通用物联网监测系统软件设计

针对在不同领域的物联网监测应用设计了一种通用物联网监测系统软件。该软件系统依托的硬件设备预留外部接口高达40个,只需在符合连接此接口标准的传感器的同时,对在上层软件页面进行修改。便可方便进行插拔,大幅的增强了系统应用的扩展性。系统基于B/S模式,采用Struts2+Spring+hibernate的框架设计搭建了一个Web平台,可完成应用与设备的增删改查,传感器数据的列表和曲线显示。同时,给出了系统的总体目标、主要功能和具体的设计实现。     

Accelerated life testing for micro-machined chemical sensors

Reliability and quality assurance are a major concern in the semiconductor industry. However, when developing a new mass-production technology, like micro-machined silicon-based devices, these aspects become particularly critical. Indeed, silicon-based thin-film tin-dioxide gas-sensor reliability has not been deeply studied; most of the completed studies address thick-film devices made on alumina substrates. New test-methods and equipment must be engineered to meet the ever-increasing expectations of the marketplace. This paper justifies the need for new accelerated tests for chemical sensors. A new method which allows `stressing the entire device structure' has been implemented. Test results obtained using this new approach allow us to evaluate the sensor reliability in the range of the requirements of applications using gas sensors     

Printing Ultrasensitive Artificially Intelligent Sensors Array with a Single Self‐Propelled Droplet Containing Nanoparticles

The fabrication and implementation of artificially intelligent sensor arrays has faced serious technical and/or cost‐effectiveness challenges. Here, a new printing method is presented to produce a fully functional array of sensors based on monolayer‐capped gold nanoparticles. The proposed printing technique is based on the so‐called self‐propelled antipinning ink droplet, from which evaporative deposition takes place along the path of motion. By applying actuating forces, different deposition line patterns with different thicknesses and morphology from a single droplet are generated. The functionality of the produced sensors is demonstrated by their ability to detect different representative volatile organic compounds (VOCs) belonging to different chemical families, including alcohols, alkanes, ethers, and aromatics, and under extremely different humidity levels resembling those encountered in real‐world conditions. The results show that the sensors exhibit ultrasensitive sensing features, with an ability to detect and differentiate between different VOCs at low ppb levels. Additionally, the results show that the sensors are able to accurately predict VOC concentrations, viz. enable quantification capabilities, while nevertheless being inexpensive, do not need complicated and expensive printing equipment and prepatterning processes, allow low voltage operation, and provide a platform for multifunctional applications.     

红外隐身技术发展趋势

随着科学技术的不断发展,红外隐身技术在新式武器装备上被广泛应用,是现代武器装备的显著特征。红外传感器诞生并应用于导弹导引,已成为各类武器装备的重大威胁,以红外探测器为例尤为突出。通过对武器装备的威胁分析,阐述了红外隐身性能对各类武器装备的重要性以及红外隐身技术的发展情况;以固定翼飞行器为重点,同时也对直升机、水面舰艇及地面武器坦克装备等加以分析,并分别简述了各类武器装备的红外辐射源、红外辐射强度控制技术措施及发展趋势,通过试验证明了红外隐身技术的研究和应用对于各类武器装备的重要性。     

Dye Modification of Nanofibrous Silicon Oxide Membranes for Colorimetric HCl and NH3 Sensing

Colorimetric sensors for monitoring and visual reporting of acidic environments both in water and air are highly valuable in various fields, such as safety and technical textiles. Until now sol‐gel‐based colorimetric sensors are usually nonflexible bulk glass or thin‐film sensors. Large‐area, flexible sensors usable in strong acidic environments are not available. Therefore, in this study organically modified silicon oxide nanofibrous membranes are produced by combining electrospinning and sol‐gel technology. Two pH‐indicator dyes are immobilized in the nanofibrous membranes: methyl yellow via doping, methyl red via both doping, and covalent bonding. This resulted in sensor materials with a fast response time and high sensitivity for pH‐change in water. The covalent bond between dye and the sol‐gel network showed to be essential to obtain a reusable pH‐sensor in aqueous environment. Also a high sensitivity is obtained for sensing of HCl and NH₃ vapors, including a memory function allowing visual read‐out up to 20 min after exposure. These fast and reversible, large‐area flexible nanofibrous colorimetric sensors are highly interesting for use in multiple applications such as protective clothing and equipment. Moreover, the sensitivity to biogenic amines is demonstrated, offering potential for control and monitoring of food quality.     

