Reflection mode scanning near-field optical microscopy analyses of integrated devices

Ultra-large-scale integrated devices have been investigated by a reflection mode scanning near-field optical microscope designed for semiconductor analyses. Although it could be found that imaging the reflectivity of metal structures buried underneath thin, optically transparent passivation layers is practicable, shading of the reflected light by the SNOM probe complicated the interpretability of the achieved results. This issue has been overcome by using the SNOM probe as both illumination source and detector, simultaneously. The application of focused ion beam milling to the probes has allowed the increase of the transmittivity of the probes to such an extent that coated fibres could be utilized and the interpretability of the results could be enhanced. Furthermore, the investigated structures are of great interest for an investigation of z-motion artefacts, as the presence of the polished passivation layers allows topographical influences to be distinguished from pure optical contrast.     

Instrumentation for dual-probe scanning near-field optical microscopy

To investigate local carrier motions, we developed a dual-probe scanning near-field optical microscope (SNOM) with two fiber probes where one is for photoexcitation and the other is for light collection. This instrumentation is based on two important techniques: the design of probe structures and distance control between the sample surface and the two probes. A finite-difference time-domain method numerically analyzed and optimized the design for high efficiency photoexcitation and light collection, while a dual band modulation realized distance control. Real time detection of the oscillations of the probe tips using different frequencies independently controls the distance between the probe tip and the sample surface as well as the distance between the two probes. Thus, the collection probe can be scanned around an illumination probe without destroying the probe tips. To demonstrate our SNOM, we performed photoluminescence spectroscopy under the dual-probe configuration and observed carrier motions in an InGaN quantum well.     

Resolution enhancing using cantilevered tip-on-aperture silicon probe in scanning near-field optical microscopy

Scanning near-field optical microscopy (SNOM) achieves a resolution beyond the diffraction limit of conventional optical microscopy systems by utilizing subwavelength aperture probe scanning. A problem associated with SNOM is that the light throughput decreases markedly as the aperture diameter decreases. Apertureless scanning near-field optical microscopes obtain a much better resolution by concentrating the light field near the tip apex. However, a far-field illumination by a focused laser beam generates a large background scattering signal. Both disadvantages are overcome using the tip-on-aperture (TOA) approach, as presented in previous works. In this study, a finite difference time domain analysis of the degree of electromagnetic field enhancement is performed to verify the efficiency of TOA probes. For plasmon enhancement, silver is deposited on commercially available cantilevered SNOM tips with 20nm thicknesses. To form the aperture and TOA in the probes, electron beam-induced deposition and focused ion beam machining were applied at the end of the sharpened tip. The results show that cantilevered TOA probes were highly efficient for improvements of the resolution of optical and topological measurement of nanostructures.     

Scanning near-field optical microscopy using semiconductor nanocrystals as a local fluorescence and fluorescence resonance energy transfer source

Local fluorescence probes based on CdSe semiconductor nanocrystals were prepared and tested by recording scanning near‐field optical microscopy (SNOM) images of calibration samples and fluorescence resonance energy transfer SNOM (FRET SNOM) images of acceptor dye molecules inhomogeneously deposited onto a glass substrate. Thousands of nanocrystals contribute to the signal when this probe is used as a local fluorescence source while only tens of those (the most apical) are involved in imaging for the FRET SNOM operation mode. The dip‐coating method used to make the probe enables diminishing the number of active fluorescent nanocrystals easily. Prospects to realize FRET SNOM based on a single fluorescence centre using such an approach are briefly described.     

Near-field optical microscopy with video signal processor to apply a CCD imaging device as a variable area photo-sensor for improving operability and spectrum mode imaging

We have developed a video signal processor for improving the operability and function of scanning near-field optical microscopy (SNOM). The video signal processor applies a CCD imaging device as a variable area photo-sensor in the SNOM unit instead of conventional photo-detectors. The signal processor converts the intensity of a selected area in video frames to a numerical value with a rate of 30 Hz. Consequently, the CCD imaging device can be used as a photo-detector of variable areas and positions for detecting a small area of a optical probe position. The need for a precise optical axis alignment is relaxed due to the large sensing area of the CCD device. Using the video signal processor, near-field optical and topographic images have been obtained by SNOM/AFM system simultaneously. By adding a spectrometer between the SNOM unit and the CCD device, the spectrum signal of selected wavelength ranges has been monitored by the video signal processor to provide an optical image.     

