单层声表面波叉指换能器(SAW-IDT)结构优化设计

为优化单层声表面波换能器的驱动性能,改善现有δ函数分析方法在计算过程中的不足之处,采用有限元仿真优化方法对叉指式换能器的静力学性能进行了分析,研究了支路电极宽度w、电极间距s和基片厚度t对驱动性能的影响。仿真结果表明,当w/t=0.7时,可以得到最佳应变响应;当s/t＞3.2时,可以得到最大应变。同时还得出了电极间距越小,驱动电压越低的结论。根据仿真优化结果制备了声表面波叉指换能器（SAW-IDT）,并进行了频率响应测试。研究结果为声表面波叉指换能器的制备、性能测试和应用提供了指导。     

挤压油膜阻尼器在深孔磨削中的应用研究

基于挤压油膜阻尼理论，设计了带挤压油膜阻尼器（SFD）的深孔内圆磨削刀杆，并在高精度内圆磨床上进行了与静压支撑刀杆的磨削性能对比实验，实验表明，参数设计合理的SFD开杆较静压支撑刀杆具有更优良的磨削性能和减振效果，而且SFD刀杆较静压支撑刀杆结构简单，拆装方便，稳定性高，因此SFD在机械加工领域具有十分重要的研究价值和广泛的应用前景。     

一种用于焊接结构多帧满秩成像检测的超声SH导波换能器

超声水平剪切(shear horizontal, SH)导波换能器在对焊接板结构进行缺陷检测时具有重要的应用价值. 为了研制换能器以对焊接结构进行多帧满秩成像检测, 运用导波半波长理论对超声SH导波的激发和换能器内部多重散射回波进行了分析.根据多重散射理论推导了匹配层介质颗粒密度与衰减的关系, 确定匹配层的组分. 提出3种V型斜楔结构, 对平面型前楔结构换能器和非平面型前楔结构换能器内部的多重散射回波进行对比试验. 结果表明,正交前楔结构换能器内部二重以上散射回波幅值减小了45%以上. 对正交前楔结构换能器进行性能测试, 其所激发的SH导波对焊接结构板中尺寸当量为?12 mm的缺陷回波信号信噪比达到了14.5 dB,具有较为优异的检测能力. 试验验证了理论分析的有效性, 所研制的正交前楔结构超声SH导波换能器可对焊接结构板中与波长尺寸当量的缺陷进行多帧满秩成像检测.     

一种用于焊接结构超声成像检测的SH导波换能器

板中水平剪切导波可用于焊接结构板材远距离成像检测,超声SH导波换能器的性能对较大尺度焊接结构板材超声导波成像检测至关重要.对板中SH导波进行了动力学分析,并结合半波长条件设计了合理的斜楔角度、压电晶片频率及尺寸等导波换能器的重要参数,通过加前背衬、取消后背衬、楔块前沿设置锯齿槽等措施,简化了换能器的工艺结构,减小了换能器内部回波干扰,提高了检测灵敏度.结果表明,设计研发的SH导波换能器激发的导波有较强的检测能力,可用于对较为复杂的T形一对焊焊接结构板材进行成像检测,能够有效表征焊接结构板材中与导波波长尺寸量级相当的缺陷,其性能指标达到了较大尺度焊接结构板材成像检测的要求.为开展较大尺度焊接结构超声导波成像检测奠定了基础.     

非金属结构检测换能器及其应用

介绍一种用于检测非金属结构强度和裂隙大小，位置分布的换能器，略述了它的设计方法。在对不同的混凝土基建设施中，这种非金属结构检测换能器与非金属检测仪配套进行了现场检测。     

电磁振动给料机的连接叉设计及结构分析

本文应用UG的三维实体建模功能和分析功能,对干熄焦用电磁振动给料机中的连接叉.进行参数化设计及结构分析,从而验证了连接叉的强度和位移满足设计要求.     

稀土—铁系超磁致伸缩材料的应用研究

本文对稀土－铁系超磁致伸缩的基本特性及应用前景进行了回顾与总结，剖析了该材料应用器件原理及结构，系统地介绍了国外稀土铁系超磁致伸缩材料在各个领域的应用及开发情况。展示了作者研制的低频水声换能器。该换能器具有低频，宽频带及电流灵敏度高的特点。     

结构损伤检测中OPCM换能器的特性

针对工程结构损伤检测应力波叠前偏移成像技术中侧向反射波信号的干扰问题,研制出正交异性压电复合材料（OPCM）换能器,通过理论仿真分析阐明其特性,并通过试验加以验证。理论仿真和试验结果共同表明：OPCM驱动器能够沿特定方向激发能量大、指向性尖锐的振动信号;OPCM传感器能够区分不同方向的应力波,并对特定方向的应力波具有强烈的响应特性。为有效解决结构损伤检测中侧向反射波干扰问题,进而提高信噪比,提供了方法参考。     

