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1.
Ferroelectric Ba0.65Sr0.35TiO3 (BST) thin films on the Pt/Ti/SiO2/Si substrate have been successfully prepared by sol-gel. Such films have approximately 300 nm thicknesses with a remnant polarization of about 2.95 C/cm2 and a coercive field of about 21.5 kV/cm. The investigations of X-ray diffraction and atomic force microscopy show that the BST films annealed at 650 ℃ exhibit a tetragonal structure and that the films dominantly consist of large column or grains of about 89 nm in diameter. The curves of the temperature dependence of dielectric coefficient in different frequencies display the curie transition at the temperature around 23 ℃. The dielectric loss tangent of BST thin films at 100 kHz is less than 0.04. As a result, the BST thin films are more applicable for fabrication of infrared detector compared with the BST thin films reported previously. 相似文献
2.
Ferroelectric Ba0.65Sr0.35TiO3(BST) thin films on the Pt/Ti/SiO2/Si substrate have been successfully prepared by sol-gel. Such films have approximately 300 nm thicknesses with a remnant polarization of about 2.95 μC/cm2 and a coercive field of about 21.5 kV/cm. The investigations of X-ray diffraction and atomic force microscopy show that the BST films annealed at 650 °C exhibit a tetragonal structure and that the films dominantly consist of large column or grains of about 89 nm in diameter. The curves of the temperature dependence of dielectric coefficient in different frequencies display the curie transition at the temperature around 23 °C. The dielectric loss tangent of BST thin films at 100 kHz is less than 0.04. As a result,the BST thin films are more applicable for fabrication of infrared detector compared with the BST thin films reported previously. 相似文献
3.
Polycrystalline paraelectric perovskite thin films in the Pb-La-Ti-O or PLT (28 mol.% La) system have been studied. Thin (0.5-μm) films were integrated onto 3-in Pt/Ti/SiO2/(100) Si wafers by the sol-gel processing technique. Low-field dielectric measurements yielded dielectric permittivity and loss tangent of 1400 and 0.015, respectively, while high-field Sawyer-Tower measurements (P -E ) showed linear behavior up to 40 kV/cm, which approached saturation at 200 kV/cm. Pulse charging transient and current-voltage measurements indicated a high charge storage density (15.8 μC/cm2) and low leakage current density (0.50 μA/cm2) under a field of 200 kV/cm. The charging time for a 1-μm2 PLT capacitor at 200 kV/cm was estimated to be 0.1 ns. The preliminary data demonstrate that paraelectric PLT thin films have excellent potential for use in ULSI DRAMs and as decoupling capacitors 相似文献
4.
采用聚合物前驱体法制备了单一铋系层状钙钛矿相SrBi2Ta2O9粉体,研究了不同烧成温度对SrBi2Ta2O9陶瓷相结构和介电、铁电性能的影响。结果表明,随着烧成温度的升高,晶粒沿c轴择优取向趋势增强;不同烧成温度下陶瓷介电常数和损耗均随频率升高而降低,1000℃时陶瓷有最大介电常数和较小的损耗,且陶瓷有较大的剩余极化值和较小的矫顽电场,分别为3.884μC/cm2和25.37kV/cm。不同Ca掺杂量掺杂后,SrBi2Ta2O9陶瓷的介电常数、损耗和剩余极化值均显著降低。 相似文献
5.
A. V. Velichko N. T. Cherpak E. V. Izhyk A. Ya. Kirichenko 《Journal of Infrared, Millimeter and Terahertz Waves》1994,15(10):1631-1642
Measurements of temperature dependence of "YBa2Cu3O7-x thin film on SrTiO3 substrate" structure effective impedance have been performed in 8-mm wave band by means of quasioptical dielectric resonator with whyspering gallery modes. This dependence appeared to be a series of quasiperiodical oscillation peaks of high steepness. Experiments on investigation of external electric field impact on parameters of the resonator loaded by the structure were carried out. It was found that electric field up to 3 kV/cm leads to a shift of the effective impedance temperature dependence to lower temperature and doesn't impact on the form of the dependence. Herewith the field of 2.5 kV/cm causes a shift of the resonator frequency by 108 MHz with negligible reduction of the loaded quality factor QL (less than in 1.5 times). Operating frequency was 35 GHz and loaded quality was about 103. A proposal about possibility of tunable passband filter design and ways of retuning bandwidth enhancment are discussed. 相似文献
6.
