化学溶液工艺制备多晶钼酸钙薄膜

利用化学溶液途径成功地制备出了符合化学计量比的钼酸钙多晶薄膜.通过旋涂技术将薄膜沉积在Si(100)或载玻片上,并利用SEM技术表征了薄膜的表面形貌,以及薄膜的表面随退火温度变化的特征.X射线衍射结果显示,在溶液中,钼酸钙化合物就已直接生成而不需经过任何中间过程.退火温度对钼酸钙薄膜微观结构的影响研究表明,当退火高于550℃时薄膜的生长具有择优取向特征.钼酸钙薄膜的拉曼光谱测试结果进一步表明了钼酸钙薄膜的四方相结构特征以及薄膜微观结构的均一性.此外,本文还报道了不同温度下测得的钼酸钙薄膜在紫外光激发下的光致发光性质,其研究结果表明,在276 nm的紫外光激发下,钼酸钙薄膜具有一个宽的(～200 nm)绿光发射带.     

Experimental Investigation of Spray-Deposited Fe-Doped ZnO Nanoparticle Thin Films: Structural, Microstructural, and Optical Properties

Structural, microstructural, and optical properties of the undoped and Fe-doped zinc oxide (ZnO) thin films grown by spray pyrolysis technique using zinc nitrate as a host precursor have been reported here. X-ray diffraction spectra confirm that all the films have stable wurtzite structure and the effects of Fe dopants on the diffraction patterns have been found to be in agreement with the Vegard’s law. Scanning electron microscopy results show good uniformity and dense surface having spherical-shaped grains. Energy dispersive x-ray analyses with elemental mapping of the Fe-doped films show that the Fe dopants are incorporated homogeneously into the ZnO film matrix. The x-ray photoelectron spectroscopy spectra confirm the presence of 3+ oxidation state of Fe in the doped films. Atomic force microscopy analyses clearly show that the average surface roughness and the grain size decrease with the addition of Fe dopants. Optical studies reveal that the optical band gap value decreases on Fe doping. The 1 at.% Fe-doped film shows normal dispersion for the wavelength range 450-700 nm. The PL spectra of the films show a strong ultraviolet emission centered at ~388 nm in the case of 1 at.% Fe-doped film. A slow photo current response in the films has been observed in the transient photoconductivity measurement.     

Structural and optical properties of epitaxial ZnO thin films on 4H–SiC (0 0 0 1) substrates prepared by pulsed laser deposition

Epitaxially grown ZnO thin films on 4H–SiC (0 0 0 1) substrates were prepared by using a pulsed laser deposition (PLD) technique at various substrate temperatures from room temperature to 600 °C. The crystallinity, in-plane relationship, surface morphology and optical properties of the ZnO films were investigated by X-ray diffraction (XRD), atomic force microscopy (AFM) and photoluminescence (PL) measurements, respectively. XRD analysis showed that highly c-axis oriented ZnO films were grown epitaxially on 4H–SiC (0 0 0 1) with no lattice rotation at all substrate temperatures, unlike on other hexagonal-structured substrates, due to the very small lattice mismatch between ZnO and 4H–SiC of ～5.49%. Further characterization showed that the substrate temperature has a great influence on the properties of the ZnO films on 4H–SiC substrates. The crystalline quality of the films was improved, and surfaces became denser and smoother as the substrate temperature increased. The temperature-dependent PL measurements revealed the strong near-band-edge (NBE) ultraviolet (UV) emission and the weak deep-level (DL) blue-green band emission at a substrate temperature of 400 °C.     

基片温度对Co掺杂ZnO薄膜室温铁磁性的影响

采用磁控共溅射法在Al2O3(0001)基片上沉积了Zn1-xCoxO(x=0.08～0.3%)薄膜,研究了基片温度对Co掺杂ZnO薄膜结构和磁性的影响.结果表明:Al2O3(001)基片很好地诱导了ZnCoO薄膜(002)取向生长,并且所有的薄膜均显示室温铁磁性.较低的基片温度不仅能有效抑制薄膜中Co2O3杂质相的产生,而且薄膜磁矩较大.紫外-可见光谱也表明,薄膜中Co2 取代了ZnO中Zn2 的位置.     

