The design and characterization of a novel piezoelectric transducer-based linear motor

Before microminiature robots can be realized, new direct drive micromotor systems must be developed. In this research, a linear motor system for a miniature jumping robot was desired. However, current systems must display better force/torque characteristics than is currently available. This paper deals with the design, construction, and testing, of a macro-scale, unidirectional, direct drive linear piezomotor that operates like an inchworm. It uses a parallel arrangement of unimorph piezoelectric transducers, in conjunction with passive mechanical latches, to perform work on a coil spring. Experimental results showed that the linear piezomotor achieved a maximum no-load velocity of 161 mm/s, and a blocked force of 14 N, at a drive signal frequency of 100 Hz. Thereafter, back slip in the latch assembly restricted the forward motion. Based on the results obtained with the macro-level linear piezomotor, it is concluded that smaller direct drive piezomotor designs based on unimorph piezoelectric transducers are achievable. System scalability will be addressed in a future publication.     

一种压电材料的新型线性高电压驱动器

提出一种压电材料的新型线性高电压驱动器的研制方案,驱动器包括两大部分,即大功率、可对压电作动器进行正负向电压加载的闭环倍压放大式线性高电压驱动器;基于固态继电器的ON/OFF驱动器,内含压电作动器的电压加载控制模块和快速放电控制模块。该驱动器线性输出电压为直流电压(-220～+220V),输出频率可达3kHz。     

测量聚合物薄膜电光系数的一种简单方法——干涉法

报道了一种测量聚合物薄膜电光系数的简单方法。这种方法是用石英晶体的逆压电效应补偿聚合物薄膜电光效应引起的光程变化,测量聚合物薄膜电光系数相对于石英晶体压电常数d     

Micro–macro linear piezoelectric motor based on self-moving cell

This paper deals with the development of a piezoelectric linear motor that can control macro and micro movements. Concept of the motor is based on a self-moving cell, which consists of an elastic shell structure and a piezoelectric stack actuator. Three cells are connected in series and by activating piezoelectric actuators in these cells, macro movement can be achieved. Since these cells are fit into a guideway with interference, this motor can possess a high stall force and fail-safe lock. When one piezoelectric actuator is activated by open loop control with hysteresis compensation, micro movement can be obtained. Design of self-moving cell structure, fabrication, and control of the motor for macro and micro movements are explained. The maximum moving velocity of 1.05 mm/s and the maximum force of 4.3 N were observed. The possibility of nano scale movement was demonstrated by taking into account the hysteresis compensation of the piezoelectric actuator.     

四足压电驱动装置的电源设计与研究

压电驱动装置具有纳米级/微米级定位的特性,被广泛应用于精密控制运动平台中,故对压电驱动装置的速度和精度的要求越来越高。根据步进式压电马达驱动原理,结合四足压电驱动装置动力学模型,设计了一种用于新型叠堆结构的四足压电驱动装置的驱动电源。该电源是高电压为±250 V和高频率为1.5 kHz的线性电源,且采用硬件阻抗补偿和信号切换两种策略,进一步解决了容性负载对信号频宽影响的问题,使四足压电驱动装置高精度恒速输出。同时应用硬件在环仿真与测试的方法搭建了实验平台。实验结果表明,在精度为1 nm分辨率的激光干涉仪采集设备中,实现了点对点50.7 nm的四足压电驱动装置的运动测试。     

基于分时驱动方法压电堆响应速度的研究

为提高压电驱动器响应速度,提出了一种超快速分时驱动方法。它通过考虑压电堆内部应力波传播对响应速度的影响,对各压电层进行分时驱动以提高其整体响应速度。通过COMSOL Multiphysics有限元仿真软件对所提出的模型进行了仿真分析,并通过实验结果得到了验证。相比于传统的同时驱动,分时驱动下压电驱动器的整体响应速度提高为原来的1.92倍;另外,分时驱动可以实现对各压电层产生应力的线性叠加,在不改变驱动器响应速度的前提下获得更大的输出位移。     

直流驱动电压下的压电陶瓷特性研究

采用了基于迈克尔逊干涉仪平台的光干涉法,测量了压电陶瓷在直流驱动电压下的非线性迟滞特性曲线,提出了描述非线性迟滞程度的两种形式,进而分析非线性迟滞程度在不同起点电压、伸长位移量下的变化趋势。通过加循环电压测量了压电陶瓷的滞回曲线,分析了影响压电陶瓷线性和非线性因素的变化,且给出了压电陶瓷灵敏度的变化曲线。     

基于GRU神经网络的晶圆测试工艺控制方法

压电驱动器位移输出的非线性特性,如迟滞的记忆特性及速率相关性,使压电驱动器的建模与控制较难。该文提出了一种基于门控循环单元(GRU)的新型位移输出控制方法。建立相应的位移输出实验平台来验证和分析压电驱动器的滞后现象。使用GRU模拟滞后的内存特性及采用两个全连接层来模拟速率依赖性。该模型是一个端到端系统,其中压电陶瓷和位移放大机构被视为一个整体。针对不同电压输入预测的输出位移量表明,该模型对速率相关的滞后具有很强的泛化能力。使用相同的循环神经网络结构构建逆模型,并进行实验测试。实验结果表明,所提出的位移输出控制法有效地削弱了压电驱动器的非线性特性,有利于将线性系统控制法与前馈补偿法相结合。     