Sensor development in the microcomputer age

The proliferating applications of LSI circuitry require inputs from sensors which are both high in performance and low in cost. The need for improved sensors is especially acute in microcomputer-based control systems, where sensor development is expected to pace system applications. This paper reviews the sensors needed for real-time automotive engine control and compares the present status of a number of competing approaches. The problems and potential of sensors using integrated-circuit processes technology age examined. Sensor comparisons must be viewed in the context of the total system, including the output data format and type of microcomputer interface required. For automotive applications, the time-analog format is shown to have advantages. Finally, the additional design freedom and changing emphasis in sensor design as the result of adding on-chip circuitry to silicon-based sensors is described.     

蓝宝石光纤光栅高温传感器研究进展与发展趋势(特邀)

在高速飞行器、航空发动机、核反应堆等国防安全和国民经济的重要领域,需要实现1800 ℃以上的高温原位测量。常规石英光纤传感器受限于材料特性,无法在1000 ℃以上高温环境中长期稳定使用。单晶蓝宝石光纤具有极高的熔点（2053 ℃）和较低的传输损耗,是一种良好的高温传感材料。在单晶蓝宝石光纤内部刻写布拉格光栅,可以研制出蓝宝石光纤光栅传感器,具有耐温性能好、测量精度高、便于多点测量等优点,是当前最具发展前景的新型高温传感器件。首先介绍了蓝宝石光纤光栅高温传感器的工作原理和理论模型,接着介绍了利用飞秒激光制备蓝宝石光纤光栅的三种主流技术,包括相位掩模板扫描法、双光束干涉法、直写法,并从制备效率、光谱质量等方面比较了三种技术的优劣,指出飞秒激光直写法是制备蓝宝石光纤光栅高温传感器的最佳手段;然后介绍了蓝宝石光纤光栅的光谱优化方法,包括如何减小光栅光谱带宽和如何降低光谱噪声;进一步介绍了蓝宝石光纤光栅的高温传感特性、封装工艺及高温温度、应变传感应用;最后展望了蓝宝石光纤光栅传感器的未来发展趋势。蓝宝石光纤光栅高温传感器的快速发展和大规模推广应用,必将有助于解决当前我国航空航天、核电等领域重大装备结构健康监测的卡脖子难题。     

A Versatile Approach for Direct Patterning of Liquid Metal Using Magnetic Field

Patterning of liquid metal (LM) is usually an integral step toward its practical applications. However, the high surface tension along with surface oxide makes direct patterning of LM very challenging. Existing LM patterning techniques are designed for limited types of planar substrates, which require multiple‐step operation, delicate molds and masks, and expensive equipment. In this work, a simple, versatile, and equipment‐free approach for direct patterning of LM on various substrates using magnetic field is reported. To achieve this, magnetic microparticles are dispersed into LM by stirring. When a moving magnetic field is applied to the LM droplet, the aggregated magnetic microparticles deform the droplet to a continuous line. In addition, this approach is also applicable to supermetallophobic substrates since the applied magnetic field significantly enhances the contact between LM and substrate. Moreover, remote manipulation of the magnetic microparticles allows direct patterning of LM on nonplanar surfaces, even in a narrow and near closed space, which is impossible for the existing techniques. A few applications are also demonstrated using the proposed technique for flexible electronics and wearable sensors.     

陶瓷传感器及应用

阐述了传感器的作用及在国民经济发展中占有的位置;介绍了利用陶瓷材料的功能制作的各种类型的陶瓷传感器及其应用.对湿度传感器、气体传感器、超声波传感器进行了市场预测.     

Colorimetric Nanofibers as Optical Sensors

Sensors play a major role in many applications today, ranging from biomedicine to safety equipment, where they detect and warn us about changes in the environment. Nanofibers, characterized by high porosity, flexibility, and a large specific surface area, are the ideal material for ultrasensitive, fast‐responding, and user‐friendly sensor design. Indeed, a large specific surface area increases the sensitivity and response time of the sensor as the contact area with the analyte is enlarged. Thanks to the flexibility of membranes, nanofibrous sensors cannot only be applied in high‐end analyte detection, but also in personal, daily use. Many different nanofibrous sensors have already been designed; albeit, the most straightforward and easiest‐to‐interpret sensor response is a visual change in color, which is of particular interest in the case of warning signals. Recently, many researchers have focused on the design of so‐called colorimetric nanofibers, which typically involve the incorporation of a colorimetric functionality into the nanofibrous matrix. Many different strategies have been used and explored for colorimetric nanofibrous sensor design, which are outlined in this feature article. The many examples and applications demonstrate the value of colorimetric nanofibers for advanced optical sensor design, and could provide directions for future research in this area.     

