Broadband ultrasonic transducers using a LiNbO3 plate with a ferroelectric inversion layer

Some heat treatment of a lithium niobate (LiNbO/sub 3/) plate induces domain inversion, thereby yielding a ferroelectric inversion layer. In such a piezoelectric plate with an inversion layer, even-order thickness-extensional modes, as well as odd-order modes, can be excited piezoelectrically. Therefore, the ultrasonic transducer using such a piezoelectric plate is expected to operate over a wide frequency range. In this paper, it is shown that broadband ultrasonic transducers can be obtained at a certain thickness ratio of inversion layer to plate, and that the transducer characteristics differ depending on whether the inversion layer is on the front side or on the backside. The broadband characteristics are experimentally demonstrated by fabricating transducers with 9 MHz or 75 MHz center frequency using 36/spl deg/ rotated Y-cut LiNbO/sub 3/ plates with a ferroelectric inversion layer.     

Half-thickness inversion layer high-frequency ultrasonic transducers using LiNbO3 single crystal.

Half-thickness inversion layer high-frequency ultrasonic transducers were fabricated using lithium niobate (LiNbO3) single crystal plate. The transducers developed for this study used a 36 degrees rotated Y-cut LiNbO3 thin plate with an active element thickness of 115 microm. The designed center frequency was in the range of 30 to 60 MHz. Half-thickness inversion layer was formed after the sample was annealed at a high temperature, and it is shown that the inversion layer thickness can be controlled by the temperature. Silver powder/epoxy composite and parylene were used as acoustic matching layers. A lossy silver epoxy was used as the backing material. Using an analytical method, the electrical impedance for different inversion layer ratios was determined. The measured resonant frequency was consistent with the modeled data. Even-order higher frequency broadband ultrasonic transducers with a center frequency at 60 MHz was obtained using half-thickness inversion layer of LiNbO3 single crystal.     

Characterization of high-frequency, single-element focused transducers with wire target and hydrophone

In this paper, a wire-target technique was used for lateral beam profile measurements for a single-element, focused transducers in the very high-frequency range (35-60 MHz). Two wire targets made from 9-cm long tungsten wires with diameters of 8 microm and 20 microm were used as the pulse-echo targets to measure the lateral beam profiles at the focal plane of two single-element, focused transducers, a spherically focused 40 MHz transducer and a lens-focused in-house lithium niobate (LiNbO3) 60 MHz transducer. For comparison, measurements on the same transducers were performed by three small-aperture hydrophones with geometrical diameters varying from 37 microm to 150 microm. Tomographic reconstruction of the acoustic field from the spherically focused transducer also was conducted. Results obtained with the wire-target technique are comparable to those obtained with small-aperture hydrophones in characterizing lateral radiation patterns of a single-element, focused transducer in the high-frequency range (35-60 MHz). However, the wire-target method may overestimate pulse length because of the additional attenuation caused by the return path. Compared to small-aperture hydrophones, the wire-target technique is simpler and more cost effective. Its major advantage, however, is in the frequency range above 100 MHz in which commercial hydrophones are not yet available.     

Analysis of the film thickness dependence of a single-phase unidirectional transducer using the coupling-of-modes theory and the finite-element method

A coupling-of-modes (COM) analysis is given for the film thickness dependence of a single-phase undirectional transducer (SPUDT), while the finite-element method (FEM) is employed for evaluating all the coefficients of COM equations. The relationship between the directivity and dispersion curves of the transducer is discussed. The theoretical analysis shows that when the electrode finger thickness increases through a threshold value, a mode conversion phenomenon occurs and the value of the reflection phase changes from the positive to the negative. This result predicts that the forward direction of a film thickness difference type SPUDT will move conversely when the electrode film thickness increases through the threshold thickness. A prototype step-type SPUDT, fabricated on 128 degrees Y-X LiNbO(3) substrate, showed a directivity of 10 dB/transducer at 481.5 MHz, and a low-loss surface acoustic wave (SAW) filter showed a minimum insertion loss of 3.8 dB.     

