Numerical analysis on the LDMOS with a double epi-layer and trench electrodes

We proposed a new lateral double-diffused MOS (LDMOS) structure employing a double p/n epitaxial layer, which is formed on p⁻ substrates. Trenched gate and drain are also employed to obtain uniform and high drift current density. The breakdown voltage and the specific on-resistance of the proposed LDMOS are numerically calculated by using a two-dimensional (2D) device simulator, Medici. The n⁻ drift region and upper p⁻ region of the proposed LDMOS are fully depleted in off-states employing the RESURF technique. The simulation results show that the breakdown voltage is 142 V and specific on-resistance is 183 mΩ mm² when the cell pitch of the LDMOS is 7.5 μm. The proposed LDMOS shows better trade-off characteristics than the previous results.     

Failure analysis and improvement of 60 V power UMOSFET

In this paper, the failure modes of a 60 V power UMOSFET firstly have been discussed by analyzing the test data of the die, and our hypothesis is that the merger of the P-base regions under the trench leads to larger on-resistance and threshold voltage of 60 V UMOSFET. To further verify the hypothesis, the formula for the resistance of the drift region has been derived, and the simulating model of UMOSFET has been given with various mergers of the P-base regions. Then the simulation model has been corrected and the parameters of UMOSFET have been optimized. The re-design of 60 V UMOSFET has been taped out successfully, with its electric parameters totally meeting the requirements.     

Analysis of the electrical characteristics of power LDMOSFETs having different design parameters under various temperature

In this paper, we have investigated the electrical characteristics of power lateral double-diffused MOSFETs (LDMOSFETs) having different gate lengths (2.1–3 μm) and drift lengths (6.6–12.6 μm) in the temperature range 100–500 K. The results of this study indicate that gate length and drift region length have a great effect on electrical characteristics, but they have little effect on temperature dependence. The specific on-resistance and the off-state breakdown voltage increase with temperature. The result shows that the specific on-resistance increases exponentially with the exponent 2.2 and, by contrast, the off-state breakdown voltage increases linearly with a slope of 100 mV/K (drift region concentration of measured device: 2×10¹⁵ cm⁻³). As a result, R_on/BV, known for a figure of merit of power device, increases with temperature.     

Silicon-on-insulator power integrated circuits

A power integrated circuit process has been developed, based on silicon-on-insulator, which allows intelligent CMOS control circuitry to be placed alongside integrated high-voltage power devices. A breakdown voltage of 335 V has been obtained by using a silicon layer of 4 μm thickness together with a buried oxide layer of 3 μm thickness. The respective LDMOS specific on-resistance and LIGBT on-state voltage for this breakdown voltage were 148 mΩ cm² and 3.9 V, respectively.     

A new technique in LDMOS transistors to improve the breakdown voltage and the lattice temperature

A new technique for high breakdown voltage of the LDMOS device is proposed in this paper. The main idea in the proposed technique is to insert the P⁺ silicon windows in the buried oxide at the interface of the n-drift to improve the breakdown voltage, electric field and maximum lattice temperature. The proposed structure is called as P⁺ window LDMOS (PW-LDMOS). It is shown by extending the depletion region between the P⁺ windows and the n-drift region, the breakdown voltage of PW-LDMOS increases to 405 V from 84 V of the conventional LDMOS on 1 µm silicon layer and 2 µm buried oxide layer. Also, effective values of doping, length, and depth of P⁺ window are investigated in the breakdown voltage. Moreover, a self-heating-effect is alleviated by the silicon windows in comparison with the conventional LDMOS. All the achieved results have been extracted by two-dimensional and two-carriers simulator ATLAS.     

