用共蒸发法制备AlSb多晶薄膜

采用元素共蒸发法结合退火处理制成了AlSb多晶薄膜.利用x射线衍射、透射光谱、暗电导温度关系等方法研究了薄膜的结构、光学和电学性质.发现540℃退火后得到的AlSb多晶薄膜呈立方相结构,间接跃迁光能隙为1.62eV,电导激活能约为0.33eV.研究结果表明,AlSb薄膜有可能成为新型太阳电池的重要材料.     

用磁控溅射和退火方法制备AlSb多晶薄膜

采用磁控溅射法在玻璃衬底上制备Al/Sb预制多层薄膜,然后将Al/Sb预制多层薄膜在退火炉中退火得到AlSb多晶薄膜.用X射线衍射(XRD)法测薄膜结构;用扫描电镜(SEM)测薄膜Al/Sb成分比,结果表明AlSb多晶薄膜具有单一的晶相、均匀的结构,以及粒径大约20nm的晶粒.根据电导率(lnσ)与温度(T)的关系得到电导激活能为0.21和0.321eV,为制备出适用于太阳电池的AlSb多晶薄膜奠定了一定的技术基础.     

用磁控溅射和退火方法制备AlSb多晶薄膜

采用磁控溅射法在玻璃衬底上制备Al/Sb预制多层薄膜,然后将Al/Sb预制多层薄膜在退火炉中退火得到AlSb多晶薄膜.用X射线衍射(XRD)法测薄膜结构;用扫描电镜(SEM)测薄膜Al/Sb成分比,结果表明AlSb多晶薄膜具有单一的晶相、均匀的结构,以及粒径大约20nm的晶粒.根据电导率(lnσ)与温度(T)的关系得到电导激活能为0.21和0.321eV,为制备出适用于太阳电池的AlSb多晶薄膜奠定了一定的技术基础.     

磁控反应溅射制备的SnO2多晶薄膜及其特性

采用反应磁控溅射制备了高阻SnO2薄膜.利用X射线衍射、透射光谱、霍尔效应、暗电导温度关系等方法研究了退火对薄膜的结构、光学和电学性质的影响.发现在510℃退火1h后,SnO2薄膜从非晶态转变为四方相结构的多晶薄膜,光能隙在3.79 eV和3.92 eV之间,电阻率为8.5Ω·cm,电导激活能约为0.322 eV.研究结果表明,此方法制备的SnO2高阻膜适合作为过渡层应用于CdTe太阳电池中.     

Ⅱ-Ⅵ族化合物(Hg_(1-x)Cd_xTe)非晶薄膜的半导体性质

本文对用蒸发法制备的非晶和多晶碲镉汞(Hg_(1-x)Cd_xTe)薄膜的结构特性及其光学和电学性质进行了研究。在800—2600nm的波长范围内测量了样品的透过率,得到了非晶和多晶状态相应的光学隙分别为1eV以上和0.65eV左右。对非晶样品的退火实验发现,在90—100℃区间退火使非晶样品的结构转变为多晶,同时电阻率突然变小约5个数量级和光学隙由1eV以上突变为0.62eV左右。在20—300K的温度范围内,分别测量了非晶与多晶样品的电阻率,所得结果可用现代非晶半导体理论进行解释。     

CdS多晶薄膜的电学性质

用化学池沉积方法（ＣＢＤ）制备了ＣｄＳ多晶薄膜，并对薄膜进行了退火处理，测量了不同ＣｄＳ薄膜光电导、暗电导和电导－温度关系，计算了电导激光活能。结果表明：刚沉积的ＣｄＳ暗电导率为１０＾－６Ω＾－１．ｃｍ＾－１比光电导率低二个数量级，退火后，电导升高，电导激活能减小。Ｘ射线衍射分析表明，经退火后，ＣｄＳ薄膜发生相变，由立方结构变成六方结构。对上述结果进行了讨论。     

无水化学沉积法制备Sb2S3薄膜

采用无水化学沉积(NCBD)法在玻璃基片上制备了Sb2S3薄膜。先用无水乙醇将4．0mL浓度为0．1mol／L的SbCl3乙醇溶液稀释至39．6mL,再加入0．4mL浓度为0．5mol／L的CH3CSNH2乙醇溶液,搅拌均匀后垂直放入玻璃基片,在15～18℃温度下沉积72h后,进行退火处理。利用X射线衍射(XRD)和扫描电子显微镜(SEM)对薄膜在退火前后的结构特性进行了研究,利用光学测试计算了薄膜的光学带隙。结果表明,高温退火使薄膜由退火前的非晶态转变为多晶的Sb2S3结构(正交晶系),薄膜的直接光学带隙从1．86eV降低为1.75eV。     

