Effect of UBM Thickness on the Mean Time to Failure of Flip-Chip Solder Joints under Electromigration

Flip-chip solder joints with Cu/Ni/Al underbump metallurgy (UBM) on the chip and an Au/Ni surface finish on the substrate were studied under current stressing at an ambient temperature of 150°C. Three different Ni thicknesses in the Cu/Ni/Al UBM (0.3, 0.5, and 0.8 μm) were used in order to investigate the effect of the Ni thickness on reliability. The solder used was eutectic Pb-Sn, and the applied current density was 5 × 10³ A/cm². The results show that the combined effect of current crowding and the local Joule heating near the entry points of electrons into the joints induced asymmetric Ni UBM consumption. Once the Ni was exhausted in a certain region, this region became nonconductive and the flow of electrons was diverted to the neighboring region. This neighboring region then became the place where electrons entered the joint, and the Ni UBM there was consumed at an accelerated rate. This process repeated itself, and the Ni-depleted region continued to extend, creating an ever larger nonconductive region. The solder joints eventually failed when the nonconductive region extended across the entire contact window of the joints. This failure model supports the observation that joints with a thicker Ni tend to have a longer average lifetime.     

Three-Dimensional Thermoelectrical Simulation in Flip-Chip Solder Joints with Thick Underbump Metallizations during Accelerated Electromigration Testing

In flip-chip solder joints, thick Cu and Ni films have been used as under bump metallization (UBM) for Pb-free solders. In addition, electromigration has become a crucial reliability concern for fine-pitch flip-chip solder joints. In this paper, the three-dimensional (3-D) finite element method was employed to simulate the current-density and temperature distributions for the eutectic SnPb solder joints with 5-μm Cu, 10-μm Cu, 25-μm Cu, and 25-μm Ni UBMs. It was found that the thicker the UBM is the lower the maximum current density inside the solder. The maximum current density is 4.37 × 10⁴ A/cm², 1.69 × 10⁴ A/cm², 7.54 × 10³ A/cm², and 1.34 × 10⁴ A/cm², respectively, when the solder joints with the above four UBMs are stressed by 0.567 A. The solder joints with thick UBMs can effectively relieve the current crowding effect inside the solder. In addition, the joint with the thicker Cu UBM has a lower Joule heating effect in the solder. The joint with the 25-μm Ni UBM has the highest Joule heating effect among the four models.     

Electromigration Behavior in Sn-37Pb and Sn-3.0Ag-0.5Cu Flip-Chip Solder Joints under High Current Density

The electromigration of conventional Sn-37Pb and Pb-free Sn-3.0Ag-0.5Cu (in wt.%) solder bumps was investigated with a high current density of 2.5 × 10⁴ A/cm² at 423 K using flip-chip specimens comprised of an upper Si chip and a lower bismaleimide triazine (BT) substrate. Electromigration failure of the Sn-37Pb and Sn-3.0Ag-0.5Cu solder bumps occurred with complete consumption of electroless Ni immersion Au (ENIG) underbump metallization (UBM) and void formation at the cathode side of the solder bump. Finite element analysis and computational simulations indicated high current crowding of electrons in the patterned Cu on the Si chip side, whereas the solder bumps and Cu line of the BT substrate had a relatively low density of flowing electrons. These findings were confirmed by the experimental results. The electromigration reliability of the Sn-3.0Ag-0.5Cu solder joint was superior to that of Sn-37Pb.     

