高温ITO薄膜应变计制备及压阻性能EI北大核心CSCD

高温薄膜应变计被广泛应用于极端条件热端构件的应变测量。ITO薄膜应变计通常能够应用于1000℃以上的应变测量,为了研究ITO薄膜的显微结构、XPS光谱、阻温特性及压阻响应,采用磁控溅射在陶瓷基底上制备了ITO薄膜应变计,并在高温纯N2中热处理ITO薄膜。结果表明,其电阻温度系数稳定在-750×10-6℃-1,在1200℃下测试其应变特性,测得电阻漂移率为0.0018 h-1,应变因子为16。ITO薄膜在高温下具有稳定的电阻温度系数和低漂移率,为高温端部件应变的测量提供了可能。     

Microfabrication and characterization of spray-coated single-wall carbon nanotube film strain gauges

We present the design, fabrication, and characterization results of single-wall carbon nanotube (SWCNT) film strain gauges for potential applications as highly sensitive strain, weight, or pressure sensors on the macro-scale. A batch microfabrication process was developed for practical device construction and packaging using spray-coated SWCNTs and a conventional semiconductor process. The prototype was characterized using a commercial metal foil gauge with tensile and compressive testing on a binocular load cell. Our test results demonstrated that the proposed SWCNT film gauges have a linear relationship between resistance changes and externally applied strain. The gauge factor ranged from 7.0 to 16.4 for four different micro-grid configurations, indicating that the maximum strain sensitivity of the prototype was approximately eight times greater than that of commercial gauges.     

Flächeneinfluss bei der PACVD‐Beschichtung

Impact of the active surface on properties of DLC films in the PACVD coating chamber. In the automotive industry, economic and stable industrial processes to apply hard coatings for tribological applications are required. Hence detailed knowledge about the influence of coating parameters on the film characteristics is essential. the following paper deals with the process of plasma activated chemical vapor deposition with focus on the effect of the parameter “active area in the coating chamber“ on the properties of diamond‐like‐carbons (DLC). the coatings are deposited in an industrial coating chamber using reactive magnetron sputtering with a pulsed bias voltage (40 kHz) and at constant pressure. During the investigation of the influence of active area and current density on the mechanical and tribological properties of the DLC films, the expected correlation between active area and current density could be confirmed. By regulating the current density, consistent film properties could be achieved, independently of the active area in the chamber. Furthermore improved wear characteristics of the film – crucial for the endurance of heavily loaded automotive components – were achieved by adapting the load pattern of the chamber.     

Abscheidung superharter Kohlenstoffschichten mittels Laser‐Arco® auf dem Weg vom Labor in die industrielle Serienfertigung

Superhard carbon film deposition by means of Laser‐Arco® on the way from the Laboratory into the industrial series coating Diamond‐like carbon films (DLC) are more and more applied as wear protection coatings for components and tools due to their unique combination of high hardness, low friction and sticking tendency to metallic counter bodies. Up to now applied DLC films are hydrogen containing (a‐C:H) or metal carbon films (Me‐C:H) deposited by a plasma assisted CVD process from carbon‐hydrogen gas mixtures. Their wide industrial effort results from that the can be deposited with slowly modified coating machines for classical hard coating (e.g. TiN or CrN). A new generation DLC films are the hydrogen‐free ta‐C films (ta‐C = tetrahedral bounded amorphous carbon) with a between two and three‐times higher hardness and with a resulting higher wear resistance under extreme condition than classical DLC films. They have excellent emergency running properties at lubrication break down. Their industrial application is more difficult due to that they cannot deposited with modified coating machines for classical hard and DLC coating and a new technology with corresponding equipment was not available up to now. The laser controlled, pulsed arc deposition technology (Laser‐Arco®) of the Fraunhofer IWS Dresden has this potential. In kind of a Laser‐Arc‐Module‐source the ta‐C film deposition can be integrated in every industrial used deposition machine.     

Piezoresistive response of ITO films deposited at room temperature by magnetron sputtering

Indium tin oxide (ITO) thin films have been deposited on (100) Si substrates by RF magnetron sputtering from a compact target (90% In₂O₃–10% SnO₂ in weight) with 6 in. in diameter. In order to perform electromechanical characterizations of these films, strain gauges were fabricated. An experimental set-up based on bending beam theory was developed to determine the longitudinal piezoresistive coefficient (π_l) of the strain gauges fabricated. It has been confirmed that electrical resistance of the strain gauges decreases with load increases which results a negative gauge factor. A model based on the activation energy was used to explain the origin of this negative signal. The influence of the temperature on piezoresistive properties of ITO films was also evaluated.     

