超光滑表面粗糙度测量的研究

本文讨论了对积分散射测量的超光滑表面均方粗糙度进行修正的问题，得出结论：可以直接依赖于散射理论从积分散射测量确定表面粗糙度值。     

高反膜片均方根粗糙度的测量

针对特定的膜层结构 ,从理论上计算了膜片表面散射与表面均方根粗糙度的关系 ,根据测量的膜片表面总积分散射计算得到的表面均方根粗糙度与在长春光机所用由美国进口的WYKO表面测量仪测量得到的表面均方根粗糙度基本符合。除了在有明显伤痕的地方相差较大而外 ,它们相差在 1A°以内。     

光散射法测量表面粗糙度综述

本文根据国内外的现状,对具有较高精度,可作快速无损测量的散射法表面粗糙度测量作一些介绍和分析。     

了解表面特征 掌握表面粗糙度测量要点(下)

2．用触针式粗糙度仪测量的要点当前国内外应用最广泛、占主导地位的表面粗糙度测量仪器是触针式粗糙度测量仪。是用一个很尖的触外压在被测表面上作横移扫描，触针将跟随表面轮廓波形的起伏作垂直位移，并转换为电参量信号，经放大、滤波和运算处理，给出表面粗糙度的某些参数值，亦能给出截面轮廓曲线图形。引入计算机技术使仪器的功能有明显提高。主要表现在能给出众多的粗糙度表征参数和波纹度的参数，一些测量条件可以在较宽的范围内选择，甚至可以自行编制一系列测量程序随时调用，条件确定后实现自动操作等等。使用时，测量的基本条…     

利用光散射测表面粗糙度的方法

在这篇文章中概括了大量以前所做的利用光散射测量金属表面粗糙度的试验。也确定了几种测量不同表面粗糙度参数和函数的方法，同时也给出了每种方法的近似范围。利用直接标准，计算光清表面粗糙度，范围从0＜α／λ＜0．05，其中σ是粗糙度均方值，凡是光波长，在这种方法中散射的角分布与粗糙度的功率谱密度密切相关。在此基础上表面目相关函数可以通过范围在0＜α／λ＜0．14之间的角分布付里叶变换计算出。在0＜α／λ＜0．3范围内，光线是可分辨和测量的，对于这种情况给出了镜面反射的方法。对于这些方法和较粗糙的表面，发散宽度的均…     

化学处理对熔石英表面抗激光损伤阈值的影响

分析了HF酸腐蚀时间对熔石英抗激光损伤阈值的影响.用浓度为4%的HF酸腐蚀15min后,测得熔石英抗激光损伤阈值提高了53.1%,并对其机理作了分析.激光损伤实验使用波长为355nm,脉宽为10ns,频率为3Hz的Nd:YAG调Q激光器测试系统.当泵浦激光辐照熔石英样品表面时,后表面比前表面更容易发生激光诱导损伤,HF酸腐蚀的程度对前后表面抗激光损伤阈值比基本没有影响.对实验样品在HF酸腐蚀前后表面粗糙度的测量结果表明,HF酸腐蚀时间较短时实验样品表面粗糙度基本无变化,如果选用的样品存在较多的表面及亚表面缺陷,当HF酸腐蚀去除掉重沉积层后,表面粗糙度将急剧上升.     

触针式表面粗糙度测量仪整机性能指标的分析与测量

一、概述 目前,国内外轮廓法触针式表面粗糙度测量仪按其传感器的类型和测量方法的不同,主要可以分为如下几种形式:按接触式测量方式工作的仪器有电感式表面粗糙度测量仪和压电式表面粗糙度测量仪,按非接触式测量方式工作的仪器有激光光触针式表面粗糙度测量仪等。我国在1985年参照国际标准ISO1880—1979《轮廓法表面粗糙度测量仪—接触(触针)式轮廓转换     

激光自混频干涉法测量表面粗糙度的理论分析

设计了一种半导体激光自混频干涉法测量表面粗糙度的实验，对半导体激光自混频干涉法测量表面粗糙度中的干涉效应进行了理论分析，推导了干涉信号与表面粗糙度的数学关系式，讨论了影响测量信号的因素。实验结果表明，随着加工表面粗糙度的降低，反射光的强度逐渐增加，被测物体表面的反射率越高，越有利于测量。     

