RF-MEMS谐振器和滤波器研究进展

介绍了基于梳状、梁式、圆盘三种结构的射频微机电系统( RF-MEMS)谐振器及滤波器,并对RF-MEMS谐振器及滤波器的结构与性能参数进行讨论;分析RF-MEMS谐振器及滤波器设计和制造中的有关问题及其处理方法;RF-MEMS谐振器及滤波器性能优异,能与其他器件实现片上集成,且与集成电路工艺兼容,在射频无线通信系统中的...     

Slow-wave bandpass filters using ring or stepped-impedance hairpinresonators

This paper proposes a new class of slow-wave bandpass filters that uses a microstrip line periodically loaded with microstrip ring or stepped-impedance hairpin resonators. The new slow-wave periodic structures utilize the parallel and series resonance characteristics of the resonators to construct a bandpass filter. Unlike conventional slow-wave filters, the proposed bandpass filters are designed to produce a narrow passband at the fundamental mode of the resonators. The new filters provide lower insertion loss than that of parallel- or cross-coupled ring and stepped-impedance hairpin bandpass filters. The calculated frequency responses of the filters agree well with experiments     

Thin stripline bandpass filters for the centimeter band

This article considers the design of thin stripline (1 mm) bandpass filters in the centimeter band, which contain dielectrics with different relative permittivity ε _r . This includes the choice of the resonators, the dielectric material, the preliminary assessment of resonators’ unloaded quality factors and taking into account the features of the frequency response curve of the filter. It was found, that the passband width of the thin comb filters with λ/4 resonators and array-type filters with λ/2 resonators cannot exceed 6% for any values of ε _r and the length of resonators of at least 2 mm. The array-type filters with resonators of half-wave type and with alternating signs of the coupling factors between resonators were proposed. Under certain additional conditions, the attenuation poles appear in such filters, resulting in improved selectivity. The results of computer modelling of the frequency response curve of thin filters of cm band are presented. They are compared to the frequency response of other filters. The data obtained from computer modelling showed good correspondence with the experimental data.     

耦合窗结构窄带LTCC滤波器设计

对各种类型的阶梯阻抗谐振器进行了分析和比较,λg/2型SIR谐振器最适合LTCC滤波器的设计;同时分析了耦合窗结构原理,多层LTCC滤波器适合采用这种耦合结构,可以大大缩小滤波器的体积;本文详细介绍通过多层孔径弱耦合、小型化发夹谐振器结构的LTCC多层窄带耦合窗滤波器设计方法,并进行该结构两种滤波器实物版图加工,实测结果与仿真结果比较吻合。该结构窄带滤波器结构小巧新颖,易于集成在小型化微波多芯片组件中使用。     

Compact, low insertion loss, sharp rejection wideband bandpassfilters using dual-mode ring resonators with tuning stubs

Novel wideband bandpass filters using dual-mode ring resonators with orthogonal direct-connected feed lines and tuning stubs are developed. The tuning stubs act as series resonators and provide sharp rejections for the filters. Also, a perturbation stub in each ring influences the fields of the ring resonators and generates a dual mode to extend the stop bands of the filters. The simulated and measured results agree well. This novel bandpass filter has advantages of compact size, low insertion loss, and sharp rejection     

Compact microstrip resonators for 900 MHz frequency band

A technique to reduce the size of planar resonators is investigated using a transmission line model and a finite-difference time-domain (FDTD) method. New miniaturized square microstrip resonators are proposed for 900 MHz band. The resonators offer low impedance sections leading to a better handling of power. The feasibility of compact filters using the proposed resonators is demonstrated. The input/output coupling lines of a two-pole filter have been positioned in a way that produces a filter response with transmission zeros on the both sides of the pass-band. Sharper skirts and higher out-of-band rejection are obtained for four-pole filters with cross-coupled resonators.     