Ming Shiahu Tsai Sun S.C. Tseung-Yuen Tseng 《Electron Devices, IEEE Transactions on》1999,46(9):1829-1838
The dielectric constant and the leakage current density of (Ba, Sr)TiO3 (BST) thin films deposited on various bottom electrode materials (Pt, Ir, IrO2/Ir, Ru, RuO2/Ru) before and after annealing in O2 ambient were investigated. The improvement of crystallinity of BST films deposited on various bottom electrodes was observed after the postannealing process. The dielectric constant and leakage current of the films mere also strongly dependent on the postannealing conditions. BST thin film deposited on Ir bottom electrode at 500°C, after 700°C annealing in O2 for 20 min, has the dielectric constant of 593, a loss tangent of 0.019 at 100 kHz, a leakage current density of 1.9×10 -8 A/cm2 at an electric field of 200 kV/cm with a delay time of 30 s, and a charge storage density of 53 fC/μm2 at an applied field of 100 kV/cm. The BST films deposited on Ir with post-annealing can obtain better dielectric properties than on other bottom electrodes in our experiments. And Ru electrode is unstable because the interdiffusion of Ru and Ti occurs at the interface between the BST and Ru after postannealing. The ten year lifetime of time-dependent dielectric breakdown (TDDB) studies indicate that BST on Pt, Ir, IrO2/Ir, Ru, and RuO2/Ru have long lifetimes over ten gears on operation at the voltage bias of 2 V 相似文献
7.
用 Sol- Gel方法研制了 PL T[(Pb0 .83 L a0 .17) Ti O3 ]铁电薄膜 ,结合非挥发性铁电存储器对铁电电容的要求 ,研究了 Au/ PL T/ Pt铁电电容和漏电流、剩余极化、疲劳、开关特性和揭电常数等性能。对厚度为 0 .4 μm的薄膜 ,5 V时的剩余极化强度 Pr=2 2 μC/ cm2 ,矫顽场强度 Ec=6 0k V/ cm,相对介电常数约 130 0 ,漏电流 Id=3.2× 10 -8A/ mm2 ,开关特性优良。疲劳测试表明 ,对Vpp=10 V的锯齿信号 ,经 4 .5× 10 11周期后 ,剩余极化强度衰减 2 0 %。上述性能表明 ,该 PL T膜能用于非挥发性铁电存储器的试制 相似文献
8.
A PbTiO3/Ba0.85Sr0.15TiO3/PbTiO3 (PT/BST15/PT) sandwich thin film has been prepared on Pt/Ti/SiO2/Si substrates by an improved sol-gel technique. It is found that such films under rapid thermal annealing at 700°C crystallize
more favorably with the addition of a PbTiO3 layer. They possess a pure, perovskite-phase structure with a random orientation. The polarization-electric field (P-E) hysteresis
loop and current-voltage (I-V) characteristic curves reveal that a PT/BST15/PT film exhibits good ferroelectricity at room
temperature. However, no sharp peak, only a weak maximum, is observed in the curves of the dielectric constant versus temperature.
The dielectric constant, loss tangent, leakage current density at 20 kV/cm, remnant polarization, and coercive field of the
PT/BST15/PT film are 438, 0.025, 1.3 × 10−6 Acm−2, 2.46 μCcm−2, and 41 kVcm−1, respectively, at 25°C and 10 kHz. The PT/BST15/PT film is a candidate material for high sensitivity elements for uncooled,
infrared, focal plane arrays (UFPAs) to be used at near ambient temperature. 相似文献
9.
Structural and Electrical Characters of Ba0.6Sr0.4TiO3/La0.5Sr0.5CoO3 Thin Films by Plus Laser Deposition
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Epitaxial Ba0.6Sr0.4TiO3 (BST) thin films were deposited on LaAlO3 (LAO) substrates with the conductive metallic oxide La0.5Sr0.5CoO3 (LSCO) film as a bottom electrode by pulsed laser deposition (PLD). X-ray diffraction ~2 and Ф scan showed that the epitaxial relationship of BST/LSCO/LAO was [001] BST//[001] LSCO//[001] LAO. The atomic force microscope (AFM) revealed a smooth and crack-free surface of BST films on LSCO-coated LAO substrate with the average grain size of 120 nm and the RMS of 1.564 nm for BST films. Pt/BST/LSCO capacitor was fabricated to perform CapacitanceVoltage measurement indicating good insulating characteristics. For epitaxial BST film, the dielectric constant and dielectric loss were determined as 471 and 0.03, respectively. The tunabilty was 79.59% and the leakage current was 2.6310-7 A/cm2 under an applied filed of 200 kV/cm. Furthermore, it was found that epitaxial BST (60/40) films demonstrate well-behaved ferroelectric properties with the remnate polarization of 6.085 C/cm2 and the coercive field of 72 kV/cm. The different electric properties from bulk BST (60/40) materials with intrinsic paraelectric characteristic are attributed to the interface effects. 相似文献
10.
