A high-frequency linear ultrasonic array utilizing an interdigitally bonded 2-2 piezo-composite

This paper describes the development of a high-frequency 256-element linear ultrasonic array utilizing an interdigitally bonded (IB) piezo-composite. Several IB composites were fabricated with different commercial and experimental piezoelectric ceramics and evaluated to determine a suitable formulation for use in high-frequency linear arrays. It was found that the fabricated fine-scale 2-2 IB composites outperformed 1-3 IB composites with identical pillar- and kerf-widths. This result was not expected and lead to the conclusion that dicing damage was likely the cause of the discrepancy. Ultimately, a 2-2 composite fabricated using a fine-grain piezoelectric ceramic was chosen for the array. The composite was manufactured using one IB operation in the azimuth direction to produce approximately 19-μm-wide pillars separated by 6-μm-wide kerfs. The array had a 50 μm (one wavelength in water) azimuth pitch, two matching layers, and 2 mm elevation length focused to 7.3 mm using a polymethylpentene (TPX) lens. The measured pulse-echo center frequency for a representative array element was 28 MHz and -6-dB bandwidth was 61%. The measured single-element transmit -6-dB directivity was estimated to be 50°. The measured insertion loss was 19 dB after compensating for the effects of attenuation and diffraction in the water bath. A fine-wire phantom was used to assess the lateral and axial resolution of the array when paired with a prototype system utilizing a 64-channel analog beamformer. The -6-dB lateral and axial resolutions were estimated to be 125 and 68 μm, respectively. An anechoic cyst phantom was also imaged to determine the minimum detectable spherical inclusion, and thus the 3-D resolution of the array and beamformer. The minimum anechoic cyst detected was approximately 300 μm in diameter.     

Fabrication and performance of a 40-MHz linear array based on a 1-3 composite with geometric elevation focusing

The fabrication and performance of a 256-element high-frequency (40-MHz) linear array is described. The array was fabricated using a high-frequency 1-3 PZT-polymer composite material developed in our laboratory. The spacing of the pillars in the composite was chosen to match the 40-microm center-to-center element spacing of the array electrodes. The element electrodes were created using photolithography, and connections to the electrodes were made using ultrasonic wire bonding. The array was focused in the elevation direction by geometrically shaping the composite material using a cylindrical die with a 6-mm radius of curvature. The resulting transducer produced pulses with a -6 dB two-way bandwidth of 50% and a peak-to-peak pressure of 503 kPa when excited with a +/-30 V monocycle pulse. The measured one-way (-6 dB) directivity for a single array element was 24 degrees and the -3 dB one-way elevation beamwidth was measured to be 130 microm. The radiation pattern for a focused 64-element subaperture was measured by mechanically translating the aperture above a needle hydrophone. A -3 dB one-way beamwidth of 97 microm was found at a depth of 6 mm. The one-way radiation pattern decreased smoothly to less than -30 dB at a lateral distance of 640 microm.     

Development of a high-frequency (> 50 mhz) copolymer annular-array, ultrasound transducer

The development of a high frequency (> 50 MHz) annular array ultrasonic transducer is presented. The array was constructed by bonding a 9 microm P(VDF-TrFE) film to a two-sided polyimide flexible circuit with annuli electrodes on the top layer. Each annulus was separated by a 30 microm kerf and had several electroplated microvias that connected to electrode traces on the bottom side of the flex circuit. In order to improve device sensitivity, each element was electrically matched to an impedance magnitude of 50 omega and 0 degrees phase at resonance using a serial inductor and high impedance coaxial cable. The array's performance was evaluated by measuring the electrical impedance, pulse echo response, and cross talk between elements. The average round trip insertion loss was -33.5 dB after compensating for diffractive and attenuative losses. The measured average center frequency and bandwidth for an element was 55 MHz and 47%, respectively. The measured cross talk between adjacent elements remained below -29 dB at the center frequency in water. A vertical wire phantom was imaged using a single focus transmit beamformer and dynamic focusing receive beamformer. This image showed a significant improvement in lateral resolution over a range of 9 mm after the dynamic focusing receive algorithm was applied. These results correlated well with predictions from a Field II simulation. After beamforming, the minimum lateral resolution achieved by the array (-6 dB) was 108 microm at the focus.     