Improvements in Cpk using real-time feedback control

The usual approach to bring the value of the process capability index, C_pk, to an acceptable level is to design equipment and develop a process in which the process variable is robust to external disturbances. However, an alternative approach involves the use of in situ sensors and real-time feedback control. Currently this approach is not widely implemented in the semiconductor industry. In this paper we provide analytic justification to quantify the potential improvement in C_pk if a real-time feedback control scheme is used instead of the usual open-loop approach. We show that for the case of feedback control the level of C_pk is only limited by the accuracy and reproducibility of the sensor provided that the target values are indeed achievable by the processing equipment. This result also holds in the presence of disturbances and nonlinearities. C_pk values for open-loop and real-time feedback control strategies are compared for two experimental applications: single-wafer CVD nitride and polysilicon processes     

Stretchable,Skin‐Mountable,and Wearable Strain Sensors and Their Potential Applications: A Review

There is a growing demand for flexible and soft electronic devices. In particular, stretchable, skin‐mountable, and wearable strain sensors are needed for several potential applications including personalized health‐monitoring, human motion detection, human‐machine interfaces, soft robotics, and so forth. This Feature Article presents recent advancements in the development of flexible and stretchable strain sensors. The article shows that highly stretchable strain sensors are successfully being developed by new mechanisms such as disconnection between overlapped nanomaterials, crack propagation in thin films, and tunneling effect, different from traditional strain sensing mechanisms. Strain sensing performances of recently reported strain sensors are comprehensively studied and discussed, showing that appropriate choice of composite structures as well as suitable interaction between functional nanomaterials and polymers are essential for the high performance strain sensing. Next, simulation results of piezoresistivity of stretchable strain sensors by computational models are reported. Finally, potential applications of flexible strain sensors are described. This survey reveals that flexible, skin‐mountable, and wearable strain sensors have potential in diverse applications while several grand challenges have to be still overcome.     

MEMS传感器现状及应用

MEMS传感器种类繁多,发展迅猛,应用广泛。首先,简单介绍了MEMS传感器的分类和典型应用。其次,对MEMS压力传感器、加速度计和陀螺仪三种最典型的MEMS传感器进行了详细阐述,包括类别、技术现状和性能指标、最新研究进展、产品,及应用情况。介绍MEMS压力传感器时,给出了国内外采用新型材料制作用于极端环境下压力传感器的研究情况。最后,从新材料、加工和组装技术方面对MEMS传感器的发展趋势进行了展望。     

Simplified terrain identification and component fatigue damage estimation model for use in a health and usage monitoring system

Improved reliability of military ground vehicle systems is often in direct conflict with increased functionality and performance. Health and Usage Monitoring Systems or HUMS are being developed to address this issue. Traditionally, HUMS applications have been limited to high-cost equipment such as aircraft. In order to apply a HUMS to a relatively inexpensive military ground vehicle, simplified algorithms that derive terrain exposure from a basic set of sensors and estimate fatigue damage accumulated on components whose loading comes primarily from terrain have been developed. Various inputs and statistical parameters are evaluated for this model based on accuracy of terrain identification and quality of fatigue prediction on an example component. The generalized process and recommendations for application of this model to military ground vehicle systems are discussed.     

干涉型光纤应变传感技术的发展与应用

详细论述了干涉型光纤应变传感器的特点、分类及各自的工作原理,包括麦克尔逊型、马赫-泽德型、萨格奈克型、法布里-珀罗型干涉仪的应用介绍;分析并比较了各类干涉应变传感器的性能指标和参数;给出了其各种类型传感器的适用范围;并且对近几年来的干涉型光纤应变传感器的新应用进行了重点介绍.分析表明,随着科学技术的不断发展,干涉型光纤应变传感器将在各种工业领域发挥更多更重要的作用.     