A dielectric resonator technique has been used for measurements of the permittivity and dielectric loss tangent of single-crystal dielectric substrates in the temperature range 20-300 K at microwave frequencies. Application of superconducting films made it possible to determine dielectric loss tangents of about 5×10-7 at 20 K. Two permittivity tensor components for uniaxially anisotropic samples were measured. Generally, single-crystal samples made of the same material by different manufacturers or by different processes save significantly different losses, although they have essentially the same permittivities. The permittivity of one crystalline ferroelectric substrate, SrTiO3, strongly depends on temperature. This temperature dependence can affect the performance of ferroelectric thin-film microwave devices, such as electronically tunable phase shifters, mixers, delay lines and filters 相似文献
11.
12.
We have optimized asymmetric InGaAsP QWs with respect to the quantum confined Stark effect (QCSE). We have found structures with a red shift of 40 meV at a field of 70 kV/cm. Moreover, it was our aim to find structures with a strong blue shift. A new principle for the integration of a laser and a modulator is presented, which is based on the application of blue shift asymmetric QW's in the active layer for laser and modulator simultaneously. A calculation of the laser and modulation properties for a QW-structure with 27 meV blue shift at a field variation of 70 kV/cm is presented. 相似文献
13.
Measurements on dipole domains in indium phosphide have shown that the depletion ratio is low and varies with domain voltage for peak fields up to at least 75 kV/cm for material with a 6×1014 cm?3 carrier density. A velocity/field characteristic, determined, using these data, has a much lower valley field than that indicated by previous measurements. 相似文献
14.
Tellmann N. Glein N. Dahne U. Scholen A. Schulz H. Chaloupka H. 《Applied Superconductivity, IEEE Transactions on》1994,4(3):143-148
We have investigated a dielectric resonator consisting of a single crystalline LaAlO3-cylinder shielded by a cylindrically shaped copper cavity with endplates made from epitaxial films of YBa2Cu3O7 or niobium. For YBa2 Cu3O7 films unloaded quality factors Q0 of 4.5·105 at 10 K and 1.3·105 at 77 K were achieved at 11.6 GHz using a compact shielding cavity with a diameter of 15 mm and a height of 3.8 mm. The loss contributions of the dielectric resonator, the normal conducting cylinder wall, and the superconducting endplates, with one of them being separated by a small distance h from the dielectric cylinder, were calculated by modeling the electromagnetic fields of the TE0νμ-modes. The dielectric loss tangent of the LaAlO 3-cylinders was found to be 10-6 at 4.3 K and f=11.6 GHz and to increase slightly with temperature. Moreover, the calculations indicate the tunability of the resonance frequency by changing h over a range of 1 GHz without significant degradation of Q 0. These resonators are considered to be useful devices for stable oscillators and narrowband filters 相似文献
15.
采用化学修饰溶胶凝胶工艺,以PVP为薄膜开裂抑制剂,以苯酰丙酮为化学修饰剂,利用其与金属盐形成的配位螫合物结构,合成了具有紫外光感应特性的锆钛酸铅镧(Pb0.91La0.09(Zr0.65Ti0.35)O3,PLZT)前驱溶胶;对单次提拉得到的凝胶薄膜进行直接感光法图形制备;通过后续热处理,在Pt/TiO2/SiO2/Si衬底上得到了具有钙钛矿结构的PLZT薄膜图形,其最终热处理后的膜厚约为260nm,剩余极化强度约为6.7μC/cm2,矫顽场强约为77kV/cm,相对介电常数约为356,介电损耗约为0.02,漏电流密度小于10-2μA/cm2,极化疲劳特性可达107以上. 相似文献
16.
