Sensing mechanism of room temperature CO2 sensors based on primary amino groups

This work reports measurements to elucidate the reaction mechanisms of sensitive materials containing primary amino groups with CO₂. The sensing mechanism is based on their ability to perform reversible acid-base reactions. The effect discussed for most of the previously used sensing layers concerns the formation of bicarbonate species, which requires H₂O as well as an increased temperature. By using work function readout technology an operation at room temperature of the sensing layers is enabled providing satisfying sensor responses in terms of SNR (signal noise ratio) and response time. In contrast to the previously investigated higher operation temperature, the response resulting from a room temperature measurement appears to be dominated by the reversible formation of carbamate, which does not require the presence of water. The presence of carbamate is considered to be the reason of the improved sensing performance of this sensing material at room temperature with work function readout.To confirm this hypothesis, DRIFT-MIR, Raman, XPS and NMR spectroscopy were employed to investigate the formation of species after manufacturing of the sensitive layers. Besides the formation of bicarbonate, the results show a strong indication for carbamate formation.     

Benzene monitoring by micro-machined sensors with SnO2 layer obtained by using micro-droplet deposition technique

SnO₂ thin layers were deposited by the way of the micro-droplet technique. The sensor substrate consisted of a thin membrane developed on oxidised silicon wafer. The sensing layers were deposited by means of the micro-droplet technique into thin layers of about 100 nm. Such devices were tested for benzene detection. The obtained results showed a very high sensitivity for this chemical compound since 500 ppb were detected.The results presented in this paper were not focused on the reactional mechanism of benzene detection but rather on the development of a cheap and sensitive sensor using sol-gel and micro-droplet processes. Since these layers were elaborated using solely tin oxide, the as-obtained sensors are not selective but these one are intended to be used by coupling with additional devices such as chromatographic micro-column and micro-pre-concentrators.     

Temperature dependent H2S and Cl2 sensing selectivity of Cr2O3 thin films

The conductometric gas sensing characteristics of Cr₂O₃ thin films - prepared by electron-beam deposition of Cr films on quartz substrate followed by oxygen annealing - have been investigated for a host of gases (CH₄, CO, NO₂, Cl₂, NH₃ and H₂S) as a function of operating temperature (between 30 and 300 °C) and gas concentration (1-30 ppm). We demonstrate that these films are highly selective to H₂S at an operating temperature of 100 °C, while at 220 °C the films become selective to Cl₂. This result has been explained on the basis of depletion of chemisorbed oxygen from the surface of films due to temperature and/or interaction with Cl₂/H₂S, which is supported experimentally by carrying out the work function measurements using Kelvin probe method. The temperature dependent selectivity of Cr₂O₃ thin films provides a flexibility to use same film for the sensing of Cl₂ as well as H₂S.     

Enhanced H2S sensing characteristics of Pt doped SnO2 nanofibers sensors with micro heater

Gas sensors were designed and fabricated using oxide nanofibers as the sensing materials on micro platforms using micromachining technology. Pure and Pt doped SnO₂ nanofibers were prepared by electrospinning and their H₂S gas sensing characteristics were subsequently investigated. The sensing temperatures of 300 and 500 °C could be attained at the heater powers of 36 and 94 mW, respectively, and the sensors showed high and fast responses to H₂S. The responses of 0.08 wt% Pt doped SnO₂ nanofibers to 4-20 ppm H₂S, were 25.9-40.6 times higher than those of pure SnO₂ nanofibers. The gas sensing characteristics were discussed in relation to the catalytic promotion effect of Pt, nano-scale morphology of electrospun nanofibers, and sensor platform using micro heater.     

Effect of La2CuO4 electrode area on potentiometric NOx sensor response and its implications on sensing mechanism