Computer aided analysis of strain rosette data

In this paper a computer program has been developed for analysing the strain gauge rosettes by considering the transverse sensitivity of all gauges. The program is capable of calculating principal strains, maximum shear strain, principal stresses, maximum shear stress and principal directions from the data obtained by using strain gauge rosettes of various configurations. The gauge factor and transverse sensitivity of all gauges in the rosette must be the same.     

Designing Metallic and Insulating Nanocrystal Heterostructures to Fabricate Highly Sensitive and Solution Processed Strain Gauges for Wearable Sensors

All‐solution processed, high‐performance wearable strain sensors are demonstrated using heterostructure nanocrystal (NC) solids. By incorporating insulating artificial atoms of CdSe quantum dot NCs into metallic artificial atoms of Au NC thin film matrix, metal–insulator heterostructures are designed. This hybrid structure results in a shift close to the percolation threshold, modifying the charge transport mechanism and enhancing sensitivity in accordance with the site percolation theory. The number of electrical pathways is also manipulated by creating nanocracks to further increase its sensitivity, inspired from the bond percolation theory. The combination of the two strategies achieves gauge factor up to 5045, the highest sensitivity recorded among NC‐based strain gauges. These strain sensors show high reliability, durability, frequency stability, and negligible hysteresis. The fundamental charge transport behavior of these NC solids is investigated and the combined site and bond percolation theory is developed to illuminate the origin of their enhanced sensitivity. Finally, all NC‐based and solution‐processed strain gauge sensor arrays are fabricated, which effectively measure the motion of each finger joint, the pulse of heart rate, and the movement of vocal cords of human. This work provides a pathway for designing low‐cost and high‐performance electronic skin or wearable devices.     

Großflächenbeschichtung mit superhartem Kohlenstoff. Large area deposition of superhard carbon films

During the nineties the Laser‐Arc technology for the deposition of superhard amorphous carbon films (Diamor®) has been developed at the Fraunhofer Institute for Material and Beam Technology. This technology has now been scaled up by a factor of 4 compared to existing devices and integrated in an industrial large‐volume vacuum arc coater. First results demonstrate the possibility of depositing well adherent Diamor® films with a thickness of more than 2 microns and a hardness above 4000 HV on larger parts and tools. This opens a wide field of industrial applications.     

Temperature-Independent Conductive Ceramic for High-Temperature Strain-Sensing Applications

Temperature-independent properties are critical for high-temperature thin-film strain gauges (TFSGs). In this study, by controlling the electron scattering and tunneling effects in the TiB₂/SiCN composites, the environmental interference of temperature fluctuations is successfully eliminated, and a temperature-independent TFSG is fabricated. The effects of pyrolysis temperature and TiB₂ content on the microstructural evolution and electrical properties of the ceramic films are studied. The temperature insensitivity is mainly attributed to the balance between the intrasheet resistance with a positive temperature coefficient of resistance (TCR) and the intersheet resistance with a negative TCR. This composite shows nearly constant resistance values over an ultrawide temperature range of 300–700 °C, with less than 0.05% deviation of the normalized resistance and TCR values as low as 1.6 ppm °C⁻¹. In addition, the TiB₂/SiCN films exhibited stable piezoresistive responses, with a gauge factor of 4.28, and the temperature-independent strain response in the high-temperature range is verified.     

Microsphere‐Assisted Robust Epidermal Strain Gauge for Static and Dynamic Gesture Recognition

A novel and robust epidermal strain gauge by using 3D microsphere arrays to immobilize, connect, and protect a multiwalled carbon nanotubes (MWNTs) pathway is presented. During the solvent deposition process, MWNTs sedimentate, self‐assemble, and wrap onto surface of polystyrene (PS) microspheres to construct conductive networks, which further obtain excellent stretchability of 100% by combining with commercially used elastomer. Benefiting from its 3D conductive pathway defined by microspheres, immobilized MWNT (I‐MWNT) network can be directly used in practical occasions without further packaging and is proved by tape tests to be capable of defend mechanical damage effectively from external environment. By parameter optimization, the strain sensor with 3 µm PS spheres obtains stable resistive responses for more than 1000 times, and maintains its gauge factor (GF) of 1.35. This thin‐film conductive membrane built by this effective construction method can be easily attached onto fingers of both robot and human, and is demonstrated in sensitive epidermal strain sensing and recognizing different hand gestures effectively, in static and dynamic modes, respectively.     