基于扭转导波T(0,1)的埋地管道长距离结构健康监测

针对不同变形模式压电换能器激发与接收管道中基频扭转导波T(0,1)的特点,设计了一种一发一收式T(0,1)波压电环形阵列。其中,厚度剪切d₁₅模式的压电圆环用于T(0,1)波的激发,面内剪切d₂₄模式的压电圆环用于T(0,1)波的接收。试验验证了这种换能器激发T(0,1)波的信噪比和T(0,1)波在埋地管道中的衰减。结果表明,该换能器对不同涂层埋地管道的探测距离超过20m,在埋地管道的长距离结构健康监测中具有很好的应用前景。     

一种专用涡流检测换能器的设计

介绍了涡流检测换能器的工作原理和设计方法，并根据检测特殊结构金属工件的要求，对涡流检测中换能器结构尺寸等参数进行了分析和优化，为设计一种专用涡流检测换能器提供了思路。     

Modelling of Lamb waves in composite laminated plates excited by interdigital transducers

The technique of permanently attaching interdigital transducers (IDT) to either flat or curved structural surfaces to excite single Lamb wave mode has demonstrated great potential for quantitative non-destructive evaluation and smart materials design. In this paper, the acoustic wave field in a composite laminated plate excited by an IDT is investigated. On the basis of discrete layer theory and a multiple integral transform method, an analytical–numerical approach is developed to evaluate the surface velocity response of the plate due to the IDTs excitation. In this approach, the frequency spectrum and wave number spectrum of the output of IDT are obtained directly. The corresponding time domain results are calculated by applying a standard inverse fast Fourier transformation technique. Numerical examples are presented to validate the developed method and show the ability of mode selection and isolation. A new effective way of transfer function estimation and interpretation is presented by considering the input wave number spectrum in addition to the commonly used input frequency spectrum. The new approach enables the simple physical evaluation of the influences of IDT geometrical features such as electrode finger widths and overall dimension and excitation signal properties on the input–output characteristics of IDT. Finally, considering the convenience of Mindlin plate wave theory in numerical computations as well as theoretical analysis, the validity is examined of using this approximate theory to design IDT for the excitation of the first and second anti-symmetric Lamb modes.     

Interaction of Rayleigh surface waves with a tightly closed fatigue crack

A miniature interdigital transducer (IDT) tuned to resonate at 3.1 MHz of frequency is designed, fabricated, and used to generate narrow band Rayleigh waves on aircraft grade metallic alloys. Electrodes of the IDT are precisely machined by a laser machining technique and its acoustical wave properties are characterized by using a scanning laser interferometry system with a spatial resolution of less than 10 microns. Unlike the conventional contact surface wave generation methods using wedges or combs, the biggest advantage of an IDT are its miniature physical size and its high efficiency in converting electrical signals to mechanical vibrations. Narrow band surface waves with finite amplitudes generated by an IDT are used to investigate the wave interaction with a tightly closed fatigue crack on a metallic test specimen. High-resolution images for the time-resolved ultrasonic field and time-averaged amplitude displacement are generated to understand the interaction of the wave with a surface-breaking fatigue crack. From the amplitude displacement data, three-dimensional surface contour plots of the wave energy are generated to find out how the elastic energy interacts with the tight fatigue crack interfaces. Results show that a tightly closed fatigue crack can transmit Rayleigh waves through the crack due to interfacial contact within the crack, where transmission of elastic energy was found to be more dominant towards the crack tip as expected. The sum of transmitted and reflected energy at the crack interface suggests that there is an additional energy loss mechanism which is proved experimentally by visualizing part of the incident Rayleigh wave energy propagating along the interfacial surfaces of the crack and continues its propagation along the surface of the opposite side of the test specimen.     

Growth of AlN Films and Its Process Development for the Fabrication of Acoustic Devices and Micromachined Structures

AlN films were grown on silicon substrates by RF reactive magnetron sputtering. At high sputtering powers, (002) preferred orientation as well as Al-N absorption band becomes prominent. The surface roughness and grain size of sputtered films were found to increase with RF power. Surface acoustic wave (SAW) device has been made on the grown (002) oriented piezoelectric AlN film with interdigital transducer (IDT) electrodes spacing corresponding to a wavelength of 60 μm. The centre frequency of the SAW filter was found to be 84.304 MHz, which gives a phase velocity of 5058 m/s with an electromechanical coupling coefficient (K ²) of 0.34%. Low etch rate of AlN films were observed in doped TMAH solution. Three-dimensional suspended Cr/AlN/Cr/SiO₂ microstructures were also fabricated by wet chemical etching.     

