长行程直线电机的迭代学习控制

光刻机工件台在扫描曝光过程中要求纳米级的定位精度，采用长行程直线电机粗动加洛仑兹电机高精密微动补偿的6自由度复合运动系统能满足要求。为减小微动电机的运动范围和加速度，必须提高直线电机的轨迹跟踪精度。提出了一种开闭环D型迭代学习控制律改善永磁直线同步电动机(PMLSM)的轨迹跟踪性能。控制器由三部分组成：PID控制器用来提高系统对扰动和参数变化的鲁棒性；前馈补偿器可提高系统的实时跟踪性能；迭代学习控制器则通过执行重复任务来不断向理想的控制信号逼近。实验结果表明，这种控制方法可以有效提高系统的轨迹跟踪精度。     

基于微分前馈自抗扰的逆变器控制策略

传统的自抗扰控制主要针对阶跃信号进行快速和无静差跟踪,而逆变器的输出为周期性信号,导致传统自抗扰控制的逆变器存在较大跟踪误差,使得自抗扰控制在逆变器上的应用受限。文中将逆变器的已知模型加入控制器中,系统未建模动态及外部扰动视为总扰动并加以抑制。常规的模型补偿自抗扰控制器虽然能实现较好的波形质量,但是存在较大的稳态误差,文中对稳态误差存在的原因进行了理论分析,提出微分前馈的自抗扰控制策略以减小逆变器的稳态误差。通过内模控制器等效法,对基于微分前馈自抗扰的逆变器进行稳定性分析。仿真与实验结果验证了所提方法的有效性。     

基于ZPETC和DOB的直线电机控制器设计及实验研究

直线电机驱动系统中存在的负载力、推力波动等干扰力会引起跟踪误差,降低跟踪性能。干扰观测器可以检测并补偿干扰,有效提高系统的抗干扰能力。前馈控制是提高系统跟踪性能的另一种方法,如直接速度前馈控制器、零相位误差跟踪控制器等,可以有效提高系统带宽,提高跟踪性能。针对直线电机在抗干扰和动态响应方面的需求,该文研究了基于直接速度前馈控制器、零相位跟踪控制器和干扰观测器的直线电机控制方法,并给出实验结果。结果表明,直接速度前馈控制器使位置能够无静地跟踪二阶指令输入,干扰观测器能够很好的抑制推力波动和摩擦力的影响,零相位跟踪控制器能够提高位置闭环带宽,改善跟踪性能,特别是三阶位置指令输入时的跟踪误差。     

针对时变输入的永磁同步电机改进型自抗扰控制器

在永磁同步电机(PMSM)调速系统中,提出了对时变输入具有更高跟踪精度的改进型模型补偿自抗扰控制(MMC-ADRC)策略。传统的自抗扰控制中,扩张状态观测器(ESO)的观测扰动项较大,通过模型补偿可以大幅减小观测扰动项,提高跟踪精度。然而当输入时变时,由于常规的模型补偿自抗扰控制(MC-ADRC)存在建模误差,系统对输入的跟踪误差仍然较大。尽管可通过增大控制器增益来减小跟踪误差,但这同时会使系统中噪声被放大,降低系统性能。在MC-ADRC基础上引入输入微分前馈(IDF)得到的MMC-ADRC,可从理论上消除建模误差,在相同增益下获得更高的跟踪精度。仿真和实验结果证明了所提方法的有效性。     

低速大转矩永磁同步电机矢量控制研究

低速大转矩永磁同步电机调速系统在负载频变时存在动态响应慢的问题,本文分析了永磁同步电机数学模型、无传感器控制和自抗扰控制原理后,提出了一种基于滑模观测的自抗扰控制方法,并将其应用于矢量控制中,以提高永磁同步电机的运行性能。与传统滑模观测器相比,该方法的观测器是采用饱和函数sat作为开关函数,并引入锁相环得到转子位置估计值的方法,来减小估计误差。此外,再对滑模观测器的输出值进行动态跟踪与实时补偿来设计出适用于永磁电机的自我补偿型自抗扰控制器,并将该方法应用到永磁同步电机矢量控制系统中。仿真结果表明：采用自抗扰控制器的矢量控制系统具有更好的抗扰动能力和跟踪精度,电机满载启动时无超调,负载转矩突然变化时,系统能快速响应。     

