用补偿器测量非球面的研究

重点讨论用零补偿器测量光学非球面表面面形精度的方法,并通过补偿器的光学设计,具体分析了各参数要素对测量精度的影响,最后给出在非球面数控加工不同阶段中对直径500mm,ƒ/2的双曲面主镜的检测结果。     

Dimensional analysis of a prototype mould-making process for thermoplastic resin transfer moulding

The resin transfer moulding (RTM) process is a low-cost process for the production of parts of composite material. However, the economic convenience is lost when large components should be produced, because of the high tooling cost. The step milling of a resin master and the subsequent deposition of a nickel shell could be a valid alternative for the fabrication of an RTM mould. So far, information about the quality of this method of fabricating RTM moulds is lacking, thus more efforts are needed to quantify the error induced by the manufacturing sequence. In order to control the whole process and to assess the quality of the manufactured part, the dimensional deviation due to single manufacturing steps is evaluated for a reference part. Both traditional pointwise measurements and contactless scanning are used for dimensional inspection.     

Imaging characteristics of an axisymmetric, grazing incidence x-ray microscope designed for laser fusion research

We report herein the first demonstration of the x-ray imaging characteristics of an axisymmetric x-ray microscope designed for laser fusion diagnostics. The design, fabrication, and evaluation of a grazing incidence hyperboloid/ellipsoid x-ray mirror pair are discussed. Initial data relating the measured mirror surface profiles, the estimated surface roughness, and mechanical alignment of the x-ray mirror pair to the observed spatial resolution are presented. A revised fabrication approach, utilizing a single point diamond turning feedback technique and resulting in improved resolution, is also discussed.     

同步辐射超光滑X光学元件的加工工艺及检测技术的研究

综述了该领域的研究现状,发展水平,以及同步辐射光学元件的特点;对超光滑表面的加工工艺及检测技术进行了归纳总结;详细阐述了本人所承担的中国科学院高能物理所同步辐射光束线的关键部件一超环面反射镜的加工与检测的研究。用户反馈的信息表明其性能优于美国生产的同类产品,标志着在该领域,我们已接近或达到国外先近水平。     

Single-point diamond turning of electroless nickel for flat X-ray mirror

X-ray mirrors require a super-smooth surface to prevent strong X-ray scattering. We examined the fabrication possibility of the X-ray mirror by single-point diamond turning (SPDT) for electroless nickel. The stable and unstable cutting modes for the electroless nickel were obtained by observing the relative position of a diamond tool for machining. A super-smooth surface of 0.95 nm rms was achieved within the stable cutting mode. The surface roughness of the electroless nickel mirror measured with an optical profiler was compared with the X-ray reflectivity measurement. The electroless nickel mirror could be successfully used as a soft X-ray reflector and a low-pass filter for the hard X-rays.     

A method for assessing geometrical errors in layered manufacturing. Part 1: Error interaction and transfer mechanisms

Geometric accuracy of components is one of the most important quality characteristics in layered manufacturing processes on which most rapid prototyping (RP) techniques are based. Layered manufacturing is an approximate fabricating process in which the final geometric error of the physical part is affected, not only by the approximation technique used, but also by the fabrication process. Errors that occur in one layer could propagate and transfer to other layers causing an accumulated error effect in the process. In this paper, a concept of disturbance error is introduced to describe the effect of accumulated errors in the fabrication process. A physical model is presented to describe error interactions and error transfer mechanisms in the layered manufacturing process. A geometrical model is developed using surface approximation techniques to describe the relationships of the geometrical errors. It is shown that although the complexity of the part geometry is not directly related to the manufacturing process, it will affect the geometrical errors of the part produced.     

高精度轻型长条形反射镜多点支撑方案

轻型、大视场、高分辨力可见光空间遥感器的研制已成为空间光学工作者的重点研究课题。本文结合某研究项目拟探讨高精度长条形反射镜的多点支撑方案及其实施,重点论述其研究过程和方法。     

Ptychographic characterization of the wavefield in the focus of reflective hard X-ray optics

A technique for quantitatively characterizing the complex-valued focal wavefield of arbitrary optics is described and applied to reconstructing the coherent focused beam produced by a reflective/diffractive hard X-ray mirror. This phase-retrieval method, based on ptychography, represents an important advance in X-ray optics characterization because the information obtained and potential resolution far exceeds that accessible to methods of directly probing the focus. Ptychography will therefore be well-suited for characterizing and aligning future nanofocusing X-ray optics.     