Optical Sensor Developments for Measuring the Surface Strains in Prestressed Concrete Members

Abstract: Conventionally, transfer‐length strain measurements are performed using mechanical gauges such as the Whittemore gauge, or demountable mechanical (DEMEC) strain gauges, and others devices using ‘contact’ measuring principles. These methods involve tedious surface preparation, and are also prone to significant human errors and inaccuracies. Furthermore, these mechanical sensors can only detect lateral displacements. This paper presents a new optical sensor of measuring prestress concrete surface strains. It makes use of the laser‐speckle displacement that is detected by cross correlating the associated optical signals from a Charged‐Coupled Device (CCD) sensor. The sensor was designed to be able to measure the surface displacement components without being affected by other surface motions that are generally present during the concrete detensioning process. Experiments were conducted on a compressed concrete beam and a real prestressed concrete member during the manufacturing process. The results from the optical strain sensor showed good consistency with contact measurements made by using both a foil strain gauge and a Whittemore gauge.     

Sensitivity calibration of post-yield strain gauges under cyclic plastic straining

A plastic sensitivity calibration procedure is outlined for strain gauges under cyclic, four point bending. Tests show that the gauge resistance changes in an approximately linear manner with longitudinal strain for the first quarter cycle of loading. Calibration curves for subsequent reversals to the direction of deformation display zero-shift and non-linearity. Under balanced strain cycling, there is evidence of a cyclically-stable, sensitivity calibration loop. Theoretical considerations are given in which it is proposed that separate sensitivity factors apply to the elastic and plastic components of strain. It is shown that the plastic sensitivity factor is a function of (i) plastic strain induced hardening and softening in the gauge foil and (ii) any apparent change to the gauge resistivity due to imperfect bonding. The elastic component sensitivity factor equals the manufacturer's value only in the absence of hardening. The two sensitivities may be combined to give a total sensitivity factor when a post-yield strain gauge suffers elastic-plastic straining.     

Secondary Sensitivity Control of Silver‐Nanowire‐Based Resistive‐Type Strain Sensors by Geometric Modulation of the Elastomer Substrate

A secondary method for modulation of the sensitivity in silver nanowire (AgNW) resistive‐type strain sensors without the need to change the material or coating process in the sensory layer is demonstrated. Instead of using a planar elastomer (polydimethylsiloxane is used in this study) substrate, diverse relief structures are introduced to induce nonuniform and complex strain within the elastic substrate and thereby different distributions of the crack density of the AgNWs upon stretching, which plays an important role in the modulation of the gauge factor (GF). Analysis of the sensory layer and mechanical studies reveal that a lower height ratio and greater number of trenches enhance the sensor sensitivity, for example, reaching a GF of 926 at 9.6% in this study. The demonstration of wrist‐motion sensors using the technology illustrates the feasibility of using relief structures for various types of sensors and sensitivity ranges using an identical sensor layer.     

A Solution‐Processable,Omnidirectionally Stretchable,and High‐Pressure‐Sensitive Piezoresistive Device

The development of omnidirectionally stretchable pressure sensors with high performance without stretching‐induced interference has been hampered by many challenges. Herein, an omnidirectionally stretchable piezoresistive pressure‐sensing device is demonstrated by combining an omniaxially stretchable substrate with a 3D micropattern array and solution‐printing of electrode and piezoresistive materials. A unique substrate structural design and materials mean that devices that are highly sensitive are rendered, with a stable out‐of‐plane pressure response to both static (sensitivity of 0.5 kPa^?1 and limit of detection of 28 Pa) and dynamic pressures and the minimized in‐plane stretching responsiveness (a small strain gauge factor of 0.17), achieved through efficient strain absorption of the electrode and sensing materials. The device can detect human‐body tremors, as well as measure the relative elastic properties of human skin. The omnidirectionally stretchable pressure sensor with a high pressure sensitivity and minimal stretch‐responsiveness yields great potential to skin‐attachable wearable electronics, human–machine interfaces, and soft robotics applications.     