High-frequency Lamb wave device composed of MEMS structure using LiNbO3 thin film and air gap

High-frequency devices operating at 3 GHz or higher are required, for instance, for future 4th generation mobile phone systems in Japan. Using a substrate with a high acoustic velocity is one method to realize a high-frequency acoustic or elastic device. A Lamb wave has a high velocity when the substrate thickness is thin. To realize a high-frequency device operating at 3 GHz or higher using a Lamb wave, a very thin (less than 0.5 μm thick) single-crystal plate must be used. It is difficult to fabricate such a very thin single crystal plate. The authors have attempted to use a c-axis orientated epitaxial LiNbO(3) thin film deposited by a chemical vapor deposition system (CVD) instead of using a thin LiNbO(3) single crystal plate. Lamb wave resonators composed of a interdigital transducer (IDT)/the LiNbO(3) film/air gap/base substrate structure like micro-electromechanical system (MEMS) transducers were fabricated. These resonators have shown a high frequency of 4.5 and 6.3 GHz, which correspond to very high acoustic velocities of 14,000 and 12,500 m/s, respectively, have excellent characteristics such as a ratio of resonant and antiresonant impedance of 52 and 38 dB and a wide band of 7.2% and 3.7%, respectively, and do not have spurious responses caused by the 0th modes of shear horizontal (SH(0)) and symmetric (S(0)) modes.     

一种基于DDS的三频点标准超声功率源的设计

结合理论方法研究和具体硬件的设计,提出一种基于铌酸锂单晶基片的三频点标准超声换能器,由单片机控制DDS芯片产生3种频率的正弦信号,经过高频运算放大器电路,对标准超声换能器激励输出标准超声功率,从而形成三频点标准超声功率源,可作为一种超声功率传递标准。三频点标准超声功率源实现了18.9MHz高频超声波的输出。和英国NPL测量比对的结果显示,3个频率点上的超声功率值误差均不大于±5%,验证了三频点标准超声功率源输出数据的有效性。     

Fabrication of high frequency spherically shaped ceramictransducers

Difficulty in obtaining well focused efficient ultrasound transducers has limited the development of new high frequency applications of B-mode imaging. This paper describes a method for fabricating high frequency (53 MHz) spherically focused lead zirconate titanate (PZT) transducers. A transducer is fabricated by bonding a malleable backing layer onto a thin plate of PZT and then pressing the plate into a spherically shaped well. The backing layer evenly distributes stresses across the material when it is pressed into the well. Local concentrations of stress which lead to fracture are avoided and the material can be deformed without macroscopic cracking. The characteristics of a 2 mm diameter 53 MHz PZT transducer with a 4 mm focal length are described. A lateral beam width of 68 μm and a 12 dB depth of field of 1.5 mm were obtained. The minimum two-way insertion loss of the system was -25 dB and the 6 dB bandwidth of the pulse echo response was 30%. An image of a resolution phantom and an in vivo skin image illustrate the excellent imaging characteristics of the transducer     

Design of efficient, broadband single-element (20-80 MHz) ultrasonic transducers for medical imaging applications

This paper discusses the design, fabrication, and testing of sensitive broadband lithium niobate (LiNbO/sub 3/) single-element ultrasonic transducers in the 20-80 MHz frequency range. Transducers of varying dimensions were built for an f# range of 2.0-3.1. The desired focal depths were achieved by either casting an acoustic lens on the transducer face or press-focusing the piezoelectric into a spherical curvature. For designs that required electrical impedance matching, a low impedance transmission line coaxial cable was used. All transducers were tested in a pulse-echo arrangement, whereby the center frequency, bandwidth, insertion loss, and focal depth were measured. Several transducers were fabricated with center frequencies in the 20-80 MHz range with the measured -6 dB bandwidths and two-way insertion loss values ranging from 57 to 74% and 9.6 to 21.3 dB, respectively. Both transducer focusing techniques proved successful in producing highly sensitive, high-frequency, single-element, ultrasonic-imaging transducers. In vivo and in vitro ultrasonic backscatter microscope (UBM) images of human eyes were obtained with the 50 MHz transducers. The high sensitivity of these devices could possibly allow for an increase in depth of penetration, higher image signal-to-noise ratio (SNR), and improved image contrast at high frequencies when compared to previously reported results.     

