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A purely chemical HCl laser employing transverse flow was operated with a maximum multiline output power of 13 W which represents a chemical efficiency of 8.6 percent based on the total exothermicity of the pumping reaction. The required nonequilibrium concentration of Cl atoms was generated by the branched chain reaction of NO with ClO2 . Mass spectrometric and absorption spectroscopic measurements of species concentrations in the NO/ClO2 reaction system showed that the effectiveness of production of the branched chain decreased with inereasing total pressure. 相似文献
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Falco C. M. J. M. van Delft 《Microelectronic Engineering》1996,30(1-4):361-364
A mechanistic framework is presented for impact assisted etch reactions. The consecutive reaction steps are assumed to be activated thermally and in parallel mechanically by fast particle impacts. The model explains the complicated temperature dependencies observed in dry etching and beam assisted etching, and it correlates the side wall profiles to the rate determining steps in the etch mechanisms. The framework is used to describe Reactive Ion Beam Etching (RIBE) experiments on InP with Ar+ ions and chlorine, in comparison with our recent Reactive Ion Etching (RIE) experiments of magnetic alloys in HCl plasmas. The framework is also applicable to other non-thermally activated etch reactions, as encountered in tribo-chemical etching and laser chemical etching. 相似文献
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采用超声氯分子束和时间分辨质谱研究了由1064nm近红外激光诱导InP(100)表面蚀刻反应的产物质量分,入射Cl_2分子束的平动能效应,激光能量密度和表面温度的影响,并讨论了反应机理。 相似文献
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为了研究附加化学反应热的激光熔凝区特征,采用在低合金钢表面预制Mg,Al和Fe3O4涂层进行激光处理,得到了化学反应热影响激光熔凝区形貌的实验结果。结果表明,引入化学反应热源,使激光熔化区宽度、热影响区宽度和深度增加,熔化区的深宽比降低;Al和Fe3O4涂层的熔化深度比表面黑化处理的熔深深,Mg和Fe3O4涂层的熔化深度比表面黑化处理的熔深浅;利用多元合金氧化物还原化学反应热和激光形成复合热源,可以快速形成多元合金共渗的熔凝层。 相似文献
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GaAs、GaP、InP、InGaAsP、AlGaAs、InAlGaAs的化学腐蚀研究 总被引:2,自引:0,他引:2
许兆鹏 《固体电子学研究与进展》1996,16(1):56-63
为研制全集成光开关、微片式激光器等,对GaAs、GaP、InGaAsP、InAIGaAs、AlGaAs等材料的化学腐蚀进行了实验研究。为了研制InAlGaAs/InAlAs/InAlGaAs微片式激光器,开发了H3PO4/H2O2/H2O薄层腐蚀液和HCl/H2O选择性腐蚀液;为了研制InGaAsP/InP/InGaAsPTbar型光波导,开发了HCl/H3PO4/H2O2薄层腐蚀液和HCl/H2O2选择性腐蚀液;为了研制GaP、InGaP光波导,开发了HCl/HNO3/H2O薄层腐蚀液。它们都具有稳定、重复性好、速率可控、腐蚀后表面形貌好等特点。除此之外,蚀刻成的GaP光波导侧壁平滑无波纹起伏。此种结果尚未见报导。 相似文献
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HCL chemical laser action has been obtained from chloro compounds when HI was used as the source of H atoms. Laser action was produced on severalupsilon = 3-2, 2-1 , and 1-0 HCl transitions when initiated by transverse pulsed discharges in HI-He mixtures containing such chloro compounds as CCl4 , CHCl3 , and several Freons. Both HCl and HF lasing were observed when a Freon (C2 Cl2 F4 ) containing F as well as Cl was used. The measured wavelengths for these HCl lasers correspond to excellent atmospheric windows for transmission of infrared radiation. No HCl lasing was obtained when HBr, H2 S, or H2 were substituted for HI. 相似文献
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强化学激光器的研究与发展 总被引:3,自引:0,他引:3
化学激光器是以释能化学反应提供能源, 并且以化学反应产生粒子数反转为基础的。由于化学储能的巨大, 这类器件目前输出的连续波功率已达兆瓦级, 大大高于所有其他激光器;近年来, 由于流动介质均匀性的改善和采用选摸能呼高的光腔, 光束质量亦已达到近衍射极限。近年来的研究集中在发展短波长化学激光体系, 从较早的DF(~3.8 μm), HF(2.7 μm)到近期的O2-J体系(1.315 μm), 以及HF的泛频跃迁激光(~1.35 μm)。更进一步则希望发展可见光波段的化学激光器。这有可能通过电子激发志的受激辐射实现, 但是看来尚需较长时间的努力。 相似文献
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针对目前常用的超短脉冲激光加工、激光诱导等离子加工、纳秒紫外激光加工石英玻璃刻蚀率低下的问题,提出一种能够大范围、高刻蚀率、低裂损刻蚀石英玻璃的新方法,即利用1064nm红外激光诱导Ba(OH)2化学反应刻蚀。本文主要从不同能量密度激光诱导化学反应刻蚀机理进行分析,实验表明,当激光能量密度超过16 J/cm2时,石英玻璃被刻蚀;当激光能量密度在16~24 J/cm2之间时,仅物理作用去蚀石英玻璃,故刻蚀率随激光能量变化较小;当激光能量密度在24~42 J/cm2之间时,刻蚀率随激光能量密度变化较大,该阶段Ba(OH)2以及其分解生成的BaO在高温条件下都与石英玻璃主要成分SiO2发生化学反应并生成BaSiO3,故刻蚀率较高;激光能量密度在42~46 J/cm2时,化学反应速率趋于饱和,故该阶段刻蚀率随激光能量密度变化较小。 相似文献