超精密运动系统跟踪误差定量分析

直线或平面电机驱动的超精密运动系统加减速域跟踪误差对建立时间有重要影响,定量分析加减速域跟踪误差并建立解析模型,对减小建立时间有重要的工程与学术价值。针对工程实际中的数字控制系统,该文基于单质量块刚体和双质量块柔性体模型,在离散域建立跟踪误差与前馈控制器、反馈控制器和目标轨迹之间的解析模型,从物理层面深入分析超精密运动系统加减速域轨迹跟踪误差产生机理。定量分析表明,在给定的前馈控制器和反馈控制器作用下,时域上加减速域跟踪误差与目标轨迹特定阶次的导数近似成正比。在跟踪误差定量分析的基础上,提出一种前馈控制器参数整定方法。实验验证误差分析的正确性和前馈控制器参数整定方法的有效性。     

预测前馈补偿在0．1um光刻机硅片台长行程电机控制中的应用

0．1um光刻机硅片台在扫描曝光过程中要求纳米级的轨迹精度，采用直线电机承担大行程粗动控制和洛沦磁电机承担高精度微动控制的复合运动能满足要求．为减小微动电机的运动范围和加速度，必须提高直线电机的位置控制精度．介绍了高精度永磁直线交流同步电机的IP位置控制算法，提出采用最优预测前馈补偿，提高实时跟踪性能，增强抗干扰能力，以满足直线电机的高速度高精度位置控制要求．     

基于重复自抗扰控制的感应电机矢量控制方法

为了实现感应电机的精确解耦和扰动补偿,降低自抗扰控制对参数的依赖性,提出一种基于重复自抗扰控制的感应电机矢量控制方法,该控制方法通过融入重复控制,进一步提升了传统感应电机自抗扰控制系统抗扰动的能力,并提高了控制精度。基于重复控制的思想,周期性跟踪并补偿误差,逐周期减小误差,提高了系统的扰动隔离度,因而减少了自抗扰控制对于参数鲁棒性的依赖性。仿真和实验结果验证了所提出的重复自抗扰控制方法比传统自抗扰控制在抗扰动性和参数变化方面有更好的控制效果和鲁棒性。     

基于模糊自抗扰的精密直线电机运动控制

针对精密直线电机运动平台模型参数不确定以及直线电机结构特性带来的端部效应和定位力波动等非线性因素引起的系统动态响应性能下降问题,分析了直线电机运动平台数学模型,设计了一种模糊自抗扰控制器(ADRC)。通过Simulink建立伺服运动平台和控制器模型,并进行仿真优化。仿真结果表明,与传统PID控制器和经典ADRC相比,设计的模糊ADRC的跟随误差明显下降,抵抗系统扰动能力明显上升,说明了模糊ADRC具有更高精度的动态跟随能力及更好的抗干扰性、鲁棒性和自适应能力。     

直线电机齿槽推力波动的标定与补偿方法

为减小直线电机齿槽推力波动对运动性能的影响,依据齿槽推力波动固有特性,提出基于PID位置控制的齿槽推力波动标定方法及其位置函数构造方法.采用线性插值计算方法建立齿槽推力波动的前馈补偿控制模型,并给出齿槽推力波动的标定结果,对比齿槽推力前馈补偿前后的位置跟踪误差.实验获得的齿槽推力波动幅值为±12N,前馈补偿前后的位置跟踪误差分别为±48μm和±10μm.实际结果表明采用所提方法可提高电机的运动精度和性能.     

Position control for a linear slider with twin linear drives

In this paper, position control of a linear slider with twin linear drives is considered. Recently, for high‐speed response, several linear motors have been used for linear slider systems. In such a linear slider, if the linear drives are controlled individually, their position responses may undergo vibrational disturbance by interaction with the output of the motors. To control this vibration, this paper presents a dynamic model of a linear slider system which consists of two motion systems decoupled by coordinate transformation, and proposes a feedback controller which is designed for these two decoupled systems. The effectiveness of the proposed method is confirmed by experiments. © 2004 Wiley Periodicals, Inc. Electr Eng Jpn, 147(4): 68–76, 2004; Published online in Wiley InterScience ( www.interscience.wiley.com ). DOI 10.1002/eej.10291     

Design of linear phase FIR filters via linear complementarity problem approach

In this paper, the design of constrained linear phase finite impulse response (FIR) filters is considered. The problem is formulated as a linear complementarity problem (LCP), which is solved using Lemke's algorithm. The LCP is a refined mathematical formalism with useful theoretical results. The digital filters presented meet efficiently the specifications of the magnitude response error. The used algorithm is a direct one and therefore, there is no need for matrix inversion. However, in the iterative methods that are frequently used, the bulk of the design computation is concerned with the evaluation of matrix inversion in order to solve a system of equations. Examples to illustrate the proposed method are presented. Copyright © 2005 John Wiley & Sons, Ltd.     

