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氢在微晶硅薄膜低温沉积及退火过程中的影响 总被引:3,自引:0,他引:3
采用等离子体增强化学气相沉积(PECVD)法,在玻璃衬底上不同的氢稀释比下低温制备了微晶硅(μc-Si:H)薄膜.利用拉曼(Raman)散射谱研究显示当H2稀释比从95%升高到99%,所得硅膜晶粒大小从2.98 nm增加8.79 nm,晶化率从24%增加到91%;暗电导测试结果从1.32×10-6scm-1增加到7.24×10-3scm-1;沉积速率却大大降低.沉积出的薄膜在进行高温炉退火后,扫描电镜(SEM)显示样品表面孔洞变大增多,推测是氢逸出所致. 相似文献
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利用控制水解浸涂法在氧化铟锡(ITO)导电玻璃上制备籽晶层,进而通过低温水热法和热处理获得了独特的氧化锌(ZnO)纳米墙薄膜结构。通过X射线衍射谱(XRD)、扫描电镜(SEM)、光电子能谱(EDS)、红外光谱(FTIR)、紫外-可见光谱(UV-Vis)和光致发光谱(PL)等对薄膜的形貌、组成和结构进行了分析表征。研究表明,ZnO纳米墙由20~100 nm厚的片层交织而成,在热处理前薄膜的组成为混合的ZnO、醋酸锌(ZnAc)和羟基醋酸锌(Zn-LHS),经500°C热处理脱除CO2、H2O等小分子后基本完全转变为ZnO,而原有层状交织纳米墙结构保留下来。室温PL谱显示薄膜在383 nm处有较强烈的紫外激发峰。结合晶体生长理论探讨了ZnO纳米墙薄膜的生长机制。 相似文献
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以硝酸铋和硫化钠为原料,用两步水热法于100℃成功制备了正交晶系Bi2S3微米环:又以硝酸铋和硫脲为原料,采用一步水热法于150℃ 制备了同属于正交晶系的Bi2S3纳米棒.分别以X射线衍射仪、场发射扫描电镜,透射电子显微镜和荧光分光光度法等测试手段对最终产物的物相、形貌和性质进行了表征,探讨了Bi2S3微米环的形成机理.结果表明:Bi2S3微米环的内径为1~1.5μm、外径为1.5~2μm,由均尺寸大约为100m 的纳米晶粒组装而成.Bi2S3纳米棒的直径约125nm、长度为1~2 μm.Bi2S3微米环和纳米棒状Bi2S3的发光峰分别位于447nm处和470nm处,Bi2S3 微米环发光峰的位置相比于Bi2S3纳米棒的发光峰位置明显发生了蓝移. 相似文献
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由不同材料以纳米级厚度相互交替组成的纳米多层膜,在某一调制周期范围内具有超硬效应,显示出作为耐磨涂层的广阔应用前景。近年来纳米多层膜机械性能的研究一直是研究的热点,本文综述了近年来国内外学者对纳米多层膜机械性能的研究成果,并提出了今后纳米多层膜的研究方向。 相似文献
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浅析多层绝热低温车的施工工艺 总被引:1,自引:0,他引:1
本文分析了多层绝热低温车的施工环境卫生要求,绝热材料的选择及其处理工艺,重点介绍了多层绝热材料的编者绕工艺及对罐体的油真空工艺。 相似文献
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采用射频等离子体增强化学气相沉积(radio frequency plasma enhanced chemical vapor deposition,RF-PECVD)技术在玻璃衬底上沉积了硼掺杂微晶硅薄膜。采用椭圆偏振光谱和Raman光谱分析了辉光功率和硼掺杂量对薄膜的晶化率、表面粗糙度、空隙率和非晶孵化层厚度的影响。结果表明:随着输入功率的增加,薄膜表面粗糙度的变化趋势为先缓慢减小、再快速增加、然后再次减小;沉积薄膜中的体层晶化率和空隙率的变化趋势相同,而空隙率与非晶孵化层厚度的变化趋势相反。随着初始硼掺量的增加,薄膜表面粗糙度的变化趋势为先缓慢增加、再减小、然后再增加;沉积薄膜的体层晶化率和空隙率并没有类似的对应关系。此外,对RF-PECVD沉积硼掺杂微晶硅的生长机理进行了分析。 相似文献
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采用Pechini溶胶-凝胶法结合旋涂工艺制备了Tb3+掺杂Lu3Al5O12(简称LuAG:Tb)发光薄膜。前驱体薄膜在850℃左右锻烧得到单一石榴石相的LuAG:Tb薄膜。LuAG薄膜的发射光谱(268nm紫外光激发)对应于Tb3+的5D4→7EJ(J=6~0)和5D3→7FJ特征跃迁,光谱强度随Tb3+掺杂浓度的升高先增强后减弱,在x(Tb3+)=2.0%时光谱强度最强,其发光衰减时间为5.14ms。扫描电镜(SEM)和原子力显微镜(AFM)观察显示LuAG薄膜的颗粒度大小和表面粗糙度随煅烧温度的升高而增大。 相似文献
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JO Estevez J Arriaga A Mendez-Blas E Reyes-Ayona J Escorcia V Agarwal 《Nanoscale research letters》2012,7(1):413
ABSTRACT: : Theoretical demonstration and experimental evidence of photon Bloch oscillations and Wannier-Stark ladders (WSLs) in dual-periodical (DP) multilayers, based on porous silicon, are presented. An introduction of the linear gradient in refractive indices in DP structure, which is composed by stacking two different periodic substructures N times, resulted in the appearance of WSLs. Theoretical time-resolved reflection spectrum shows the photon Bloch oscillations with a period of 130 fs. Depending on the values of the structural parameters, one can observe the WSLs in the near infrared or visible region which may allow the generation of terahertz radiation with a potential applications in several fields like imaging. 相似文献
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Timoshenko VY Gonchar KA Mirgorodskiy IV Maslova NE Nikulin VE Mussabek GK Taurbaev YT Svanbayev EA Taurbaev TI 《Nanoscale research letters》2011,6(1):349