Fabrication of sub-100 nm IDT SAW devices on insulating, semiconducting and conductive substrates

This work describes the electron-beam (e-beam) lithography process developed to manufacture nano interdigital transducers (IDTs) to be used in high frequency (GHz) surface acoustic wave (SAW) applications. The combination of electron-beam (e-beam) lithography and lift-off process is shown to be effective in fabricating well-defined IDT finger patterns with a line width below 100 nm with a good yield. Working with insulating piezoelectric substrates brings about e-beam deflection. It is also shown how a very thin organic anti-static layer works well in avoiding this charge accumulation during e-beam lithography on the resist layer. However, the use of this anti-static layer is not required with the insulating piezoelectric layer laying on a semiconducting substrate such as highly doped silicon. The effect of the e-beam dose on a number of different layers (of insulating, insulating on semiconducting, semiconducting, and conductive natures) is provided. Among other advantages, the use of reduced e-beam doses increases the manufacturing time.The principal aim of this work is to explain the interrelation among e-beam dose, substrate nature and IDT structure. An extensive study of the e-beam lithography of long IDT-fingers is provided, in a wide variety of electrode widths, electrode numbers and electrode pitches. It is worthy to highlight that this work shows the influence of the e-beam dose on five substrates of different conductive nature.     

薄镀锌钢板点焊超声谐振检测

研究了低频超声探头的谐振特性,并将这种谐振特性用于镀锌薄板的点焊检测中.采用接触式低频探头对点焊进行检测时,检测探头能够接收到未焊薄基板产生的半波谐振高频信号,这些半波谐振信号的高频部分处于探头频带外的奇数次谐振频率附近.通过小波包变换的方法可以将这些高频信号从检测信号中分离出来并用于点焊的质量评价.分析小波包变换中各尺度信号,获取了能够评价焊核质量的超声波特征值并将这些特征值与点焊力学性能联系起来,提供了一种能够定量评价点焊质量的超声无损评价方法.此外,采用低频探头对点焊进行检测较之普通检测方法将大大降低检测成本.     

Ultrasonic elliptical vibration transducer driven by single actuator and its application in precision cutting

The ultrasonic elliptical vibration cutting has been successfully applied to precision cutting due to its superior performances, such as low cutting force, high quality surface finish and long tool life. This paper presented an asymmetrical structural model of the ultrasonic elliptical vibration transducer with only the longitudinal excitation. Based on the modal and static analysis with finite element method, various parameters of the model were modified to meet the needs of the vibration modality and the inherent frequency. A cutting system of the ultrasonic elliptical vibration driven by single longitudinal actuator was developed and the effect of the transducer amplitude and cutting depth on the cutting force was studied in detail. A part with surface roughness of R_a 0.08 μm was achieved. The results showed that the ultrasonic elliptical vibration transducer can be designed rationally with finite element method and single driven ultrasonic elliptical vibration machining can be used in precision cutting.     

热超声键合压电换能器的动力学特性

基于有限元方法和试验测试,研究了芯片封装用压电超声换能器的动力学特忡。借助ANSYS压电耦合和非线性接触分析功能,对换能器自由和约束状态下的振动特性进行了分析。探讨了超声能量在空间域、时域和频域的传递规律。由模态分析得到换能器的振动形式,通过谐响应分析提取其在正弦电压激励下的振动信息,经瞬态分析获得换能器的瞬态响应。结果表明,螺栓径向尺寸和预紧力影响换能器的模态分布和动态特性,压电晶堆加载电压的频率影响超声能量传递特性。通过键合试验考察了焊点质量与螺栓径向尺寸的关系。分析和试验结果为换能器设计和键合工艺优化提供了指导。     

稀土超磁致伸缩材料在水下发射器中的应用

本文从稀土超磁致伸缩材料的独特性能入手,结合国内外一些新的换能器设计理念,针对宽频水声换能器的使用特点,给出了换能器的理论设计方法,同时还给出了其结构形式.测试结果和使用性能表明,达到了预期的目的,这也是该材料在国内首次应用于单只宽频水声换能器中,开创了稀土超磁致伸缩材料应用的又一个先例.     

PVDF梳状传感器及在超声导波检测中的应用

为了减少多模态现象对超声导波检测的影响，设计制作了偏聚氟乙烯（PVDF）梳状传感器，在薄钢板中进行超声导波检测试验研究。结果表明，这种传感器可以实现单一模态超声导波的激励与接收，并可实现薄钢板表面污物的检测。