四音叉定子驱动的压电旋转电机动力学特性

提出基于四音叉式定子驱动的旋转超声电机,选定定子的一阶面外弯振与二阶面内弯振为工作模态,复合形成旋转运动。阐明了电机驱动机理,基于频率一致性优化得到音叉杆尺寸为24 mm×4.2 mm×5 mm,公共部分尺寸为12 mm×12 mm×3 mm。建立电机的有限元(FEM)模型,对电机进行谐响应分析,排除激励时产生干扰模态。采用激励信号幅值为250 V、频率为28 000 Hz对电机进行瞬态分析,得到动足的x、y、z向振幅分别为1.4μm、0.8μm和1.2μm。对电机进行运动特性分析,验证了该旋转电机具有良好的调频、调压、调相特性。     

一种锯齿波驱动的压电电机

设计和制作了一台锯齿波驱动的压电电机,电机直径为28 mm,高56 mm,质量为300 g。在幅值180 V,频率500 Hz的交流电驱动下,电机转速可达89.5 r/min,最大扭矩1 N.mm。电机依靠摩擦力驱动,依靠转子的惯性实现单向输出。该文详细介绍了该电机的驱动原理和结构设计并对电机的一些性能进行了测试。多种测试参数表明,本电机具有工作稳定,运行参数优良的特点。     

复十形定子正交模态驱动的旋转超声电机研究

为了丰富旋转超声电机的型式,该文提出了一种复十形定子正交模态驱动的旋转超声电机.选取定子的面内、外弯振作为电机的工作模态,阐述了定子驱动机理.建立了定子有限元(FEM)模型,对电机进行模态分析,基于两相工作模态频率一致性的目标对定子进行尺寸优化,最终确定定子的主要尺寸L、H、K、J、I、D分别为18.2 mm、3.2 ...     

超声内窥合成孔径成像技术的研究

将广泛应用于雷达系统的合成孔径技术引入超声内窥成像系统,提出一种基于单换能器探头的超声内窥镜合成孔径成像方法。利用单换能器探头的旋转效应,在旋转的不同时刻与位置发射并接收超声回波,等效合成较大的超声发射孔径,以增强超声图像的信噪比与分辨率。分析了单探头合成孔径技术的原理与合成方法,并在此基础上根据超声回波的编码与线性调频特性,完成纵向与横向的脉冲压缩。最后采用中心频率为8 MHz的换能器对猪皮样本进行探测,可分辨出尺寸为0.8 mm×2 mm的目标,系统的信噪比提升了9.38 dB。     

压电叠堆驱动式超声电机设计

该文研究了拟发挥压电叠堆大输出力的特点,并提出了一种压电叠堆驱动的超声电机。电机定子由压电叠堆与金属弹性体结构组成,定子在交变激励信号下产生行波振动,并通过摩擦耦合驱动转子旋转输出。该文制作了样机,并搭建了实验平台。测试结果表明,电机转速与驱动电压呈正相关关系。当驱动电压峰-峰值为310 V时,电机最大输出转速为42.55 r/min,输出扭矩为0.8 N·m。     

一种用于高频超声探头的扫描电机及控制系统

对于以体表器官为主要应用对象的甚高频超声来说,扇扫方式下超声对组织的入射角在整个成像平面上分布极不均匀,会导致图像边缘部分的成像质量严重下降问题。文中提出了一种侧面输出的音圈电机及其伺服控制系统,用于高频超声探头的线性扫描。伺服系统采用STM32F103作为主控芯片,光电编码器作为位置传感器,同时使用PD算法对驱动电压进行PWM调节。系统仿真和实验选择了适当的控制参数,实验结果表明,该电机及其控制系统具有结构简单、精度高的优点,符合超声成像的要求。     

压电粘滑旋转电机的设计

该文提出了一种结构简单紧凑的压电粘滑旋转电机。通过一个力偶式机构设计了定子,并在此基础上设计出双定子压电粘滑旋转电机,提升了电机结构的紧凑性。通过在典型锯齿波上改造而成的一种异步驱动方式,使电机能够实现“增粘减滑”。建立了电机机电-摩擦耦合动力学模型,制作出电机的样机并进行相应的实验。实验结果表明,电机输出位移曲线显示出良好的步进特性,当驱动电压幅值为150 V、频率为900 Hz时,电机输出的最大单步转角、转速分别为125μrad和6.3 (°)/s,最大可承负载为30 g。     

