微电子器件在雷达接收机中的应用

本文叙述了现代战争对雷达接收机以及微电子化的迫切要求，具体列出了对ＭＭＩＣ、ＡＳＩＣ、ＦＰＧＡ、ＳＭＴ微组装器件的要求以及目前国内外的先进水平，同时列举了作者单位应用微电子技术的历史及现状。     

微电子技术在雷达接收机中的应用

比较了微电子技术在雷达接收机中三种应用形式的优缺点；国产器件与进口器件的主要差别。提出了雷达接收机微电子化的三个步骤实施。     

雷达信号传输与处理及其模块化应用

本文评述雷达信号传输与处理模块化应用的需求和进展，应用模块化电路将使雷达功能大幅度提高，可靠性增强，大产量条件下成本降低。这对发展相控阵雷达作用尤为突出，对改造制式雷达也很有利。文中对雷达应用模块的多种形态（ＭＩＣ、ＭＨＭＩＣ、ＭＭＩＣ、ＭＣＭ等）进行各自特征和优势的多方面比较，微电子技术含量的不断提高，使雷达模块化应用更上一层楼。文中也简介了国内外部分产品的水平。     

雷达数字技术的微电子化

微电子技术是当代的一个重要学科领域，它在雷达中的应用水平已经成为衡量系统性能乃至生存能力的重要标志。本文介绍了单片数字信号处理器（ＤＳＰ）、超大规模可编程逻辑器件（ＰＬＤ）、专用集成电路（ＡＳＩＣ）、表面安装技术（ＳＭＴ）等微电子技术在雷达数字系统中的应用成果，分析了新一代雷达对微电子技术发展的需求。     

雷达用微波功率器件的发展趋势

本文从雷达技术发展的角度阐述了雷达用微波功率器件的发展趋势，并指出今后将主要发展ＭＰＭ，ＭＭＩＣ，毫米波真空器件和真空微电子器件。     

微电子技术在雷达信号处理中的应用

本文结合微电子技术在雷达信号处理应用中的发展方向，将应用较广泛的数字信号处理分系统，按通用化、系列化、模块化的原则，分为若干模块。对数据采集、数字脉冲压缩、数字滤波、恒虚警模块分别提出了一些技术要求；对雷达信号处理中常用的电源也给出了技术指标。     

产品设计中的SMT

微电子技术的迅猛发展。促进了电子器件和电子产品的小型化的发展。电子产品的高密度组装组装使得传统的ＴＨＴ无能为力。ＳＭＴ是较好地解决了电子产品发展的组装需求。现在，微电子器件已趋向于ＡＳＩＣ和ＶＬＳＩＣ化。而这些器件通常采用ＱＦＰ、，ＰＬＣＣ，ＳＯＩＣ，ＢＧＡ等封装形式。     

雷达信号处理与微电子技术

本文讨论了雷达信号处理对微电子技术的要求及微电子技术对雷达信号处理技术发展的推动作用，介绍了电子设计自动化（ＥＤＡ）在雷达信号处理技术的模块化、微电子化中的应用，还讨论了几种可能的微电子化途径和信号处理模块。     

微电子制造科学与技术研究计划中的单圆片加工设备

由美国得州仪器（ＴＩ）公司实施的微电子制造科学与技术计划全面采用了一种灵活的单圆片加工技术，该技术适合快周期的ＩＣ生产，且投资少，灵活性高。他们设计的实验型单圆片小型工厂包含３４个具有各种不同的工艺能源组合和现场监测与控制传感器的单圆片处理系统；采用模块化系统（大多为先进真空处理器（ＡＶＰ））进行了４０种不同的器件制造工艺实验；真空片盒在洁净环境中传递圆片；ＡＶＰ由计算机综合制造（ＣＩＭ）系统驱动     

硅微电子技术在雷达系统中的应用

本文从微电子概念入手，论述了硅微电子技术在雷达中的作用；分析了现代雷达对硅微电子技术，尤其是模拟专用集成电路的需求态势；提出了解决雷达系统中微电子技术关键问题的主要措施。     

Resolution Enhancement Technology:Integrated Process Solutions using OPC

DUV lithography, using the 248 nm wavelength, is a viable manufacturing option for devices with features at 130 nm and less. Given the low kl value of the lithography, integrated process development is a necessary method for achieving acceptable process latitude. The application of assist features for rule based OPC requires the simultaneous optimization of the mask, illumination optics and the resist.Described in this paper are the details involved in optimizing each of these aspects for line and space imaging.A reference pitch is first chosen to determine how the optics will be set. The ideal sigma setting is determined by a simple geometrically derived expression. The inner and outer machine settings are determined, in turn,with the simulation of a figure of merit. The maximum value of the response surface of this FOM occurs at the optimal sigma settings. Experimental confirmation of this is shown in the paper.Assist features are used to modify the aerial image of the more isolated images on the mask. The effect that the diffraction of the scattering bars (SBs) has on the image intensity distribution is explained. Rules for determining the size and placement of SBs are also given.Resist is optimized for use with off-axis illumination and assist features. A general explanation of the material' s effect is discussed along with the affect on the through-pitch bias. The paper culminates with the showing of the lithographic results from the fully optimized system.     

Cost-effective test solutions for smart card and other integrated flash applications

From its emergence in the late 1980s as a lower cost alternative to early EEPROM technologies, flash memory has evolved to higher densities and speedsand rapidly growing acceptance in mobile applications.In the process, flash memory devices have placed increased test requirements on manufacturers. Today, as flash device test grows in importance in China, manufacturers face growing pressure for reduced cost-oftest, increased throughput and greater return on investment for test equipment. At the same time, the move to integrated flash packages for contactless smart card applications adds a significant further challenge to manufacturers seeking rapid, low-cost test.     