陶瓷封装倒装焊器件Sn-Pb微焊点的电迁移行为

高密度陶瓷封装倒装焊器件的焊点尺寸已降低至100μm以下,焊点电流密度达到10~4 A/cm~2以上,由此引发的电迁移失效成为不可忽视的问题。以陶瓷封装菊花链倒装焊器件为研究对象,开展了Sn10Pb90、Sn63Pb37焊点热电环境可靠性评估试验,通过电连接检测及扫描电子显微镜(SEM)等方法对焊点互连情况进行分析。结果表明,Sn63Pb37焊点阴极侧金属间化合物(IMC)增长明显,表现出明显的极化现象,IMC厚度的平方与通电时间呈线性关系。通电时间达到576 h后Sn63Pb37焊点阴极侧产生微裂纹,而Sn10Pb90焊点在通电576 h后仍未出现异常,表现出优异的电迁移可靠性。研究结果对于直径100μm微焊点的陶瓷封装倒装焊器件的应用具有重要的意义。     

Electromigration in Line-Type Cu/Sn-Bi/Cu Solder Joints

In this study, the different electromigration (EM) behaviors of eutectic Sn-Bi solder in the solid and molten states were clarified using line-type Cu/Sn-Bi/Cu solder joints. When the eutectic Sn-Bi solder was in the solid state during the EM test, a Bi-rich layer formed at the anode side while a Sn-rich band formed at the cathode side, and the intermetallic compound (IMC) at the cathode side was thicker than that at the anode side. The growth of the Bi-rich layer exhibited a linear dependence on the time of stressing. While the actual temperature of the solder joint increased to 140°C and the solder was in a molten state or partially molten state, two separate Bi-rich layers formed at the anode side and a great many Cu₆Sn₅ IMC precipitates formed between the two Bi-rich layers. Also, the IMC layer at the cathode side was thinner than that at the anode side. With a current-crowding-reduced structure, the products of diffusivity and effective charge number of Bi in the eutectic Cu/Sn-Bi/Cu solder joints stressed with current density of 5 × 10³ A/cm² at 35°C, 55°C, and 75°C were calculated.     

倒装焊中复合SnPb焊点形态模拟

本文给出了倒装焊(flip-chip)焊点形态的能量控制方程,采用Surface Evolver软件模拟了倒装焊复合SnPb焊点(高Pb焊料凸点,共晶SnPb焊料焊点)的三维形态.利用焊点形态模拟的数据,分析了芯片和基板之间SnPb焊点的高度与焊点设计和焊接工艺参数的关系.研究表明:共晶SnPb焊料量存在临界值,当共晶SnPb焊料量小于临界值时,焊点的高度等于芯片上高Pb焊料凸点的半径值;当共晶SnPb焊料量大于临界值时,焊点的高度随共晶SnPb焊料量的增加而增加.另外,采用无量纲的形式给出了焊点高度与共晶焊料量、焊盘尺寸、芯片凸点的尺寸,芯片重量之间的关系模型,研究结果对倒装焊焊点形态的控制、工艺参数的优化和提高焊点可靠性具有指导意义.     

焊盘尺寸对FC—PBGA焊点可靠性的影响

影响封装可靠性的因素很多,其中对封装及供货厂商相关的封装设计方面的各种变量应该给予足够的重视。焊盘尺寸是影响焊点可靠性的关键因素之一,不同供货厂商的各种工艺造成焊盘尺寸方面的差异,对可靠性造成了极大的影响。有限元应力分析、波纹干涉测量试验及可靠性试验表明,基板厚度影响封装可靠性。文章采用有限元模拟来定量分析焊盘尺寸对PBGA封装可靠性的影响,把空气对空气热循环试验结果与FEM预测进行比较,讨论最佳焊盘尺寸,并预测对焊点可靠性的影响。     

Secondary Current Crowding Effect during Electromigration of Flip-Chip Solder Joints

In flip-chip interconnects under current stressing, the primary current crowding effect occurs at the entrance edge of the contact interface with the highest current density. In this study, an increased current density also occurred at the other edge of the contact interface, followed by a selective dissolution of under bump metallization. After primary current crowding, the rest of electrons flow to the metallization edge, followed by an abrupt change in direction toward the anode. Primary current crowding is attributed to the electrical field change whereas the secondary crowding effect is due to the physical blocking of the electron flow. Because this effect is not as great as that of primary current crowding, it must be assisted by thermal diffusion.     