Collinear guided wave to leaky wave acoustooptic interactions in proton-exchanged LiNbO(3) waveguides

The results of a detailed theoretical study on collinear guided wave to leaky wave acoustooptic (AO) interactions in proton-exchanged LiNbO(3) (PE:LiNbO(3)) planar waveguides are presented. The guided-to-leaky mode conversion for an input optical beam at the wavelength of 632.8 nm by the induced diffraction grating from a collinear surface acoustic wave (SAW) is analyzed using a generalized multimode formulation of the coupled mode theory. Mode conversion efficiency and AO bandwidth have been calculated as functions of acoustic frequency, interaction length, guiding layer thickness, and acoustic drive power density for three cuts of the LiNbO(3) substrate. High performance configurations that are desirable for application to demultiplexing and switching in optical communication systems are identified, and the corresponding channel capacity and frequency resolution are determined. For example, it was shown that the X-cut configuration features the highest mode conversion efficiency. However, a relatively small AO bandwidth is associated with this configuration. Both high mode conversion efficiency and large AO bandwidth can be accomplished at the guiding layer thickness of 1.0 mum. A TM(o)-->TE(nu) mode conversion efficiency as high as 42% together with an AO bandwidth of approximately 70 MHz can be achieved in the Z-cut waveguide at the guiding layer thickness of 1.0 mum, acoustic drive power density of 50 mW/mm, interaction length of 40 mm, and acoustic frequency of 460 MHz. The corresponding channel capacity and frequency resolution are 745 and 0.09 MHz, respectively. Measured mode conversion efficiencies as high as 90 and 78% obtained at the acoustic frequencies of 107 and 367 MHz using the X-cut substrate and the Y-propagation SAW have verified the theoretical prediction on the mode conversion efficiencies.     

调频光纤陀螺中的集成光学频移器

报道了一种在Ｙ一切铁扩散ＬｉＮｂＯ３平板光波导上制作的调频光纤陀螺用集成光学频移器。它由一对球面波导短程透镜和两个声表面波声光调制器组成。频移宽度为１０ＭＨｚ，调制器的中。Ｃ频率为１０７ＭＨｚ，驱动功率为２００ｍＷ。     

Focusing with an optoacoustic transducer

A prototype of an ultrasonic transducer has been developed that uses an optical input to control the ultrasonic output. This transducer is called an optoacoustic transducer (OAT) and provides an ultrasonic pattern that is spatially similar to the optical pattern used to illuminate it. When a focus-inducing optical pattern, such as a zone plate, is used, an acoustic focus is achieved. The success of this procedure depends on the use of amplitude-modulated light at the input and on filtering the received signal to eliminate the primary frequency. This provides an increase, from 30 dB to 70 dB, in the ratio of acoustic pressure in the illuminated regions to that in the dark regions. The prototype operates at 2.8 MHz and has been used to provide a good acoustic focus in water. A 3-dB beamwidth of 3.5 mm was measured at a range of 92 mm. The construction techniques and materials used are discussed.     

A low-loss SAW-TV-IF filter with an extended impedance matching range

A novel low-loss SAW (surface acoustic wave) filter for an intermediate frequency (IF) circuit in a color TV receiver has been developed. It consists of an apodized bidirectional and an unapodized group-type unidirectional transducer. The unidirectional transducer is designed to use different numbers of finger pairs in sending and reflecting electrodes for extension of the impedance-matching range. A thin-film capacitor for use as a phase shifter is monolithically fabricated on a 128 degrees Y-X LiNbO(3) substrate. A low insertion loss (11.3 dB) and impedance matching without adjustment are achieved at the same time without increasing the device chip size or number of electrical parts.     