Preparation and optical characteristics of ZnO films by chelating sol-gel method

The effect of different annealing temperatures on the structure, morphology, and optical properties of ZnO thinf ilms prepared by the chelating sol-gel method was investigated. Zinc-oxide thin films were coated on quartz glass substrates by dip coating. Zinc nitrate, absolute ethanol, and citric acid were used as precursor, solvem, and chelating agent, respectively. The results show that ZnO films derived flom zinc-citrate have lower crystallization temperature (below 400℃),and that the crystal structure is wurtzite. The films, treated over 500℃, consist of nano-pardcles and show to be porous at 600℃. The particle size of the film increases with the increase of the annealing temperature. The largest particle size is 60 nm at 600℃. The optical transmittances related to the annealing temperatures become 90% higher in the visible range. The film shows a stalting absorption at 380 ran, and the optical band-gap of the thin film (fired at 500℃) is 3.25 eV and close to the intrinsic band-gap of ZnO (3.2 eV).     

Synthesis and characterization of sol-gel derived gallium-doped zinc oxide thin films

Gallium-doped ZnO (GZO) semiconductor thin films were prepared by a sol-gel spin coating process. The effects of Ga dopant concentrations on the microstructure, electrical resistivity, optical properties, and photoluminescence (PL) were studied. XRD results showed that all the as-prepared GZO films had a wurtzite phase and a preferred orientation along the [0 0 2] direction. ZnO thin films doped with Ga had lower electrical resistivity, lower RMS roughness, and improved optical transmittance in the visible region. The lowest average electrical resistivity value, 2.8 × 10² Ω cm, was achieved in the ZnO thin films doped with 2% Ga, which exhibited an average transmittance of 91.5%. This study also found that the optical band gap of Ga-doped films was 3.25 eV, slightly higher than that of undoped samples (3.23 eV), and the PL spectra of GZO films showed strong violet-light emission centers at about 2.86 eV (the corresponding wavelength of which is about 434 nm).     

Surface morphology and photoluminescence properties of ZnO thin films obtained by PLD

ZnO thin films on Si(111) substrate were deposited by laser ablation of Zn target in oxygen reactive atmosphere, Nd-YAG laser with wavelength of 1 064 nm was used as laser source. XRD and FESEM microscopy were applied to characterize the structure and surface morphology of the deposited ZnO films. The optical properties of the ZnO thin films were characterized by photoluminescence. The UV and deep level (yellow-green) light were observed from the films. The UV light is the intrinsic property and deep level light is attributed to the existence of antisite defects (Ozn). The intensity of UV and deep level light depends strongly on the surface morphology and is explained by the surface roughness of ZnO film. A strongly UV emission can be obtained from ZnO film with surface roughness in nanometer range.     

溅射气压对ZnO透明导电薄膜光电性能的影响

采用射频磁控溅射方法,在普通玻璃上制备了具有高度c轴取向的ZnO薄膜,研究了溅射气压(0.2～1.5 Pa)对ZnO薄膜的微观结构和光电性能的影响.AFM、XRD、UV-Vis分光光度计及四探针法研究表明:随着溅射气压的增大,ZnO薄膜沿c轴方向的结晶质量提高,晶粒细化,薄膜表面更加致密,晶粒大小更加均匀;ZnO薄膜在400～900nm范围内的平均透过率均高于85%,其中在0.5～1.5 Pa范围内其透过率高于90%;样品在高纯氮气气氛中经350 ℃,300 s退火后,电阻率最低达到10-2 Ω-cm量级.     

SrMoO4薄膜的化学溶液制备技术和发光性质研究

利用化学溶液技术制备了具有单一白钨矿结构的SrMoO4多晶薄膜.用X射线衍射仪(XRD)分析了薄膜的晶相结构,用红外光谱(IR)对薄膜的均一性进行了表征,用原子力显微镜(AFM)对薄膜的表面形貌进行了观察.采用荧光光谱仪测试了所制SrMoO4薄膜在不同温度下的光致发光特性.研究结果表明,在276 nm的紫外光激发下,钼酸锶薄膜室温条件下显示出良好的光致发光特性,呈现宽带(～300 nm)的发光特征.另外,光致发光光谱的峰值呈现出明显的温度漂移特性,从511 nm(11 K)变化到484 nm(293 K).此外,本文还讨论了SrMoO4薄膜在闪烁材料和紫外成像薄膜材料方面的可能应用.     

Structural, optical and chemical analysis of zinc sulfide thin film deposited by RF-mganetron sputtering and post deposition annealing

Zinc sulfide (ZnS) thin films were deposited by radio-frequency (RF) magnetron sputtering. The effects of the process parameters such as deposition time and RF-power, as well as of post deposition annealing under oxygen containing atmospheres, on the material properties of ZnS films have been investigated. X-ray diffraction analysis reveals out that the as-deposited ZnS films preferred (002) hexagonal wurtzite and (111) cubic zinc blend (111) at 28.60°, while a thicker ZnS film has additional hexagonal wurtzite (100), (110), and (200) planes coexisting with the preferred oriented-planes, suggesting that the thickness is dependent on the growth of ZnS. After annealing, ZnO phases were detected, indicating island-like grain growth on the surface of the ZnS film. By increasing the deposition time and the RF power, the optical band gap energy (E_g) of the ZnS film changes from 4.13 to 3.87 eV, indicating the presence of lower E_g with thicker ZnS film. The lower E_g (～3.27 eV) value of the annealed films is attributed to the ZnO transition. Unlike bulk ZnS material (Zn/S～1.08), deposited ZnS thin film has Zn-rich and S-deficient composition (Zn/S～1.28). However, the Zn/S ratio is closer to the ideal value when there is a longer deposition time or higher RF-power.     