Optoelectronic detector probes for scanning near-field optical microscopy

A brief explanation of the optoelectronic probe concept and a comparison between the implementation of passive waveguide probes and optoelectronic probes in scanning near-field optical microscopy (SNOM) is presented. The first probe realizations using cleaved semiconductor crystals and the work at present in progress using microfabricated Si pyramids are described. These crystals with evaporated metal electrodes forming a slit aperture with subwave-length dimensions work as metal–semiconductor–metal photodetectors. Their optical detection behaviour is investigated by measuring the intensity distribution of a laser focal point. Measurements where the external bias voltage is changed show that it is possible to modify the detection behaviour of the device because of the varying depletion widths. The last part of the article describes a concept where pyramidal probes should function simultaneously as sensors for scanning force microscopy (SFM) to measure topography and as optoelectronic probes for scanning near-field optoelectronic microscopy (SNOEM).     

Microfabricated silicon dioxide cantilever with subwavelength aperture

We have developed a microfabricated SiO₂ cantilever with subwavelength aperture for scanning near-field optical microscopy (SNOM), to overcome the disadvantages of conventional optical fibre probes such as low reproducibility and low optical throughput. The microcantilever, which has a SiO₂ cantilever and an aperture tip near the end of the cantilever, is fabricated in a reproducible batch process. The circular aperture with a diameter of 100–150 nm is formed by a focused ion-beam technique. Incident light is directly focused on the aperture from the rear side of the cantilever using a focusing objective, and high optical throughput (10⁻² to 10⁻³) is obtained. The microcantilever can be operated as a SNOM probe in contact mode or in dynamic mode.     

Apertureless near-field optical microscopy via local second-harmonic generation

We describe an apertureless scanning near-field optical microscope (SNOM) based on the local second-harmonic generation enhancement resulting from an electromagnetic interaction between a probe tip and a surface. The imaging mechanisms of such apertureless second-harmonic SNOM are numerically studied. The technique allows one to achieve strongly confined sources of second-harmonic light at the probe tip apex and/or surface area under the tip. First experimental realization of this technique has been carried out using a silver-coated fibre tip as a probe. The experiments reveal a strong influence of the tip–surface interaction as well as polarization of the excitation light on images obtained with apertureless second-harmonic SNOM. The technique can be useful for studying the localized electromagnetic excitations on surfaces as well as for visualization of lateral variations of linear and nonlinear optical properties of surfaces.     

SNOM/SFM结合的近场光学探针

介绍了近年来近场光学探针技术的进展，特别是可与扫描力显徽镜结合的探针制备技术。     

A silanized mica substrate suitable for high-resolution fiber FISH analysis by scanning near-field optical/atomic force microscopy

We applied a novel silanized mica substrate with an extremely flat surface constructed according to Sasou et al. (Langmuir 19, 9845-9849 (2003)) to high-resolution detection of a specific gene on a DNA fiber by scanning near-field optical/atomic force microscopy (SNOM/AFM). The interaction between the substrate and fluorescence-dye conjugated peptide nucleic acid (PNA) probes, which causes fluorescence noise signal, was minimal. By using the substrate, we successfully obtained a fluorescence in situ hybridization signal from the ea47 gene on a λphage DNA labeled with an Alexa 532-conjugated 15-base PNA probe. As the results, no fluorescence noises were observed, indicating that the surface adsorbed almost none of the PNA probe. The combination of the substrate and SNOM/AFM is an effective tool for visualizing DNA sequences at nanometer-scale resolution.     

Near-field scanning optical microscopy using polymethylmethacrylate optical fiber probes

We report the first use of polymethylmethacrylate (PMMA) optical fiber-made probes for scanning near-field optical microscopy (SNOM). The sharp tips were prepared by chemical etching of the fibers in ethyl acetate, and the probes were prepared by proper gluing of sharpened fibers onto the tuning fork in the conditions of the double resonance (working frequency of a tuning fork coincides with the resonance frequency of dithering of the free-standing part of the fiber) reported earlier for the case of glass fibers. Quality factors of the probes in the range 2000–6000 were obtained, which enables the realization of an excellent topographical resolution including state-of-art imaging of single DNA molecules. Near-field optical performance of the microscope is illustrated by the Photon Scanning Tunneling Microscope images of fluorescent beads with a diameter of 100 nm. The preparation of these plastic fiber probes proved to be easy, needs no hazardous material and/or procedures, and typical lifetime of a probe essentially exceeds that characteristic for the glass fiber probe.     