Bandpass filters using dual-mode and quad-mode Mobius resonators

Compact bandpass filters are being developed using Mobius wire-loaded cavity resonators. Initial results on tuned filters indicate that excellent filter characteristics can be attained in devices that are significantly smaller than traditional wire-loaded cavity technologies. A novel quad-mode Mobius resonator is presented which occupies the same volume as a dual-mode Mobius resonator. A four-pole bandpass filter is demonstrated using a single quad-mode Mobius resonator. Precisely controlled dielectric loading of dual-mode Mobius wire resonators has been implemented to realize bandpass filters. Two-pole and four-pole bandpass filters are demonstrated using one and two dual-mode dielectric-loaded Mobius resonators, respectively     

Design of quasi-elliptic function filters with a dual-passband response

Compact miniaturized hairpin resonators are used to design cross-coupled filters with a dual-passband response of elliptic function type. The hairpin resonators are treated as a stepped impedance resonator (SIR) in analysis. In a filter, two different hairpin resonators are used to establish proper couplings required for the two design frequencies. Two filters are fabricated and measured. The results show a good agreement with the simulation.     

Compact bandpass filters using stepped impedance resonators

This paper presents a theoretical analysis of, and experimental results given by, stepped impedance (SI) resonators constructed and used as high-Q resonators in the UHF band. These results made it clear that the Q-factor is higher than conventional capacitor-loaded resonators. Three types of bandpass filters were designed and fabricated using the SI resonators. The filters mentioned in this paper show that excellent performance has been obtained.     

Intelligence method for optimizing a microstrip filter based on folded dual-mode resonators

An efficient method for optimizing microwave filters based on dual-mode resonators has been developed. In this method, a prior knowledge of how the passband parameters depend on the resonators’ resonant frequencies and couplings is used. It is shown that the rules for the intelligence optimization of filters, previously formulated for single-mode resonators, can also be applied to dual-mode resonators. To this end, each dual-mode resonator of the filter should be put into correspondence with its proper pair of imaginary single-mode resonators whose coupled-oscillation frequencies coincide with the frequencies of the dual-mode resonator.     

Improved optical filter responses in cascaded InGaAsP/InP microdiskresonators

Cascaded InGaAsP/InP microdisk resonators as optical filters are fabricated by deep dry-etching. Compared with single microdisk resonators, these higher-order filters show steeper rolloffs and flatter passbands. The bandwidth ratios of 15 to 3dB for the single, three and five cascaded microdisk resonator filters are ~2.4, 1.4 and 1.2     

Novel realization of monotonic Butterworth-type lowpass, highpass,and bandpass optical filters using phase-modulated fiber-opticinterferometers and ring resonators

A novel realization of monotonic Butterworth-type lowpass, highpass, and bandpass optical filters (from their electrical digital filter characteristics) by cascading the all-pole and all-zero resonators is presented. A graphical method for fast derivation of the transfer functions, quick inspection of the resonance effects, and important characteristics of any photonic circuits is described. It is shown that incorporation of the optical amplifiers and optical phase modulators into the delay lines of two basic optical resonators, whose pole and zero can be adjusted independently of each other, provides great design flexibility which would otherwise not possible using conventional passive optical resonators. Possible applications of these optical filters as optical pulse equalizers and receiver shaping filters in long-haul coherent lightwave transmission systems are discussed. Possible application of basic resonators comprising of optical phase modulators as tunable optical filters for spectrum analyzers is also considered     

Miniaturized Hexagonal Stepped-Impedance Resonators and Their Applications to Filters

Miniaturized hexagonal stepped-impedance resonators and their applications to bandpass filters are presented. Based on the odd- and even-mode equivalent circuits, the resonance characteristics of these resonators are investigated. A series of circuit configurations, including the third-order Chebyshev, trisection, and fifth-order cascaded trisection filters, are constructed by the proposed resonators. These filters are very compact and have good stopband responses. Measured results validate the analysis and theoretical prediction with good agreement.     

Combline filters designed on symmetric stripline

Problems arising during the design of stripline combline filters, which until quite recently were considered as all-stop microwave structures, are considered. It has been shown that the electromagnetic coupling coefficient of quarter-wave stripline resonators increases with the value of material permittivity ε_r, the operating frequency, and the thickness of the filter resonators. For ε_r = 92 and a thickness of stripline resonators of 4 mm, it exceeds 12% at frequencies higher than 2.2 GHz. Two alternative versions of combline filters have been designed: a filter with a coupling strip and a filter without a coupling strip. Experimental data for a nine-resonator combline filter with a thickness of 4 mm, ε_r = 9.7, and the center frequency f ₀ = 2.4 GHz are presented. A method for increasing the selectivity of combline filters with the same number of resonators is proposed. It has been found that amplitude–frequency responses of stripline combline filters are near-symmetric, unlike the responses of microstrip combline filters.     