A Highly Aligned Nanowire‐Based Strain Sensor for Ultrasensitive Monitoring of Subtle Human Motion

Achieving highly accurate responses to external stimuli during human motion is a considerable challenge for wearable devices. The present study leverages the intrinsically high surface‐to‐volume ratio as well as the mechanical robustness of nanostructures for obtaining highly‐sensitive detection of motion. To do so, highly‐aligned nanowires covering a large area were prepared by capillarity‐based mechanism. The nanowires exhibit a strain sensor with excellent gauge factor (≈35.8), capable of high responses to various subtle external stimuli (≤200 µm deformation). The wearable strain sensor exhibits also a rapid response rate (≈230 ms), mechanical stability (1000 cycles) and reproducibility, low hysteresis (<8.1%), and low power consumption (<35 µW). Moreover, it achieves a gauge factor almost five times that of microwire‐based sensors. The nanowire‐based strain sensor can be used to monitor and discriminate subtle movements of fingers, wrist, and throat swallowing accurately, enabling such movements to be integrated further into a miniaturized analyzer to create a wearable motion monitoring system for mobile healthcare.     

非平衡磁控溅射无氢DLC增透膜的研制

非平衡磁控溅射(UBMS)技术近年来得到了广泛地应用.采用该技术制备的类金刚石薄膜(DLC)具有许多独特的性质.本文利用正交实验方法,对非平衡磁控溅射技术制备无氢DLC膜增透膜进行了研究,得到了影响薄膜光学性能的主要因素和最佳的制备工艺.结果表明,非平衡磁控溅射制备的无氢DLC膜具有较宽的光谱透明区,锗基底单面沉积DLC膜,其峰值透射率达到61.4%,接近理论值.     

Studies of diamond-like carbon films prepared by ion beam-assisted deposition

Ion beam-assisted deposition offers a novel and unique process to prepare diamond-like carbon (DLC) films at room temperature, with particularly good interface adhesion. This advantage was explored in this study to deposit highly wear-resistant coating on bearing 52100 steel. Both dual ion beam sputtering and ion beam deposition were employed. Various bombarding species and energy were investigated to optimize the process. Raman, X-ray photoelectron and Auger electron spectroscopy were used to characterize the bonding structure of DLC. Extensive experiments were carried out to examine the tribological behaviour of the DLC/52100 system. A metal intermediate layer can help tremendously in wear resistance. The results are optimistic and may lead to useful applications.     

The Reinforcement Effect of Strain Gauges Embedded in Low Modulus Materials

The reinforcement effect of electrical resistance strain gauges is well‐described in the literature, especially for strain gauges installed on surface. This paper considers the local reinforcement effect of strain gauges embedded within low Young modulus materials. In particular, by using a simple theoretical model, already used for strain gauges installed on the surface, it proposes a simple formula that allows the user to evaluate the local reinforcement effect of a generic strain gauge embedded on plastics, polymer composites, etc. The theoretical analysis has been integrated by numerical and experimental analyses, which confirmed the reliability of the proposed model.     

Micro‐Raman Studies on DLC coatings

Raman scattering is an excellent tool to characterize nanocrystalline clusters and the structural arrangement of carbon atoms in carbon‐based materials. Diamond‐like carbon (DLC) films are used in many industrial applications due to their hardness, wear resistance and biological compatibility. The properties of DLC coatings depend on the carbon coordination and incorporation of other elements, influences onto their Raman spectra will be reviewed.     

Deposition of Ti/C nano-composite DLC films by magnetron DC sputtering with dual targets

Deposition of Ti/C nano-composite DLC films by magnetron DC sputtering was examined using dual targets of titanium and carbon, in order to in order to investigate the effects of Ti/C nano-composite structure on its mechanical properties such as hardness or physical properties such as electrical resistivity. The deposition of DLC films or Ti/C nano-composite DLC films was respectively carried out in the atmosphere of argon at the pressure of 0.4 Pa by sputtering of only the carbon target or by co-sputtering of both the carbon one and the titanium one. The DLC film obtained in this study looked semitransparent and dark brown, while the Ti/C nano-composite DLC one looked metallic and light gray. According to Raman spectroscopy, a typical spectrum for DLC was detected for the metal-like titanium containing composite DLC films even though it's intensity was rather small. And it was found that the G band slightly shifted to higher wave numbers and the shoulder D band was enhanced, compared to the spectrum for the DLC films. Furthermore, based on both the indentation hardness and the electrical resistivity of the obtained films, it was assumed that the miniaturization of titanium phase might bring the increase in hardness.