Vibration sensitivity of the scanning near-field optical microscope with a tapered optical fiber probe

In this paper the Rayleigh-Ritz method was used to study the scanning near-field optical microscope (SNOM) with a tapered optical fiber probe's flexural and axial sensitivity to vibration. Not only the contact stiffness but also the geometric parameters of the probe can influence the flexural and axial sensitivity to vibration. According to the analysis, the lateral and axial contact stiffness had a significant effect on the sensitivity of vibration of the SNOM's probe, each mode had a different level of sensitivity and in the first mode the tapered optical fiber probe was the most acceptive to higher levels of flexural and axial vibration. Generally, when the contact stiffness was lower, the tapered probe was more sensitive to higher levels of both axial and flexural vibration than the uniform probe. However, the situation was reversed when the contact stiffness was larger. Furthermore, the effect that the probe's length and its tapered angle had on the SNOM's probe axial and flexural vibration were significant and these two conditions should be incorporated into the design of new SNOM probes.     

The tetrahedral tip as a probe for scanning near-field optical microscopy at 30 nm resolution

The tetrahedral tip is introduced as a new type of a probe for scanning near-field optical microscopy (SNOM). Probe fabrication, its integration into a scheme of an inverted photon scanning tunnelling microscope and imaging at 30 nm resolution are shown. A purely optical signal is used for feedback control of the distance of the scanning tip to the sample, thus avoiding a convolution of the SNOM image with other simultaneous imaging modes such as force microscopy. The advantages of this probe seem to be a very high efficiency and its potential for SNOM at high lateral resolution below 30 nm.     

Labelling quality and chromosome morphology after low temperature FISH analysed by scanning far-field and near-field optical microscopy

A non‐enzymatic, low temperature fluorescence in situ hybridization (LTFISH) procedure was applied to metaphase spreads and interphase cell nuclei. In this context ‘low temperature’ means that the denaturation procedure of the chromosomal target DNA usually applied by heat treatment and chaotropic agents such as formamide was completely omitted so that the complete hybridization reaction took place at 37 °C. For LTFISH, the DNA probe had to be single‐stranded, which was achieved by means of separate thermal denaturation of the DNA probe only. The DNA probe pUC1.77 was used for all LTFISH experiments. The labelling quality (number of binding sites, relative background intensity, relative intensity of major and minor binding sites) was analysed by confocal laser scanning microscopy (CLSM). An optimum in specificity and signal quality was obtained for 15 h hybridization time. For this hybridization condition of LTFISH, the chromosomal morphology was analysed by scanning near‐field optical microscopy (SNOM). The results were compared with the morphology of chromosomes after (a) labelling of all centromeres using the same chemical treatment in the FISH procedure but with the application of target denaturation, and (b) labelling of all centromeres using a standard FISH protocol including thermal denaturation of the DNA probe and the chromosomal target. Depending on the FISH‐procedure applied, SNOM images show substantial differences in the chromosome morphology. After LTFISH the chromosome morphology appeared to be much better preserved than after standard FISH. In contrast, the application of the LTFISH chemical treatment accompanied by heat denaturation had a very destructive influence on chromosomal morphology. The results indicate that, at least for certain DNA probes, specific chromosome labelling can be obtained without the usually applied heat and chemical denaturation of the DNA target, resulting in an apparently well preserved chromatin morphology as visualized by SNOM. LTFISH may be therefore a useful labelling technique whenever the chromosomal morphology had to be preserved after specific labelling of DNA regions. Binding mechanisms of single‐stranded DNA probes to double‐stranded DNA targets are discussed.     

Probe design optimization for a high-resolution scattering-type scanning near-field optical microscope

The scattering-type scanning near-field optical microscope (SNOM) has a probe with a sharp tip for use in high resolution imaging. As sharp a tip as possible is generally considered ideal for the observations, but actually, a sharp tip does not always provide a high resolution SNOM image. We numerically examined the scattering property of the SNOM probe by the three dimensional finite difference time domain method. In this paper, we show the criterion for the ideal scattering probe which satisfies the simple relation between radius and taper angle of the tip.     