Theoretical analysis of the relationship between the Brillouin gain coefficient and the strain in the optical-fiber sensors

The relation between the power of the Brillouin signal and the strain is one of the bases of the distributed fiber sensors of temperature and strain. The coefficient of the Bfillouin gain can be changed by the temperature and the strain that will affect the power of the Brillouin scattering. The relation between the change of the Brillouin gain coefficient and the strain is thought to be linear by many researchers. However, it is not always linear based on the theoretical analysis and numerical simulation. Therefore, errors will be caused if the relation between the change of the Brillouin gain coefficient and the strain is regarded as to be linear approximately for measuring the temperature and the strain. For this reason, the influence of the parameters on the Brillouin gain coefficient is proposed through theoretical analysis and numerical simulation.     

An improved parallel thinning algorithm with two subiterations

The parallel thinning algorithm with two subiterations is improved in this paper. By analyzing the notions of connected components and passes, a conclusion is drawn that the number of passes and the number of eight-connected components are equal. Then the expression of the number of eight-connected components is obtained which replaces the old one in the algorithm. And a reserving condition is proposed by experiments, which alleviates the excess deletion where a diagonal line and a beeline intersect. The experimental results demonstrate that the thinned curve is almost located in the middle of the original curve connectivelv with single pixel width and the processing speed is high.     

Novel fiber-optical interferometer with miniaturized probe for in-hole measurements

Today, micro-system technology and the development of new MEMS （Micro-Electro-Mechanical Systems） are emerging rapidly. In order for this development to become a success in the long run, measurement systems have to ensure product quality. Most often, MEMS have to be tested by means of functionality or destructive tests. One reason for this is that there are no suitable systems or sensing probes available which can be used for the measurement of quasi inaccessible features like small holes or cavities. We present a measurement system that could be used for these kinds of measurements. The system combines a fiber optical, miniaturized sensing probe with low-coherence interferometry, so that absolute distance measurements with nanometer accuracy are possible.     

Development of the readout system for waveguide multilayer optical card

Waveguide multilayer optical card （WMOC） is a novel storage device of three-dimensional optical information. An advanced readout system fitting for the WMOC is introduced in this paper. The hardware mainly consists of the light source for reading, WMOC, motorized stages addressing unit, microscope imaging unit, CCD detecting unit and PC controlling ＆ processing unit. The movement of the precision motorized stage is controlled by the computer through Visual Basic （VB） language in software. A control panel is also designed to get the layer address and the page address through which the position of the motorized stages can be changed. The WMOC readout system is easy to manage and the readout result is directly displayed on computer monitor.     

Study of waveguide coupling efficiency in hybrid silicon lasers

This paper presents a new method to increase the waveguide coupling efficiency in hybrid silicon lasers. We find that the propagation constant of the InGaAsP emitting layer can be equal to that of the Si resonant layer through improving the design size of the InP waveguide. The coupling power achieves 42% of the total power in the hybrid lasers when the thickness of the bonding layer is 100 nm. Our result is very close to 50% of the total power reported by Intel when the thickness of the thin bonding layer is less than 5 nm. Therefore, our invariable coupling power technique is simpler than Intel＇s.     

Collinear phase-matching study of terahertz-wave generation via difference frequency mixed in GaAs and Inp

The collinearly phase-matching condition of terahertz-wave generation via difference frequency mixed in GaAs and InP is theoretically studied. In collinear phase-matching, the optimum phase-matching wave hands of these two crystals are calculated. The optimum phase-matching wave bands in GaAs and lnP are 0.95-1.38μm and 0.7-0.96μm respectively. The influence of the wavelength choice of the pump wave on the coherent length in THz-wave tuning is also discussed. The influence of the temperature alteration on the phase-matching and the temperature tuning properties in GaAs crystal are calculated and analyzed. It can serve for the following experiments as a theoretical evidence and a reference as well.     

Effects of the alloy compositions on the phonon-polaritons in ternary mixed crystals

Composition dependence of bulk and surface phonon-polaritons in ternary mixed crystals are studied in the framework of the modified random-element-isodisplacement model and the Bom-Huang approximation. The numerical results for Several Ⅱ - Ⅵ and Ⅲ- Ⅴ compound systems are performed, and the polariton frequencies as functions of the compositions for ternary mixed crystals AlxGa1-xAs, GaPxAS1-x, ZnSxSe1-x, GaAsxSb1-x, GaxIn1-xP, and ZnxCd1-xS as examples are given and discussed. The results show that the dependence of the energies of two branches of bulk phonon-polaritons which have phonon-like characteristics, and surface phonon-polaritons on the compositions of ternary mixed crystals are nonlinear and different from those of the corresponding binary systems.     

New insert layer structure OLEDs

An insert layer structure organic electroluminescent device（OLED） based on a new luminescent material （Zn（salen）） is fabricated. The configuration of the device is ITO/CuPc/NPD/Zn（salen）/Liq/LiF/A1/CuPc/NPD/Zn（salen）/Liq/LiF/A1. Effective insert electrode layers comprising LiF（1nm）/Al（5 nm） are used as a single semitransparent mirror, and bilayer cathode LiF（1 nm）/A1（100 nm） is used as a reflecting mirror. The two mirrors form a Fabry-Perot microcavity and two emissive units. The maximum brightness and luminous efficiency reach 674 cd/m^2 and 2.652 cd/A, respectively, which are 2.1 and 3.7 times higher than the conventional device, respectively. The superior brightness and luminous efficiency over conventional single-unit devices are attributed to microcavity effect.