P(VDF-TrFE) transducer with a concave annular structure for the measurement of layer thickness

A new type of transducer that measures the layer thickness at a small spot by spectroscopy is developed. It is made of piezoelectric copolymer film P(VDF-TrFE) with a concave annular structure. This transducer converges an ultrasonic wave on the specimen surface with oblique incidence. The layer thickness is estimated by means of a dip in the frequency spectrum of a reflected wave. Theoretical analysis using the angular spectrum theory and experimental evaluation of the transducer are described. The transducers operate in a frequency range from 7 MHz to 90 MHz. The output variation when the transducer scans a thin wire is in good agreement with a calculation of a line spread function. The lateral and axial resolutions estimated by the calculation of a point spread function are 0.61 lambda and 8.05 lambda, respectively.     

Piezoelectrically actuated flextensional micromachined ultrasound droplet ejectors

This paper reports a variation on the design of the flextensional transducer for use in ejecting liquids. The transducer is constructed by depositing a piezoelectric thin film to a thin, edge-clamped, circular annular plate. By placing a fluid behind one face of a vibrating compound plate that has an orifice at its center, we achieve continuous or drop-on-demand ejection of the fluid. We present results of ejection of water and isopropanol. The ejector is harmless to sensitive fluids and can be used to eject fuels as well as chemical and biological samples. Micromachined two-dimensional array piezoelectrically actuated flextensional droplet ejectors were realized using planar silicon micromachining techniques. Typical resonant frequency of the micromachined device ranges from 400 kHz to 4.5 MHz. The ejection of water through a 5-μm diameter orifice at 3.5 MHz was demonstrated by using the developed micromachined two-dimensional array ejectors     

Numerical analysis of wave generation and propagation in a focused surface acoustic wave device for potential microfluidics applications

We develop a 3-D finite element model of a focused surface acoustic wave (F-SAW) device based on LiNbO/sub 3/to analyze the wave generation and propagation characteristics for devices operating at MHz frequencies with varying applied input voltages. We compare the F-SAW device to a conventional SAW device with similar substrate dimensions and transducer finger periodicity. SAW devices with concentrically shaped focused interdigital transducer fingers (F-IDTs) are found to excite waves with high intensity and high beam-width compression ratio, confined to a small localized area. F-SAW devices are more sensitive to amplitude variations at regions close to the focal point than conventional SAW devices having uniform IDT configuration. We compute F-SAW induced streaming forces and velocity fields by applying a successive approximation technique to the Navier-Stokes equation (Nyborg's theory). The maximum streaming force obtained at the focal point varies as the square of the applied input voltage. Computed streaming velocities at the focal point in F-SAW devices are at least an order of magnitude higher than those in conventional SAW devices. Simulated frequency response indicates higher insertion losses in F-SAW devices than in conventional devices, reflecting their greater utility as actuators than as sensors. Our simulation findings suggest that F-SAW devices can be utilized effectively for actuation in microfluidic applications involving diffusion limited transport processes.     

Characterization of a broadband all-optical ultrasound transducer-from optical and acoustical properties to imaging