大气等离子喷涂Al2O3-3%TiO2涂层的性能

利用两种中频交流磁控溅射电源,溅射Al2O3含量为2%的两块氧化锌铝陶瓷靶材,在不同衬底温度的条件下制备得到了ZAO薄膜。研究了不同衬底温度条件下不同靶材和溅射电源对ZAO薄膜结构、电学和光学性能的影响。结果表明,制备得到的ZAO薄膜均具有c轴择优取向生长的晶体结构,在衬底温度为240℃时,得到的ZAO薄膜的电阻率低至1.4×10-3Ω·cm,可见光平均透过率在82%以上。     

Spray Pyrolysis Deposition of ZnO Thin Films from Zinc Chloride Precursor Solution at Different Substrate Temperatures

ZnO films were prepared at different substrate temperatures through spraying pyrolysis deposition of zinc chloride precursor onto glass substrate. Substrate temperature affects surface morphology of films and therefore their optical and electrical properties. All films are polycrystalline with Wurtzite crystal structure and preferentially grow along c-axis direction. Formation of ZnO rods start at about 500 °C. The diameter and length of rods deposited at 500 °C are350–500 and 550–700 nm, respectively. By increasing substrate temperature, film becomes more coverage and diameter of the rods reduces to 250–300 nm but their length increases to 1,000–1,200 nm, respectively. Optical transmission in visible region decreases with increasing substrate temperature. An ultraviolet emission and two visible emissions at 2.82 and2.37 eV are observed for photoluminescence spectra at room temperature. The resistivity of ZnO films increases with increasing substrate temperature due to surface morphology.     

Influence of iron doping on morphological,structural and optical properties of zinc oxide thin films prepared by dip-coating method

Undoped zinc oxide and iron-doped zinc oxide thin films have been deposited by the sol-geldipcoating method. The Fe/Zn nominal volume ratio was 5% in the solution. The effects of Fe incorporation on morphological, structural, and optical properties of ZnO films were investigated. The scanning electron microscopy measurements showed that the surface morphology of the prepared thin films was affected by Fe doping. The X-ray diffraction patterns of the thin films showed that doped incorporation leads to substantial changes in the structural characteristics of ZnO thin films. The optical absorption measurements indicated a band gap in the range of 3.31 to 3.19 eV. The X-ray photoelectron spectroscopy demonstrated that Fe is incorporated in the ZnO matrix with 6.5 atomic percent (at %). The energy dispersive spectroscopy studies indicated the formation of ZnO with high efficiency.     

Novel blue-violet photoluminescence from sputtered ZnO thin films

Although wurtzite ZnO has a simple crystal structure, the mechanism of its photoluminescence is still controversial and this topic has attracted numerous research efforts. The polycrystalline ZnO thin films studied here were deposited on Si (1 0 0) substrate by sputtering in pure Ar atmosphere, and then thermally annealed in air at various temperatures ranging from 300 °C to 1050 °C. The photoluminescence spectra of the as-synthesized ZnO thin films exhibited some interesting results: two novel and remarkable blue-violet emission peaks around 415 nm and 440 nm were discovered, while the usual strong green emission peak at 450-550 nm was absent. These two blue-violet peaks might originate from zinc interstitial and zinc vacancy point defects, which were introduced during sputtering in a non-oxygen atmosphere. Strong blue-violet emissions of ZnO are highly desirable and they have great potential in light emitting and biological fluorescence labeling applications.     