The intent of this work is to look at the effects of varying the La₂CuO₄ electrode area and the asymmetry between the sensing and counter electrode in a solid state potentiometric sensor with respect to NO_x sensitivity. NO₂ sensitivity was observed at 500-600 °C with a maximum sensitivity of ∼22 mV/decade [NO₂] observed at 500 °C for the sensor with a La₂CuO₄ electrode area of ∼30 mm². The relationship between NO₂ sensitivity and area is nearly parabolic at 500 °C, decreases linearly with increasing electrode area at 600 °C, and was a mixture of parabolic and linear behavior 550 °C. NO sensitivity varied non-linearly with electrode area with a minima (maximum sensitivity) of ∼−22 mV/decade [NO] at 450 °C for the sensor with a La₂CuO₄ electrode area of 16 mm². The behavior at 400 °C was similar to that of 450 °C, but with smaller sensitivities due to a saturation effect. At 500 °C, NO sensitivity decreases linearly with area.We also used electrochemical impedance spectroscopy (EIS) to investigate the electrochemical processes that are affected when the sensing electrode area is changed. Changes in impedance with exposure to NO_x were attributed to either changes in La₂CuO₄ conductivity due to gas adsorption (high frequency impedance) or electrocatalysis occurring at the electrode/electrolyte interface (total electrode impedance). NO₂ caused a decrease in high frequency impedance while NO caused an increase. In contrast, NO₂ and NO both caused a decrease in the total electrode impedance. The effect of area on both the potentiometric and impedance responses show relationships that can be explained through the mechanistic contributions included in differential electrode equilibria.     

Optical CO2 sensor with the combination of colorimetric change of α-naphtholphthalein and internal reference fluorescent porphyrin dye

A new optical CO₂ sensor based on the overlay of the CO₂ induced absorbance change of pH indicator dye α-naphtholphthalein with the fluorescence of tetraphenylporphyrin (TPP) was developed. The observed luminescence intensity from TPP at 655 nm increased with increasing the CO₂ concentration. The ratio I₁₀₀/I₀ values of the sensing films consisting of α-naphtholphthalein in ethyl cellulose layer and TPP in polystyrene layer, where I₀ and I₁₀₀ represent the detected luminescence intensities from a layer exposed to 100% nitrogen and 100% CO₂, respectively, that the sensitivity of the sensor, are more than 53.9. The response and recovery times of the sensing films consisting of α-naphtholphthalein in ethyl cellulose layer and TPP in polystyrene layer were less than 5 s for switching from nitrogen to CO₂, and for switching from CO₂ to nitrogen. The signal changes were fully reversible and no hysterisis was observed during the measurements. The highly sensitive optical CO₂ sensor based on fluorescence intensity changes of TPP due to the absorption change of α-naphtholphthalein with CO₂ was achieved.     

Love wave hydrogen sensors based on ZnO nanorod film/36°YX-LiTaO3 substrate structures operated at room temperature

Love wave hydrogen sensors based on ZnO nanorod layers deposited on 36°YX-LiTaO₃ substrates have been studied. The ZnO nanorod layers are prepared by two steps: first, the seed layers, as well the guiding layers of the Love wave devices, are deposited by RF magnetron sputtering; second, the nanostructural layers, as well the sensing layers of the sensors, are grown by hydrothermal synthesis. Two kinds of ZnO layers have been analyzed by XRD, SEM and XPS. The XRD shows that both ZnO layers have (0 0 2) oriented wurtzite structures. The SEM results reveal that the morphologies of the deposited ZnO seed layers are continuous and compact, while the hydrothermal treated layers are with nanorods almost perpendicular to the substrate surfaces. Finally, the hydrogen sensing responses of the Love wave sensors activated by Pt catalysts are measured for various concentrations of hydrogen in synthetic air at room temperature. The results show that the sensors have high sensitivity and repeatability as the nanorod layers are optimized, such as the frequency shift 8 kHz toward 0.04% of H₂ in synthetic air is obtained while the height of the nanorod layer is about 2.1 μm and the central frequency of the sensor is about 125.5 MHz. The XPS analyses of the sensitive layers show that there are oxygen vacancies in the layers, so the oxygen vacancy model is used to explain the hydrogen sensing mechanism of the Love wave sensors.     

A selective room temperature formaldehyde gas sensor using TiO2 nanotube arrays

A new gas sensor using TiO₂ nanotube arrays was fabricated and explored for formaldehyde detection at room temperature. Highly ordered vertically grown TiO₂ nanotube arrays were synthesized by using the conventional electrochemical anodization process. The sensor using the fabricated nanotube arrays as the sensing elements demonstrated a good response to different concentrations of formaldehyde from 10 to 50 ppm and a very good selectivity over other reducing gas species such as ethanol and ammonia at room temperature. While the exact sensing mechanism is unclear, some possibilities are briefly discussed.     

