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1.
SiCN扩散阻挡层薄膜的制备及特性研究   总被引:1,自引:0,他引:1  
采用磁控溅射法在单晶硅衬底上制备了SiCN及Cu/SiCN薄膜,并对试样进行了退火处理.利用原子力显微镜(AFM)、X射线衍射(XRD)、四探针测试仪(FPP)研究了SiCN薄膜的表面形貌、物相结构及在Cu/SiCN/Si结构中SiCN薄膜对铜与硅的阻挡性能.结果表明,沉积态SiCN薄膜为无定型的非晶结构,晶化温度在1000℃以上;SiCN薄膜作为Cu的扩散阻挡层有较好的热稳定性及阻挡性,阻挡失效温度在600℃左右.  相似文献   

2.
在不同的衬底温度下,通过脉冲激光淀积(PLD)方法在Si衬底上生长出c轴高度取向的ZnO薄膜。ZnO薄膜的结构分别通过X射线衍射(XRD)和广延X射线吸收精细结构(EXAFS)来表征,而表面成份和化学态则通过X射线光电子能谱来研究。利用光致发光(PL)来研究样品的发光特性。XRD结果和EXAFS结果都表明了500℃时生长的ZnO薄膜的结晶性比300℃时生长的要好。EXAFS结果和XPS结果显示,300℃时生长的ZnO薄膜处于富氧状态,而500℃时生长的则处于缺氧状态。结合XRD谱、EXAFS谱、XPS谱和PL谱的结果可以看到:随着ZnO薄膜的结晶性变好,它的紫外发光增强;另一方面,随着ZnO薄膜中O的含量减少,绿光发射变强。我们的结果表明绿光发射与ZnO中氧空位(V0)有关。  相似文献   

3.
离子注入改善纳米二氧化钛薄膜光催化性能   总被引:15,自引:0,他引:15  
利用直流磁控反应溅射技术在玻璃衬底上制备了透明的纳米TiO2光催化薄膜。利用离子注入技术将Sn离子注入到TiO2表面以提高其光催化活性。用X射线衍射(XRD)、X射线光电子谱(XPS)以及UV-VIS分光光度计对薄膜进行结构与性能表征。Sn离子注入后的薄膜具有更高的光催化活性,这是因为在TiO2和SnO2半导体的复合体系中,电子-空穴对的分离变得更加有效,从而提高了其催化性能。  相似文献   

4.
采用恒电流电沉积技术,在不同衬底(金属钼片、镀金的硅片、ITO导电玻璃)上,不同溶液酸碱性的条件下制备出了具有白钨矿结构的钼酸钡薄膜,利用X射线衍射仪(XRD)、扫描电子显微镜(SEM)、原子力显微镜(AFM)对制备的薄膜进行了分析表征。分析了利用电沉积方法制备的钼酸钡薄膜的成膜机制.实验结果表明:在室温环境下,利用电沉积技术,在不同材质的衬底(金属钼片、镀金的硅片和ITO导电玻璃)上,可以制备出具有白钨矿结构钼酸钡薄膜,不同材质的衬底会影响到薄膜晶粒的形状进而影响薄膜的表面形貌和致密性,用镀金的硅片(Au-Si片)作衬底时,制备的钼酸钡薄膜晶粒更加饱满,晶体生长呈四方锥形,晶界清晰。  相似文献   

5.
RF磁控溅射法制备ZnO薄膜的XRD分析   总被引:10,自引:0,他引:10  
采用RF磁控溅射法,在玻璃村底上制备多晶ZnO薄膜,并对所制备的ZnO薄膜在空气气氛中进行了不同温度(350~600℃)的退火处理和600℃时N2气氛中的退火处理。利用X射线衍射分析了溅射参数如溅射功率、溅射氧分压、衬底温度以及退火处理对ZnO薄膜结晶性能的影响。结果表明,合适的衬底温度和退火处理能够提高ZnO薄膜的结晶质量。  相似文献   

