不需要高压触发脉冲发生器和高压隔离脉冲变压器,简化了电源系统。实验测量了采用电阻触法20-200A主弧电流下的引出离子流,结果表明离子流随主弧流增大。研究了不同阻值触发电阻的起弧情况,实验结果表明在一定电阻阻值范围内,触发电阻越大,触发越难成功。电阻增大使得触发时间增长,主弧上升沿变缓,但是对引出的离子流几乎没有影响。     

真空弧氘离子源中杂质氕对束流品质的影响

分析了真空弧氘离子源中杂质的主要构成,并着重分析了杂质氕的成因及其对氘离子源性能的影响.对单次脉冲和低重复频率脉冲工作状态下的真空弧氘离子源进行了光谱诊断实验和核反应分析实验,结果表明,氘离子源等离子体中的确含有较多的杂质氕,可对氘离子源的引出束流品质产生较大的危害.并对如何减小杂质氕的影响提出了建议.     

间热式大面积六硼化镧中空阴极

介绍了适用于强流离子源的间热式大面积六硼化镧中空阴极。在１５ｃｍ双潘宁离子湖泊 上放电特性研究表明，该阴极性能良好，能可靠工作，使用过程中多次暴露于大气中，发射性能并未变坏，加热功率为１．４５ｋＷ，ＬａＢ６发射电流密度为２０Ａ／ｃｍ＾２，放电电流４００Ａ，脉冲宽度３０ｍｓ，放电波形重复性很好。使用１００ｈ后，发射体尺寸无明显变化。     

真空弧离子源引出束流在加速空间的分布

采用数码相机直接照相的方法来确定真空弧离子源引出束流在加速空间的分布。实验在动态真空实验系统中进行,系统真空度优于2×10-3 Pa。在离子源脉冲工作的条件下,采用数码相机拍摄到离子源引出束流在加速空间的积分图像,得到引出束流的幅亮度在拍摄平面上的相对分布,然后再通过Abel转换得到引出束流在加速空间的径向分布。实验结果表明:真空弧离子源引出束流近似高斯分布,离子源出口处的束流比靶入口处的束流强40%。     

磁过滤等离子体沉积和注入技术

利用阴极真空弧放电技术能够产生高密度的金属等离子体。经过90度的磁过滤器，可以除去金属等离子体中的大颗粒微粒，从而为制备高质量的、致密的各种薄膜提供了一种全新的技术。利用该技术制备薄膜具有非常广泛的应用。本文介绍了阴极真空弧放电技术的应用，以及磁过滤等离子体沉积和注入装置及其应用。     

LaMo阴极材料的制备与对比测试

对ＬａＭｏ阴极材料的制备进行了探索性的尝试，并对从美国购进的ＬａＭｏ阴极材料和自制的ＬａＭｏ材料的发射特性及用于强流离子源的弧放电性能进行了对是度是了较好的实验结果。     

支持气体对弧放电离子源的有益作用

在弧放电等离子体离子源中,用支持气体改善离子源的工作已有三十年的历史。美国ORNL在Calutron源中引进N_2或惰性气体。1973年Freeman提出,蒸汽未放电时,先用惰性气体帮助放电,直到蒸汽能建立放电时就停止供气。1977年Hudson等报道了用支持气体提高Ne~(6 )流强。但是,支持气体在弧放电离子源中的作用,至今尚未深入研究,     

氢化钛镍合金阴极真空弧放电离子特性研究

本文将氢化钛镍合金材料应用于强流长脉冲(200 A/270μs)真空弧放电实验中,该材料能在强流长脉冲真空弧放电产生的高温条件下保持较好的稳定性。使用飞行时间谱仪获得了氢化钛镍合金阴极真空弧放电产生的离子电荷态分布和离子成分。结果表明:Ti~(n+)和Ni~(n+)电荷态为1+、2+和3+,在放电过程的早期(0～30μs),H~+成分随时间逐渐增加,在30μs时达到最大比例57%,而Ti~(n+)和Ni~(n+)(n=1,2,3)离子成分随时间逐渐减少,在30μs时达到最小比例43%;在放电过程的后期(30～270μs),H~+成分迅速下降且在75μs后保持在总离子流的12%左右直至放电结束,Ti~(n+)和Ni~(n+)(n=1,2,3)含量随时间逐步增加,且在75μs后保持在总离子流的88%左右直至放电结束。     

Investigation of cathode spot characteristics in vacuum under transverse magnetic field (TMF) contacts