Films of nanocrystalline silicon (nc-Si) were prepared from hydrogenated amorphous silicon (a-Si:H) by using rapid thermal annealing. The formed nc-Si films were subjected to stain etching in hydrofluoric acid solutions in order to passivate surfaces of nc-Si. The optical reflectance spectroscopy revealed the nc-Si formation as well as the high optical quality of the formed films. The Raman scattering spectroscopy was used to estimate the mean size and volume fraction of nc-Si in the annealed films, which were about 4 to 8 nm and 44 to 90%, respectively, depending on the annealing regime. In contrast to as-deposited a-Si:H films, the nc-Si films after stain etching exhibited efficient photoluminescence in the spectral range of 600 to 950 nm at room temperature. The photoluminescence intensity and lifetimes of the stain etched nc-Si films were similar to those for conventional porous Si formed by electrochemical etching. The obtained results indicate new possibilities to prepare luminescent thin films for Si-based optoelectronics. 相似文献
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在可聚合阴离子乳化剂体系下,以甲基丙烯酸甲酯(MMA)、丙烯酸丁酯(BA)为主要单体,甲基丙烯酸十二氟庚酯(DFMA)、γ-甲基丙烯酰氧基丙基三甲氧基硅烷(KH-570)为功能单体,采用半连续种子乳液聚合法合成了含氟硅丙烯酸酯核壳乳液。考察了DFMA和KH-570用量对乳液聚合过程和乳胶膜表面疏水性能的影响,并对乳胶膜的表面自由能进行了估算。采用傅里叶红外光谱(FT-IR)、差示扫描量热仪(DSC)、热重(TG)、接触角(CA)及X射线光电子能谱(XPS)对氟硅丙乳液及乳胶膜进行了表征。研究结果表明,氟硅单体有效地参与了聚合,乳胶膜中氟硅元素呈梯度分布,当氟硅丙乳液中DFMA和KH-570用量分别为16%和5%(质量分数)时,涂膜-空气界面与去离子水的接触角为110.6°,涂膜的表面能低至15.4 mN·m-1,其疏水性和耐热性有较大幅度提高。 相似文献
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Composite films were successfully prepared from cellulose and two kinds of nanocrystalline TiO2 particles in a NaOH/urea aqueous solution (7.5 : 11 in wt %) by coagulation with H2SO4 solution. The structure, morphology, and properties of the films were characterized by transmission electron microscopy, scanning electron microscopy, X‐ray diffraction, TGA, tensile testing, UV–vis spectroscopy, and antibacterial test. The results indicated that TiO2 particles in a cellulose matrix maintained the original nanocrystalline structure and properties. TiO2(I) (anatase) and TiO2(II) (the mixture of anatase and rutile) particles exhibited a certain miscibility with cellulose. The tensile strength of two kinds of composite films was higher than 70 and 75 MPa, when the content of TiO2(I) and TiO2(II) was 4 and 11 wt %, respectively. The cellulose composite films containing nanocrystalline TiO2 particles displayed distinct antibacterial abilities and excellent UV absorption. This work provides a potential way for preparing functional composite materials from cellulose and inorganic nanoparticles in a NaOH/urea aqueous solution, without a destruction of the structure and properties of the particles. © 2006 Wiley Periodicals, Inc. J Appl Polym Sci 101: 3600–3608, 2006 相似文献
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以水和N,N-二甲基甲酰胺(DMF)为二元溶剂,丁二酸钠为辅助剂的溶剂热法合成纳米晶自组装CaWO4:Tb3+微球。探讨N,N-二甲基甲酰胺的用量、丁二酸钠的用量及Tb3+掺杂物质的量分数对发光性能的影响。利用X射线衍射(XRD)、紫外漫反射(DRS)、扫描电镜(SEM)、光致发光光谱(PL)、暗箱式紫外分析仪等对产物结构、形貌及其性能进行表征。实验表明:添加5 mL的DMF作为溶剂,加入1.2 g丁二酸钠为辅助剂,合成的产物为四方晶相的纳米晶自组装CaWO4:Tb3+微球。该微球在257 nm激发下表现出强发射峰,在546 nm 附近有较强的荧光发射峰,荧光强度是未添加丁二酸钠对应产物的3.8倍。 相似文献