6.
通过直流反应磁控溅射的方法制备了氧化铅薄膜,并通过XRD和紫外-可见光(UV-Vis)吸收谱对薄膜的晶体结构和光学性能进行了表征。我们发现,直流反应磁控溅射金属铅靶可以形成三种氧化铅薄膜,即非晶态PbO,正交晶系的β-PbO,以及四方晶系的Pb3O4。X射线衍射结果表明,衬底温度和氧气流量对薄膜的生长有很大的影响。当衬底温度小于300℃时,薄膜呈非晶状态,当衬底温度超过300℃时,薄膜开始结晶。另外,氧气流量的改变引起薄膜晶体结构的明显变化。当氧气流量较小时,薄膜为立方相结构的PbO;随着氧气流量的增加,薄膜的晶体结构发生改变,生成四方相结构的Pb3O4的薄膜。UV-Vis吸收谱测试结果表明,不同条件下制备的氧化铅薄膜的UV-Vis吸收谱明显不同。  相似文献   

7.
利用湿化学制备技术在硅(100)衬底上制备出符合化学计量比的钼酸铋(α相)薄膜。采用X射线衍射(XRD)技术分析薄膜的晶相结构,利用原子力显微镜(AFM)对其表面形貌进行表征,使用荧光发射仪研究了薄膜在室温下的发光特性。研究结果表明,通过化学溶液制备技术可以制备出具有单一晶相的钼酸铋(α相)薄膜,烧结温度的不同会对所制备的薄膜样品的结构和晶粒的形状有不同的影响,该薄膜具有良好的光致发光特性。  相似文献   

8.
利用微波电子回旋共振(MW-ECR)等离子体增强非平衡磁控溅射法制备了碳氮化硅(SiCN)薄膜。研究结果表明,碳含量对薄膜化学结构、力学性能有很大影响。傅里叶变换红外光谱(FT-IR)和X射线光电子能谱(XPS)表征显示,随着碳靶溅射偏压由-450V提高到-650V,薄膜中碳含量由19.0%增加到27.1%,sp^3C-N键含量增多,薄膜生长速率由3.83nm/min提高到5.83nm/min,硬度在-600V时达到最大值25.36GPa。上述结果表明,提高碳靶溅射偏压,可以提高薄膜含碳量,得到性能较好的SiCN薄膜。  相似文献   

9.
利用X射线光电子谱(XPS)、扫描俄歇微探针(SAM)、X射线衍射(XRD)和差热-热重(DTA-TG)等多种分析技术,对由溶胶凝胶(Sol-Gel)法制备的Pd-SnO2薄膜试样的结构作了综合表征,系统地研究了热处理过程中试样结构及试样中Pd和Sn元素化学状态的变化规律。  相似文献   

10.
利用氢等离子体加热晶化n^ -a-Si:H/a-Si:H薄膜.可以在450℃的衬底温度下制备多晶硅薄膜。采用X射线衍射谱、Raman散射谱和扫描电子显微镜等手段进行表征和分析,研究了不同退火条件对薄膜晶化的影响。结果表明。随着射频氢等离子功率的提高、衬底温度升高和退火时间的增加,薄膜的晶化度呈现出增加趋势。  相似文献   

11.
In this paper, we present a new method for inserting several triangulated surfaces into an existing tetrahedral mesh generated by the meccano method. The result is a conformal mesh where each inserted surface is approximated by a set of faces of the final tetrahedral mesh. First, the tetrahedral mesh is refined around the inserted surfaces to capture their geometric features. Second, each immersed surface is approximated by a set of faces from the tetrahedral mesh. Third, following a novel approach, the nodes of the approximated surfaces are mapped to the corresponding immersed surface. Fourth, we untangle and smooth the mesh by optimizing a regularized shape distortion measure for tetrahedral elements in which we move all the nodes of the mesh, restricting the movement of the edge and surface nodes along the corresponding entity they belong to. The refining process allows approximating the immersed surface for any initial meccano tetrahedral mesh. Moreover, the proposed projection method avoids computational expensive geometric projections. Finally, the applied simultaneous untangling and smoothing process delivers a high‐quality mesh and ensures that the immersed surfaces are interpolated. Several examples are presented to assess the properties of the proposed method.  相似文献   

12.
13.
Standards are the basis for production enterprises to organize production, ex-factory inspection, trade (delivery) and technical exchanges, product certification, quality arbitration and supervision.……  相似文献   