Analysis,measurement and control of a new disc-type ultrasonic motor system

This paper first presents an equivalent circuit model of a new disc-type ultrasonic motor and discusses its applications in evaluation of the stator’s frequency characteristics. The equivalent circuit analysis is based on the principle of ultrasonic motor operations and is conducted from the viewpoint of the mechanic vibration of the piezoelectric ceramic disk. Furthermore, because drift of the piezostator characteristics will cause variation of the motor speed, a controller is thus necessary in order to produce a constant output speed. In this research, the speed control scheme is implemented by using current modulation, so the revolutional speed will be kept constant. Meanwhile, the frequency behaviour of the proposed motor and its consequences on speed control scheme are discussed. Finally, a 3-D mechanical element with an extra electrical degree of freedom is employed to simulate the dynamic vibration modes of the linear piezoelectric, mechanical and piezoelectro-mechanic behaviours of a metal disc structure embedded with a piezoelectric actuator. In piezoelectric finite element formulation, a discretized equation of motion is developed and solved by using the integration scheme to explain why an adaptive boundary condition, a simple support condition with three non-equal-triangular (120°–90°–150°) fixed points near the edge for the mechanical design of a new disc-type piezoelectric ultrasonic stator, is defined so that a lateral elliptical motion of the contact point between stator and rotor can be realized for driving the rotor.     

微压电式振动能量采集器的研究进展

给出了微压电式振动能量采集器的基本工作原理和物理模型。按照压电单元结构类型的不同,将其分为单一的直线型悬臂梁、直线型悬臂梁阵列、L型悬臂梁和圆形压电膜,分别讨论了各种类型的微压电振动能量采集器的优缺点。详细介绍了国内外各研究小组研制的微压电式振动能量采集器的结构参数、性能及其应用现状,分析针对目前研究中存在的问题,指出如果能在分析建模、压电结构及压电材料优化方面取得实质性进展,微压电振动能量采集器作为新型供能设备在MEMS系统和低功耗无线传感网络中的应用将会具有更加诱人的前景。     

压电声衬结构设计及其优化

可调频声衬是学术界的研究热点,该文提出了一种基于逆压电效应的可调频声衬结构。该结构将压电片作为声衬的背板,通过压电片的形变来改变声衬的腔体体积,从而调节声衬的消声频率。在分析声衬消声原理及逆压电效应的基础上,采用有限元法对压电片的位移进行分析,压电片的形变量与施加的直流电压幅值呈线性关系。最后通过对压电声衬进行结构优化设计,增加了体积的相对变化量,直径为50mm压电片的形变量为0.2mm时,产生的体积相对变化量从0.85%提升到3.3%,其消声频带的偏移量增加至30Hz。     

Energy flow relations in multiwave systems with absorption and dispersion

Expressions for the time average energy flow are derived for a linear physical system with an arbitrary number of interacting waves. The system is assumed to be temporally and spatially dispersive and to include losses. Waves constant in time but growing or decaying in space with arbitrarily large factors are considered. The results are used to discuss the energy flow components in a traveling-wave tube and in a piezoelectric semiconductor device.     

结构健康监测中压电元件的温度补偿方法

在复合材料的结构健康监测中,一般采用压电元件作为激励源和接收源进行损伤监测。为了获得稳定一致的信号,必须考虑压电元件的温度效应。该文首先从理论上分析了温度对于压电元件的影响,并加以实验验证,据此提出了一种基于数字滤波器的温度补偿法。通过软件自动调节滤波器的参数,实现对波形的相位和幅度的补偿。实验验证这种温度补偿法能较好的消除压电元件温度效应。     

Characterization of excitons in wurtzite GaN quantum wells undervalence band mixing, strain, and piezoelectric field

Low-dimensional excitons in general, and quantum-well (QW) excitons in particular, are important for linear and nonlinear semiconductor optics applications. The recent observation of the high binding energy of bulk excitons in gallium nitride samples being the main impetus, we undertake a theoretical work to characterize QW excitons in wurtzite semiconductors. In our formulation, we take into account valence band mixing, strain, and piezoelectric field effects. The in-plane behavior of excitons is treated variationally, whereas the finite-element method is used for the dependence along the growth direction. The formulation is applied to GaN-Al_x Ga_1-x N QW's. The presence of the piezoelectric field leads to the well-known quantum-confined Stark effect. We deduce from an oscillator strength analysis that the quantum-confined Franz-Keldysh effect is operational for QW's of width around 45 Å for an aluminum content of x=0.15. Our results further indicate that, for very clean samples, QW excitons should not ionize at room temperature even in the presence of the piezoelectric field for sufficiently narrow QW's. We determine the fractional dimensionality of the QW excitons in the absence of the piezoelectric field, which can in principle be cancelled by introducing delta-doped ionized layers on either side of the QW. The absorption spectra associated with the low-lying 1s excitons are also presented for several well widths     