Microfabrication of electrode patterns for high-frequency ultrasound transducer arrays

High-frequency ultrasound is needed for medical imaging with high spatial resolution. A key issue in the development of ultrasound imaging arrays to operate at high frequencies (?30 MHz) is the need for photolithographic patterning of array electrodes. To achieve this directly on 1-3 piezocomposite, the material requires not only planar, parallel, and smooth surfaces, but also an epoxy composite filler that is resistant to chemicals, heat, and vacuum. This paper reports, first, on the surface finishing of 1-3 piezocomposite materials by lapping and polishing. Excellent surface flatness has been obtained, with an average surface roughness of materials as low as 3 nm and step heights between ceramic/polymer of ～80 nm. Subsequently, high-frequency array elements were patterned directly on top of these surfaces using a photolithography process. A 30-MHz linear array electrode pattern with 50-μm element pitch has been patterned on the lapped and polished surface of a high-frequency 1-3 piezocomposite. Excellent electrode edge definition and electrical contact to the composite were obtained. The composite has been lapped to a final thickness of ～55 μm. Good adhesion of electrodes on the piezocomposite has been achieved and electrical impedance measurements have demonstrated their basic functionality. The array was then packaged, and acoustic pulse-echo measurements were performed. These results demonstrate that direct patterning of electrodes by photolithography on 1-3 piezocomposite is feasible for fabrication of high-frequency ultrasound arrays. Furthermore, this method is more conducive to mass production than other reported array fabrication techniques.     

Performance and characterization of new micromachined high-frequency linear arrays

A new approach for fabricating high frequency (> 20 MHz) linear array transducers, based on laser micromachining, has been developed. A 30 MHz, 64-element, 74-microm pitch, linear array design is presented. The performance of the device is demonstrated by comparing electrical and acoustic measurements with analytical, equivalent circuit, and finite-element analysis (FEA) simulations. All FEA results for array performance have been generated using one global set of material parameters. Each fabricated array has been integrated onto a flex circuit for ease of handling, and the flex has been integrated onto a custom printed circuit board test card for ease of testing. For a fully assembled array, with an acoustic lens, the center frequency was 28.7 MHz with a one-way -3 dB and -6 dB bandwidth of 59% and 83%, respectively, and a -20 dB pulse width of -99 ns. The per-element peak acoustic power, for a +/- 30 V single cycle pulse, measured at the 10 mm focal length of the lens was 590 kPa with a -6 dB directivity span of about 30 degrees. The worst-case total cross talk of the combined array and flex assembly is for nearest neighboring elements and was measured to have an average level -40 dB across the -6 dB bandwidth of the device. Any significant deviation from simulation can be explained through limitations in apparatus calibration and in device packaging.     

Development of a 35-MHz piezo-composite ultrasound array for medical imaging

This paper discusses the development of a 64-element 35-MHz composite ultrasonic array. This array was designed primarily for ocular imaging applications, and features 2-2 composite elements mechanically diced out of a fine-grain high-density Navy Type VI ceramic. Array elements were spaced at a 50-micron pitch, interconnected via a custom flexible circuit and matched to the 50-ohm system electronics via a 75-ohm transmission line coaxial cable. Elevation focusing was achieved using a cylindrically shaped epoxy lens. One functional 64-element array was fabricated and tested. Bandwidths averaging 55%, 23-dB insertion loss, and crosstalk less than -24 dB were measured. An image of a tungsten wire target phantom was acquired using a synthetic aperture reconstruction algorithm. The results from this imaging test demonstrate resolution exceeding 50 microm axially and 100 microm laterally.     