Rapid thermal multiprocessing for a programmable factory foradaptable manufacturing of ICs

This paper presents an overview of research at Stanford University on the development of concepts of a programmable factory, based on a new generation of flexible multifunctional equipment implemented in a smaller flexible factory. This approach is demonstrated through the development of a novel single wafer Rapid Thermal Multiprocessing (RTM) reactor with extensive integration of sensors, computers and related technology for specification, communication, execution, monitoring, control, and diagnosis to demonstrate the programmable nature of the RTM. The RTM combines rapid thermal processing and several other process environments in a single chamber, with applications for multilayer in-situ growth and deposition of dielectrics, semiconductors and metals. Because it is highly instrumented, the RTM is very flexible for in-situ multiprocessing, allowing rapid cycling of ambient gases, temperature, pressure, etc. It allows several processing steps to be executed sequentially in-situ, while providing sufficient flexibility to allow optimization of each processing step. This flexibility is partially the result of a new lamp system with three concentric rings each of which is independently and dynamically controlled to provide for better control over the spatial and temporal optical flux profile resulting in excellent temperature uniformity over a wide range of process conditions namely temperatures, pressures and gas flow rates. The lamp system has been optimally designed through the use of a newly developed thermal simulator. For equipment and process control, a variety of sensors for real-time measurements and a model based control system have been developed     

一种基于模糊聚类的故障诊断方法

电子设备的多个传感器实时反映了设备运行状态,对一种基于模糊聚类的电子设备故障诊断方法进行讨论,针对电子装备多个传感器状态信息采用模糊聚类的方法进行融合,进而提出了对于观测数据运用模糊聚类方法进行故障诊断,推理故障模式的方法。实例证明该模糊聚类方法成功地完成了某电子装备故障诊断的自动推理。该方法可以不依赖于被诊断系统的数学模型进行自适应诊断,实现故障诊断的智能化、自动化。     

Review of fiber Bragg grating sensor technology

The current status of the fiber Bragg grating (FBG) sensor technology was reviewed. Owing to their salient advantages, including immunity to electromagnetic interference, lightweight, compact size, high sensitivity,large operation bandwidth, and ideal multiplexing capability, FBG sensors have attracted considerable interest in the past three decades. Among these sensing physical quantities, temperature and strain are the most widely investigated ones. In this paper, the sensing principle of FBG sensors was briefly introduced first. Then, we reviewed the status of research and applications of FBG sensors. As very important for industrial applications,multiplexing and networking of FBG sensors had been introduced briefly. Moreover, as a key technology, the wavelength interrogation methods were also reviewed carefully. Finally, we analyzed the problems encountered in engineering applications and gave a general review on the development of interrogation methods of FBG sensor.     

Large‐Area Ultrathin Graphene Films by Single‐Step Marangoni Self‐Assembly for Highly Sensitive Strain Sensing Application

Promoted by the demand for wearable devices, graphene has been proved to be a promising material for potential applications in flexible and highly sensitive strain sensors. However, low sensitivity and complex processing of graphene retard the development toward the practical applications. Here, an environment‐friendly and cost‐effective method to fabricate large‐area ultrathin graphene films is proposed for highly sensitive flexible strain sensor. The assembled graphene films are derived rapidly at the liquid/air interface by Marangoni effect and the area can be scaled up. These graphene‐based strain sensors exhibit extremely high sensitivity with gauge factor of 1037 at 2% strain, which represents the highest value for graphene platelets at this small deformation so far. This simple fabrication for strain sensors with highly sensitive performance of strain sensor makes it a novel approach to applications in electronic skin, wearable sensors, and health monitoring platforms.     

Flexible strain sensor with high performance based on PANI/PDMS films

A high strain sensor composed of elastomer polydimethylsiloxane (PDMS) and polyaniline (PANI) was fabricated by electrodeposition method for PANI preparation and daubing method for PDMS preparation. This kind of sensor could subject to a large tensile strain (∼50%) and revealed a high gauge factor (54 at 50% strain), which was higher than other sensors reported previously. Also, the sensor displayed a current with a magnitude of mA when applied to 1 V, indicating it didn't need expensive and huge test equipment. Moreover, cyclic strain on the sensor obtained repeatable resistive responses. Its work mechanisms were discussed. The flexible sensor was proved to be useful in sensing strains and other various applications.