14.
A flow calorimeter for enthalpy increment measurements on condensed gases is presented. A better knowledge of the properties of the liquefied natural gas is needed, and therefore a liquid loop has been designed for our flow calorimeter. The fluid loop in the calorimeter is designed in order to avoid the two-phase region, since two phases would give compositional disturbances in the measurements. The avoidance of the two-phase region is made possible by increasing the pressure of the test fluid after the measurement section, then heating the fluid at super-critical pressure past the critical point. Finally, the fluid is throttled to the low-pressure gas state at the inlet condition of the compressor that circulates the fluid. To perform the pressure increase, a new cryogenic pump has been designed. To evaluate the new equipment, measurements were taken on liquid ethane over the temperature range 146–256 K at pressure between 0.9 and 5.1 MPa.  相似文献   

15.
We associate a variety of innovations with the term "Industry 4.0". The pioneer of many 4.0 modifications forms the basisfor the trend towards the integrated di...  相似文献   

16.
On November 30, 2007, the China Association for Standardization (CAS) held a press conference at Beijing Diaoyutai State Guest House. Leaders from the China Household Electric Appliance Research Institute, the China Household Electric Appliance Association, and the China Consumers' Association attended and made speeches.……  相似文献   

17.
ABSTRACT

The production of ferrous metal increased during the Roman Late Republican period, Principate and Empire. The direct bloomery process was used to extract the metal from its ores using slag-tapping and slag-pit furnaces. The fuel was charcoal and an air blast was introduced by bellows-operated tuyères. Iron formed as a bloom, often as a spongy mass of metal, which contained impurities from the smelting process, including unreacted ore, fuel, slag and fragments from the furnace walls, while the metal was often inhomogeneous with varied carbon contents. Blooms were either smithed directly into bars or ingots or they were broken up, which also allowed the removal of gross impurities and a selection of pieces with similar properties to be made. These could then be forge-welded together and formed into characteristically shaped ingots. Making steel in the furnace seems to have been achieved: it depended on the ore and the furnace and conditions within it. Surface carburization was also carried out. Iron and steel were used extensively in construction and for tools and weapons. Fire welding was often used to add pieces of steel to make the edges of tools and weapons, which could be heat-treated by quenching to harden them.  相似文献   

18.
Zusammenfassung Bei der Gestaltung von Ernteprozessen — beispielsweise des Prozesses Mähdrusch, Körnertransport und -abnahme — als transportverbundene Fließarbeitsverfahren mit mindestens zwei verschiedenen Arbeitsmitteln gibt es einen großen Optimierungsspielraum. Solche Prozesse sind mehrstufige Bedienungsprozesse mit gemischter Anordnung der Bedienungseinrichtungen. Außerdem besitzen sie stark ausgeprägte räumliche Aspekte. Es wird vor allem gezeigt, welche Merkmale solcher Prozesse in Simulationsmodellen abgebildet sein müssen, welche Zielgrößen in Abhängigkeit von welchen Einflußgrößen unter Berücksichtigung welcher Prozeßbedingungen ermittelt werden sollten und wie der Bewertungsprozeß zur Ermittlung der gewünschten Informationen gestaltet werden muß.  相似文献   

19.
In the present study a high‐boron high speed steel (HSS) roll material was designed. Many expensive alloy elements have been substituted by cheap boron alloy, and high‐boron high speed steel roll has been manufactured by centrifugal casting method. The microstructures, mechanical properties and wear resistance of centrifugal casting high‐boron high speed steel roll have been investigated by optical microscopy (OM), scanning electron microscopy (SEM), and X‐ray diffraction (XRD) analysis, hardness test, impact test and wear test. The results indicated that the solidification microstructures of high‐boron high speed steel roll consisted of M2(B,C), (W,Mo)2(B,C), M3(B,C), M23(B,C)6 type borocarbides and martensite, a small amount of retained austenite. Borocarbides were continuously distributed over the grain boundary. After quenching from 1050 °C, local broken network appeared in partial borocarbides, and fine secondary borocarbide precipitated from the matrix. After tempering from 525 °C, the amount of precipitated borocarbide increased significantly. After heat treatment, the hardness of high‐boron high speed steel roll excelled 60 HRC, and its impact toughness excelled 8.0 J/cm2. The single groove steel rolling amount of high‐boron high speed steel rolls increases by 500% than that of bainite cast iron roll, when the rolls are used in K1 mill housing of bar mill.  相似文献   

20.
The definition of the thixotropy is a decrease in viscosity with time in shear and a subsequent recovery of viscosity after the shear deformation is removed.We ...  相似文献   

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