Fabrication and performance of endoscopic ultrasound radial arrays based on PMN-PT single crystal/epoxy 1-3 composite

In this paper, 0.7Pb(Mg(1/?)Nb(2/?)O?-0.3PbTiO? (PMN-PT) single crystal/epoxy 1/3 composite was used as the active material of the endoscopic ultrasonic radial array transducer, because this composite exhibited ultrahigh electromechanical coupling coefficient (k(t) = 0.81%), very low mechanical quality factor (Q(m) = 11) and relatively low acoustic impedance (Z(t) = 12 MRayls). A 6.91 MHz PMN-PT/epoxy 1/3 composite radial array transducer with 64 elements was tested in a pulseecho response measurement. The -6-dB bandwidth of the composite array transducer was 102%, which was ~30% larger than that of traditional lead zirconate titanate array transducer. The two-way insertion loss was found to be -32.3 dB. The obtained results show that this broadband array transducer is promising for acquiring high-resolution endoscopic ultrasonic images in many clinical applications.     

A 256 x 256 2-D array transducer with row-column addressing for 3-D rectilinear imaging

We present simulation and experimental results from a 5-MHz, 256times256 2-D (65536 elements, 38.4times38.4 mm) 2-D array transducer with row-column addressing. The main benefits of this design are a reduced number of interconnects, a modified transmit/receive switching scheme with a simple diode circuit, and an ability to perform volumetric imaging of targets near the transducer with transmit beamforming in azimuth and receive beamforming in elevation. The final dimensions of the transducer were 38.4 mm times 38.4 mm times 300 mum. After a row-column transducer was prototyped, the series resonance impedance was 104 Omega at 5.4 MHz. The measured -6 dB fractional bandwidth was 53% with a center frequency of 5.3 MHz. The SNR at the transmit focus was measured to be 30 dB. At 5 MHz, the average nearest neighbor crosstalk was -25 dB. In this paper, we present 3-D images of both 5 pairs of nylon wires embedded in a clear gelatin phantom and an 8 mm diameter cylindrical anechoic cyst phantom acquired from a 256 times 256 2-D array transducer made from a 1-3 composite. We display the azimuth and elevation B-scans as well as the C-scan for each image. The cross-section of the wires is visible in the azimuth B-scan, and the long axes can be seen in the elevation B-scan and C-scans. The pair of wires with 1-mm axial separation is discernible in the elevational B-scan. When a single wire from the wire target phantom was used, the measured lateral beamwidth was 0.68 mm and 0.70 mm at 30 mm depth in transmit beamforming and receive beamforming, respectively, compared with the simulated beamwidth of 0.55 mm. The cross-section of the cyst is visible in the azimuth B-scan whereas the long axes can be seen as a rectangle in the elevation B-scan and C-scans.     

Inkjet printed electronics for multifunctional composite structure

Copper nano-ink with a drop-on-demand (DOD) piezoelectric inkjet printing method was introduced. The printed electrodes were thermally sintered to ensure high-quality electrical and mechanical performances. To check the reliability of the printed electrodes on a polymer layer, resistance changes were measured under static loading. The electrodes with various widths and thicknesses were used to find the optimal dimensions. A multifunctional composite laminate which can harvest and store a solar energy was fabricated using printed electrodes. An amorphous silicon solar cell and a thin film solid state lithium-ion battery were adhesively joined and electrically connected to a thin flexible printed circuit board (PCB). Then, the passive components such as resistor and diode were electrically connected to the printed circuit board by silver pasting. The integrated PCB was co-cured with a carbon/epoxy composite laminate by the vacuum bag molding process in an autoclave. The structural and functional performance of the final energy harvesting/storage composite laminate was tested under mechanical loading.     