永磁直线同步电机的改进线性自抗扰控制

在永磁直线同步电机（PMLSM）的运动控制系统中,提出一种位置环的改进线性自抗扰控制（ILADRC）方法。相对于传统的线性自抗扰控制（LADRC）,ILADRC仅利用线性扩张状态观测器输出的位置估计信号,通过PD控制器计算初始控制量,避免了引入速度估计信号的滞后影响。对PMLSM运行过程中受到的总扰动通过线性扩张状态观测器进行实时估计,并在控制律中进行动态补偿。利用李雅普诺夫函数方法证明了闭环误差系统的渐近稳定性。通过系统辨识得到了PMLSM平台的传递函数模型,在MATLAB中进行了仿真分析,并搭建了基于dSPACE控制器的实验系统。实验结果表明,相比于PID和LADRC,ILADRC能够有效减小跟踪误差,降低超调,且具有更好的扰动抑制能力。     

直线压缩机用无内定子动磁式直线振荡电机的建模与分析

针对直线压缩机要求结构紧凑及力特性好的特点,提出一种新型动磁式直线振荡电机.该电机具有无需内定子、动子质量轻、加工难度小及力特性平稳等优点.在分析电机运行原理的基础上,建立了该电机的等效磁路模型,并推导了气隙磁链、电磁推力及电感的解析表达式.为验证等效磁路模型的正确性,建立了电机准二维有限元模型,并对电机气隙磁场分布及力特性进行了深入分析.实际加工了一台实验样机并进行了静态推力实验,样机测试结果、有限元分析结果和磁路分析结果较好吻合,证明了所建模型的正确性.     

Electrical characterization of linear and non‐linear random networks and mixtures

A material composed of a mixture of distinct homogeneous media can be considered as a homogeneous one at a sufficiently large observation scale. The problem of mixture characterization has been exactly solved in case of linear random mixtures, that is, materials for which the various components are isotropic, linear and mixed together as an ensemble of particles having random shapes and positions. In the present work the authors briefly review the linear theory and then consider mixtures of non‐linear media. In particular they give formulas for obtaining their constitutive equations for current density, electrical displacement, and magnetic induction. These relations have been derived by means of heuristic considerations on random networks and they have been verified with simulations obtaining a high degree of accuracy. Copyright © 2003 John Wiley & Sons, Ltd.     

A linear programming approach to online set membership parameter estimation for linear regression models

This paper presents a new technique for online set membership parameter estimation of linear regression models affected by unknown‐but‐bounded noise. An orthotopic approximation of the set of feasible parameters is updated at each time step. The proposed technique relies on the solution of a suitable linear program, whenever a new measurement leads to a reduction of the approximating orthotope. The key idea for preventing the size of the linear programs from steadily increasing is to propagate only the binding constraints of these optimization problems. Numerical studies show that the new approach outperforms existing recursive set approximation techniques, while keeping the required computational burden within the same order of magnitude. Copyright © 2016 John Wiley & Sons, Ltd.     

On the design of high‐efficiency linear induction motors for linear metro

Linear metro with single‐sided linear induction motor (SLIM) propulsion and wheel‐on‐rail support and guidance came into service in April 1990 in Osaka and in December 1991 in Tokyo, and is under construction or planned for Yokohama, Kobe, and Fukuoka. Since the new traffic system is used widely, it is of great importance to decrease its energy consumption. In this paper, the design of the SLIM for the linear metro is formulated as a constrained nonlinear programming problem, and optimum design is carried out to maximize efficiency. Seven parameters are chosen as independent variables: number of poles, pole pitch, stack height, secondary aluminum sheet thickness, overhang length, slot width/slot pitch ratio, and rated slip. The output KW/input KVA ratio, maximum flux density in teeth, temperature rise, primary length, stack height, overhang length, maximum thrust, and vertical force are selected as constraint functions. In the optimization procedure, the performance characteristics are formulated by space harmonic analysis taking account of the end effect, skin effect, and air gap leakage. The accuracy of the formulas is verified against experimental results. Effective ways of increasing efficiency include the addition of a copper reaction plate and minimization of the mechanical clearance. © 2001 Scripta Technica, Electr Eng Jpn, 137(2): 36–43, 2001     

Operation of small-displacement linear actuator

The structure and synthesis of a modal regulator of a small-displacement linear actuator based on a solenoid motor are considered. The results of using the developed approach to estimating the regulator of the electrical-drive system of the cross-feed motion of the lathe knife are given.     

运用静态反馈分析设计离散饱和线性系统

给出了控制饱和单输入状态反馈系统是全局渐近稳定还是区域渐近稳定的充分性条件,且对区域渐近稳定的情况计算其不变吸引椭球,运用Ricatti方程迭代法设计控制器以使所得椭球尽量大;对多输入控制饱和系统输出反馈系统,给出其吸引域的描述;最后用算例说明方法的有效性。