Polarization properties of bent-type optical fibre probe for magneto-optical imaging

Quantitative evaluation of magneto-optical parameters is necessary in order to apply scanning near-field optical microscope (SNOM) technology to the study of magnetism on the mesoscopic scale. For this purpose, quantitative knowledge of polarization transmission properties through an optical fibre probe is required. We therefore determined the Stokes parameters of the bent-type optical fibre probe that is used as a cantilever for atomic force microscope operation in our SNOM system. As a result, it is found that the degree of polarization is maintained in the light emitted from the probe, although the probe acts as if it were a wave plate. This anisotropic polarization state of the light emitted from the probe was compensated for by using a Berek compensator placed in front of the fibre coupler.     

Light emission induced by tunneling electrons from surface nanostructures observed by novel conductive and transparent probes

We have developed an ultrahigh-vacuum low-temperature scanning tunneling microscope (STM) equipped with a near-field optical detection system using novel conductive and optically transparent probes. Tunneling-electron induced photons generated in a nanometer-scale area just under the STM probe can be collected directly into the core of the optical fiber probe within the optical near-field region. Firstly, optical fiber probes coated with indium-tin-oxide thin film are applied to quantitative analysis of p-type GaAs(110) surface, where a decrease of light emission in photon mapping clearly extracts the existence of Zn accepter atoms located at the sub-surface layers. Secondly, in order to enhance the efficiency for inelastic tunneling excitation of a tip-induced plasmon mode, a STM probe coated with an Ag/ITO dual-layer film has been developed and applied to an Ag(111) surface, where photon mapping with a step resolution has been achieved by near-field detection.     

Polarization properties of bent-type optical fibre probe for magneto-optical imaging

Quantitative evaluation of magneto-optical parameters is necessary in order to apply scanning near-field optical microscope (SNOM) technology to the study of magnetism on the mesoscopic scale. For this purpose, quantitative knowledge of polarization transmission properties through an optical fibre probe is required. We therefore determined the Stokes parameters of the bent-type optical fibre probe that is used as a cantilever for atomic force microscope operation in our SNOM system. As a result, it is found that the degree of polarization is maintained in the light emitted from the probe, although the probe acts as if it were a wave plate. This anisotropic polarization state of the light emitted from the probe was compensated for by using a Berek compensator placed in front of the fibre coupler.     

Moulded photoplastic probes for near-field optical applications

The inexpensive fabrication of high-quality probes for near-field optical applications is still unsolved although several methods for integrated fabrication have been proposed in the past. A further drawback is the intensity loss of the transmitted light in the 'cut-off' region near the aperture in tapered optical fibres typically used as near-field probes. As a remedy for these limitations we suggest here a new wafer-scale semibatch microfabrication process for transparent photoplastic probes. The process starts with the fabrication of a pyramidal mould in silicon by using the anisotropic etchant potassium hydroxide. This results in an inverted pyramid limited by < 111 > silicon crystal planes having an angle of ∼ 54°. The surface including the mould is covered by a ∼ 1.5 nm thick organic monolayer of dodecyltrichlorosilane (DTS) and a 100-nm thick evaporated aluminium film. Two layers of photoplastic material are then spin-coated (thereby conformal filling the mould) and structured by lithography to form a cup for the optical fibre microassembly. The photoplastic probes are finally lifted off mechanically from the mould with the aluminium coating. Focused ion beam milling has been used to subsequently form apertures with diameters in the order of 80 nm. The advantage of our method is that the light to the aperture area can be directly coupled into the probe by using existing fibre-based NSOM set-ups, without the need for far-field alignment, which is typically necessary for cantilevered probes. We have evidence that the aluminium layer is considerably smoother compared to the 'grainy' layers typically evaporated on free-standing probes. The optical throughput efficiency was measured to be about 10⁻⁴. This new NSOM probe was directly bonded to a tuning fork sensor for the shear force control and the topography of a polymer sample was successfully obtained.     

A scanning near-field optical microscope having scanning electron tunnelling microscope capability using a single metallic probe tip

A new microscope system that has the combined capabilities of a scanning near-field optical microscope (SNOM) and a scanning tunnelling microscope (STM) is described. This is achieved with the use of a single metallic probe tip. The distance between the probe tip and the sample surface is regulated by keeping the tunnelling current constant. In this mode of operation, information about the optical properties of the sample, such as its refractive index distribution and absorption characteristics, can be disassociated from the information describing its surface structure. Details of the surface structure can be studied at resolutions smaller than the illumination wavelength. The performance of the microscope is evaluated by analysing a grating sample that was made by coating a glass substrate with gold. The results are then compared with the corresponding SNOM and STM images of the grating.