Multi-layered PZT/polymer composites to increase signal-to-noise ratio and resolution for medical ultrasound transducers part II: thick film technology

For pt.I, see ibid., vol.46, no.4, p.961-71 (1999). Increasing transducer bandwidth and signal-to-noise ratio (SNR) is fundamental to improving the quality of medical ultrasound images. In previous work, we have proposed the use of multi-layer 1-3 PZT/polymer composites to increase both, but have encountered significant fabrication challenges. Thus, we have developed a multi-layer composite hybrid array that will not require post alignment. Starting from a 2-MHz, three-layer PZT-5H, thick film transducer designed for 1.5-D arrays, cuts are made only through the top layer and back-filled with epoxy, forming a composite layer on top of two ceramic layers. Finite element (PZFlex) simulations show that for a 2-MHz phased-array element with a single matching layer, the three-layer hybrid structure increases the pulse echo SNR by 11 dB versus a single layer PZT element and improves -6 dB pulse echo fractional bandwidth by a factor of 1.4. Composite hybrid arrays fabricated in our laboratory showed an improvement in SNR of 6 to 11 dB over a PZT control and an increase in -6 dB bandwidth by a factor of 1.1. Images from a phased-array scanner confirmed these improvements     

Micro-machined high-frequency (80 MHz) PZT thick film linear arrays

This paper presents the development of a micromachined high-frequency linear array using PZT piezoelectric thick films. The linear array has 32 elements with an element width of 24 μm and an element length of 4 mm. Array elements were fabricated by deep reactive ion etching of PZT thick films, which were prepared from spin-coating of PZT sol-gel composite. Detailed fabrication processes, especially PZT thick film etching conditions and a novel transferring-and-etching method, are presented and discussed. Array designs were evaluated by simulation. Experimental measurements show that the array had a center frequency of 80 MHz and a fractional bandwidth (-6 dB) of 60%. An insertion loss of -41 dB and adjacent element crosstalk of -21 dB were found at the center frequency.     

2-D array for 3-D ultrasound imaging using synthetic aperture techniques

A two-dimensional (2-D) array of 256 X 256 = 65,536 elements, with total area 4 X 4 = 16 cm2, serves as a flexible platform for developing acquisition schemes for 3-D rectilinear ultrasound imaging at 10 MHz using synthetic aperture techniques. This innovative system combines a simplified interconnect scheme and synthetic aperture techniques with a 2-D array for 3-D imaging. A row-column addressing scheme is used to access different elements for different transmit events. This addressing scheme is achieved through a simple interconnect, consisting of one top, one bottom single-layer, flex circuits that, compared to multilayer flex circuits, are simpler to design, cheaper to manufacture, and thinner so their effect on the acoustic response is minimized. We present three designs that prioritize different design objectives: volume acquisiton time, resolution, and sensitivity, while maintaining acceptable figures for the other design objectives. For example, one design overlooks time-acquisition requirements, assumes good noise conditions, and optimizes for resolution, achieving -6 dB and -20 dB beamwidths of less than 0.2 and 0.5 mm, respectively, for an F/2 aperture. Another design can acquire an entire volume in 256 transmit events, with -6 dB and -20 dB beamwidths in the order of 0.4 and 0.8 mm, respectively.     

Backscattering measurement from a single microdroplet

Backscattering measurements for acoustically trapped lipid droplets were undertaken by employing a P[VDF-TrFE] broadband transducer of f-number = 1, with a bandwidth of 112%. The wide bandwidth allowed the transmission of the 45 MHz trapping signal and the 15 MHz sensing signal using the same transducer. Tone bursts at 45 MHz were first transmitted by the transducer to hold a single droplet at the focus (or the center of the trap) and separate it from its neighboring droplets by translating the transducer perpendicularly to the beam axis. Subsequently, 15 MHz probing pulses were sent to the trapped droplet and the backscattered RF echo signal received by the same transducer. The measured beam width at 15 MHz was measured to be 120 μ m. The integrated backscatter (IB) coefficient of an individual droplet was determined within the 6-dB bandwidth of the transmit pulse by normalizing the power spectrum of the RF signal to the reference spectrum obtained from a flat reflector. The mean IB coefficient for droplets with a 64 μ m average diameter (denoted as cluster A) was -107 dB, whereas it was -93 dB for 90-μm droplets (cluster B). The standard deviation was 0.9 dB for each cluster. The experimental values were then compared with those computed with the T-matrix method and a good agreement was found: the difference was as small as 1 dB for both clusters. These results suggest that this approach might be useful as a means for measuring ultrasonic backscattering from a single microparticle, and illustrate the potential of acoustic sensing for cell sorting.     

