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1.
介绍了具有宽测量范围(140×140μm2)的高灵敏度扫描探针显微镜(SPM)。仅用了6个需加工的零件,构造出了直接对130mm的磁盘、光盘表面纳诺形貌和集成电路芯片光刻质且检查分析的多模式测量仪器。通过更换测头,可以在扫描隧道显微镜(STM)、原子力显微镜(AFM)、磁力显微镜(MPM)与静电力显微镜(EFM)模式下工作。本文给出了部份试验结果,如高定向石墨的原子图像、光栅和超精密磨削试件表面的纳米级形貌图。  相似文献   

2.
硅片的在线电解修整超精密磨削   总被引:5,自引:0,他引:5  
用铸铁短纤维结合剂金刚石砂轮与脉冲电解修整相配合,对硅片进行了在线电解修整(ELID)超精密磨削。研究了磨削工艺参数对硅片的加工质量及磨削效率的影响,采用原子力显微镜(AFM)与扫描电子隧道显微镜(STM)对硅片磨削表面进行了形貌分析,探讨其微观磨削机理。  相似文献   

3.
变温超高真空扫描探针显微镜   总被引:1,自引:0,他引:1  
扫描隧道显微镜(STM)是一种可以在实空间观察到原子级分辨率图像的实验仪器,且发展出许多衍生仪器,如原子力显微镜(AFM)、扫描近场光学显微镜(SNOM)等,统称为扫描探针显微镜(SPM)。但是以往人多数STM是在室温条件下工作的,不能实时观察样品随温度变化的情况。本文介绍德国Omicron公司新开发的变温超高真空扫描探针显微镜(VT UHV SPM),它包括STM和AFM两部分,可以在25K~1  相似文献   

4.
利用自行研制的新型石英钟罩式微波等离子体化学气相沉积(MPCVD)装置进行轩金刚石薄膜的实验研究。用扫描电子显微镜(SEM)对形貌观察和喇曼谱测试表明,由此装置可以面积较大、晶体良好、杂质少、比较纯净的高质量金刚石薄膜。  相似文献   

5.
纳米碳管对MWPCVD过程增强金刚石形核的影响   总被引:3,自引:0,他引:3  
利用石英钟罩式微波等离子体化学气相沉积(MWPCVD)实验装置,研究了硅基体表面沉积金刚石薄膜时纳米碳管对金刚石形核过程的影响。扫描电子显微镜(SEM)形貌分析结果显示,纳米碳管处理能够促进金刚石形核。对非研磨基体而言,这是一种有效的增强金刚石形核的表面预处理方式。  相似文献   

6.
扫描探针显微镜是近十几年来在表面特征表面形貌观测方面最重大的进展之一,是纳米测量学的基本工具,本文叙述了扫描探针显微镜的工作原理、检测模式及在观察检测纳米级的粗糙度、微小尺寸、表面形貌方面的特点和方法,比较了原子力显微镜、常规的表面轮廓仪、干涉显微镜、扫描电子显微镜在表面特性、表面形貌观测方面的性能,着重介绍了扫描探针显微镜在这方面的应用和存在的问题。  相似文献   

7.
STM和AFM的研制   总被引:1,自引:0,他引:1  
叙述STM(扫描隧道显微镜)和AFM(原子力显微镜)的主要关键技术和研制情况。在研制的STM和AFM样机上,对12001/mm光栅进行测量,得出本样机的测量重复性可达10%以内。对研制的样机进行分析和对比后提出:STM和AFM,尤其是AFM,技术上已趋于成熟;使用上简单、方便,已达到实用化程度,可以作为高级表面粗糙度测量的常用计量仪器。  相似文献   

8.
利用扫描声学显微镜(SAM)观察了三种不同成分的大气等离子喷涂(APS)涂层磨削加工后的亚表层显微结构,通过分析磨削后亚表层声学显微和抛光后表面扫描电子镜(SEM)的观察,并参照涂层断怖的金相照片,证实了声学显微镜的亚表层观测能力,为研究涂层亚表层缺陷及其变化提供了一种新的技术手段,并根据涂层磨削加工后表层的变化情况,比较了三者的抗剪切强度。  相似文献   

9.
常规扫描电子显微镜的特点和发展   总被引:9,自引:0,他引:9  
介绍了常规扫描电子显微镜(SEM)的工作原理、缺陷及采取的改进措施。由此起来的环境扫描电子显微镜(ESEM)的性能已大幅度提高,其使用范围和领域大为扩展。  相似文献   

10.
模块化扫描探针显微镜的研究   总被引:1,自引:0,他引:1  
范细秋  徐龙 《工具技术》1998,32(12):32-33
介绍一种多功能、模块化扫描探针显微镜,它综合了STM、AFM、MFM、FFM等的功能,不仅能检测物质表面微观形貌,还能检测微小静电力、磁力、原子力和摩擦力,具有较好的灵活性和较宽的应用范围。  相似文献   

11.
研究了高纯度Fe-0.06%C-1.80%Mo和Fe-0.19%C-1.81%Mo合金在550~850℃恒温时的贝氏体转变。结果表明,转变是完全的。两种合金分别在600℃和585℃左右恒温时,转变中途出现暂时停滞的现象,而后恢复并加快转变。两合金等温等转(TTT)图均有一明显稳定区(称为河湾或θ b),θ b温度上下铁素体形貌明显不同。在700~800℃恒温时,碳化物平行于奥氏体晶粒边界沉淀。  相似文献   