BGA焊点可靠性研究综述

随着集成电路封装技术的发展,BGA封装得到了广泛应用,而其焊点可靠性是现代电子封装技术的重要课题。该文介绍了BGA焊点可靠性分析的主要方法,同时对影响焊点可靠性的各因素进行综合分析。并对BGA焊点可靠性发展的前景进行了初步展望。     

SnAgCu凸点互连的电迁移

研究了无铅Sn96Ag3 sCuo s凸点与镀Ni焊盘互连界面的电迁移现象.在180℃条件下,凸点及互连界面在电迁移过程中出现了金属间化合物沿电子流运动方向的迁移,其演化过程呈现出显著的极性效应:阴极互连界面发生了金属间化合物的熟化、剥落和迁移;阳极互连界面则出现了金属间化合物的大量聚集.金属间化合物的演化和迁移造成了阴极处的物质减少,从而诱发空洞的形成和聚集,导致互连面积减小,整体电阻增大,可靠性降低.     

焦耳热作用下共晶锡铋焊点电迁移特性

电迁移可以引发芯片内部互连金属引线(单一元素)中的原子或离子沿电子运动方向移动.但是,在共晶锡铋焊点中,组成的元素为锡和铋而非单一元素.由于铋原子和锡原子在高电流密度下具有不同的迁移速率,因此共晶锡铋钎料具有独特的电迁移特性.实验中采用的电流密度为104A/cm2,同时焦耳热会引发焊点温度从25升高至49℃,富铋相在此温度下会发生明显粗化,除此之外,铋原子会首先到达正极界面处并形成坚硬的阻挡层,使得锡原子的定向运动受到阻碍,最终,富锡相会,凸起,其与负极界面问会有凹谷形成.     

焦耳热作用下共晶锡铋焊点电迁移特性

电迁移可以引发芯片内部互连金属引线（单一元素）中的原子或离子沿电子运动方向移动. 但是,在共晶锡铋焊点中,组成的元素为锡和铋而非单一元素. 由于铋原子和锡原子在高电流密度下具有不同的迁移速率,因此共晶锡铋钎料具有独特的电迁移特性. 实验中采用的电流密度为1E4A/cm2,同时焦耳热会引发焊点温度从25升高至49℃,富铋相在此温度下会发生明显粗化,除此之外,铋原子会首先到达正极界面处并形成坚硬的阻挡层,使得锡原子的定向运动受到阻碍,最终,富锡相会凸起,其与负极界面间会有凹谷形成.     

Thermomechanical Stress and Strain in Solder Joints During Electromigration

Thermomechanical stress and strain in the solder joints of a dummy area array package were studied as electromigration occurred. A current density of 0.4 × 10⁴ A/cm² was applied to this package, constructed with 9 × 9 solder joints in a daisy chain, to perform the electromigration test. After 37 h, the first joint on the path of the electron flow broke off at the cathode, and the first three solder joints all exhibited a typical accumulation of intermetallic compounds at the anode. Different solder joints exhibited dissimilar electromigration states, such as steady state and nonsteady state. Finite element analysis indicated that during steady-state electromigration, although the symmetrical structure produced uniform distributions of current density and Joule heating in all solder joints, the distribution of temperature was nonuniform. This was due to the imbalanced heat dissipation, which in turn affected the distribution of thermomechanical stress and strain in the solder joints. The maximum thermomechanical stress and strain, as well the highest temperature and current crowding, appeared in the Ni/Cu layer of each joint. The strain in the Ni/Cu layer was significant along the z-axis, but was constrained in the x–y plane. The thermomechanical stress and strain increased with advancing electromigration; thus, a potential delamination between the Ni/Cu layer and the printed circuit board could occur.     

