激光器在数字散斑干涉系统中的应用

介绍了在数字散斑干涉系统中经常使用的激光器 :He- Ne激光器、半导体激光器和 LD泵浦的固体激光器 ,总结了这几种激光器在数字散斑干涉系统中的应用原理 ,对比了各自的优缺点 ,并提出了一种新的应用领域——在采用数字散斑干涉技术的机器人口型识别系统中 ,应用微片激光器作为光源 ,对该激光器作了分析介绍 ,讨论了它的特点。     

全光纤干涉系统在测量激光光谱结构特征中的应用

利用自制的全光纤干涉系统,对激光光谱结构特性所引起的干涉条纹幅度变化进行了理论分析和实验证明。首次将全 光纤干涉系统应用于激光光谱的结构分析领域,可能会导致出现一种新的激光光谱测量仪。     

一种新型垂直扫描白光显微干涉测量仪

研究开发了一种新型垂直扫描白光显微干涉测量仪。基于Linnik显微干涉结构,设计了干涉测量仪的显微干涉系统,介绍了干涉系统的工作原理;设计了Z向一维位移工作台,介绍了其结构和驱动原理;分析了测量仪的工作原理,并采用标准样板对测量仪的测量精度进行了验证。     

二次曝光全息照相干涉仪及其在冲击波观测中的应用

本文简要阐述了全息照相术的原理及会聚冲击波的特点,在此基础上,设计了一种二次曝光全息照相干涉系统,使用该系统对圆柱形冲击波会聚过程的不稳定性进行了观测,得到了清晰的干涉图像,给出了几个重要结论。     

二次暴光全息照相干涉仪及其在冲击波观测中的应用

本文简要阐述了全息照相术的原理及会聚冲击波的特点,在此基础上,设计了一种二次曝光全息照相干涉系统,使用该系统对圆柱形冲击波会聚过程听不稳定性进行了观测,得到了的干涉图像,给出了几个重要结论。     

大口径莫尔全息透镜干涉仪

大口径莫尔全息透镜干涉仪郑刚，史大椿（华东工业大学仪表学院）０引言运用全息学原理制成的全息干涉仪是众多干涉系统中受到人们重视的一类［１］，我们曾在前几年提出过一种采用同轴全息透镜的共光路干涉仪［２］。本文在此基础上，结合莫尔条纹技术和空间滤波技术，进...     

SPG-1型激光数字波面干涉仪干涉系统的设计、制造与装调

已经研制成功的SPG-1型激光数字波面干涉仪是激光技术、微机技术与干涉仪相结合而形成的一种新型光学面形的测试仪器。本文概述该仪器的设计指标及其依据,干涉系统的设计要求,设计结果,关键干涉元件的制造以及干涉系统的装调。仪器的最大口径为φ80mm,最高测量精度为λ/40,分辨率为λ/100,球面测量范围为500mm曲率半径以内.可以测量A级光学样板。干涉系统应有低的噪音、高的干涉条纹对比度及条纹亮度可调等要求。所采用的菲索型与泰曼型的干涉系统中,引入偏振元件而形成偏振干涉系统较好地满足了上述要求。仪器的自检误差优于0.04λ。为了使SPG-1型数字干涉仪及早产品化,提出了一个组合式的设计方案。     

高精度激光长度测量干涉仪

自从激光器问世以来,特别是近几年稳频激光器付之实用后,干涉精密测量取得了重大的进展。目前,激光干涉系统已广泛应用于长度、角度、直线度、平行度、平面度、两轴正交性、光洁度等几何量的精密测量,机械加工中工件尺寸的控制和切削参数的测量,精密机床、坐标测量机的校正,集成电路制作中的精密定位,以及振动、速度、加速度、重力、压力、材料线膨胀系数等物理量的精密测定。本文叙述几种新的高精度激光长度测量干涉仪,这些干涉系统当然也可以应用于其它精密测量领域。     

用于三维测量的双路点衍射干涉系统

针对在仅有一个光纤对的单路点衍射三维测量系统中,存在平行于条纹的横向方向上测量精度低的问题,提出了用于三维测量的双路点衍射干涉系统。分析了点衍射波前误差、测量探头结构布局以及三维迭代重构算法对于三维测量精度的影响,在此基础上确定点衍射源结构以及探头结构布局等最优系统参数。实验结果显示,单路点衍射干涉三维测量系统在xy方向的精度分别为亚微米量级和微米量级,而双路点衍射干涉仪系统可在三维方向上同时达到亚微米量级,验证了所提出的双路点衍射干涉系统方案的可行性和准确性。所提出的双路点衍射干涉系统有效的实现高精度三维测量,为无导轨三维位移和尺寸等测量提供了一种可行方法。     

激光全息干涉技术在机床测量中的应用

本文从全息干涉原理和测量方法入手，结合北京机床研究所对某些机床部件静、动态特性测量分析的实例，分别对全息干涉系统、全息技术的应用以及与模态分析技术的比较作一介绍。     

光纤干涉绝对测距技术

提出一种利用短扫描导轨实现１ｍ以上绝对距离测量的光纤干涉测距新方法：测系统由定位干涉仪和扫描干涉仪组成,定位干涉仪采用准光光源实现测量中的定位瞄准,扫描干涉仪完成距离的测量。     