12.
热变形后冷却速率对钒氮非调质钢显微组织的影响   总被引:1,自引:0,他引:1  
利用光学显微镜、扫描电镜和透射电镜观察了钒氮非调质钢在Gleeble1500热模拟试验机上经奥氏体区热变形后以四种冷却速率冷却到室温的显微组织,并用JMatPro4.1软件计算了冷却后的组织构成及力学性能。结果表明:随着冷却速率增加,组织中铁素体变细且数量减少,珠光体增多,而且贝氏体数量逐渐增加并出现马氏体;钒、钛析出物的形状由规则形状向粒状转化,尺寸变小,以(Ti,V)N为主逐渐转变为以(Ti,V)C为主;不同冷却速率下平衡相组成的计算结果与实际组织基本一致;以3.0℃.s-1冷却后,试验钢室温屈服强度的计算结果为(814±42)MPa。  相似文献   

13.
采用扫描电镜、X射线衍射仪、透射电镜和拉伸试验机等,研究了通过弛豫-析出-控制相变工艺制备的热轧TRIP钢显微组织与力学性能。结果表明:通过对轧后TRIP钢在弛豫阶段保温时间的控制可准确得到设定比例的铁素体;在铁素体量较多,贝氏体量较少的情况下,较强的TRIP效应使得试验钢的抗拉强度并没有下降;较多的残余奥氏体和较高的残余奥氏体力学稳定性,使得热轧TRIP钢的强度和塑性得到良好匹配。  相似文献   

14.
《Wear》1987,117(1):37-48
The erosion behavior of AISI 4140 steel under various heat treatment conditions was investigated. A variety of microstructures, such as the primary and tempered martensites, varying proportions of martensite and bainite, cementite spheroids embedded in a ferrite matrix and ferrite and pearlite were obtained. The erosion tests were performed in a sand-blast-type test rig. Except in the region where temper embrittlement occurred, the erosion decreased with increasing tempering temperatures. Erosion decreased with the increasing percentage of bainite in the austempered condition and also with increasing tempering time during spheroidization. From the point of view of the mechanical properties, erosion decreased with increasing ductility and decreasing hardness or ultimate strength. The abraded surfaces were also studied using scanning electron microscopy.  相似文献   

15.
In this article, an in situ observation method, combining laser scanning confocal microscopy and electron backscattering diffraction, was used to investigate the morphological and crystallographic evolution of bainite transformation in a Fe‐0.15C binary alloy. The nucleation at a grain boundary and inclusions, sympathetic nucleation, and impingement event of bainitic ferrite were directly shown in real time. The variant evolution during bainite transformation and misorientation between bainitic ferrites were clarified. Strong variant selection was observed during sympathetic nucleation. Microsc. Res. Tech., 2009. © 2009 Wiley‐Liss, Inc.  相似文献   

16.
A hybrid scanning transmission electron/scanning tunnelling microscope vacuum system is introduced, which allows freeze drying and metal coating of biological samples and their simultaneous observation by scanning transmission electron microscopy and scanning tunnelling microscopy (STM). Different metal coatings and STM tips were analysed to obtain the highest possible resolution for such a system. Bovine liver catalase was used as a test sample and the STM results are compared to a molecular scale model.  相似文献   

17.
A scanning electron microscope of ultra-high-vacuum (UHV-SEM) with a field emission gun (FEG) is operated at the primary electron energies of from 100 eV to 3 keV. The instrument can form the images that contain information on surface chemical composition, chemical bonding state (electronic structure), and surface crystal structure in a microscopic resolution of several hundred angstroms (Å) using the techniques of scanning Auger electron microscope, scanning electron energy loss microscope, and scanning low-energy electron diffraction (LEED) microscope. A scanning tunneling microscope (STM) also has been combined with the SEM in order to obtain the atomic resolution for the solid surface. The instrumentation and examples of their applications are presented both for scanning LEED microscopy and STM.  相似文献   

18.
Two ferritic stainless steels (409Nb and 434L) manufactured through powder metallurgical techniques were wear tested at different temperature conditions (up to 300 °C). Two sliding speeds were used, and tests were carried out against a wrought austenitic stainless steel. Materials’ wear performance was characterized through friction coefficients and analysis of wear tracks was carried out through scanning electron microscopy. Results have shown an adhesive wear mechanism. Oxidized ferrite particles have also been found on wear tracks.  相似文献   

19.
采用E551T1-Ni2药芯焊丝对Q345E钢与14NiCrMo10 6V钢进行焊接,并通过室温拉伸、弯曲、冲击、硬度试验以及金相分析等对焊接接头的力学性能与显微组织进行了研究。结果表明:采用此焊丝可以获得拉伸、弯曲和冲击性能均良好的焊接接头,焊缝硬度在200~250HV之间;焊缝处晶界组织为先共析铁素体、少量无碳贝氏体(从晶界伸向晶内),晶内为针状铁素体与珠光体,个别部位有粒状贝氏体;Q345E钢侧热影响区与焊缝过渡区的组织为沿晶界析出的块状先共析铁素体和向晶内生长的条状铁素体以及少量的珠光体和贝氏体;14NiCrMo10 6V钢侧热影响区与焊缝过渡区的组织为板条状马氏体。  相似文献   

20.
We present the data obtained by scanning tunnelling microscopy combined with scanning electron microscopy of the digitally encoded structure on a stamper used to fabricate optical discs. The combination allows us to focus the STM tip on a preselected spot with a precision of ?0·3 μm. The data show the superiority of STM for a more detailed characterization of shape, width, length, height and fine structure appearing on the sample. We also show the influence of tip shape on STM resolution. Simultaneous use of both microscopes is possible but high electron doses produce an insulating layer of contaminants thick enough to make STM operation impossible.  相似文献   

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