一般性问题

TN032007020001雷达电源结构的电磁兼容性设计/巨亚荣(西安电子工程研究所)//火控雷达技术.―2006,35(1).―65～69.介绍雷达电源结构设计中电磁兼容性的经验和有关的一些考虑。图0表0参6TN032007020002用磁控溅射和退火方法制备AlSb多晶薄膜/陈卫东,冯良桓,雷智,张静全,武莉莉,     

射频磁控溅射法制备Cu_2ZnSnS_4薄膜

利用射频磁控溅射法在玻璃基片上制备了Cu2ZnSnS4(CZTS)薄膜,薄膜在室温下生长,再在Ar气氛中快速退火。通过X射线衍射、X射线电子能谱、原子力显微镜和吸收谱研究了退火温度对薄膜结构、组分、形貌和禁带宽度的影响。结果表明,所制备样品为Cu2ZnSnS4多晶薄膜,具有较强的沿(112)晶面择优取向生长的特点,薄膜组分均为富S贫Cu,样品表面形貌比较均匀。退火温度为350,400,450和500℃的薄膜样品的禁带宽度分别是1.49,1.53,1.51和1.46 eV。     

Cu2SnS3薄膜的制备及性能研究

采用LBL(layer-by-layer)法制备了Cu2SnS3薄膜.即首先采用电化学方法在SnO2衬底上制备SnS薄膜,然后又在其上用化学沉积法制备CuS薄膜,最后进行退火处理得到厚度约为960 nm的Cu2SnS3薄膜.探讨了薄膜的制备机理、生长速度、结构和光学特性.制备的薄膜为多晶(Cu2SnS3)72z(三斜或假单斜晶系)结构,其直接光学带隙约为1.05 eV.     

Resolution Enhancement Technology:Integrated Process Solutions using OPC

DUV lithography, using the 248 nm wavelength, is a viable manufacturing option for devices with features at 130 nm and less. Given the low kl value of the lithography, integrated process development is a necessary method for achieving acceptable process latitude. The application of assist features for rule based OPC requires the simultaneous optimization of the mask, illumination optics and the resist.Described in this paper are the details involved in optimizing each of these aspects for line and space imaging.A reference pitch is first chosen to determine how the optics will be set. The ideal sigma setting is determined by a simple geometrically derived expression. The inner and outer machine settings are determined, in turn,with the simulation of a figure of merit. The maximum value of the response surface of this FOM occurs at the optimal sigma settings. Experimental confirmation of this is shown in the paper.Assist features are used to modify the aerial image of the more isolated images on the mask. The effect that the diffraction of the scattering bars (SBs) has on the image intensity distribution is explained. Rules for determining the size and placement of SBs are also given.Resist is optimized for use with off-axis illumination and assist features. A general explanation of the material' s effect is discussed along with the affect on the through-pitch bias. The paper culminates with the showing of the lithographic results from the fully optimized system.     

Cost-effective test solutions for smart card and other integrated flash applications

From its emergence in the late 1980s as a lower cost alternative to early EEPROM technologies, flash memory has evolved to higher densities and speedsand rapidly growing acceptance in mobile applications.In the process, flash memory devices have placed increased test requirements on manufacturers. Today, as flash device test grows in importance in China, manufacturers face growing pressure for reduced cost-oftest, increased throughput and greater return on investment for test equipment. At the same time, the move to integrated flash packages for contactless smart card applications adds a significant further challenge to manufacturers seeking rapid, low-cost test.     

Theoretical analysis of the relationship between the Brillouin gain coefficient and the strain in the optical-fiber sensors

The relation between the power of the Brillouin signal and the strain is one of the bases of the distributed fiber sensors of temperature and strain. The coefficient of the Bfillouin gain can be changed by the temperature and the strain that will affect the power of the Brillouin scattering. The relation between the change of the Brillouin gain coefficient and the strain is thought to be linear by many researchers. However, it is not always linear based on the theoretical analysis and numerical simulation. Therefore, errors will be caused if the relation between the change of the Brillouin gain coefficient and the strain is regarded as to be linear approximately for measuring the temperature and the strain. For this reason, the influence of the parameters on the Brillouin gain coefficient is proposed through theoretical analysis and numerical simulation.     