焊点的质量与可靠性

主要介绍了Sn-Pb合金焊接点发生失效的各种表现形式,探讨发生的各种原因及如保在工艺上进行改进以改善焊点的可靠性,提高产品的质量。     

有限元动力分析及其在焊点可靠性评价中的应用

有限元分析是求解动力响应的重要数值模拟方法,该文首先阐述了有限元动力学方程的建立原理,对主要求鹪方法进行了比较说明。并以一块电路板为案例,建立有限元模型,利用有限元软件计算焊点在冲击载荷作用下的动力响应,给出焊点应力分布图,为焊点寿命估计和可靠性评价提供参考。     

电子封装微互连中的电迁移

 随着电子产品不断向微型化和多功能化发展,电子封装微互连中的电迁移问题日益突出,已成为影响产品可靠性和耐久性的重要因素.本文在回顾铝、铜及其合金互连引线中电迁移问题的基础上,对目前微电子封装领域广泛采用的倒装芯片互连焊点结构中电迁移问题的几个方面进行了阐述和评价,其中包括电流拥挤效应、焦耳热效应、极化效应、金属间化合物、多种负载交替或耦合作用下的电迁移以及电迁移寿命预测等.     

Cu-Ni/Solder/Ni-Cu互连结构的电迁移

采用Cu-Ni/Solder/Ni-Cu互连结构,在加载的电流密度为0.4×104 A/cm2的条件下,得到了界面阴极处金属原子的电迁移.数值模拟揭示了其原因是由于凸点互连结构的特殊性,电子流在流经凸点时会发生流向改变进而形成电流聚集,此处的电流密度超过电迁移的门槛值,从而诱发电迁移.运用高对流系数的热传导方法降低了互连焊点的实际温度,在电迁移的扩展阶段显著减小了高温引起的原子热迁移对电迁移的干扰;因此电迁移力是原子迁移的主要驱动力.在电迁移的快速失效阶段,原子的迁移是热迁移和电迁移共同作用的结果:电迁移力驱动阴极处原子的迁移,造成局部区域的快速温升,从而加剧此处原子的热迁移.     

Cu-Ni/Solder/Ni-Cu互连结构的电迁移

采用Cu-Ni/Solder/Ni-Cu互连结构,在加载的电流密度为0.4×104 A/cm2的条件下,得到了界面阴极处金属原子的电迁移.数值模拟揭示了其原因是由于凸点互连结构的特殊性,电子流在流经凸点时会发生流向改变进而形成电流聚集,此处的电流密度超过电迁移的门槛值,从而诱发电迁移.运用高对流系数的热传导方法降低了互连焊点的实际温度,在电迁移的扩展阶段显著减小了高温引起的原子热迁移对电迁移的干扰;因此电迁移力是原子迁移的主要驱动力.在电迁移的快速失效阶段,原子的迁移是热迁移和电迁移共同作用的结果:电迁移力驱动阴极处原子的迁移,造成局部区域的快速温升,从而加剧此处原子的热迁移.     

基于正交法的FBGA焊点可靠性优化研究

在芯片紧密度、功耗都在增加的微电子封装领域,FBGA封装在同体积下有较大的存储容量。基于有限元和正交法,进行了FBGA焊点热循环载荷下的可靠性分析,并进行了更稳健的焊点结构参数优化设计。结果表明,焊点阵列对FBGA结构热可靠性有重要影响;优化方案组合为12×12焊点阵列,焊点径向尺寸为0.42 mm,焊点高度为0.38 mm,焊点间距为0.6 mm。经过优化验证,该优化方案的等效塑性应变范围较原始设计方案降低了89.92%,信噪比提高到17.72 dB,实现了焊点参数优化目标。     

典型Sn基焊料凸点互连结构电迁移异同性

研究了Sn37Pb,Sn3.0Ag0.5Cu和Sn0.7Cu三种焊料BGA焊点在电迁移作用下界面的微观组织结构.在60℃,1×103 A/cm2电流密度条件下通电187h后,Sn37 Pb焊点阴极界面已经出现了空洞,同时在阳极有Pb的富集带;Sn3.0Ag0.5Cu焊点的阴极界面Cu基体大量溶解,阳极金属间化合物层明显比阴极厚;对于Sn0.7Cu焊料,仅发现阳极金属间化合物层厚度比阴极厚,阴极Cu基体的溶解不如SnAgCu明显,电迁移破坏明显滞后.