新型锥壳形旋转超声电机的研究

该文提出了一种新型锥壳形旋转行波超声电机,该锥壳形超声电机振子的三阶弯曲振动模态可以将面内、外弯曲振动结合起来,实现新型振动模式的行波驱动。利用有限元软件确定了振子结构尺寸、三阶弯曲振型及频率并制作了原理样机,对原理样机振动特性及输出性能进行了测试。测试结果表明,当激励电压峰峰值为240 V,谐振频率为27.53 kHz时,空载时超声电机最高转速为85.8 r/min,堵转力矩为441 mN·mm。     

压电尺蠖直线电机的设计

为实现大行程、高分辨率精密驱动,该文提出了一种压电尺蠖直线电机的设计方法。首先,基于尺蠖运动原理,对电机进行了结构设计,它包括左、右箝位机构、驱动机构和输出轴,左、右箝位机构结构相同,用来对输出轴交替箝位与释放,驱动机构可以微米级及纳米级地步进输出位移,在左、右箝位机构及驱动机构的共同作用下,输出轴可连续输出大行程直线位移,该电机结构简单紧凑,便于调节,并可断电自锁;其次,采用有限元法对箝位机构及驱动机构进行了仿真分析,初步获得了电机的静、动态特性;最后,基于所搭建的实验系统,对电机的静、动态特性进行了测试。结果表明,在5mm的运动范围内,电机输出位移具有良好的直线性;在50 Hz的驱动电压作用下,电机运动速度为59.1μm/s;电机输出位移具有较高的分辨率,达到21nm。     

旋转型行波超声电机定子的结构优化

为了提高旋转型行波超声电机定子的驱动能力,延长电机的使用寿命,设计了一种带有辐射板的定子,根据辐射板与基体的连接方式共分为a~e 5种结构。基于ANSYS软件建立了定子结构的有限元仿真模型,对其进行了模态分析和谐响应分析。在对比5种结构性能的基础上,以电机的输出性能最佳为目标函数,对定子结构的辐射板槽宽w、外径d及厚度t 3个参数进行了优化,得到定子的最佳结构为a,即辐射板与基体连接长度为1mm,尺寸分别为:w=1.8mm,d=72mm,t=0.5mm。该优化结果可为旋转型行波超声电机定子的加工制作提供参考尺寸。     

Resolution Enhancement Technology:Integrated Process Solutions using OPC

DUV lithography, using the 248 nm wavelength, is a viable manufacturing option for devices with features at 130 nm and less. Given the low kl value of the lithography, integrated process development is a necessary method for achieving acceptable process latitude. The application of assist features for rule based OPC requires the simultaneous optimization of the mask, illumination optics and the resist.Described in this paper are the details involved in optimizing each of these aspects for line and space imaging.A reference pitch is first chosen to determine how the optics will be set. The ideal sigma setting is determined by a simple geometrically derived expression. The inner and outer machine settings are determined, in turn,with the simulation of a figure of merit. The maximum value of the response surface of this FOM occurs at the optimal sigma settings. Experimental confirmation of this is shown in the paper.Assist features are used to modify the aerial image of the more isolated images on the mask. The effect that the diffraction of the scattering bars (SBs) has on the image intensity distribution is explained. Rules for determining the size and placement of SBs are also given.Resist is optimized for use with off-axis illumination and assist features. A general explanation of the material' s effect is discussed along with the affect on the through-pitch bias. The paper culminates with the showing of the lithographic results from the fully optimized system.     

Cost-effective test solutions for smart card and other integrated flash applications

From its emergence in the late 1980s as a lower cost alternative to early EEPROM technologies, flash memory has evolved to higher densities and speedsand rapidly growing acceptance in mobile applications.In the process, flash memory devices have placed increased test requirements on manufacturers. Today, as flash device test grows in importance in China, manufacturers face growing pressure for reduced cost-oftest, increased throughput and greater return on investment for test equipment. At the same time, the move to integrated flash packages for contactless smart card applications adds a significant further challenge to manufacturers seeking rapid, low-cost test.     

Theoretical analysis of the relationship between the Brillouin gain coefficient and the strain in the optical-fiber sensors

The relation between the power of the Brillouin signal and the strain is one of the bases of the distributed fiber sensors of temperature and strain. The coefficient of the Bfillouin gain can be changed by the temperature and the strain that will affect the power of the Brillouin scattering. The relation between the change of the Brillouin gain coefficient and the strain is thought to be linear by many researchers. However, it is not always linear based on the theoretical analysis and numerical simulation. Therefore, errors will be caused if the relation between the change of the Brillouin gain coefficient and the strain is regarded as to be linear approximately for measuring the temperature and the strain. For this reason, the influence of the parameters on the Brillouin gain coefficient is proposed through theoretical analysis and numerical simulation.     