Optic Fiber Interferometer For Absolute Distance Measurement

提出一种利用短扫描导轨(100 mm)实现1 m以上绝对距离测量的光纤干涉测距新方法测量系统由定位干涉仪和扫描干涉仪组成,定位干涉仪采用准白光光源实现测量中的定位瞄准,扫描干涉仪完成距离的测量。此外定位干涉仪采用多组光纤干涉结构,各组光纤的光程差由自身系统进行标定,从而实现量程的倍增。实验表明,测量精度达10     

Real-time displacement measurements with a Fabry-Perot cavity and a diode laser

We present the basic operating principles of a traceable measurement system suitable for use with atomic force microscopes (AFMs) and nanometer-resolution displacement sensors. Our method is based upon a tunable external-cavity diode laser system which is servo-locked via a phase-modulated heterodyne locking technique to a Fabry-Perot interferometer cavity. We discuss mechanical considerations for the use of this cavity as a displacement metrology system and we describe methods for making real-time (sub 10 ms sampling period) measurements of the optical heterodyne signals. Our interferometer system produces a root-mean-squared (RMS) displacement measurement resolution of 20 pm. Two applications of the system are described. First, the system was used to examine known optical mixing errors in a heterodyne Michelson interferometer. Second, the Fabry-Perot interferometer was integrated into the Z axis of a commercial AFM scanning stage and used to produce interferometer-based images of a 17 nm step height specimen. We also demonstrate atomic resolution interferometer-based images of a 0.3 nm silicon single atomic step-terrace specimen.     

A proposed design for a polarization-insensitive optical interferometer system with subnanometric capability

A bidirectional, fringe-counting, two-beam interferometer system is described that can be used for precision length measurement with any laser source that is adequately coherent for the application. The two electrical phase-quadrature signals required for bidirectional electronic counting are obtained from photodetectors at the two interferometer outputs. A thin metal film design for the beam-splitter coating introduces the required phase difference of nearly 90° for both the perpendicular and parallel polarization components. Electronic alignment and control are performed by a system used to continuously monitor the signals produced from the outputs and automatically process these signals to achieve the optimum performance from the interferometer. Interferometers using the technique require a limited amount of optical alignment and all of the electronic adjustments are automatically controlled by the electronic system. These instruments are economical to manufacture and easy to apply in practice, readily achieving subnanometric accuracy in the measurement of changes in optical path.     

基于单频激光干涉仪的精密工件台定位系统设计

激光干涉仪是以稳频氦氖激光波长为已知长度,利用迈克耳逊干涉系统测量位移的工具。近年来,激光干涉仪一直作为精密测量工具为精密加工机和工件台进行定位校准工作。本文介绍了一种基于单频激光干涉仪的精密工件台测量定位系统。本定位系统采用单频激光干涉仪作为精密测量工具,采用高档8位单片机作为数据处理微控单元,并基于VC＋＋语言编写相关控制软件。实际应用证明本系统定位速度快,精度高,理论上最小分辨率为58．6pm。     

红外干涉仪调试和测量技术的研究

从干涉计量术方面对自行研制的移相式CO₂红外激光干涉仪进行了研究并提供了精确定位红外光路的调试技术,应用该干涉仪对红外光学元件及系统进行了测量;最后,对本干涉仪的系统误差作了测试和分析.结果表明,本仪器系统误差优于λ/20(λ=10.6μm).     

Verification of a polarization-insensitive optical interferometer system with subnanometric capability

The performance of a length-measuring interferometer system designed to be insensitive to stray reflections and polarization effects resulting in a subnanometric measurement capability is described. Results from the mathematical analysis of the interferometer signals, which provided accurate fringe subdivision and allowed a 1σ of 0.15 nm to be realized from this system, are also described. The motion of a piezoelectric transducer (PZT) was characterized over a 1-μm range using the system, and the results were used to confirm this subnanometric measurement capability of the interferometer.     

Subnanometric calibration of a differential interferometer

A novel self-calibration method is proposed for calibrating differential interferometers with subnanometer resolution, and the basic characteristics of the method are discussed. Analysis shows that without using any external reference, the calibration accuracy approaches the resolution limit of the interferometer, which is determined by the signal-to-noise ratio (SNR) and the stability of the measurement system. A compact differential interferometer that uses a laser diode as the light source has been developed in order to demonstrate the viability of the proposed calibration method. The conventional fringe-counting and phase modulation methods are combined in order to extend the measurement range and improve the resolution of the interferometer. The developed interferometer was calibrated using the new method, and the calibration results were compared to those obtained by a comparison calibration method that uses a capacitance displacement sensor as the reference.     

Velocity sensing interferometer (VISAR) modification

The VISAR (velocity interferometer system for any reflector) has become a common tool used in experiments where high surface velocities must be measured. A modification that uses previously wasted interferometer light to more than double output signals and to cancel noise is described. Laser power is used more efficiently, VISAR performance in the presence of intense target self-light is improved, and only two data signals are required instead of the usual three or four. Effects of changing light intensity and fringe visibility are eliminated using a novel detection system with a simplified solution for velocity.     

An unmodulated bi-directional fringe-counting interferometer system for measuring displacement

A bi-directional fringe-counting Michelson interferometer is described that is used in conjunction with a frequency-stabilised laser for precise length measurement. The two counting signals, in phase quadrature and sinusoidally related to path difference, are produced by a novel system that does not employ any form of modulation. Under optimum conditions, the instrument is capable of measuring displacement to a precision of 0.1 μm and the correct fringe-count is maintained even with a signal attenuation corresponding to a 99% loss of intensity in one arm of the interferometer. This performance can be further improved by the application of an automatic gain control system. The interferometer is simple in concept, cheap to produce and easy to set up and align.