Nanostructured spinel ZnCo2O4 for the detection of LPG

Nanostrucutred spinel ZnCo₂O₄ (∼26-30 nm) was synthesized by calcining the mixed precursor (consisting of cobalt hydroxyl carbonate and zinc hydroxyl carbonate) in air at 600 °C for 5 h. The mixed precursor was prepared through a low cost and simple co-precipitation/digestion method. The transformation of the mixed precursor into nanostructured spinel ZnCo₂O₄ upon calcinations was confirmed by X-ray diffraction (XRD) measurement, thermogravimetric analysis (TGA), X-ray photoelectron spectroscopy (XPS) and high resolution transmission electron microscopy (HRTEM). To demonstrate the potential applicability of ZnCo₂O₄ spinel in the fabrication of gas sensors, its LPG sensing characteristics were systematically investigated. The ZnCo₂O₄ spinel exhibited outstanding gas sensing characteristics such as, higher gas response (∼72-50 ppm LPG gas at 350 °C), response time (∼85-90 s), recovery time (∼75-80 s), excellent repeatability, good selectivity and relatively lower operating temperature (∼350 °C). The experimental results demonstrated that the nanostructured spinel ZnCo₂O₄ is a very promising material for the fabrication of LPG sensors with good sensing characteristics. Plausible LPG sensing mechanism is also discussed.     

A nitric oxide gas sensor based on Rayleigh surface acoustic wave resonator for room temperature operation

A Rayleigh surface acoustic wave (RSAW) resonator with polyaniline/tungsten oxide nanocomposite thin film is investigated as a gas sensor for detecting the presence of nitric oxide (NO) in air. The sensor developed in this work was sensitive to NO gas at room temperature. It is shown that the sensor had a frequency shift of 1.2 ppm when it was exposed to 138 ppb NO. The negative frequency response increased with NO concentration increasing. The response and recovery times of the NO sensor in this work were about 20-80 s. In addition, this RSAW sensor also exhibited reversibility and repeatability to the presence of NO gas. Especially, the presented sensor showed high selectivity with NO gas to separate from NO₂ and CO₂ gases.     

Highly sensitive and selective LPG sensor based on α-Fe2O3 nanorods

The α-Fe₂O₃ nanorods were successfully synthesized without any templates by calcining the α-FeOOH precursor in air at 300 °C for 2 h and their LPG sensing characteristics were investigated. The α-FeOOH precursor was prepared through a simple and low cost wet chemical route at low temperature (40 °C) using FeSO₄·7H₂O and CH₃COONa as starting materials. The formation of α-FeOOH precursor and its topotactic transformation to α-Fe₂O₃ upon calcination was confirmed by X-ray diffraction measurement (XRD), X-ray photoelectron spectroscopy (XPS), field emission scanning electron microscopy (FESEM) and transmission electron microscopy (TEM) analysis. The α-Fe₂O₃ nanorods exhibited outstanding gas sensing characteristics such as, higher gas response (∼1746-50 ppm LPG at 300 °C), extremely rapid response (∼3-4 s), relatively slow recovery (∼8-9 min), excellent repeatability, good selectivity and lower operating temperature (∼300 °C). Furthermore, the α-Fe₂O₃ nanorods are able to detect up to 5 ppm for LPG with reasonable response (∼15) at the operating temperature of 300 °C and they can be reliably used to monitor the concentration of LPG over the range (5-60 ppm). The experimental results clearly demonstrate the potential of using the α-Fe₂O₃ nanorods as sensing material in the fabrication of LPG sensors. Plausible LP G sensing mechanism of the α-Fe₂O₃ nanorods is also discussed.     

Mid-IR source based on a free-standing microhotplate for autonomous CO2 sensing in indoor applications

The measurement of CO₂ by Non-Dispersive InfraRed absorption (NDIR) is often used as a tracer of human occupancy in confined living spaces. The major constraint of commercial sensors comes from the power consumption of the IR source, which makes them unsuitable for autonomous operation.This paper reports the fabrication and the characterization of a black-body IR source based on a microhotplate micromachined in Si and suitable to work above 650 °C. The use of state-of-the-art MEMS technologies allows to lower the power consumption below 50 mW while ensuring a lifetime well beyond 10 years.The radiance of the microhotplate in the spectral range where CO₂ adsorption takes place indicated that the device works as a quasi-perfect blackbody source providing enough power to drive an autonomous NDIR system for CO₂ detection.     

