Influence of Cs doping in spray deposited SnO2 thin films for LPG sensors

Detection of low concentrations of petroleum gas was achieved using transparent conducting SnO₂ thin films doped with 0–4 wt.% caesium (Cs), deposited by spray pyrolysis technique. The electrical resistance change of the films was evaluated in the presence of LPG upon doping with different concentrations of Cs at different working temperatures in the range 250–400 °C. The investigations showed that the tin oxide thin film doped with 2% Cs with a mean grain size of 18 nm at a deposition temperature of 325 °C showed the maximum sensor response (93.4%). At a deposition temperature of 285 °C, the film doped with 3% Cs with a mean grain size of 20 nm showed a high response of 90.0% consistently. The structural properties of Cs-doped SnO₂ were studied by means of X-ray diffraction (XRD); the preferential orientation of the thin films was found to be along the (3 0 1) directions. The crystallite sizes of the films determined from XRD are found to vary between 15 and 60 nm. The electrical investigations revealed that Cs-doped SnO₂ thin film conductivity in a petroleum gas ambience and subsequently the sensor response depended on the dopant concentration and the deposition temperature of the film. The sensors showed a rapid response at an operating temperature of 345 °C. The long-term stability of the sensors is also reported.     

Tetrakis(alkylthio)-substituted lutetium bisphthalocyanines for sensing NO2 and O3

In this study, the nitrogen dioxide (NO₂) and ozone (O₃) sensing properties of a series bis[tetrakis(alkylthio) phthalocyaninato] lutetium(III) complexes [(C_nH_2n+1S)₄Pc]₂Lu(III) (n = 6, 10, 16) are investigated as a function of concentration in the temperature range between 25 °C and 150 °C. The concentration ranges were 1–10 ppm for NO₂, and 50 ppb–1 ppm for O₃. The response time and the sensor response to NO₂ are measured for approximately 1 min and 100% ppm⁻¹, respectively, for compound 1 at room temperature. At room temperature, all compounds are in the solid phase. The response time decreases to a few seconds with increasing operation temperature to 150 °C. At this temperature, all compounds are in the liquid crystal phase. The fastest response to oxidizing gases is observed at the liquid crystal phase of the Pcs. It has also been observed that the response time and the sensor response depend on the alkyl chain lengths of the Pcs. The doping effect of oxygen has been determined under high purity nitrogen N₂ flow, after exposure to dry air, at a different period of time and after annealing. It has been found that the conductivities of [(C_nH_2n+1S)₄Pc]₂Lu(III) thin films increased after exposure to dry air and the conduction mechanism also changed from ohmic behavior to space-charge-limited conduction.     

Structural, optical and electrical properties of CdO/Cd(OH)2 thin films grown by the SILAR method

Successive Ionic Layer Adsorption and Reaction (SILAR) was used to form Cd(OH)₂ thin films from aqueous cadmium–ammonia complex on glass substrates at room temperature and the thermal annealing effect on thin films was studied. The as-deposited films were annealed at 200, 300 and 400 °C for 1 h in an oxygen atmosphere for conversion from Cd(OH)₂ to CdO and change in the structural, optical and electrical properties of the films and the effect of the light on the electrical properties of the films were investigated. The structural and surface morphological properties of the films were studied using X-ray diffraction (XRD) and scanning electron microscopy (SEM). It was found that Cd(OH)₂ phase is converted into the cubic CdO films by annealing. The band gap energy values of films decreased from 3.59 to 2.13 eV through increasing annealing temperature. It was found that the current increased with increasing light intensity and CdO films were more conductive than the as-deposited films.     

Acoustic wave-based NO2 sensor: Ink-jet printed active layer

Microsphere-templated BaCO₃ films with well-defined area were deposited onto quartz crystal microbalances by thermal ink-jet printing, and the devices were characterized with respect to their microstructures and NO₂ sensing characteristics. Highly porous three-dimensional BaCO₃ frameworks with promising sensor characteristics were obtained. The printed thin films exhibited reversible frequency shifts following exposure to NO₂ and subsequent recovery under CO/CO₂ at 400 °C. The feasibility of controlled deposition of complex functional films in controlled patterns is discussed in the context of the direct-write features of ink-jet printing.     

