Novel directional couplers using broadside-coupled coplanarwaveguides for double-sided printed antennas

Two types of tight-coupling, broadband directional couplers employing open broadside-coupled coplanar waveguides (BC CPWs) are proposed which can easily be integrated with printed strip antennas. The first type uses the BC CPWs with dielectric overlays above and below the center substrate, while the second type uses the nonuniform BC CPWs. The scattering parameters of these directional couplers are derived with the even-odd mode analysis method based on the quasi-TEM wave approximation. Two 3-dB directional couplers, one for each type, are designed and measured characteristics are compared with theoretical results     

Attenuation characteristics of coplanar waveguides at subterahertz frequencies

We present experimental and simulation data of subterahertz attenuation of coplanar waveguides (CPWs) with wide and narrow ground planes. Experimental data are obtained by using a subpicosecond measurement technique based on electrooptic sampling. While time-domain data qualitatively describe the attenuation characteristics, they are converted to the frequency domain by a Fourier transform to give a quantitative interpretation. Simulation data are obtained by full-wave analysis and compared with the experimental results. It is shown that the simulation results consistently agree with experimental results. Furthermore, in the case of CPWs with wide ground planes, both of them are consistent with analytical theory. While CPWs with narrow ground planes have not been analytically studied, our results show that they suffer considerably lower attenuation, which we attribute to a reduced coupling between the CPW mode and substrate modes. The effects of ground-plane width and line dimensions on the attenuation characteristics are discussed in detail.     

Low-loss coplanar waveguides interconnects on low-resistivity silicon substrate

This paper describes fabrication, characterization and simulation of low-loss coplanar waveguide (CPW) interconnects on low-resistivity silicon substrate. The fabrication of CPWs is low-temperature (below 250/spl deg/C) and incorporates a spin-on low-k dielectric benzocyclobutene (BCB) and self-aligned electroplating of copper. The performance of CPWs is evaluated by high-frequency characterization and EM simulation. CPWs with different line width (W) and line spacing (S) are investigated and compared. Using a BCB layer as thick as 20 /spl mu/m, CPW fabricated on a low-resistivity silicon substrate exhibits an insertion loss of 3 dB/cm at 30 GHz.     

应用于毫米波的共面波导的统一模型及直接提参方法

Coplanar waveguides （CPW） are widely used in mm-wave circuits designs for their good performance. A novel unified model of various on chip CPWs for mm-wave application, together with corresponding direct parameter extraction methodologies, are proposed and investigated, where standard CPW, grounded CPW （GCPW） and CPW with slotted shield （SCPW） are included. Several kinds of influences of different structures are analyzed and considered into the model to explain the frequency-dependent per-unit-length L, C, R, and G parameters, among which the electromagnetic coupling for CPWs with large lower ground or shield is described by a new C-L-R series path in the parallel branch. The direct extraction procedures are established, which can ensure both accuracy and simplicity compared with other reported methods. Different CPWs are fabricated and measured on 90-nm CMOS processes with Short-Open-Load-Through （SOLT） de-embedding techniques. Excellent agreement between the model and the measured data for different CPWs is achieved up to 67 GHz.     

High frequency electrical circuits on a planar lightwave circuitplatform

We investigated the propagation losses and the characteristic impedances Z_L of coplanar waveguides (CPWs) and microstrip lines (MSLs) on a planar lightwave circuit (PLC)-platform formed on a silica/silicon substrate. The loss of the CPWs was 2.7 dB/cm at 10 GHz on the PLC-platform with 30 μm thick silica layer. Thus, a cm-order circuit of this CPW is difficult to fabricate in the 10 Gb/s module. This is because the silicon substrate has a large loss tangent (tan δ). On the other hand, the loss of the MSLs, where a ground plane shielded the high loss silicon substrate, could be improved to 0.9 dB/cm at 10 GHz with 30 μm thick polyimide. These lower loss MSLs on a PLC-platform can be applied to module operation at 10 Gb/s. Furthermore they have the advantage that they are suitable for application to array device circuits or circuits in a module where several devices are integrated because unlike CPWs the ground planes are not divided by signal lines or DC bias lines. The structure of CPWs and MSLs on a PLC-platform with a Z_L of 50 Ω was also studied in detail     

Influence of the SRO as passivation layer on the microwave attenuation losses of the CPWs fabricated on HR-Si

In this letter, silicon rich oxide (SRO) is used as the passivation layer of coplanar wave guides (CPWs) fabricated on high resistivity silicon (HR-Si). The microwave performance of the CPWs is evaluated computing the attenuation loss (/spl alpha/) of the device in the 0.045-50 GHz frequency range. It is shown that for frequencies lower than 5 GHz the losses of CPWs using SRO as a passivation layer are lower than those of CPWs using SiO/sub 2/. It is also shown that using a combination of thermal and CVD SiO/sub 2/, a reduction of the losses of CPWs is obtained.     