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A pulsed electrical discharge in a flowing mixture of Cl2 and HI produces laser action on the 3 → 2 and 2 → 1 vibrational transitions of HCl. 相似文献
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Diving–Surfacing Smart Locomotion Driven by a CO2‐Forming Reaction,with Applications to Minigenerators
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Harvesting energy from environment has attracted increasing attention for its potential applications in fabricating minigenerator. However, most studies in the fabrication of mini‐ or nanogenerators are based on the concept of piezoelectricity or triboelectrification while few of the reports paid attention to the classical theory of Faraday's law. Herein, a pH responsive smart surface is combined with the reaction between CaCO3 and HCl to develop a new minigenerator, which can convert mechanical energy generated from the chemical reaction into electrical energy through cutting magnetic lines with moving conductive lines. The conductive lines are connected with a smart device consisting of a pH‐responsive cube, a hydrophobic cube, and a quartz cell window; the device can perform diving‐surfacing cycled motions with an intelligent initiation through the adjustment of the solution. The device can surface through gathering CO2 bubbles from the reaction between CaCO3 and HCl and dive by releasing the bubbles on the water/air interface. Moreover, the results demonstrate that the inert CO2 was nonhazardous to the smart surfaces, which is meaningful for durable electricity generation. 相似文献
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By developing a comprehensive computer code fore -beam excited XeCl lasers, we studied mainly the effect of Ar and Ne diluents on the performance characteristics of XeCl lasers. According to the analysis of the XeCl* formation process, the XeCl* relaxation process, and the 308 nm absorption process, it is found that the XeCl* formation efficiency is determined mainly by the rate of the charge transfer process (from Ar+ and Ne+ diluent ions to Xe+); in other words, by the difference between ionic potentials of Xe and the diluent gas used. The extraction efficiency is found to be decided mainly by the quenching rate of a three-body reaction for a short-pulse (55 ns) and a high-excitation-rate (∼ 3 MW/cm3) pumping, and by the absorption process for a long-pulse (500 ns) and a low-excitation-rate (∼ 0.2 MW/cm3) pumping. However, note that no appreciable difference in the intrinsic efficiency is found between the Ar/Xe/HCl and Ne/Xe/HCl mixtures. We also analyzed the dependence of the intrinsic XeCl laser efficiency on the pumping pulse width and excitation rate for Ar/Xe/HCl and Ne/Xe/HCl mixtures. As a result, the same intrinsic efficiencies are obtainable for both Ar- and Ne-based mixtures although the optimum operating conditions are slightly different. The maximum intrinsic efficiency of 5 percent is obtainable both for the Ar/Xe/HCl mixture at 3 atm and with 1.5 MW/cm3, 200 ns (FWHM) pumping and for the Ne/Xe/HCl mixture at 4 atm and with 2 MW/cm3, 200 ns (FWHM) pumping. 相似文献
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A novel, purely optical technique for demultiplexing high speed time-division multiplexed data is demonstrated. The technique uses the SLALOM (semiconductor laser amplifier in a loop mirror) The data rate is not limited by the gain recovery time of the semiconductor laser amplifier. The same technique can also be used for multiplexing.<> 相似文献