Fabrication of micro sensors on a flexible substrate

Flexible micro temperature and humidity sensors on parylene thin films were designed and fabricated using a micro-electro-mechanical-systems (MEMS) process. Based on the principles of the thermistor and the ability of a polymer to absorb moisture, the sensing device comprised gold wire and polyimide film. The flexible micro sensors were patterned between two pieces of parylene thin film that had been etched using O₂ plasma to open the contact pads. The sacrificial Cr spacer layer was removed from the Cr etchant to release the flexible temperature and humidity sensors from the silicon substrate. Au was used to form the sensing electrode of the sensors while Ti formed the adhesion layer between the parylene and Au. The thickness of the device was 7 ± 1 μm, so the sensors attached easily to highly curved surfaces. The sensitivities of the temperature and humidity sensor were 4.81 × 10⁻³ °C⁻¹ and 0.03 pF/%RH, respectively. This work demonstrates the feasibility and compatibility of thin film sensor applications based on flexible parylene. The sensor can be applied to fuel cells or components that must be compressed.     

Highly sensitive SnO2 thin film with low operating temperature prepared by sol–gel technique

Sol–gel dip coating technique was employed to prepare Cu-doped SnO₂ thin films, which were able to detect H₂S gas at room temperature with high sensitivity and revealed fast response characteristics. The highest sensor response (the ratio of resistance in air versus in H₂S) was 3648 under H₂S concentration of 68.5 ppm at room temperature. Recoverability of the thin films appeared when the temperature raised to 50 °C. The films were analyzed by means of XRD and the dried gel powder was studied by TG-DTA test. Influences of sintering temperature and doping level on the H₂S response are discussed. The average grain size of the SnO₂ was about 25 nm.     

Controlled synthesis and gas-sensing properties of hollow sea urchin-like α-Fe2O3 nanostructures and α-Fe2O3 nanocubes

Hollow sea urchin-like α-Fe₂O₃ nanostructures were successfully synthesized by a hydrothermal approach using FeCl₃ and Na₂SO₄ as raw materials, and subsequent annealing in air at 600 °C for 2 h. The hollow sea urchin-like α-Fe₂O₃ nanostructures with the diameters of 2–4.5 μm consist of well-aligned α-Fe₂O₃ nanorods with an average length of about 1 μm growing radially from the centers of the nanostructures, have a hollow interior with a diameter of about 2 μm. α-Fe₂O₃ nanocubes with a diameter of 700–900 nm were directly obtained by a hydrothermal reaction of FeCl₃ at 140 °C for 12 h. The response S_r (S_r = R_a/R_g) of the hollow sea urchin-like α-Fe₂O₃ nanostructures reached 2.4, 7.5, 5.9, 14.0 and 7.5 to 56 ppm ammonia, 32 ppm formaldehyde, 18 ppm triethylamine, 34 ppm acetone, and 42 ppm ethanol, respectively, which was excess twice that of the α-Fe₂O₃ nanocubes and the nanoparticle aggregations. Our results demonstrated that the hollow sea urchin-like α-Fe₂O₃ nanostructures were very promising for gas sensors for the detection of flammable and/or toxic gases with good-sensing characteristics.     

Sensing properties of chemically sprayed TiO2 thin films using Ni, Ir, and Rh as catalysts

The purpose of this work is double, to analyze the influence of (i) the addition of different catalysts and (ii) the implementation of different procedures to introduce them in the titanium dioxide (TiO₂) thin films, in order to improve the film sensitivity for detecting oxygen. For reaching these objectives, TiO₂ thin films were deposited on alumina substrates by the ultrasonic spray pyrolysis (USP) technique employing titanium(IV) oxide acetylacetonate (TiO(acac)₂) as a titanium precursor, and pure methanol as a solvent. Iridium, nickel, and rhodium were the three catalysts used, which were incorporated by impregnation and USP onto the TiO₂ thin films surface. The electrical characterization, consisting in surface resistance measurements of the films, in a mixture of oxygen and zero-grade air, was performed using interdigitated gold electrodes contacted on the alumina substrates. From these, the film response or resistance change of the TiO₂ films was estimated. Single TiO₂ thin films measured at 400 °C displayed a response of the order of 0.02 and 0.18 to oxygen of 1000 and 10,000 ppm, respectively, whereas TiO₂ thin films using impregnated rhodium proved to have the highest response to O₂, with a value in the order of 2.5 to a concentration of 1000 ppm of O₂ diluted in zero-grade air at an optimal operating temperature of 250 °C.     