具有L型栅极场板的双槽双栅绝缘体上硅器件新结构

为了降低绝缘体上硅（SOI）功率器件的比导通电阻,同时提高击穿电压,利用场板（FP）技术,提出了一种具有L型栅极场板的双槽双栅SOI器件新结构.在双槽结构的基础上,在氧化槽中形成第二栅极,并延伸形成L型栅极场板.漂移区引入的氧化槽折叠了漂移区长度,提高了击穿电压;对称的双栅结构形成双导电沟道,加宽了电流纵向传输面积,使比导通电阻显著降低;L型场板对漂移区电场进行重塑,使漂移区浓度大幅度增加,比导通电阻进一步降低.仿真结果表明：在保证最高优值条件下,相比传统SOI结构,器件尺寸相同时,新结构的击穿电压提高了123%,比导通电阻降低了32%;击穿电压相同时,新结构的比导通电阻降低了87.5%;相比双槽SOI结构,器件尺寸相同时,新结构不仅保持了双槽结构的高压特性,而且比导通电阻降低了46%.     

AlGaN/GaN Schottky barrier diodes on silicon substrates with various Fe doping concentrations in the buffer layers

This study demonstrated AlGaN/GaN Schottky barrier diodes (SBDs) for use in high-frequency, high-power, and high-temperature electronics applications. Four structures with various Fe doping concentrations in the buffer layers were investigated to suppress the leakage current and improve the breakdown voltage. The fabricated SBD with an Fe-doped AlGaN buffer layer of 8 × 10¹⁷ cm^− 3 realized the highest on-resistance (R_ON) and turn-on voltage (V_ON) because of the memory effect of Fe diffusion. The optimal device was the SBD with an Fe-doped buffer layer of 7 × 10¹⁷ cm^− 3, which exhibited a R_ON of 31.6 mΩ-cm², a V_ON of 1.2 V, a breakdown voltage of 803 V, and a buffer breakdown voltage of 758 V. Additionally, the low-frequency noise decreased when the Fe doping concentration in the buffer layer was increased. This was because the electron density in the channel exhibited the same trend as that of the Fe doping concentration in the buffer layer.     

Influence of interface state charges on RF performance of LDMOS transistor

Si-LDMOS transistor is studied by TCAD simulation for improved RF performance. In LDMOS structure, a low-doped reduced surface field (RESURF) region is used to obtain high breakdown voltage, but it reduces the transistor RF performance due to high on-resistance. The interface charges between oxide and the RESURF region are studied and found to have a strong impact on the transistor performance both in DC and RF. The presence of excess interface state charges at the RESURF region results not only higher DC drain current but also improved RF performance in terms of power, gain and efficiency. The most important achievement is the enhancement of operating frequency and RF output power is obtained well above 1 W/mm up to 4 GHz.     

具有超低导通电阻阶梯槽型氧化边VDMOS新结构

基于国际上Liang Y C提出的侧氧调制思想,提出了一种具有阶梯槽型氧化边VDMOS新结构.新结构通过阶梯侧氧调制了VDMOS高阻漂移区的电场分布,并增强了电荷补偿效应.在低于300V击穿电压条件下这种结构使VDMOS具有超低的比导通电阻.分析结果表明:较Liang Y C提出的一般槽型氧化边结构,器件击穿电压提高不小于20%的同时,比导通电阻降低40%～60%.     

具有超低导通电阻阶梯槽型氧化边VDMOS新结构

基于国际上Liang Y C提出的侧氧调制思想,提出了一种具有阶梯槽型氧化边VDMOS新结构.新结构通过阶梯侧氧调制了VDMOS高阻漂移区的电场分布,并增强了电荷补偿效应.在低于300V击穿电压条件下这种结构使VDMOS具有超低的比导通电阻.分析结果表明:较Liang Y C提出的一般槽型氧化边结构,器件击穿电压提高不小于20%的同时,比导通电阻降低40%～60%.     