Microstructure control of TiO2 nanotubular films for improved VOC sensing

Porous gas sensing films composed of TiO₂ nanotubes were fabricated for the detection of volatile organic compounds (VOCs), such as alcohol and toluene. In order to control the microstructure of TiO₂ nanotubular films, ball-milling treatments were used to shorten the length of TiO₂ nanotubes and to improve the particle packing density of the films without destroying their tubular morphology and crystal structure. The ball-milling treatment successfully modified the porosity of the gas sensing films by inducing more intimate contacts between nanotubes, as confirmed by scanning electron microscopy (SEM) and mercury porosimetry. The sensor using nanotubes after the ball-milling treatment for 3 h exhibited an improved sensor response and selectivity to toluene (50 ppm) at the operating temperature of 500 °C. However, an extensive ball-milling treatment did not enhance the original sensor response, probably owing to a decrease in the porosity of the film. The results obtained indicated the importance of the microstructure control of sensing layers in terms of particle packing density and porosity for detecting large sized organic gas molecules.     

Improved crystalline structure and H2S sensing performance of CuO-Au-SnO2 thin film using SiO2 additive concentration

In situ SiO₂-doped SnO₂ thin films were successfully prepared by liquid phase deposition. The influence of SiO₂ additive as an inhibitor on the surface morphology and the grain size for the thin film has been investigated. These results show that the morphology of SnO₂ film changes significantly by increasing the concentration of H₂SiF₆ solution which decreases the grain size of SnO₂. The stoichiometric analysis of Si content in the SnO₂ film prepared from various Si/Sn molar ratios has also been estimated. For the sensing performance of H₂S gas, the SiO₂-doped Cu-Au-SnO₂ sensor presents better sensitivity to H₂S gas compared with Cu-Au-SnO₂ sensor due to the fact that the distribution of SiO₂ particles in grain boundaries of nano-crystallines SnO₂ inhibited the grain growth (<6 nm) and formed a porous film. By increasing the Si/Sn molar ratio, the SiO₂-doped Cu-Au-SnO₂ gas sensors (Si/Sn = 0.5) exhibit a good sensitivity (S = 67), a short response time (t_90% < 3 s) and a good gas concentration characteristic (α = 0.6074). Consequently, the improvement of the nano-crystalline structures and high sensitivity for sensing films can be achieved by introducing SiO₂ additive into the SnO₂ film prepared by LPD method.     

An interferometric biosensor composed of a prism-chamber assembly and a composite waveguide with a Ta2O5 nanometric layer

A highly sensitive integrated polarimetric interferometer biosensor with improved long-time stability and simple operation was prepared by using a novel prism-chamber assembly and an inexpensive waveguide made by sputtering a tapered nanometric layer of Ta₂O₅ on a single-mode glass waveguide. By comparing the measured refractive-index (RI) sensitivities with those simulated based on a four-layer homogeneous waveguide, both the equivalent thicknesses (T_eq) for the tapered Ta₂O₅ layers and a severe dependence of RI sensitivity on T_eq were obtained. Addition of 1 g of water in 100 g of a Chinese liquor (alcohol concentration = 46% (v/v)) was easily detected by the sensor. Monitoring of anti-human IgG adsorption with a waveguide of T_eq = 31.99 nm indicates that the antibody coverage required for inducing a phase-different change of Δ? = π is less than 0.012 monolayer. The same waveguide presents a quasi-linear dependence of Δ? on water temperature with the slope of d(Δ?)/dT = −28.50°/°C to which the contribution by the thermo-optical effect of the waveguide is 4.24°/°C, equivalent to a liquid RI change of Δn_c = 1.41 × 10⁻⁵. The interferometer exhibits the promising potential for chemical and biological analyses because of its outstanding characteristics.     

Preparation and characterization of unimorph actuators based on piezoelectric Pb(Zr0.52Ti0.48)O3 materials

This paper describes the preparation and characterization of unimorph actuators for deformable mirrors, based on Pb(Zr_0.52Ti_0.48)O₃ (PZT52) thin film. As comparison, two different designs, where the PZT layer in the unimorph actuators was driven by either interdigitated electrodes (IDT-mode) or parallel plate electrodes (d₃₁-mode), were investigated. The actuators utilize a unimorph membrane (diaphragm) structure consisting of an active PZT piezoelectric layer and a passive SiO₂/Si composite layer. To fabricate the diaphragm structures, n-type (1 0 0) silicon-on-insulator (SOI) wafers with 1 μm thermal SiO₂ were used as substrates (for d₃₁-mode actuators, the upper Si part of SOI need to be heavily doped and used as bottom electrodes simultaneously). Sol-gel derived PZT piezoelectric layers with PbTiO₃ (PT) bufferlayer in total of 0.86 μm were then fabricated on them, and 0.15 μm Al reflective layers were deposited and patterned into top electrode geometries, subsequently. The diaphragms were released using orientation-dependent wet etching (ODE) with 5-10 μm residual silicon layers. The complete unimorph actuators comprise 4 × 4 discrete units (4 mm² in size) with patterned PZT films for parallel plate configuration or 3 × 3 individual pixels (2 mm in IDT diameter) with continuous PZT films in graphic region for IDT configuration. The measurement results indicated that both of the two configurations can generate considerable deflections at low voltage. The measured maximum central deflections at 15 V were approximately 2.5 μm and 2.8 μm, respectively. The intrinsic strain conditions shaping the deflection profiles for the diaphragm actuators were also analyzed. In this paper, the behaviors of clamped parallel plate configuration without a diaphragm were also evaluated.     