With the continuous improvement of current levels in power systems,the demands on the breaking capacity requirements of vacuum circuit breakers are getting higher and higher.The breaking capacity of vacuum breakers is determined by cathode spots,which provide electrons and metal vapor to maintain the arc.In this paper,experiments were carried out on two kinds of transverse magnetic field (TMF) contacts in a demountable vacuum chamber,the behavior of the cathode spots was recorded by a high-speed charge-coupled device (CCD) video camera,and the characteristics of the cathode spots were analyzed through the image processing method.The phenomenon of cathode spot groups and the star-shaped pattern of the spots were both discovered in the experiment.The experimental results show that with the condition of TMF contacts the initial expansion speed of cathode spots is influenced by some parameters,such as the tested current,contact gap,the structure of the contact,the contact diameter,the number of slots,etc.In addition,the influence of the magnetic field on the formation of the cathode spot groups,the distribution,and the dynamic characteristics of the cathode spots were analyzed.It is concluded that the characteristics of the cathode spots are due to the effect of the magnetic field on the near-cathode plasma.The study of the characteristics of cathode spots in this paper would be helpful in the exploration of the physical process of vacuum arcs,and would be of guiding significance in optimizing the design of vacuum circuit breakers.     

Investigation of Arc Regulation of Hot Cathode Ion Source with Langmuir Probe

The neutral beam injector (NBI) is one of the main plasma heating methods for nuclear fusion devices. For the hot cathode high current ion source, the arc current and beam current tends to increase during the beam pulse. In order to gets long pulse beam extraction, the arc regulation technology is employed. The Langmuir probes are installed on the experimental advanced superconducting tokamak-NBI ion source, to feedback control the arc discharge and beam extraction. The experimental results show that, the long pulse of 100 s ion beam is extracted with beam energy of 30 keV with arc regulation. More the results are presented in this paper.     

Analysis of Effects of the Arc Voltage on Arc Discharges in a Cathode Ion Source of Neutral Beam Injector

A hot cathode bucket ion source is used for the EAST(experimental advanced superconducting tokamak)neutral beam injector.The thermal electrons emitted from the surface of the cathode are extracted and accelerated by the electric field formed by the arc voltage,which is applied between the arc chamber of the ion source and the cathode.This paper analyzes the effects of arc voltage on the arc discharge in a hot cathode high current ion source.     

Study the Characteristic of the Hot Cathode of High Current Ion Source

The difference of hot cathode operation mode has great influence on the arc discharge of high current ion source. Based on the analysis of the theory of hot filament with two operation modes and combined with ion source experiments, the paper studies the effects of hot filament operation modes on ion source arc discharge.     

Generation characteristics of a metal ion plasma jet in vacuum discharge

To improve the performance of a metal ion plasma jet in vacuum discharge,an anode-insulated cone-cylinder electrode with insulating sleeve is proposed in this paper.Discharge characteristics and generation characteristics of plasma of the electrode are investigated,effects of diameter of insulating sleeve,variety of cathode material and length of the insulating sleeve on characteristics of metal ion plasma jet are discussed.Results indicate that a directional and steady plasma jet is formed by using the novel electrode with insulating sleeve under high vacuum conditions.Moreover,the properties of metal ion plasma jet are improved by using the aluminum cathode and thin and long insulating sleeve.The study provides strong support for research of vacuum metal ion plasma thruster and ion implantation technology.     

Impact of the Insulator on the Electric Field and Generation Characteristics of Vacuum Arc Metal Plasmas

The field electron emission plays a vital role in the process of vacuum discharge breakdown. The electric field strength at the cathode tip is significant to the generation char- acteristics of vacuum arc metal plasmas. To increase the field strength at the cathode tip, a coaxial electrode plasma source was employed with an insulator settled between the electrodes. The math expression of the field strength is derived based on the Gauss theory. The impact of the insulator on the electric field and parameters of plasmas were investigated by MAXWELL 3D simulation software and the Langmuir probe. In addition, a composite insulator was adopted to further strengthen the field strength. A series of experiments were performed to focus on the role of the composite insulator in detail. The experimental and simulation results indicate that, a reasonable layout of the insulator, especially the composite insulator, can effectively increase the field strength at the cathode tip and the plasma density.     

A Source for Multiply-Charged Ions and Acceleration of C, N and O Ions by IPCR Cyclotron

The design and performance of the ion source which is now used in the IPCR variable energy cyclotron are described. The source is of the electron-bombarded hot cathode type having two cylindrical cathodes of tungsten and a water-cooled copper anode containing a replaceable molybdenum slit plate. The arc discharge is established continuously but not pulsed. The source is usually operated very stably under an arc power of 1.5 to 3kW with a gas flow rate of 1 to 2 cc/min. The lifetime of the source is mainly limited by the erosion of the upper tungsten cathode at about 24 hours. At present, C4+, N4+, O4+, N5+ and O5+ ions are accelerated up to 48~100, 56~1100, 70~95, 56~125 and 70~125 MeV respectively, and a few micro-amperes of these ions are extracted from the cyclotron. The vacuum obtainable in the accelerating chamber is usually 2 ~ 4 × 10-6 mHg, and the loss of ion beam by the charge exchange effect is comparatively small. Extracted ion beams are used in several experiments for about 1900 hours in a year.