An improved parallel thinning algorithm with two subiterations

The parallel thinning algorithm with two subiterations is improved in this paper. By analyzing the notions of connected components and passes, a conclusion is drawn that the number of passes and the number of eight-connected components are equal. Then the expression of the number of eight-connected components is obtained which replaces the old one in the algorithm. And a reserving condition is proposed by experiments, which alleviates the excess deletion where a diagonal line and a beeline intersect. The experimental results demonstrate that the thinned curve is almost located in the middle of the original curve connectivelv with single pixel width and the processing speed is high.     

Novel fiber-optical interferometer with miniaturized probe for in-hole measurements

Today, micro-system technology and the development of new MEMS （Micro-Electro-Mechanical Systems） are emerging rapidly. In order for this development to become a success in the long run, measurement systems have to ensure product quality. Most often, MEMS have to be tested by means of functionality or destructive tests. One reason for this is that there are no suitable systems or sensing probes available which can be used for the measurement of quasi inaccessible features like small holes or cavities. We present a measurement system that could be used for these kinds of measurements. The system combines a fiber optical, miniaturized sensing probe with low-coherence interferometry, so that absolute distance measurements with nanometer accuracy are possible.     

Development of the readout system for waveguide multilayer optical card

Waveguide multilayer optical card （WMOC） is a novel storage device of three-dimensional optical information. An advanced readout system fitting for the WMOC is introduced in this paper. The hardware mainly consists of the light source for reading, WMOC, motorized stages addressing unit, microscope imaging unit, CCD detecting unit and PC controlling ＆ processing unit. The movement of the precision motorized stage is controlled by the computer through Visual Basic （VB） language in software. A control panel is also designed to get the layer address and the page address through which the position of the motorized stages can be changed. The WMOC readout system is easy to manage and the readout result is directly displayed on computer monitor.     

Study of waveguide coupling efficiency in hybrid silicon lasers

This paper presents a new method to increase the waveguide coupling efficiency in hybrid silicon lasers. We find that the propagation constant of the InGaAsP emitting layer can be equal to that of the Si resonant layer through improving the design size of the InP waveguide. The coupling power achieves 42% of the total power in the hybrid lasers when the thickness of the bonding layer is 100 nm. Our result is very close to 50% of the total power reported by Intel when the thickness of the thin bonding layer is less than 5 nm. Therefore, our invariable coupling power technique is simpler than Intel＇s.     

Collinear phase-matching study of terahertz-wave generation via difference frequency mixed in GaAs and Inp

The collinearly phase-matching condition of terahertz-wave generation via difference frequency mixed in GaAs and InP is theoretically studied. In collinear phase-matching, the optimum phase-matching wave hands of these two crystals are calculated. The optimum phase-matching wave bands in GaAs and lnP are 0.95-1.38μm and 0.7-0.96μm respectively. The influence of the wavelength choice of the pump wave on the coherent length in THz-wave tuning is also discussed. The influence of the temperature alteration on the phase-matching and the temperature tuning properties in GaAs crystal are calculated and analyzed. It can serve for the following experiments as a theoretical evidence and a reference as well.     

Effects of the alloy compositions on the phonon-polaritons in ternary mixed crystals

Composition dependence of bulk and surface phonon-polaritons in ternary mixed crystals are studied in the framework of the modified random-element-isodisplacement model and the Bom-Huang approximation. The numerical results for Several Ⅱ - Ⅵ and Ⅲ- Ⅴ compound systems are performed, and the polariton frequencies as functions of the compositions for ternary mixed crystals AlxGa1-xAs, GaPxAS1-x, ZnSxSe1-x, GaAsxSb1-x, GaxIn1-xP, and ZnxCd1-xS as examples are given and discussed. The results show that the dependence of the energies of two branches of bulk phonon-polaritons which have phonon-like characteristics, and surface phonon-polaritons on the compositions of ternary mixed crystals are nonlinear and different from those of the corresponding binary systems.     

New insert layer structure OLEDs

An insert layer structure organic electroluminescent device（OLED） based on a new luminescent material （Zn（salen）） is fabricated. The configuration of the device is ITO/CuPc/NPD/Zn（salen）/Liq/LiF/A1/CuPc/NPD/Zn（salen）/Liq/LiF/A1. Effective insert electrode layers comprising LiF（1nm）/Al（5 nm） are used as a single semitransparent mirror, and bilayer cathode LiF（1 nm）/A1（100 nm） is used as a reflecting mirror. The two mirrors form a Fabry-Perot microcavity and two emissive units. The maximum brightness and luminous efficiency reach 674 cd/m^2 and 2.652 cd/A, respectively, which are 2.1 and 3.7 times higher than the conventional device, respectively. The superior brightness and luminous efficiency over conventional single-unit devices are attributed to microcavity effect.