The effect of La2CuO4 sensing electrode thickness on a potentiometric NOx sensor response

In order to further understand the different contributions to NO_x sensing mechanism as well as the importance of electrode geometry, solid state potentiometric sensors with varying La₂CuO₄ sensing electrode thicknesses were studied. These sensors (with a Pt counter electrode) showed a dependence of NO₂ sensitivity which decreased with increasing thickness in the temperature range of 550-650 °C. They also showed NO sensitivity that was independent of thickness at 400 °C and 600 °C, but varied at temperatures between. This behavior was attributed to multiple mechanistic contributions explained by Differential Electrode Equilibria.     

Enhancing performance of FSP SnO2-based gas sensors through Sb-doping and Pd-functionalization

Via flame spray pyrolysis (FSP), SnO₂ gas sensing layers have been doped with 0.01-4 wt% Sb as well as 0.01 wt% Pd in combination with 1 wt% Sb. Characterization of these materials through X-ray diffraction (XRD), Brunauer-Emmett-Teller (BET) surface analysis, and transmission electron microscopy (TEM) revealed particle grain sizes and crystallinity unchanged by the presence of Sb and/or Pd. The addition of Sb to SnO₂ resulted in the significant decrease in baseline resistance; up to two orders of magnitude in dry air at 300 °C and three orders of magnitude in humid air at 300 °C, which is significant for FSP-prepared gas sensors with high porosity and low particle coordination number since they typically suffer from high baseline resistance. While the baseline resistance was improved with Sb-doping, the sensor signal (R₀/R_gas) remained constant over all concentrations explored. Moreover, regarding the surface functionalization of SnO₂ with Pd in combination with Sb-doping, the reduction of baseline resistance was preserved without influencing sensor signal.     

α-MoO3/TiO2 core/shell nanorods: Controlled-synthesis and low-temperature gas sensing properties

Crystalline α-MoO₃/TiO₂ core/shell nanorods are fabricated by a hydrothermal method and subsequent annealing processes under H₂/Ar flow and in the ambient atmosphere. The shell layer is composed of crystalline TiO₂ particles with a diameter of 2-6 nm, and its thickness can be easily controlled in the range of 15-45 nm. The core/shell nanorods show enhanced sensing properties to ethanol vapor compared to bare α-MoO₃ nanorods. The sensing mechanism is different from that of other one-dimensional metal oxide core/shell nanostructures due to very weak response of TiO₂ nanoparticles to ethanol. The enhanced sensing properties can be explained by the change of type II heterojunction barrier formed at the interface between α-MoO₃ and TiO₂ in the different gas atmosphere. The present results demonstrate a novel sensing mechanism available for gas sensors with high performance.     

Influence of doping BiYO3 and Nb2O5 on PTCR characteristics of BaTiO3 thermistor ceramics

Nb₂O₅-doped (1 − x)Ba_0.96Ca_0.04TiO₃-xBiYO₃ (where x = 0.01, 0.02, 0.03 and 0.04) lead-free PTC thermistor ceramics were prepared by a conventional solid state reaction method. X-ray diffraction, scanning electron microscope, Agilent E4980A and resistivity-temperature measurement instrument, were used to characteristic the lattice distortion, microstructure, temperature dependence of permittivity and resitivity-temperature dependence. It was revealed that the tetragonality c/a of the perovskite lattice, the microstructure and the Curie temperature changed with the BiYO₃ content. In order to decrease the room temperature resistivity, the effect of Nb₂O₅ on the room temperature resistivity was also studied, and its optimal doping content was finally chosen as 0.2 mol%. The 0.97Ba_0.96Ca_0.04TiO₃-0.03BiYO₃-0.002Nb₂O₅ thermistor ceramic exhibited a low ρ_RT of 3.98 × 10³ Ω cm, a typical PTCR effect of ρ_max/ρ_min > 10³ and a T_c of 153 °C.