Deep trap-induced dynamic on-resistance degradation in GaN-on-Si power MISHEMTs

Identification and characterization of a single, deep trap causing large increases in the on-resistance of GaN-on-Si power metal-insulator-semiconductor-high electron mobility transistors (MISHEMTs) is reported. This is achieved by using HEMT-based deep level optical spectroscopy (DLOS) and related methods in conjunction with high voltage off-state V_DS switching up to 400 V. A trap with an activation energy of ~ E_C − 2 eV that is physically located in the drain-access region of the MISHEMT is shown to be the primary source of an increase of the dynamic on-resistance increase by as much as ~ 9 times at 400 V operation. Comparisons of trap signatures extracted from the MISHEMT with capacitance-based DLOS measurements of simple Schottky-diode test-structures showing the same, dominant trap signature suggests that the physical defect is located within the GaN buffer and is not a surface or insulator-related defect. A buffer trap based model is presented to explain the observed on-resistance degradation effects in the MISHEMTs during high voltage switching.     

Performance optimization of InGaAs power LDMOSFET

In this paper, a power laterally diffused metal-oxide-semiconductor field-effect transistor (LDMOSFET) on InGaAs is proposed to achieve substantial improvement in breakdown voltage, on-resistance and Baliga׳s figure-of-merit with reduced cell pitch. The proposed LDMOSFET contains two vertical gates which are placed in two separate trenches built in the drift region. The source and drain contacts are taken from the top. The modified device has a planer structure implemented on InGaAs which is suitable for medium voltage power integrated circuits. The performance of proposed device is evaluated using two-dimensional numerical simulations and results are compared with that of the conventional LDMOSFET. The proposed structure considerably reduces the electric field inside the drift region due to reduced-surface field (RESURF) effect even at increased doping concentration leading to improved design trade-off. The proposed device provides 144% higher breakdown voltage, 25% lower specific on-resistance, 8 times improvement in figure-of-merit, and 25% reduction in cell pitch as compared to the conventional device.     

Study of the leakage current suppression for hybrid-Schottky/ohmic drain AlGaN/GaN HEMT

The leakage current suppression mechanism in AlGaN/GaN High Electron Mobility Transistors (HEMTs) is investigated. It is known that leakage current can cause severe reliability problems for HEMT devices and conventional AlGaN/GaN HEMT devices suffer from detrimental off-state drain leakage current issues, especially under high off-state drain bias. Therefore, a leakage current suppression technique featuring hybrid-Schottky/ohmic-drain contact is discussed. Through the 2-zones leakage current suppression mechanism by the hybrid-Schottky/drain metal including the shielding effect of the rough ohmic-drain metal morphology and the drain side electric field modulation, AlGaN/GaN HEMT featuring this novel technique can significantly enhance the leakage current suppression capability and improve the breakdown voltage. An analytical method using loop-voltage-scanning is proposed to illustrate the optimization procedure of the hybrid-Schottky/ohmic drain metallization on leakage current suppression. Through the comparison of the loop leakage current hysteresis of conventional ohmic drain HEMT and hybrid-Schottky/ohmic drain, the leakage current suppression mechanism is verified through the leakage current considering surface acceptor-like trap charging/discharging model. Device featuring the hybrid-Schottky/ohmic drain technique shows an improvement in breakdown voltage from 450 V (with no Schottky drain metal) to 855 V with a total drift region length of 9 μm, indicating enhanced off-state reliability characteristics for the AlGaN/GaN HEMT devices.     

RESURF LDMOSFET with a trench for SOI power integrated circuits

A new structure of RESURF LDMOSFET is proposed, based on silicon-on-insulator, to improve the characteristics of the breakdown voltage and the specific on-resistance, where a trench is applied under the gate in the drift region. A trench is used to reduce the electric field under the gate when the concentration of the drift region is high, thereby increasing the breakdown voltage and reducing the specific on-resistance. Detailed numerical simulations demonstrate the characteristics of this device and indicate an enhancement on the performance of the breakdown voltage and the specific on-resistance in comparison with an optimal conventional device with LOCOS under the gate.     

高k介质阶梯变宽度SOI LDMOS

本文提出了一种具有高k介质阶梯变宽度结构的新型的SOI LDMOS器件,该器件通过在漂移区内引入介质区域使得漂移区的宽度呈阶梯变化.借助三维器件仿真软件DAVINCI对其势场分布及耐压特性进行了深入分析.首先,阶梯变宽度结构能够在漂移区内引入新的电场峰值来优化势场分布,提高击穿电压.其次,采用高k材料作为侧壁介质区域可以进一步优化漂移区内势场分布,并提高漂移区浓度来降低导通电阻.结果表明,与常规结构相比,新器件的击穿电压可提高42%,导通电阻可降低37.5%,其FOM优值是常规器件的3.2倍.     