Comparative study on TeO2 and TeO3 thin film for γ-ray sensor application

Tellurium trioxide (TeO₃) and tellurium dioxide (TeO₂) thin film has been deposited by rf sputtering. The influence of γ-radiation doses (in the range 10–50 Gy) on the optical and electrical properties of as-deposited films were studied. Optical band gap values were found to decrease with increasing radiation dose whereas electrical conductivity was increased by about five orders in magnitude. Monotonic decrease in the values of dielectric constant for the deposited TeO₃ films with increase in radiation dose was observed. The γ-ray response behavior of TeO₃ and TeO₂ thin films are compared, and TeO₃ thin film is found to be more suitable in amorphous form for γ-ray detection.     

H2 sensing characteristics of highly textured Pd-doped SnO2 thin films

The effects of the crystallographic orientation on the H₂ gas sensing properties were investigated in highly oriented polycrystalline Pd-doped SnO₂ films, which were obtained using rf magnetron sputtering of a Pd (0.5 wt%)-SnO₂ target on various substrates (a-, m-, r-, and c-cut sapphire and quartz). All the films had a similar thickness (110 nm), root-mean-square (rms) roughness (1.3 nm), surface area, and chemical status (O, Sn, and Pd). However, the orientation of the films was strongly affected by the orientation of the substrates. The (1 0 1), (0 0 2), and (1 0 1) oriented films were grown on (a-cut), (m-cut), and (r-cut) Al₂O₃ substrates, respectively, and rather randomly oriented films were deposited on (0 0 0 1) (c-cut) Al₂O₃ and quartz substrates. In addition, the oriented Pd-doped SnO₂ films were highly textured and had in-plane orientation relationships with the substrates similar to the epitaxial films. The (1 0 1) Pd-doped SnO₂ films on and Al₂O₃ showed a considerably higher H₂ sensitivity, and their gas response decreased with increasing sensing temperature (400–550 °C). The films deposited on and (0 0 0 1) Al₂O₃ showed the maximum sensitivity at 500 °C. The comparison of the H₂ gas response between undoped and Pd-doped SnO₂ films revealed that the Pd-doping shifted the optimum sensing temperature to a lower value instead of improving the gas sensitivity.     

Solid-state potentiometric SO2 sensor combining NASICON with V2O5-doped TiO2 electrode

A compact tubular sensor based on NASICON (sodium super ionic conductor) and V₂O₅-doped TiO₂ sensing electrode was designed for the detection of SO₂. In order to reduce the size of the sensor, a thick-film of NASICON was formed on the outer surface of a small Al₂O₃ tube; furthermore, a thin layer of V₂O₅-doped TiO₂ with nanometer size was attached on the NASICON as a sensing electrode. This paper investigated the influence of V₂O₅ doping and sintering temperature on the characteristics of the sensor. The sensor attached with 5 wt% V₂O₅-doped TiO₂ sintered at 600 °C exhibited excellent sensing properties to 1–50 ppm SO₂ in air at 200–400 °C. The EMF value of the sensor was almost proportional to the logarithm of SO₂ concentration and the sensitivity (slope) was −78 mV/decade at 300 °C. It was also seen that the sensor showed a good selectivity to SO₂ against NO, NO₂, CH₄, CO, NH₃ and CO₂. Moreover, the sensor had speedy response kinetics to SO₂ too, the 90% response time to 50 ppm SO₂ was 10 s, and the recovery time was 35 s. On the basis of XPS analysis for the SO₂-adsorbed sensing electrode, a sensing mechanism involving the mixed potential at the sensing electrode was proposed.     

Electrical response of Sm2O3-doped SnO2 to C2H2 and effect of humidity interference

Pure and Sm₂O₃-doped SnO₂ are prepared through a sol–gel method and characterized by X-ray diffraction (XRD) and transmission electron microscopy (TEM). The sensor based on 6 wt% Sm₂O₃-doped SnO₂ displays superior response at an operating temperature of 180 °C, and the response magnitude to 1000 ppm C₂H₂ can reach 63.8, which is 16.8 times larger than that of pure SnO₂. This sensor also shows high sensitivity under various humidity conditions. These results make our product be a good candidate in fabricating C₂H₂ sensors.     