K. -M. Lipka B. Splingart D. Theron J. K. Luo G. Salmer H. Thomas D. V. Morgan E. Kohn 《Journal of Electronic Materials》1995,24(7):913-916
Low temperature grown GaAs has been fabricated containing a limited amount of excess arsenic. The material has a low conductivity
in the order of 100KΩ cm, due to hopping in a deep donor band. This σ-LT-GaAs was grown reproducibly by using the lattice
mismatch as the primary parameter for substrate temperature calibration. Breakdown fields, in the order of 100kV/cm, are observed
for planar structures and increased at low measurement emperatures. Low hopping conductivity and high breakdown field are
also observed in the lossy dielectric metal-insulator-semiconductor field-effect transistor device using σ-LT-GaAs as a surface
layer. The record radio frequency power density of 4.0W/mm at 77K is extracted from the dc output characteristics. 相似文献
17.
A comprehensive study of Time-Dependent Dielectric Breakdown (TDDB) of 6.5-, 9-, 15-, and 22-nm SiO2 films under dc and pulsed bias has been conducted over a wide range of electric fields and temperatures. Very high temperatures were used at the wafer level to accelerate breakdown so tests could be conducted at electric fields as low as 4.5 MV/cm. New observations are reported for TDDB that suggest a consistent electric field and temperature dependence for intrinsic breakdown and a changing breakdown mechanism as a function of electric field. The results show that the logarithm of the median-test-time-to failure, log (t50), is described by a linear electric field dependence with a field acceleration parameter that is not dependent on temperature. It has a value of approximately 1 decade/MV/cm for the range of oxide thicknesses studied and shows a slight decreasing trend with decreasing oxide thickness. The thermal activation Ea ranged between 0.7 and 0.95 eV for electric fields below 9.0 MV/cm for all oxide thicknesses. TDDB tests conducted under pulsed bias indicate that increased dielectric lifetime is observed under unipolar and bipolar pulsed stress conditions, but diminishes as the stress electric field and oxide thickness are reduced. This observation provides new evidence that low electric field aging and breakdown is not dominated by charge generation and trapping 相似文献
18.
Epitaxial Ba0.6Sr0.4TiO3 (BST) thin films were deposited on LaAlO3 (LAO) substrates with the conductive metallic oxide La0.5Sr0.5CoO3 (LSCO) film as a bottom electrode by pulsed laser deposition (PLD). Xray relationship of BST/LSCO/LAO was [001] BST//[001]LSCO//[001] LAO. The atomic force microscope (AFM)revealed a smooth and crackfree surface of BST films on LSCOcoated LAO substrate with the average grain size of 120 nm and the RMS of 1.564 nm for BST films.Pt/BST/LSCO capacitor was fabricated to perform CapacitanceVoltage measurement indicating good insulating characteristics. For epitaxial BST film, the dielectric constant and dielectric loss were determined as 471 and 0.03, respectively. The tunabilty was 79.59% and the leakage current was 2.63×107 A/crm2 under an applied filed of 200 kV/cm. Furthermore, it was found that epitaxial BST (60/40) films demonstrate wellbehaved ferroelectric properties with the remnate polarization of 6.085 μC/cm2 and the coercive field of 72 kV/cm. The different electric properties from bulk BST (60/40)materials with intrinsic paraelectric characteristic are attributed to the interface effects. 相似文献
19.
Epitaxial strontium titanate (SrTiO3 or STO) thin films were prepared by an off-axis pulsed laser deposition technique on neodymium gallate (NdGaO3 or NGO) substrates held at temperature of 820 °C. This technique allows different film growth rates in a deposition. Coplanar capacitors were fabricated and dielectric responses were measured at 1 MHz and at 2 GHz, and from 300 K to 4 K. The electric field tunability of the dielectric constant and loss tangent were taken with a range of electric field. The structure and morphology of the films were analyzed using high-resolution X-ray diffractometry and atomic force microscopy, respectively. The results showed that the films are crystalline with (1 0 0) orientation and the grains are columnar. Increased in-plane grain size and reduced surface to volume ratio were found to play a major role in improved performance of the film coplanar capacitors. The film with the growth rate of approximate 40 Å/min showed the highest change in the dielectric constant with an electric field of 4 V/μm. The film also showed the largest in-plane grain size of about 3000 Å. 相似文献