Frequency-selective MEMS for miniaturized low-power communicationdevices

With Q's in the tens to hundreds of thousands, micromachined vibrating resonators are proposed as integrated circuit-compatible tanks for use in the low phase-noise oscillators and highly selective filters of communications subsystems. To date, LF oscillators have been fully integrated using merged CMOS/microstructure technologies, and bandpass filters consisting of spring-coupled micromechanical resonators have been demonstrated in a frequency range from HF to VHF. In particular, two-resonator micromechanical bandpass filters have been demonstrated with frequencies up to 35 MHz, percent bandwidths on the order of 0.2%, and insertion losses less than 2 dB. Higher order three-resonator filters with frequencies near 455 kHz have also been achieved, with equally impressive insertion losses for 0.09% bandwidths, and with more than 64 dB of passband rejection. Additionally, free-beam single-pole resonators have recently been realized with frequencies up to 92 MHz and Q's around 8000. Evidence suggests that the ultimate frequency range of this high-Q tank technology depends upon material limitations, as well as design constraints, in particular, to the degree of electromechanical coupling achievable in microscale resonators     

Novel Centrally Loaded Resonators and Their Applications to Bandpass Filters

This paper presents several novel centrally loaded resonators and their applications to various types of bandpass filters. Based on the theoretical analysis, it is found that the even- mode resonance of the proposed resonators can be conveniently controlled without affecting the responses at the odd-mode resonant frequencies. Benefiting from this feature, the resonator can be utilized to design not only harmonic-suppressed bandpass filters and dual-band bandpass filters but also tunable bandpass filters. The tunable filter offers a fixed passband and a tunable one. The center frequency of the upper passband can be electrically tuned, whereas the performance of the lower one is maintained constant. To demonstrate these applications, four filters using the proposed resonators are implemented. The experiments verify the theoretical predictions and simulations.     

An experimental investigation of high permittivity dielectric resonators for millimeter-wave microstrip components

This paper proposes a new type of high permittivity whispering gallery mode cylindrical dielectric resonators with a geometry which is very suitable for use in microstrip type integrated circuits. These “oversized” resonators, together with high Q factors and ease of fabrication, are potentially interesting for millimeter wave integrated filters and oscillators. In this paper, we report an experimental investigation of such resonators carried out in Ka band (26.5–40 GHz). Measured results including resonant frequencies and loaded quality factors will be presented. Application to millimeter wave filters will also be demonstrated.     

Silicon-on-Insulator Microring Add-Drop Filters With Free Spectral Ranges Over 30 nm

We demonstrate highly compact optical add-drop filters based on silicon-on-insulator microring resonators. The microring resonators have a small radius of 2.5 mum and a very large free spectral range ~ 32 nm at the 1.55 mum communication band. The propagation loss in such small micoring resonators was experimentally determined and shown to be extremely important in designing microring add-drop filters with low add-drop crosstalk, low drop loss, and maximally flat drop passband. For box-like channel dropping responses, second-order optical add-drop filters with two coupled microring resonators are designed and demonstrated, and the simulation matches well with the experiment. Devices were patterned with electron-beam lithography. Two fabrication procedures utilizing different polarity of resists were introduced and compared, and the process with negative resist resulted in much smaller sidewall roughness of waveguides, thus reducing the propagation loss in microring resonators.     

Compact Millimeter-wave filters using distributed capacitively loaded CPW resonators

In this paper, a method for reducing the size of coplanar-waveguide (CPW) resonators, used in the design of compact bandpass filters, is presented. This is accomplished by incorporating a distributed array of capacitive loads along a resonant CPW line. Design of a miniaturized bandpass filter using capacitively loaded CPW resonators, which are inductively coupled, is presented. Inductively coupled bandpass filters with the proposed capacitively loaded CPW line resonators are designed and a size reduction of 25%, compared with filters using a standard CPW line resonator, is demonstrated. It is shown that, through this size reduction, the insertion loss is minimally increased (<0.4 dB). A hybrid algorithm, combining the method of moments (MOM) and circuit simulation is used to facilitate design process. Few filters using this technique are designed, fabricated, and measured at W-band. An excellent agreement between the simulation and measurement responses of these filters is presented.     

Microstrip filters using new compact resonators

Compact two-pole and four-pole passband filters in 900 MHz frequency band using novel square microstrip resonators are presented. The measured filters' responses demonstrate the feasibility of selective filters using these new resonators