表面粗糙度Ra和光学散射特征值Sn关系的研究

本文以光散射法测量磨削表面 例，研究光散射法光学特征值Ｓｎ和表面粗糙度主要参数Ｒａ的对应关系；特别是针对研磨表面建立的Ｒａ－Ｓｎ关系曲线图，在较大的测量范围内，Ｒａ－Ｓｎ存在较好的线性对应关系，表明光散射非接触测量表面粗糙度更适合较光滑表面的粗糙度进行了无接触，快速检测。     

激光—分子束—表面散射装置的研制

介绍自自设计和加工的激光－分子分子束－表面散射装置，并对超高真空转动密封结构作了详细描述。差发泵浦的超音速分子束对准样品中心，射入超高真空主室，样品架安放在主室中央，四极质谱检测器可绕样品转动，用来测量表面散射分子的平动能及角分布。三个石英窗口作为激光窗口。可用ＬＩＦ或ＭＰＩ方法来测量表面散射分子的内能态分布，也可用于研究表面光化学。最后给出了分子束发射角及室时ＣＨ２Ｉ２在Ａｇ（１１０）表面用３０     

Measurement of surface roughness profile by a triangulation method

Some aspects of measuring surface roughness parameters using a laser triangulation method are considered. A connection is established between surface roughness and scattering indicatrices with probing radiation polarization parameters of a semiconductor laser. A marked effect is noted of the form and position of the polarization plane on the measurement error for linear values. __________ Translated from Metrologiya, No. 6. pp. 21–27, June, 2008.     

Grinding surface roughness measurement based on the co-occurrence matrix of speckle pattern texture

Surface speckle pattern intensity distribution resulting from laser light scattering from a rough surface contains various information about the surface geometrical and physical properties. A surface roughness measurement technique based on the texture analysis of surface speckle pattern texture images is put forward. In the surface roughness measurement technique, the speckle pattern texture images are taken by a simple setup configuration consisting of a laser and a CCD camera. Our experimental results show that the surface roughness contained in the surface speckle pattern texture images has a good monotonic relationship with their energy feature of the gray-level co-occurrence matrices. After the measurement system is calibrated by a standard surface roughness specimen, the surface roughness of the object surface composed of the same material and machined by the same method as the standard specimen surface can be evaluated from a single speckle pattern texture image. The robustness of the characterization of speckle pattern texture for surface roughness is also discussed. Thus the surface roughness measurement technique can be used for an in-process surface measurement.     

Development of a laser-scattering-based probe for on-line measurement of surface roughness

The design and properties of an optical probe for on-line measurement of surface roughness are discussed. Based on light scattering, a probe that consists of a laser diode, a measuring lens, and a linear photodiode array was designed to detect surface roughness, in which the light scattered from a test surface at a relatively large scattering angle phi (=28 degrees) can be collected to enhance measuring range and repeatability. A coaxial design that incorporates a dual-laser probe and compressed air makes the proposed system insensitive to the position of the test surface and to surface conditions such as the presence of debris, vibration, and lubricants that result from machining. The results from measurements of several sets of specimens have demonstrated the feasibility of measuring surface roughness by using light scattering. On-line measurement on a diamond-turning lathe has shown that the proposed technique is stable and compact enough to be applicable to on-line measurement of surface roughness of an engineering surface.     

Angle Encoding Disk Surface Parameters Evaluation Using Conventional Laser Head: Initial Study

Surface quality is one of the most important parameters in mechanical treatment. In recent years a great number of contact and non-contact surface quality measurement methods have been created. This article covers a non-contact laser method of surface parameter evaluation, intended for the evaluation of the surface quality of an angle encoder disk. For such a measurement, this paper proposes using a conventional compact disc laser-reading unit. The proposed system is relatively simple and inexpensive. The device allows measuring unevenness in the surface thickness of an encoder disk, as well as its surface roughness and profile details. The structure of the measurement system, the static and dynamic calibration results and the experimental surface measurement results for an angle encoder disc are presented.     