Electrochemical detection in polymer microchannels

A method, using UV laser photoablation, is presented for the fabrication and the integration of an electrochemical detector in a microchannel device, where carbon microband electrodes are placed either in the bottom or in the side walls of the rectangular microchannel. The different electrochemical cell geometries are tested with a model compound (ferrocenecarboxylic acid) in 40- and 100-μm-wide capillaries fabricated in planar polymer substrates. The experimental results are compared to numerical simulations for stagnant stream conditions. Depending on the scan rate and on the microchannel depth, the system behaves as a microband electrode until a linear diffusion field develops within the channel. The limit of detection for a one electron redox species within the 120-pL detection volume is ～1 fmol with both cyclic voltammetry and chronoamperometric detection.     

A 32 x 32 capacitive micromachined ultrasonic transducer array manufactured in standard CMOS

As ultrasound imagers become increasingly portable and lower cost, breakthroughs in transducer technology will be needed to provide high-resolution, real-time 3-D imaging while maintaining the affordability needed for portable systems. This paper presents a 32 x 32 ultrasound array prototype, manufactured using a CMUT-in-CMOS approach whereby ultrasonic transducer elements and readout circuits are integrated on a single chip using a standard integrated circuit manufacturing process in a commercial CMOS foundry. Only blanket wet-etch and sealing steps are added to complete the MEMS devices after the CMOS process. This process typically yields better than 99% working elements per array, with less than ±1.5 dB variation in receive sensitivity among the 1024 individually addressable elements. The CMUT pulseecho frequency response is typically centered at 2.1 MHz with a -6 dB fractional bandwidth of 60%, and elements are arranged on a 250 μm hexagonal grid (less than half-wavelength pitch). Multiplexers and CMOS buffers within the array are used to make on-chip routing manageable, reduce the number of physical output leads, and drive the transducer cable. The array has been interfaced to a commercial imager as well as a set of custom transmit and receive electronics, and volumetric images of nylon fishing line targets have been produced.     

A miniaturized catheter 2-D array for real-time, 3-D intracardiac echocardiography

The design, fabrication, and characterization of a 112 channel, 5 MHz, two-dimensional (2-D) array transducer constructed on a six layer flexible polyimide interconnect circuit is described. The transducer was mounted in a 7 Fr (2.33 mm outside diameter) catheter for use in real-time intracardiac volumetric imaging. Two transducers were constructed: one with a single silver epoxy matching layer and the other without a matching layer. The center frequency and -6 dB fractional bandwidth of the transducer with a matching layer were 4.9 MHz and 31%, respectively. The 50 omega pitch-catch insertion loss was 80 dB, and the typical interelement crosstalk was -30 dB. The final element yield was greater than 97% for both transducers. The transducers were used to acquire real-time, 3-D images in an in vivo sheep model. We present in vivo images of cardiac anatomy obtained from within the coronary sinus, including the left and right atria, aorta, coronary arteries, and pulmonary veins. We also present images showing the manipulation of a separate electrophysiological catheter into the coronary sinus.     

Design and fabrication of annular arrays for high-frequency ultrasound

The design, fabrication, and performance of miniature high-frequency annular arrays are described. A 50-MHz, 2-mm-diameter, 7-element, equal-area annular array was fabricated and tested. The array elements were defined using photolithography and the electrical contacts were made using ultrasonic wire bonding. The resulting transducer produced pulses with a -6 dB bandwidth of 52% and an insertion loss of -16 dB. A radiation pattern was collected by scanning the transducer array above the tip of a glass fiber. A -6 dB two-way beam width of 75 microns was found at f/2. The radiation pattern decreased smoothly to less than -60 dB at a distance of 550 microns.     

