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EMMI被广泛应用于集成电路的失效分析和机理判定。针对端口I-V特性曲线的异常现象,采用静态电流的发光效应对漏电点进行光发射定位。静态电流法无法全面测试集成电路内部逻辑单元,需要使用动态信号驱动集成电路,使内部失效部位能够产生光发射。对样品在动态失效工作状态进行光发射捕捉,再结合良品对比、电路原理图和版图分析等辅助手段进行故障假设,以定位失效点,最后利用FIB系统对电路进行剖面切割制样,找出物理损伤点。对砷化镓数字集成电路的不稳定软失效案例进行分析,动态EMMI法与FIB系统联用可成功应用于芯片内部金属化互连异常的失效分析,解决传统静态光发射法无法定位的技术难题。 相似文献
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激励源诱导故障测试(SIFT)是一种新型的失效定位技术,可用于集成电路和分立器件中漏电、击穿、短路等失效点的定位及失效机理的分析。在介绍SIFT技术工作原理的基础上,利用该技术进行了六反相器电路的深埋层缺陷、收发器电路中电源与地之间漏电流失效和串行输出模数转换电路MOS器件欧姆短路的定位,并结合微结构观测分析了失效原因。研究结果表明,SIFT技术能有效分析光发射显微镜(EMMI)和激光光束诱导阻抗变化测试(OBIRCH)技术较难定位的缺陷,弥补了这些常规失效分析技术的不足。 相似文献
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ESD保护电路已经成为CMOS集成电路不可或缺的组成部分,在当前CMOS IC特征尺寸进入深亚微米时代后,如何避免由ESD应力导致的保护电路的击穿已经成为CMOS IC设计过程中一个棘手的问题.光发射显微镜利用了IC芯片失效点所产生的显微红外发光现象可以对失效部位进行定位,结合版图分析以及微分析技术,如扫描电子显微镜SEM、聚焦离子束FIB等的应用可以揭示ESD保护电路的失效原因及其机理.通过对两个击穿失效的CMOS功率ICESD保护电路实际案例的分析和研究,提出了改进ESD保护电路版图设计的途径. 相似文献
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光发射显微分析、光致电阻变化技术两种电失效定位方法在精确定位缺陷上存在局限性,为此提出了基于SEM电压衬度的联用方法用于精确定位集成电路缺陷。首先根据电特性测试进行光发射显微分析或者光致电阻变化分析,结合电路原理和版图,提出失效区域的假设,再进行电压衬度像分析,通过衬度翻转可精确和快速确定缺陷位置,最后通过FIB或者TEM对缺陷进行表征。案例研究显示,有源电压衬度可定位双极型电路铝金属化开路失效,无源电压衬度定位CMOS电路多晶硅栅刻蚀异常引起的漏电流失效,结合形貌和材料分析得出缺陷形成机理和根本原因。 相似文献
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光发射显微镜(PEM)系统是应用于微电子器件漏电流定位和分析的有效工具。利用PEM系统的激光光束诱导阻抗变化(OBIRCH)功能和光发射(EMMI)功能,从正面可直接对功率器件大的漏电流进行定位观察。利用PEM的EMMI功能,还可从背面对器件微弱的漏电流进行定位和分析。介绍了PEM系统对功率器件芯片不同量级的漏电流进行定位与分析的应用,为分析功率器件漏电流失效提供依据。 相似文献
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Michael Reilly 《半导体技术》2004,29(12)
DUV lithography, using the 248 nm wavelength, is a viable manufacturing option for devices with features at 130 nm and less. Given the low kl value of the lithography, integrated process development is a necessary method for achieving acceptable process latitude. The application of assist features for rule based OPC requires the simultaneous optimization of the mask, illumination optics and the resist.Described in this paper are the details involved in optimizing each of these aspects for line and space imaging.A reference pitch is first chosen to determine how the optics will be set. The ideal sigma setting is determined by a simple geometrically derived expression. The inner and outer machine settings are determined, in turn,with the simulation of a figure of merit. The maximum value of the response surface of this FOM occurs at the optimal sigma settings. Experimental confirmation of this is shown in the paper.Assist features are used to modify the aerial image of the more isolated images on the mask. The effect that the diffraction of the scattering bars (SBs) has on the image intensity distribution is explained. Rules for determining the size and placement of SBs are also given.Resist is optimized for use with off-axis illumination and assist features. A general explanation of the material' s effect is discussed along with the affect on the through-pitch bias. The paper culminates with the showing of the lithographic results from the fully optimized system. 相似文献
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Thomas M.Trexler 《半导体技术》2004,29(5)
From its emergence in the late 1980s as a lower cost alternative to early EEPROM technologies, flash memory has evolved to higher densities and speedsand rapidly growing acceptance in mobile applications.In the process, flash memory devices have placed increased test requirements on manufacturers. Today, as flash device test grows in importance in China, manufacturers face growing pressure for reduced cost-oftest, increased throughput and greater return on investment for test equipment. At the same time, the move to integrated flash packages for contactless smart card applications adds a significant further challenge to manufacturers seeking rapid, low-cost test. 相似文献
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The parallel thinning algorithm with two subiterations is improved in this paper. By analyzing the notions of connected components and passes, a conclusion is drawn that the number of passes and the number of eight-connected components are equal. Then the expression of the number of eight-connected components is obtained which replaces the old one in the algorithm. And a reserving condition is proposed by experiments, which alleviates the excess deletion where a diagonal line and a beeline intersect. The experimental results demonstrate that the thinned curve is almost located in the middle of the original curve connectivelv with single pixel width and the processing speed is high. 相似文献
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The relation between the power of the Brillouin signal and the strain is one of the bases of the distributed fiber sensors of temperature and strain. The coefficient of the Bfillouin gain can be changed by the temperature and the strain that will affect the power of the Brillouin scattering. The relation between the change of the Brillouin gain coefficient and the strain is thought to be linear by many researchers. However, it is not always linear based on the theoretical analysis and numerical simulation. Therefore, errors will be caused if the relation between the change of the Brillouin gain coefficient and the strain is regarded as to be linear approximately for measuring the temperature and the strain. For this reason, the influence of the parameters on the Brillouin gain coefficient is proposed through theoretical analysis and numerical simulation. 相似文献