Adaptive neuro-fuzzy inference system for gap discontinuities in coplanar waveguides

A new approach based on an adaptive neuro-fuzzy inference system (ANFIS) is presented for gap discontinuities in coplanar waveguides (CPWs). The proposed ANFIS model combines the neural network adaptive capabilities and the fuzzy qualitative approach. The ANFIS is presented so as to produce a good approximation to the nonlinear relationship between the geometrical parameters and the frequency-dependent equivalent circuit parameter (the S ₂₁ parameter of the gap). The ANFIS results for the S ₂₁ parameters are compared with the results available in the literature obtained by using the conformal-mapping technique (CMT), and the results confirm that the proposed ANFIS model can provide an accurate computation of the S ₂₁ parameters of the gaps in CPWs.     

Small-size CPW silicon resonating antenna based on transmission-line meta-material approach

A small-size zeroth-order resonating antenna based on a composite right/left-handed transmission line (CRLH TL) fabricated on high resistivity silicon substrate using coplanar waveguides (CPW) is proposed. The CRLH TL consists of a series of CPW interdigital capacitors and parallel short-ended CPWs. The predicted and experimental results for return loss, gain and radiation pattern are in very good agreement.     

Characterization of silver CPWs for applications in silicon MMICs

High-Q broadband passives are needed for monolithic microwave circuits in silicon. Coplanar waveguides (CPWs) provide an effective way to implement passives in silicon monolithic microwave integrated circuits. Silver "fat" wires in the backend interconnects, used for CPW fabrication, will reduce the bulk resistive loss in metallization to the lowest possible level, which is vital to minimize noise. Electromigration, electrochemical migration, and agglomeration issues are not a problem for silver microwave passives, because of their coarse dimensions and the low current densities encountered in these structures. In this letter, Ag and Cu CPWs were designed, fabricated and tested. Silver CPWs showed a 2-3/spl Omega//cm improvement in resistance over copper devices at 20GHz. A circuit was identified in which the application of silver passives could provide an improvement in noise performance.     

Coplanar-waveguide dispersion characteristics including anisotropicsubstrates

An efficient iterative method, based on potential theory, is developed to solve coplanar-waveguide (CPW) dispersion characteristics. In this method, a conformal mapping technique is used to derive the new general expressions for the charge and current sources applicable to both microstrip lines and CPWs. Excellent accuracy for the dispersion results obtained by this method is observed     

0.13μm CMOS上接地板宽度有限共面波导的特性与建模

讨论了利用TSMC 0.13μm CMOS工艺实现的共面波导的特性及其建模.通过Momentum等电磁场仿真软件计算了传输线的基本参数,例如特征阻抗和衰减常数.并设计了特征阻抗分别为30,50,70和100Ω的共面波导传输线元件库.最后,在0.1～40GHz的范围内利用网络分析仪和SOLT(short-open-load-thru)测试技术测得特征阻抗和衰减常数,共面波导的分布参数则通过提取测试得到的S参数得到.     

The influence of finite conductor thickness and conductivity onfundamental and higher-order modes in miniature hybrid MIC's (MHMIC's)and MMIC's

The effect of finite metallization thickness and finite conductivity on the propagation characteristics of conductor-backed CPW on thin substrate is rigorously analyzed. A self-consistent approach is used together with the method of lines (MoL) to determine the propagation constant, losses and field distribution of the fundamental and first two higher-order modes in coplanar waveguides (CPWs) with finite metallization thickness and lossy backmetallization. The method used is general and can be applied to miniature MHMICs and MMICs including lossy semiconductor substrate. It is shown that the onset of higher-order modes limits the usable frequency range of conductor-backed CPWs. The analysis also includes microstrip transmission lines on thin substrate material. It is demonstrated that a resistive strip embedded into the microstrip ground plane may potentially be useful in the design of integrated planar attenuators     