Response time of nanostructured relative humidity sensors

Capacitive relative humidity (RH) sensors were fabricated by coating countersunk interdigitated electrode substrates with nanostructured TiO₂ films produced using glancing angle deposition. Areal capacitance increased from 1 nF cm⁻² to 800 nF cm⁻² as relative humidity was increased from 2% RH and 95% RH. For films deposited at 81° and with a thickness below 4 m, response time was (162±4) ms m⁻¹. Response times increased from 64 ms to 1440 ms as film thickness increased from 280 nm to 8.5 m. The linear dependence of response time with film thickness indicates that device response time is dominated by surface adsorption. Response time decreased with increasing deposition angle, with a slope of (−15.2±1.6) ms degree⁻¹ for the adsorption data, and (−17.3±2.5) ms degree⁻¹ for the desorption data. The optimum operating range of the sensors depends on deposition angle, and can be tuned to different ranges to match application needs.     

A technique for monitoring SO2 in combustion exhausts: Use of a non-Nernstian sensing element in combination with an upstream catalytic filter

Detection of sulfur dioxide (SO₂) at high temperature (600–750 °C) in the presence of some interferents found in combustion exhausts (NO₂, NO, CO₂, CO, and hydrocarbon (C₃H₆)) is described. The detection scheme involves use of a catalytic filter in front of a non-Nernstian (mixed-potential) sensing element. The catalytic filter was a Ni:Cr powder bed operating at 850 °C, and the sensing elements were pairs of platinum (Pt) and oxide (Ba-promoted copper chromite ((Ba,Cu)_xCr_yO_z) or Sr-modified lanthanum ferrite (LSF)) electrodes on yttria-stabilized zirconia. The Ni:Cr powder bed was capable of reducing the sensing element response to NO₂, NO, CO, and C₃H₆, but the presence of NO₂ or NO (“NO_x”, at 100 ppm by volume) still interfered with the SO₂ response of the Pt–(Ba,Cu)_xCr_yO_z sensing element at 600 °C, causing approximately a 7 mV (20%) reduction in the response to 120 ppm SO₂ and a response equivalent to about 20 ppm SO₂ in the absence of SO₂. The Pt–LSF sensing element, operated at 750 °C, did not suffer from this NO_x interference but at the cost of a reduced SO₂ response magnitude (120 ppm SO₂ yielded 10 mV, in contrast to 30 mV for the Pt-(Ba,Cu)_xCr_yO_z sensing element). The powder bed and Pt–LSF sensing element were operated continuously over approximately 350 h, and the response to SO₂ drifted downward by about 7%, with most of this change occurring during the initial 100 h of operation.     

Enhanced H2S sensing characteristics of SnO2 nanowires functionalized with CuO

The CuO-functionalized SnO₂ nanowire (NW) sensors were fabricated by depositing a slurry containing SnO₂ NWs on a polydimethylsiloxane (PDMS)-guided substrate and subsequently dropping Cu nitrate aqueous solution. The CuO coating increased the gas responses to 20 ppm H₂S up to 74-fold. The R_a/R_g value of the CuO-doped SnO₂ NWs to 20 ppm H₂S was as high as 809 at 300 °C, while the cross-gas responses to 5 ppm NO₂, 100 ppm CO, 200 ppm C₂H₅OH, and 100 ppm C₃H₈ were negligibly low (1.5–4.0). Moreover, the 90% response times to H₂S were as short as 1–2 s at 300–400 °C. The selective detection of H₂S and enhancement of the gas response were attributed to the uniform distribution of the sensitizer (CuO) on the surface of the less agglomerated network of the SnO₂ NWs.     