A broadband all-optical ultrasound transducer has been designed, fabricated, and evaluated for high- frequency ultrasound imaging. The device consists of a 2-D gold nanostructure imprinted on top of a glass substrate, followed by a 3 microm PDMS layer and a 30 nm gold layer. A laser pulse at the resonance wavelength of the gold nanostructure is focused onto the surface for ultrasound generation, while the gold nanostructure, together with the 30 nm thick gold layer and the PDMS layer in between, forms an etalon for ultrasound detection, which uses a CW laser at a wavelength far from resonance as the probing beam. The center frequency of a pulse-echo signal recorded in the far field of the transducer is 40 MHz with -6 dB bandwidth of 57 MHz. The signal to noise ratio (SNR) from a 70 microm diameter transmit element combined with a 20 microm diameter receive element probing a near perfect reflector positioned 1.5 mm from the transducer surface is more than 10 dB and has the potential to be improved by at least another 40 dB. A high-frequency ultrasound array has been emulated using multiple measurements from the transducer while mechanically scanning an imaging target. Characterization of the device's optical and acoustical properties, as well as preliminary imaging results, strongly suggest that all-optical ultrasound transducers can be used to build high-frequency arrays for real-time high-resolution ultrasound imaging.     

用于非线性兰姆波检测的高灵敏度宽带光纤光栅传感器

光纤传感器因其灵敏度高,已逐渐应用于超声检测的研究中,但大多数光纤传感器的频带响应范围有限,约为几百k Hz,很难检测到更高频率的信号。所提出的光纤布拉格光栅(Fiber Bragg Grating,FBG)传感器的高频检测范围可以达到4 MHz左右,大大提高了其检测带宽范围。文中将传感器应用于304不锈钢板兰姆波的非线性检测,同时与传统超声换能器的检测结果做对比。实验结果表明,用脉冲波激励信号时,FBG传感器可以检测到钢板兰姆波的基频到五倍频信号,表明FBG在检测兰姆波非线性上是有很大潜力的。     

Phononic crystals based on LiNbO3 realized using domain inversion by electron-beam irradiation.

We report in this paper about the realization of domain inversion in z-cut lithium niobate by electron beam irradiation in order to perform phononic crystals. The fabrication of these phononic crystals on z-cut LiNbO3, which is, in our case, a periodic repetition of voids and LiNbO3, was achieved by domain inversion followed by wet etching, taking advantage of the large difference in etching rate between z+ and z- faces. A pertinent choice of irradiation conditions such as accelerating voltage, beam current, and charge density was determined and optimized. Two-dimensional structures at the micrometer scale were then realized on z-cut LiNbO3. We demonstrate the achievement of hexagons with diameters between 2 microm and 18 microm, with a very important depth close to 30 microm, which depends on the etching time and the hole size. The obtained structures, which exhibit a filling fraction varying from 1% to 64%, were characterized before etching by polarizing microscope to visualize the inverted domains. After HF etching, scanning electron microscopy was used to observe the obtained phononic structures. Taking into account the obtained filling fraction values and the size of created hexagons, the frequency band gap of these structures is expected at a range of 200 to 350 MHz. As expected in this frequency range, we have proven experimentally the existence of the phononic band gap on z-cut LiNbO3 by combination of a realized phononic crystal with a surface acoustic wave (SAW) device.     

Techniques and physical properties of 10MHz short pulse focused ultrasonic transducer

A focused ultrasonic transducer used for biomedical purposes with a fundamental frequency of 10MHz and a pulse width of one and a half periods is described in this paper. Its physical properties are given including (1) focused acoustic field recorded by an optical means, (2) electric waveform for triggering the transducer and the corresponding waveform of the wave received by another transducer, and (3) result of tests on a sample object.     

Properties of shear horizontal acoustic plate modes in BT-cut quartz

Properties of shear horizontal acoustic plate modes (SHAPMs) in BT-cut quartz were calculated and measured. A delay line with a long interdigital transducer, deposited on -50.5°YX90°-oriented quartz plate, was used for the measurements. For one of the SHAPMs, at a frequency of about 100.4 MHz, insertion loss, turnover temperature, and quadratic temperature coefficient of frequency of about 10 dB, 15°C, and -30 ppb/(°C)(2) in air, respectively, were obtained. Using water and glycerin solutions, insertion loss changes against dynamic viscosity were measured for this mode. In a viscosity range from about 1 mPa·s to 1000 mPa·s, an insertion loss change of about 14 dB was obtained.