航空发动机叶片粗糙度测量方法研究

航空发动机叶片表面弯扭大,加工过程中难以保证表面粗糙度一致。针对现阶段粗糙度测量方法在测量叶片时缺少测量位置和方向的定义,导致测得的粗糙度值无法判定叶片粗糙度合格性的问题,开展了叶片粗糙度测量方法研究。基于叶片实测截面数据,利用坐标测量机上搭载的粗糙度测头,通过对不同类型的叶片进行多位置多方向的粗糙度测量实验,分析不同位置、不同方向的粗糙度测量结果差异,得到了叶片粗糙度测量方法。本方法将叶片粗糙度与叶片型面相关联,解决了叶片粗糙度的测量位置和测量方向缺乏规范的问题。研究结果对准确、有效、规范地评估叶片表面质量的合格性具有重要意义。     

脉冲激光作用Al2O3的表面形貌演变过程

激光表面加工是一种能够有效降低陶瓷材料表面粗糙度的方法,为了研究脉冲激光与陶瓷材料作用后表面形貌演变过程及激光工艺参数对表面粗糙度的影响,本文通过有限元法建立了瞬态二维轴对称数值模型,研究了单脉冲、多脉冲激光作用于氧化陶瓷表面形貌的演变过程及激光工艺参数对表面粗糙度的影响。结果表明：单脉冲激光对材料表面具有显著的平滑效果;多脉冲激光加工在脉冲2～3次时具有最好的平滑效果,继续增加脉冲数量,熔池内的表面轮廓开始向下凹陷,表面平滑效果减弱;采用不同工艺参数加工时,过大的频率、脉宽、激光功率都会导致材料表面粗糙度增加。当表面温度处于熔化温度与蒸发温度之间,熔池内流体以毛细力为主要驱动力,促使表面逐渐平滑;当表面温度超过蒸发温度时,熔池内流体受反冲压力挤压,促使表面粗糙。实验与模拟结果对比表明,该模型具有较高的准确性。     

Non-contact strain measurement using metal foil gauges with the application of the laser speckle method

This paper presents a new method to measure cyclic strain with no contact using metal foil gauges assisted by the laser speckle method. When aluminium foil is pasted on a specimen and the specimen is loaded cyclically, slip bands are produced on the foil surface. There is a fixed relation between density of the slip bands and the strain amplitude or loading cycles depending on the foil material. Thus the fatigue strain of the base metal can be estimated by observing the surface change of the metal foil by the slip bands at a constant number of loading cycles. The method presented in this paper is intended to make a non-contacting strain measurement by the application of the laser speckle technique for the detection of the surface change. This method is based on observation of the changes in a laser speckle pattern depending on the surface roughness and surface property changes of the foil caused by fatigue. The laser speckle pattern can be analysed automatically and quantitatively using an image processing system.     

基于响应面遗传算法的低碳钢激光切割工艺分析及参数优化

为了研究光纤激光加工工艺对Q235低碳钢板切割质量的影响,采用1000 W光纤激光切割机对3 mm厚低碳钢板切割质量影响规律进行了研究.设计了Box-Behnken实验,使用粗糙度仪和高精度电子秤完成了切面粗糙度和试样挂渣量的测量,研究了在氧气熔化切割方式下激光功率、切割速度、激光频率、激光占空比和辅助气体压力等工艺参...     

Hybrid vision system for online measurement of surface roughness

A hybrid vision system for online measurement of surface roughness is introduced. The hybrid vision system applies two cameras for capturing the laser speckle pattern and scattering images simultaneously. With the help of advanced image processing, several features of texture and shape are computed for the surface roughness characterization. On the basis of experimental tests, feature fusion to improve measurement range and linearization of the measurement is also discussed.     

Two-dimensional modelling of systematic surface height deviations in optical interference microscopy based on rigorous near field calculation

Optical interference microscopes are widespread in topography and roughness measurement on the micro- and nanoscale. In spite of a wide range of scientific and industrial applications, systematic deviations between the measured and the real surface topography occur in certain situations, e.g. at edges or steep flanks. We present a numerical model considering the properties of the measurement instrument as well as the surface structure to be measured in order to get new insights into the physical dependencies of these deviations. The computation is based on a rigorous simulation of the scattered near field combined with a Fourier optics treatment of the image formation in the measurement instrument. In this study, the near fields are calculated with an open-source finite element method (FEM) software and a commercial finite difference time domain method (FDTD) software. The numerical results are compared with an analytical Kirchhoff approach and measurements. The main intention of this paper is to introduce the modelling and point out possible fields of application. In further studies, this model could be extended to 3D and parameter dependencies of systematic deviations, such as the material of the measurement object and the NA of the measurement instrument, could be investigated.