一种微透镜--针孔阵列合成器件的制作方法

微透镜阵列与针孔阵列的组合光学器件是全场共焦检测中的一个关键器件，微透镜中心与针孔中心要求严格对准，相应的装配对准精度应控制在几微米之内，本文给出了一种可进行5自由度高精度调节，并利用光学显微镜进行实时监测的对准方法。     

空间相机反射镜碳化硅材料性能测试

通过对SiC样件加工研磨及反射率等性质的测试,得到了材料的性能数据,分析了用SiC材料制备反射镜毛坯的几种方法的优缺点。采用Lanmda-9分光光度计,对SiC在不同表面镀硅、镀银、以及镀硅后再镀银的条件下进行了反射率测试,得出在镀硅再镀银条件下,反射率最高,达到98%的结果。利用Wyko干涉仪对国产SiC长条形样镜进行研磨分析测试,测得表面粗糙度值为6.27 nm。该材料在某型号离轴三反光学系统中作为反射镜得以应用和验证,测得被加工后,镜面面形PV值达到0.068 λ,RMS值为0.01 λ(λ=632.8 nm)。此结果表明,材料的性能达到了可加工可应用的要求。     

应用多模式组合加工技术修正大口径非球面环带误差

为了满足大口径非球面光学元件加工的需求,提出了用多模式组合加工(MCM)技术修正大口径非球面反射镜环带误差的方法。本文讨论的MCM技术以经典加工工艺为基础,采用抛光盘的多工位加工和抛光模式的组合完成光学元件的抛光,实现对光学表面中低频段误差的有效控制。介绍了MCM技术的重要组成部分JP-01抛光机械手的工作原理,分析了MCM的工作模式。采用MCM技术对Φ1230mm的非球面反射镜进行环带误差的修正,给出了镜面面形检测结果。实验结果表明,MCM技术可以有效地控制光学表面的中低频误差,使光学表面误差得到有效收敛,从而显著提高抛光效率。目前,采用MCM技术加工1～2m口径的同轴非球面,其精度可以达到30nm(RMS)。     

环形子孔径拼接检测大口径非球面镜的规划模型及分析

环形子孔径拼接技术是一种无需辅助元件就能检测旋转对称大口径非球面镜的有效手段。根据该技术的检测原理,从几何光学的角度建立了子孔径规划模型,给出了模型数值求解的具体方法。以一口径为700 mm、中心遮拦为160 mm、顶点曲率半径为3 000 mm的抛物面镜为例进行了数值计算,且从物理光学的角度对数值计算结果进行了进一步分析和解释,并进行了初步的实验研究。结果表明,该模型具有较好的预测效果,可为实际检测方案设计提供理论依据,使得检测过程可控、量化和可重复。     

High-energy x-ray microbeam with total-reflection mirror optics

Total-reflection mirror optics for high-energy x-ray microfocusing have been developed, and tested in the energy range of 30-100 keV at beamline 20XU of Synchrotron Radiation Facility SPring-8. The optical system consists of a Kirkpatrick-Baez-type [J. Opt. Soc. Am. 38, 766 (1548)] focusing optics with aspherical total-reflection mirrors for the purpose of reducing the spherical aberrations. A focused beam size of 0.35 x 0.4 microm(2) has been achieved at an x-ray energy of 80 keV, and the measured spot size was less than 1 microm in the x-ray energy region below 90 keV.     

空间太阳望远镜中的轻量化铍镜研究

摘 要：针对空间太阳望远镜相关跟踪器中的摆镜研究,开展了Φ84mm轻量化铍镜设计与研制。利用冲击研磨工艺得到铍粉,再通过热等静压工艺和机械加工得到铍镜镜坯。使用化学镀镍工艺在镜坯基体上镀覆镍磷合金过渡层,再经过光学加工完成铍镜研制。干涉检测得到面形精度为,RMS：0.012λ,PV：0.114λ,轻量化率为43.68%。检测结果满足空间太阳望远镜的技术要求。铍镜研制结果表明,金属铍可以作为空间天文仪器中反射镜基体材料,实现了高精度铍镜研制的技术路线,为在我国空间天文仪器中应用铍镜奠定了基础。     

Experimental and simulation study of undesirable short-period deformation in piezoelectric deformable x-ray mirrors

To construct adaptive x-ray focusing optics whose optical parameters can be varied while performing wavefront correction, ultraprecise piezoelectric deformable mirrors have been developed. We computationally and experimentally investigated undesirable short-period deformation caused by piezoelectric actuators adhered to the substrate during mirror deformation. Based on the results of finite element method analysis, shape measurements, and the observation of x-ray reflection images, a guideline is developed for designing deformable mirrors that do not have short-period deformation errors.     