An improved parallel thinning algorithm with two subiterations

The parallel thinning algorithm with two subiterations is improved in this paper. By analyzing the notions of connected components and passes, a conclusion is drawn that the number of passes and the number of eight-connected components are equal. Then the expression of the number of eight-connected components is obtained which replaces the old one in the algorithm. And a reserving condition is proposed by experiments, which alleviates the excess deletion where a diagonal line and a beeline intersect. The experimental results demonstrate that the thinned curve is almost located in the middle of the original curve connectivelv with single pixel width and the processing speed is high.     

Novel fiber-optical interferometer with miniaturized probe for in-hole measurements

Today, micro-system technology and the development of new MEMS （Micro-Electro-Mechanical Systems） are emerging rapidly. In order for this development to become a success in the long run, measurement systems have to ensure product quality. Most often, MEMS have to be tested by means of functionality or destructive tests. One reason for this is that there are no suitable systems or sensing probes available which can be used for the measurement of quasi inaccessible features like small holes or cavities. We present a measurement system that could be used for these kinds of measurements. The system combines a fiber optical, miniaturized sensing probe with low-coherence interferometry, so that absolute distance measurements with nanometer accuracy are possible.     

Development of the readout system for waveguide multilayer optical card

Waveguide multilayer optical card （WMOC） is a novel storage device of three-dimensional optical information. An advanced readout system fitting for the WMOC is introduced in this paper. The hardware mainly consists of the light source for reading, WMOC, motorized stages addressing unit, microscope imaging unit, CCD detecting unit and PC controlling ＆ processing unit. The movement of the precision motorized stage is controlled by the computer through Visual Basic （VB） language in software. A control panel is also designed to get the layer address and the page address through which the position of the motorized stages can be changed. The WMOC readout system is easy to manage and the readout result is directly displayed on computer monitor.     

Study of waveguide coupling efficiency in hybrid silicon lasers

This paper presents a new method to increase the waveguide coupling efficiency in hybrid silicon lasers. We find that the propagation constant of the InGaAsP emitting layer can be equal to that of the Si resonant layer through improving the design size of the InP waveguide. The coupling power achieves 42% of the total power in the hybrid lasers when the thickness of the bonding layer is 100 nm. Our result is very close to 50% of the total power reported by Intel when the thickness of the thin bonding layer is less than 5 nm. Therefore, our invariable coupling power technique is simpler than Intel＇s.     

Collinear phase-matching study of terahertz-wave generation via difference frequency mixed in GaAs and Inp

The collinearly phase-matching condition of terahertz-wave generation via difference frequency mixed in GaAs and InP is theoretically studied. In collinear phase-matching, the optimum phase-matching wave hands of these two crystals are calculated. The optimum phase-matching wave bands in GaAs and lnP are 0.95-1.38μm and 0.7-0.96μm respectively. The influence of the wavelength choice of the pump wave on the coherent length in THz-wave tuning is also discussed. The influence of the temperature alteration on the phase-matching and the temperature tuning properties in GaAs crystal are calculated and analyzed. It can serve for the following experiments as a theoretical evidence and a reference as well.     

Effects of the alloy compositions on the phonon-polaritons in ternary mixed crystals

Composition dependence of bulk and surface phonon-polaritons in ternary mixed crystals are studied in the framework of the modified random-element-isodisplacement model and the Bom-Huang approximation. The numerical results for Several Ⅱ - Ⅵ and Ⅲ- Ⅴ compound systems are performed, and the polariton frequencies as functions of the compositions for ternary mixed crystals AlxGa1-xAs, GaPxAS1-x, ZnSxSe1-x, GaAsxSb1-x, GaxIn1-xP, and ZnxCd1-xS as examples are given and discussed. The results show that the dependence of the energies of two branches of bulk phonon-polaritons which have phonon-like characteristics, and surface phonon-polaritons on the compositions of ternary mixed crystals are nonlinear and different from those of the corresponding binary systems.     

New insert layer structure OLEDs

An insert layer structure organic electroluminescent device（OLED） based on a new luminescent material （Zn（salen）） is fabricated. The configuration of the device is ITO/CuPc/NPD/Zn（salen）/Liq/LiF/A1/CuPc/NPD/Zn（salen）/Liq/LiF/A1. Effective insert electrode layers comprising LiF（1nm）/Al（5 nm） are used as a single semitransparent mirror, and bilayer cathode LiF（1 nm）/A1（100 nm） is used as a reflecting mirror. The two mirrors form a Fabry-Perot microcavity and two emissive units. The maximum brightness and luminous efficiency reach 674 cd/m^2 and 2.652 cd/A, respectively, which are 2.1 and 3.7 times higher than the conventional device, respectively. The superior brightness and luminous efficiency over conventional single-unit devices are attributed to microcavity effect.