2-2型水泥基压电机敏复合材料的研制

在土木工程领域中，智能结构系统越来越受到人们的重视，而在智能结构系统中机敏材料是不可缺的元素，它是构成智能结构中的传感器和驱动器的关键材料。针对目前土木工程领域智能结构中存在的结构材料与机敏材料相容性差问题，采用水泥基材料作为压电机敏复合材料的基体，通过调节水泥基材料组分和比例，克服水泥基材料与压电陶瓷在密度上的悬殊差异为材料准备带来的困难，制备出2－2型水泥基压电机敏6复合材料。同时，采用集成了微型计算机、MTS自动伺服试验机、示波器、信号发生器、线性放大器和HP－IB界面的测试系统测量2－2型水泥基压电复合材料的弹性性能、传感性能和驱动性能。实验结果表明，在实验范围里，该材料具有线弹性性能；传感性能和驱动性能具有明显的频率依赖性；在超低频范围内，2－2型水泥基压电复合材料的压电电压系数的模值随频率线性增大，相角随频率增大开始时增大较快，随后趋于一常数；2－2型水泥基压电复合材料的压电性能与聚合物基压电复合材料相似。     

Feedforward Controller With Inverse Rate-Dependent Model for Piezoelectric Actuators in Trajectory-Tracking Applications

Effective employment of piezoelectric actuators in microscale dynamic trajectory-tracking applications is limited by two factors: 1) the intrinsic hysteretic behavior of piezoelectric ceramic and 2) structural vibration as a result of the actuator's own mass, stiffness, and damping properties. While hysteresis is rate-independent, structural vibration increases as the piezoelectric actuator is driven closer to its resonant frequency. Instead of separately modeling the two interacting dynamic effects, this work treats their combined effect phenomenologically and proposes a rate-dependent modified Prandtl-Ishlinskii operator to account for the hysteretic nonlinearity of a piezoelectric actuator at varying actuation frequency. It is shown experimentally that the relationship between the slope of the hysteretic loading curve and the rate of control input can be modeled by a linear function up to a driving frequency of 40 Hz     

非线性压电耦合对L型梁俘能器性能的影响

以二自由度的L型梁双稳态压电俘能器为研究对象,研究了非线性压电耦合关系中的一、二次非线性系数对俘能器输出功率和主梁运动的影响。通过对无量纲动力学方程的数值进行了仿真分析,结果表明,当激励幅值较大时,非线性压电耦合对俘能器输出功率和主梁运动有明显的影响;非线性压电耦合系数越大,输出功率越大,而俘能器的振动位移越小。非线性压电耦合的一次非线性系数取正值时,俘能器的响应优于线性耦合时的俘能器响应,取负值,则反之;而无论二次非线性系数取何值,非线性耦合时俘能器的响应都优于线性耦合时俘能器的响应。     

PVDF压电薄膜传感特性研究

聚偏氟乙烯(PVDF)压电薄膜是一种压电高分子材料,它具有独特的压电效应,被广泛应用于振动测量等各个领域。但对于压电薄膜在受到外加应力时其输出特性的研究较少。该文理论分析了PVDF压电薄膜的传感机理和电路等效模型;然后利用COMSOL软件进行仿真;最后实验研究了PVDF压电薄膜在不同激励振幅、激励频率及外加应力下的动态响应。研究结果表明,压电薄膜输出信号的幅值与薄膜振幅成线性关系,与所受外加静态应力无关。     

一种新型直动式压电直线电机的设计

为研制高精度、大行程、宽频响的压电直线电机,提出了一种基于叠层型压电陶瓷的直动式压电直线电机.分析了电机的工作原理,对电机的结构进行了设计,制作了原理样机,并进行了实验研究.实验表明,在一定频率范围内,定子驱动足纵向振幅保持不变,且最大幅值为900 nm,电机最大无负载速度为4.8 mm/s,最大输出推力为4.5 N.     

混凝土中压电陶瓷在变载荷作用下的特性研究

提出了一种将压电陶瓷埋入混凝土中进行机械应力测量的方法。为此，研究了埋入混凝土试件中的压电陶瓷（PZT-8）在混凝土试件受到外部变载荷作用的情况下，压电陶瓷特性参数随混凝土内应力的变化。由压电方程建立机电等效电路模型时，压电陶瓷的各物理参数都采用了复数形式。推导了引入复参数后的压电等效电路以及电路中的等效电参数同复参数的关系。使用网络分析仪测出了各等效电路参数在应力作用下的变化。实验结果表明，压电等效电路中的各等效电参数同应力间有着明显的线性关系，这种线性关系在加载和卸载阶段略微不同，呈现出一种迟滞特性。应力同电参数之间的线性关系为提出的通过埋入混凝土中的压电陶瓷测量混凝土中内应力的新的测量方法提供了理论和实验基础。