Characterization and attenuation mechanism of CMOS-compatible micromachined edge-suspended coplanar waveguides on low-resistivity silicon substrate

This paper presents detailed characterization of a category of edge-suspended coplanar waveguides that were fabricated on low-resistivity silicon substrates using improved CMOS-compatible micromachining techniques. The edge-suspended structure is proposed to provide reduced substrate loss and strong mechanical support at the same time. It is revealed that, at radio or microwave frequencies, the electromagnetic waves are highly concentrated along the edges of the signal line. Removing the silicon underneath the edges of the signal line, along with the silicon between the signal and ground lines, can effectively reduce the substrate coupling and loss. The edge-suspended structure has been implemented by a combination of deep reactive ion etching and anisotropic wet etching. Compared to the conventional silicon-based coplanar waveguides, which show an insertion loss of 2.5dB/mm, the loss of edge-suspended coplanar waveguides with the same dimensions is reduced to as low as 0.5 dB/mm and a much reduced attenuation per wavelength (dB//spl lambda//sub g/) at 39 GHz. Most importantly, the edge-suspended coplanar waveguides feature strong mechanical support provided by the silicon remaining underneath the center of the signal line. The performance of the coplanar waveguides is evaluated by high-frequency measurement and full-wave electromagnetic (EM) simulation. In addition, the resistance, inductance, conductance, capacitance (RLGC) line parameters and the propagation constant of the coplanar waveguides (CPWs) were extracted and analyzed.     

Attenuation mechanisms of aluminum millimeter-wave coplanar waveguides on silicon

The loss mechanisms of silicon coplanar waveguides (CPW) with aluminum metallization are investigated up to 40 GHz. Three main parts contribute to the attenuation of coplanar waveguides (CPWs): the frequency-dependent conductor losses of the metallization, frequency-independent substrate losses, and the specifically investigated bias-dependent interface losses caused by free charges at the Si-SiO/sub 2/ interface. The minimum losses found in 50-/spl Omega/ CPWs with 45-/spl mu/m signal line width were 0.19 db/mm at 10 GHz and 0.33 dB/mm at 40 GHz. High-purity silicon from a float zone (FZ) process was used as substrate. Substrates with lower purity from a Czochralski (CZ) process (resistivity 50-100 /spl Omega/cm) resulted in somewhat higher (0.2-0.3 dB/mm) losses for the same CPW geometry.     

Modeling and characterization of shielded low loss CPWs on 65 nm node silicon

Coplanar waveguides(CPWs)are promising candidates for high quality passive devices in millimeterwave frequency bands.In this paper,CPW transmission lines with and without ground shields have been designed and fabricated on 65 nm CMOS technology.A physical-based model is proposed to describe the frequency-dependent per-unit-length L,C,R and G parameters.Starting with a basic CPW structure,the slow-wave effect and ground-shield influence have been analyzed and incorporated into the general model.The accuracy of the model is confirmed by experimental results.     

Dual-polarised CPW-fed microstrip antenna for wireless applications at 2.45 GHz

The design and fabrication of a dual-polarised microstrip antenna fed by two coplanar waveguides (CPWs) for operation at 2.45 GHz are presented. Obtained results show an impedance bandwidth of 44.3 MHz using a single layer of substrate. The simulated return loss for both polarisations is less than -35 dB, and the isolation between the ports of the antenna is better than 21 dB.     

Characterisation and modelling of mitered coplanar waveguide bends on silicon substrate

Mitered coplanar waveguide (CPW) bends are cascaded to form meandered CPW lines. Test samples are fabricated and characterised. In this article a compact, CAD-oriented semi-empirical equivalent circuit model is presented. The validity of the model is verified by comparing it with the experimental and simulation results. It is demonstrated that a meandered CPW with mitered bends has higher characteristic impedance and lesser loss when compared to straight CPWs.     

Basic characteristics of two layered substrate coplanar waveguides

The conformal mapping technique is used to obtain simple CAD oriented closed form expressions for the effective dielectric permittivity, line capacitance and impedance of two layered coplanar waveguides (CPWs)