Spray deposited superhydrophobic ZnO coatings via seed assisted growth

Superhydrophobic zinc oxide (ZnO) coatings were synthesized by a simple and cost-effective spray pyrolysis technique (SPT) via seed assisted growth onto the glass substrates at 723 K from an aqueous zinc acetate precursor solution. Initially, the ZnO seeds were synthesized from an aqueous 0.4 M zinc acetate solution onto the glass substrates at 723 K. For the seed assisted growth of ZnO, the solution concentrations (0.1 M to 0.4 M) were used and its effect on structural, morphological, optical and wettability properties of ZnO thin films was investigated. The synthesized films were found to be polycrystalline, with preferential growth along c-axis. Scanning electron microscopy (SEM) images show the uniform distribution of spherical grains of about 60-80 nm grain size. After seed assisted growth, film surface becomes very rough. The films were specular and transmittance of thin films decreases as the concentration of the precursor solution increases. The optical absorption spectrum shows a sharp absorption band-edge at 381 nm, corresponding to optical gap energy (Eg) of 3.25 eV. All samples are superhydrophobic in nature. The Zn4 sample shows the superhydrophobicity with highest value of the contact angle (CA) i.e. 165°. Such a superhydrophobic coatings can be useful in the anti-snow, anti-fog and self cleaning surfaces.     

The evolution behavior of structures and photoluminescence of K-doped ZnO thin films under different annealing temperatures

In this work, 1 at.% K-doped ZnO thin films were prepared by sol-gel method on Si substrates. The evolution behavior of the structures and photoluminescence of these films under different annealing temperatures was deeply studied. The crystal structures and surface morphology of the samples were analyzed by an X-ray diffractometer and an atomic force microscope, respectively. The photoluminescence spectra were used to study the luminescent behavior of the samples. The results showed that the films had a hexagonal wurtzite structure and were preferentially oriented along the c-axis perpendicular to the substrate surface. All the samples showed a strong ultraviolet emission and a weak blue emission. With the increase of annealing temperature, the ZnO grains gradually grew up; at the same time, the blue emission gradually decreased. The sample annealed at 500 °C showed the best crystalline quality and strongest ultraviolet emission. The authors think that the blue emission in these samples is mainly connected with K interstitial defects. When the 1 at.% K-doped ZnO thin film is annealed at high temperatures (≥600 °C), most of K interstitials move into ZnO lattice sites replacing Zn. As a result, the blue emission resulting from K interstitial defects also decreased.     

Fabrication of ZnO films by radio frequency magnetron sputtering and annealing

ZnO thin films were deposited on Si（111） substrates through a radio frequency （rf） magnetron sputtering system. Then the samples were annealed at different temperatures in air ambience and ammonia ambience respectively. The structure and composition of the ZnO films were studied by X-ray diffraction （XRD） and X-ray photoelectron spectroscopy （XPS）. The morphology of the samples was studied by scanning electron microscopy （SEM）. Measured results show that ZnO films with hexagonal wurtzite structure were grown on Si（111） substrates when annealed in the two ambiences. The volatilization process of ZnO in the ammonia ambience at high temperature was discussed and the mechanism of the reaction was analyzed.     

电化学沉积Nd掺杂ZnO薄膜的结构和光学性质的研究

用电化学沉积方法制备出了Nd掺杂的ZnO薄膜,并研究其结构和光学性质。X-射线衍射谱的结果表明Nd3 替代Zn2 进入到ZnO晶格中,并没有引起杂相的出现。吸收谱的分析表明,随着掺杂浓度的增大,吸收峰向短波长方向移动 ,即发生蓝移。光致发光谱的结果表明随着Nd3 掺杂浓度的增大,紫外峰强度减小,可见光部分强度增大了。     

Influence of growth temperature on the optical and structural properties of ultrathin ZnO films

This study investigates the effect of growth temperature on the optical and structural properties of ultrathin ZnO films on the polished Si substrate. Thickness of the ultrathin ZnO films deposited by atomic layer deposition (ALD) method was about 10 nm. Photoluminescence (PL), X-ray diffraction (XRD), transmission electron microscopy (TEM) and atomic force microscopy (AFM) techniques were used to measure the properties of ultrathin ZnO films. Experimental results showed that the ultrathin ZnO film deposited at 200 °C had excellent ultraviolet emission intensity, and the average roughness of the film surface was about 0.26 nm.     

Zn靶与掺铝ZnO靶共溅射制备ZnO:Al薄膜及其性能

采用Zn靶和ZnO(掺2%Al2O3(质量分数))陶瓷靶在玻璃衬底上共溅射沉积Al掺杂ZnO薄膜,即ZnO:Al透明导电薄膜,研究Zn靶溅射功率(0～90 W)和衬底温度(室温、100℃和200℃)对薄膜结构、形貌、光学和电学性能的影响。结果表明:按双靶共溅射工艺制备的ZnO:Al薄膜的晶体结构均为六角纤锌矿结构,且随着Zn靶溅射功率的增加,薄膜的结晶质量呈现出先改善后变差的规律,薄膜中的载流子浓度逐渐升高,电阻率逐渐降低,而薄膜的光学性能受其影响不大;随着衬底温度的升高,薄膜的结晶性能得到改善,薄膜的可见光透过率增强,电阻率降低。