磁流变抛光系统去除函数的原点位置标定

为了实现磁流变抛光的确定性加工,对磁流变抛光去除函数的原点位置进行了标定。分析了磁流变抛光去除函数的产生过程及其去除率分布。利用标准圆柱,建立了抛光轮最低点与数控加工中心测头的相对位置坐标变换关系,实现了光学元件在机床坐标系中的精确对准。通过在光学元件的特征点上进行去除函数实验测试,实现了抛光轮最低点对应的去除函数原点位置标定,对标定误差进行了分析。选择圆形平面光学元件,应用以金刚石颗粒为抛光粉的水基磁流液,对抛光轮直径为360mm的磁流变抛光系统进行去除函数原点标定,单次标定精度达到0.030mm。实验结果表明:本文提出的去除函数原点标定方法简单可靠,能够满足磁流变抛光技术的修形需求,可为磁流变抛光在光学制造中的应用提供有力支持。     

同步辐射仪器中柔性铰链压弯机的研究

阐述了一种应用柔性铰链产生精密光学反射镜的弹性压弯机构的工作原理.应用经典力学方法对这种压弯机构进行了详细的力学分析,并将这种弹性压弯机构简化成平面钢架结构,用力法正则方程和梁的弯曲方程推导得出镜子的曲率与压弯机构参数及压弯驱动力之间的关系,即压弯机构驱动方程或镜子曲率方程.对影响镜子面形精度的弹性压弯机构参数进行分析,重点讨论了弹性压弯机构转动中心轴和镜子中性面不重合时对镜子面形精度的影响.分析了柔性铰链在这种弹性压弯机构中的作用及其对镜子面形精度的影响.并应用有限元数值计算方法对经典力学分析得出的压弯机构驱动方程进行验证,证实了经典力学分析的正确性.此压弯机构驱动方程可以作为这种弹性压弯机构设计的理论基础.     

高精度离轴凸非球面反射镜的加工及检测

为了提高离轴凸非球面反射镜的面形精度和光轴精度,研究了离轴凸非球面反射镜的加工与检测技术。首先,描述了离轴三反消像散(TMA)光学系统以及作为该光学系统次镜的离轴凸非球面反射镜的光学参数和技术指标。然后,介绍了非球面计算机控制光学表面成型(CCOS)技术及FSGJ非球面数控加工设备。最后,给出了非球面研磨阶段检测用的轮廓测量法和离轴凸非球面抛光阶段检测用的背部透射零位补偿检测法,并对背部透射零位补偿检测中离轴凸非球面反射镜光轴精度的控制技术进行了研究。检测结果表明:采用背部透射零位补偿检测法检测得到的离轴凸非球面反射镜的面形精度为0.017λ(均方根值,λ=0.632 8μm);用Leica经纬仪测量反射镜的光轴精度其结果达到9.4″,满足光学设计技术指标要求。     

硬质粒子摩擦法电铸新技术的研究

提出一种新型的硬质粒子摩擦法电铸技术，从理论上深入探讨了硬质粒子摩擦法电铸技术的沉积机理，并通过金属镍的电铸试验加以验证。理论分析和试验结果表明：硬质粒子摩擦法电铸技术在阴阳极之间引入硬质粒子，并通过电铸芯模的旋转，带动硬质粒子运动，使其不断摩擦、撞击阴极表面，能有效地去除沉积层表面的吸附气泡和积瘤，获得表面平整光亮的电铸层；通过减薄扩散层和扰动结晶过程，能细化晶粒，提高电铸速度。研究结果显示，硬质粒子摩擦法电铸技术在回转体类薄壁零件的电铸成形中有实用价值。     

Algorithm for the generation of mandrel protection curve and trajectory scheme for spinning machine

Spinning process is an effective and flexible method that has been widely employed to produce metal components having an axisymmetric rotational geometry, such as components for jet engines, turbines, radar reflectors, satellite nose cones, etc. Safe performance of mandrel and staff is critical to spinning process. In this paper, the safety aspects, i.e., temperature, leakage of hydraulic system, material deformation, roller path that related to spinning process operations, were in-depth analyzed. Moreover, a concept of mandrel protection curve was presented to avoid the potential dangers, and the relevance algorithm to generate mandrel protection curve was also developed. Then, based on the generation algorithm of mandrel protection curve, the redundant point problem was analyzed, and a new algorithm for rejecting redundant points was designed to enhance efficiency and safety. Finally, Multi-passes and constant linear velocity were adopted for higher product precision during complex spinning product manufacture. The common open-architecture CNC system and hydraulic servo system were used to realize the algorithm researches. The results show that the researched algorithms are effective to guarantee mandrel and staff’s safety and improve product precision.