25 MHz ultrasonic transducers with lead- free piezoceramic, 1-3 PZT fiber-epoxy composite, and PVDF polymer active elements

This paper presents the fabrication and characterization of single-element ultrasonic transducers whose active elements are made of lead-free piezoceramic, 1-3 PZT/polymer composite and PVDF film. The lead free piezoelectric KNNLT- LS(K_0.44Na_0.52Li_0.04)(Nb_0.84Ta_0.10S_0.06b)O₃ powders and ceramics were prepared under controlled humidity and oxygen flow rate during sintering. Due to its moderate longitudinal piezoelectric charge coefficient (175 pC/N) and k_t of 0.50, the KNN-LT-LS composition may be a good candidate for highfrequency transducer applications. PZT fibers with 25 μm diameter formed by the viscose suspension spinning process were incorporated into epoxy to fabricate 1-3 composites with the averaged k_t = 0.64 and d₃₃ = 400 pC/N. Using KNN-LS-LT ceramic, 1-3 PZT fiber composite, and PVDF film, 3 different unfocused single element transducers with center frequencies of 25 MHz were fabricated. The acoustic characterization of the transducers demonstrated that wideband and low insertion loss could be obtained employing KNN-LS-LT ceramic. The ?6 dB bandwidth and insertion loss were 70% and ?21 dB, respectively. In comparison, the insertion loss of the ceramic transducer was much smaller than those made with 1-3 composite and PVDF film. This was attributed to closer electrical impedance match to 50 Ω and higher thickness coupling coefficient of the ceramic transducer.     

Multi-layered PZT/polymer composites to increase signal-to-noise ratio and resolution for medical ultrasound transducers

Increasing transducer bandwidth and signal-to-noise ratio (SNR) is fundamental to improving the quality of medical ultrasound images. In previous work, the authors have proposed the use of multi-layer 1-3 PZT/epoxy composites to increase both but have encountered significant fabrication challenges. These difficulties include making the bond thickness between the layers extremely small relative to the ultrasound wavelength and aligning the posts of the composite to increase the coupling coefficient. The authors have routinely achieved a bond thickness of less than 5 mum but aligning the posts is more complicated. Finite element (PZFlex; Weidlinger, Assoc., New York, NY and Los Altos, CA) simulations show that the pulse-echo SNR and bandwidth degrade significantly with misalignment of the posts. Alignment of greater than 90% of the post pitch (i.e., tolerance of 10 to 20 mum) is required to obtain significant increases in SNR and bandwidth relative to conventional transducer arrays. This will be a difficult tolerance for large-scale production. Thus, the authors have developed a multi-layer composite hybrid array that will not require post alignment. This structure consists of a layer of 5 MHz 1-3 composite material on top of conventional 5 MHz PZT, which will provide greater SNR relative to conventional composites and increased bandwidth over multi-layer PZT. PZFlex simulations show that for a 2 MHz linear array element, the 2 layer hybrid structure increases the pulse-echo SNR by 7.5 dB over that from a single layer PZT element. Even without a matching layer, an increase in the -6 dB pulse-echo fractional bandwidth from 22% for the PZT element to 35% for the hybrid element was also predicted. Experimentally, in a 32 element array, the authors achieved an increase of 5.2 dB in SNR and an increased -6 dB bandwidth from 23 to 30%. In vitro and in vivo images showed corresponding improvements.     

High-frequency ultrasound annular-array imaging. Part I: array design and fabrication

This is Part I of a series of two papers describing the development of a digital high-frequency, annular-array, ultrasonic imaging system. In this paper, the design and fabrication of a high-frequency annular array as well as its performance will be reported. A six-element, 50 MHz array, which incorporated an acoustic lens to provide an initial focal point, was designed and fabricated. A submicron size grain lead titanate piezoelectric ceramic was used to both reduce lateral coupling and keep the electrical impedance matched close to the 50 ohm receive electronics. The array elements were isolated using laser micromachining to fully separate the annuli, and electrical interconnection was achieved by directly soldering thin wires to the elements. The resulting array attained an average impulse response that exhibited a 43 MHz center frequency, 30% relative bandwidth, and an average insertion loss of 31 dB at 45 MHz. Maximum next-element crosstalk was -27 dB in water.