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Today, micro-system technology and the development of new MEMS (Micro-Electro-Mechanical Systems) are emerging rapidly. In order for this development to become a success in the long run, measurement systems have to ensure product quality. Most often, MEMS have to be tested by means of functionality or destructive tests. One reason for this is that there are no suitable systems or sensing probes available which can be used for the measurement of quasi inaccessible features like small holes or cavities. We present a measurement system that could be used for these kinds of measurements. The system combines a fiber optical, miniaturized sensing probe with low-coherence interferometry, so that absolute distance measurements with nanometer accuracy are possible. 相似文献
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GU Min-fen LIANG Zhong-cheng WANG Ren-zhou DONG Xiang-mei ZHANG Pei-ming CHEN Jia-bi 《光电子快报》2008,4(2):150-152
Waveguide multilayer optical card (WMOC) is a novel storage device of three-dimensional optical information. An advanced readout system fitting for the WMOC is introduced in this paper. The hardware mainly consists of the light source for reading, WMOC, motorized stages addressing unit, microscope imaging unit, CCD detecting unit and PC controlling & processing unit. The movement of the precision motorized stage is controlled by the computer through Visual Basic (VB) language in software. A control panel is also designed to get the layer address and the page address through which the position of the motorized stages can be changed. The WMOC readout system is easy to manage and the readout result is directly displayed on computer monitor. 相似文献
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Qi-jiang Ran Pei-de Han Yu-jun Quan Li-peng Gao Fan-ping Zeng Chun-hua Zhao 《光电子快报》2008,4(4):239-242
This paper presents a new method to increase the waveguide coupling efficiency in hybrid silicon lasers. We find that the propagation constant of the InGaAsP emitting layer can be equal to that of the Si resonant layer through improving the design size of the InP waveguide. The coupling power achieves 42% of the total power in the hybrid lasers when the thickness of the bonding layer is 100 nm. Our result is very close to 50% of the total power reported by Intel when the thickness of the thin bonding layer is less than 5 nm. Therefore, our invariable coupling power technique is simpler than Intel's. 相似文献
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It is a key problem to accurately calculate beam spots' center of measuring the warp by using a collimated laser. A new method, named double geometrical center method (DGCM), is put forward for the first time. In this method, a plane wave perpendicularly irradiates an aperture stop, and a charge couple device (CCD) is employed to receive the diffraction-beam spots, then the geometrical centers of the fast and the second diffraction-beam spots are calculated respectively, and their mean value is regarded as the center of datum beam. In face of such adverse instances as laser intension distributing defectively, part of the image being saturated, this method can still work well. What's more, this method can detect whether an unacceptable error exits in the courses of image receiving, processing and calculating. The experimental results indicate the precision of this method is high. 相似文献
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The collinearly phase-matching condition of terahertz-wave generation via difference frequency mixed in GaAs and InP is theoretically studied. In collinear phase-matching, the optimum phase-matching wave hands of these two crystals are calculated. The optimum phase-matching wave bands in GaAs and lnP are 0.95-1.38μm and 0.7-0.96μm respectively. The influence of the wavelength choice of the pump wave on the coherent length in THz-wave tuning is also discussed. The influence of the temperature alteration on the phase-matching and the temperature tuning properties in GaAs crystal are calculated and analyzed. It can serve for the following experiments as a theoretical evidence and a reference as well. 相似文献
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Composition dependence of bulk and surface phonon-polaritons in ternary mixed crystals are studied in the framework of the modified random-element-isodisplacement model and the Bom-Huang approximation. The numerical results for Several Ⅱ - Ⅵ and Ⅲ- Ⅴ compound systems are performed, and the polariton frequencies as functions of the compositions for ternary mixed crystals AlxGa1-xAs, GaPxAS1-x, ZnSxSe1-x, GaAsxSb1-x, GaxIn1-xP, and ZnxCd1-xS as examples are given and discussed. The results show that the dependence of the energies of two branches of bulk phonon-polaritons which have phonon-like characteristics, and surface phonon-polaritons on the compositions of ternary mixed crystals are nonlinear and different from those of the corresponding binary systems. 相似文献