High temperature potentiometric carbon dioxide sensor with minimal interference to humidity

We report on the development of a potentiometric sensor with Li₃PO₄ electrolyte and BaCO₃-coated Li₂CO₃ sensing electrode for measuring CO₂ over a wide range of concentrations (500 ppm to 20%) at 500 °C with minimal interference to humidity. The active element in the sensing electrode for CO₂ detection is Li₂CO₃. However, sensors with just Li₂CO₃ electrodes showed interference from humidity, which was eliminated by use of the BaCO₃ layer. Infrared spectroscopy as well as electrode preparations involving heating above the eutectic temperature of BaCO₃–Li₂CO₃ suggests that the BaCO₃ layer wets the Li₂CO₃ electrode surface, making it more hydrophobic and thereby reducing the interference from humidity.     

Investigation on the structural and spectral characteristics of deposited FBG stacks at elevated temperature

A composite nano-crystalline structured thin film was realized by depositing mixed Al₂O₃ and MgO coating material using physical vapor deposition approach and then annealing at high temperature. The film thus fabricated retains a high transmission even after annealing at 1500 °C. The grain size of less than 100 nm was measured by atomic force microscopy and the composite nano-crystalline structure of spinel and corundum was confirmed by the X-ray diffraction pattern analysis. Based on this, Bragg grating stacks were fabricated by depositing alternating quarter-wave layers of Al₂O₃ and Al₂O₃/MgO at the end of a sapphire crystal fiber at first and then the layers of NiO and Al₂O₃/MgO on the surface of a sapphire slice. The performance of the grating stacks at high temperature or after high temperature annealing was measured. It was found that the reflection peak measured from the grating stacks can survive a high temperature up to 1050 °C but will disappear after annealing at temperature of 1100 °C or above. A conclusion of inter-diffusion between layers of stack was obtained to explain the phenomenon of reflection peak disappearing after annealing at high temperature.     

Microstructural and electrical properties of 0.65Pb(Mg1/3Nb2/3)O3-0.35PbTiO3 (PMN-PT) epitaxial films grown on Si substrates

Epitaxially grown PMN-PT thin films using the PMN-PT single crystal targets were prepared at 550 °C on appropriate buffer layers of LSCO/CeO₂/YSZ deposited on a Si substrate using pulsed laser deposition. The micro-structural and the electrical properties of the films were investigated as a function of the film thickness. The PMN-PT films with the thickness from 200 to 600 nm exhibited an epitaxial nature with a pure perovskite structure. On the other hand, the films above 700 nm included a pyrochlore phase embedded in the perovskite structure although they exhibited an epitaxial nature. A pyrochlore phase included in the films above 700 nm thickness decreased the dielectric constant and the ferroelectric properties of the PMN-PT films.     

Studies on the gas sensing behaviour of nanosized CuNb2O6 towards ammonia, hydrogen and liquefied petroleum gas

Appreciable changes in resistance of polycrystalline nanosized CuNb₂O₆ upon exposure to reducing gases like hydrogen, liquefied petroleum gas (LPG) and ammonia in ambient atmosphere recognize the material as a gas sensor. Nanosized CuNb₂O₆ synthesized by thermal decomposition of an aqueous precursor solution containing copper nitrate, niobium tartrate and tri-ethanol amine (TEA), followed by calcination at 700 °C for 2 h, has been characterized using X-ray diffraction (XRD) study, transmission electron microscopy (TEM), field-emission scanning electron microscope (FESEM), energy dispersive X-ray (EDX) analysis and Brunauer–Emmett–Teller (BET) surface area measurement. The synthesized CuNb₂O₆ exhibits monoclinic structure with crystallite size of 25 nm, average particle size of 25–40 nm and specific surface area of 55 m² g⁻¹.     

Sprayed CdIn2O4 thin films for liquefied petroleum gas (LPG) detection

Nanocrystalline cadmium indium oxide (CdIn₂O₄) thin films of different thicknesses were deposited by chemical spray pyrolysis technique and utilized as a liquefied petroleum gas (LPG) sensors. These CdIn₂O₄ films were characterized for their structural and morphological properties by means of X-ray diffraction (XRD) and scanning electron microscope (SEM), respectively. The dependence of the LPG response on the operating temperature, LPG concentration and CdIn₂O₄ film thickness were investigated. The results showed that the phase structure and the LPG sensing properties changes with the different thicknesses. The maximum LPG response of 46% at the operation temperature of 673 K was achieved for the CdIn₂O₄ film of thickness of 695 nm. The CdIn₂O₄ thin films exhibited good response and rapid response/recovery characteristics to LPG.