Optimization of high voltage LDMOSFETs with complex multiple-resistivity drift region and field plate

An improved high voltage LDMOSFET with multiple-resistivity drift region is proposed. Using the 2-D process simulator TSUPREM4 and device simulator MEDICI, we design a conventional LDMOSFET optimized for breakdown voltage. Then multiple-resistivity drift region is incorporated, with optimized thickness and doping concentration to reduce specific on-resistance while the breakdown voltage is not degraded. To further improve the device performance, we apply a field plate above the drift region to attract more electrons. Carrier concentration in the channel is increased, so drain current level is improved. The simulation result shows that the optimized complex structure, containing both multiple-resistivity drift region and a field plate, exhibits a 34.2% reduction in specific on-resistance with a mere 2.5% degradation of breakdown voltage compared to the standard LDMOSFET.     

Optimized design of 4H-SiC floating junction power Schottky barrier diodes

SiC floating junction Schottky barrier diodes were simulated with software MEDICI 4.0 and their device structures were optimized based on forward and reverse electrical characteristics.Compared with the conventional power Schottky barrier diode,the device structure is featured by a highly doped drift region and embedded floating junction region,which can ensure high breakdown voltage while keeping lower specific on-state resistance,solved the contradiction between forward voltage drop and breakdown voltage.The simulation results show that with optimized structure parameter,the breakdown voltage Can reach 4 kV and the specific on-resistance is 8.3 mΩ·cm2.     

High-voltage accumulation-layer UMOSFET's in 4H-SiC

A novel silicon carbide UMOSFET structure is reported. This device incorporates two new features: a self-aligned p-type implantation in the bottom of the trench that reduces the electric field in the trench oxide, and an n-type epilayer under the p-base to promote lateral current spreading into the drift region. This UMOS structure is capable of supporting the full blocking voltage of the pn junction while keeping the electric field in the gate oxide below 4 MV/cm. An accumulation channel is formed on the sidewalls of the trench by epigrowth, and the gate oxide is produced by a polysilicon oxidation process, resulting in a uniform oxide thickness over both the sidewalls and bottom of the trench. The fabricated 4H-SiC devices have a blocking voltage of 1400 V (10 μm drift region), a specific on-resistance of 15.7 mΩ-cm ² at room temperature, and a gate oxide field of 3 MV/cm     

An improved 860–960 MHz fully integrated CMOS power amplifier designation for UHF RFID transmitter

An improved design of 860–960 MHz fully integrated CMOS power amplifier (PA) for UHF RFID transmitter is presented in this paper. It utilizes three stage differential structure, including common-source structure applying RC feedback circuit to improve linearity, cascade structure adopting self-biased cascode technique and self-forward-body-bias (SFBB) technique to overcome shortcomings of low breakdown voltage and to reduce supply voltage respectively in order to obtain high output power, high efficiency and low supply voltage. By integrating these techniques organically, simulation results demonstrate that the circuit provides 21 dBm output power and 35% power-added efficiency (PAE) with 3 V supply. A comparison with other PAs operating in similar frequencies shows the proposed LNA has advantages of higher output power, higher PAE, higher linearity and lower supply voltage.     

Compact MOS-triggered SCR with faster turn-on speed for ESD protection

The merged and compact MOS-triggered SCR devices have been compared and investigated in a 0.13 μm CMOS process. From experimental results, the turn-on time of compact MOS-triggered SCR has been improved from ～7.2 ns of merged MOS-triggered SCR to ～4 ns. Compared to merged MOS-triggered SCR devices, the compact MOS-triggered SCR devices can achieve a lower trigger voltage, a faster turn-on speed, a lower on-resistance, a lower clamping voltage and a higher failure current.