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Chunlin Chen Yiguang Jiang Longfei Zhang Feng Guan Zaiyang Wang Xin Huang Huidan Zeng Xinqiang Yuan Long Zhang Jin He 《Journal of the American Ceramic Society》2022,105(4):2595-2604
For transparent low melting inorganic glass, which is relevant for sealing and additional applications, Pb-containing glasses have reached the lowest melting point and best comprehensive performance. Considering potential toxicity and regulatory limitations, there is urgent need to develop Pb-free ultra-low melting point glass. Herein, we systemically investigated the structure and luminescence evolution of the Pb-free ultra-low melting quaternary tin fluorophosphate glasses (NaF-SnF2-SnO-P2O5), in which varied NaF content was tuned to affect the properties of glass. With NaF content increases, the Sn-O and P-O bonds have been gradually transformed to Sn-F and P-F bonds, and the phosphrous tetrahedron PO4 has been converted to PO3F. The weaken bonding results in the decrease of the ultra-low melting point to 329°C when NaF increased to 15 a.t.%, 29oC lower than the ternary glass. The blue shifts of both absorption and photoluminescence spectra were observed due to the higher ionic character of glass structure with NaF increases. As reported previously in the ternary tin fluorophosphate glass, the quaternary glass system also shows a phosphorescence behavior (∼1 s) due to the existence of oxygen vacancies. Additionally, the changes in oxygen vacancy defects correlate with the NaF content, thus affecting the decay time as well. The ultra-low melting point luminescent quaternary tin fluorophosphate glasses (NaF-SnF2-SnO-P2O5) may be relevant for opto-electronic applications such as the packaging in displays or light-emitting diodes. 相似文献
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Jong-Jin Choi Kyung-Su Cho Joon-Hwan ChoiJungho Ryu Byung-Dong HahnWoon-Ha Yoon Jong-Woo KimCheol-Woo Ahn Jondo YunDong-Soo Park 《Journal of the European Ceramic Society》2012,32(1):115-121
A low temperature (≤650 °C) process for fabricating nano-structured (La, Sr) (Ga, Mg, Co)O3−δ (LSGMC) electrolyte/(La, Sr) (Co, Fe)O3−δ-(Gd, Ce)O2−δ (LSCF-GDC) cathode films, ∼7 and ∼25 μm in thickness, respectively, was developed using an aerosol deposition (AD) process for use in intermediate temperature solid oxide fuel cells (IT-SOFCs). NiO-GDC was used as an anode substrate in anode-supported type cells. The deposited LSGMC electrolyte and LSCF-GDC composite cathode film maintained good adhesion with the NiO-GDC anode, even though the coating processes were completed at the room temperature. The LSGMC electrolyte was composed of nano-sized grains smaller than 30 nm. The electrical conductivity of the LSGMC electrolyte fabricated at room-temperature was ∼30 mS/cm at 650 °C. The LSCF-GDC composite cathode showed ≥20% porosity with a grain size ≤100 nm. The peak power density of the LSGMC electrolyte-based, anode-supported-type cell with the nano-structured LSCF-GDC cathode produced at room-temperature by AD was 0.39 W/cm2 at 650 °C. 相似文献