非球面曲面光学零件超精密加工装备与技术

"Nanosys-300非球面曲面超精密复合加工系统"是 "九五"重点预研课题-"非球面曲面的超精密加工与测量技术"的主要研究成果.重点对非球面曲面光学零件超精密加工机床,非球面曲面光学零件超精密加工工艺,非球面曲面光学零件超精密测量技术进行了研究.其主要技术成果有:非球面超精密复合加工系统综合设计和制造技术,高速超精密空气静压主轴系统,超精密闭式液体静压导轨系统,高速超精密空气静压磨头电主轴系统,开放式高性能数控系统集成技术等.系统的精度检测和工艺实验表明其研究水平进入了国际先进行列.     

光学自由曲面超精密加工方法综述

介绍了几种典型的光学自由曲面,如离轴非球面、环曲面、Zernike曲面、微结构光学曲面、样条曲面和双对称曲面。评述了目前光学自由曲面超精密加工的方法,包括复制成型、CNC磨削/抛光、飞切加工、慢速溜板伺服和快速刀具伺服等,同时分析对比了上述方法的优点和不足之处,并展望了光学自由曲面的加工方法的发展方向。     

自由曲面光学元件的设计、加工及面形测量的集成制造技术

针对自由曲面光学组件的超精密制造这门崭新技术,开发出从自由曲面光学设计、CAD连续数据转化、自由曲面模型重构、多轴加工仿真与切削优化、加工误差补偿到自由曲面面形测量的集成制造信息平台。所开发的集成技术,能有效减少在同类多轴机床编写复杂数控程序的时间,优化加工条件与切削策略,针对不同类型的自由曲面光学零件的主工艺,进行数字化仿真,避免昂贵的反复试切试验,以及提高产品的面形精度。并通过一系列的试验来验证该集成平台的稳定性和有效性。     

超精密慢刀伺服车削零件的面型分析与刀具设计方法研究

研究首先分析总结了当前自由曲面复杂零件超精密慢刀伺服车削加工中的具体加工技术挑战,进而系统地研究了自由曲面零件面型特性,零件面型关键参数提取,零件面型参数与刀具参数之间的关联关系。进一步研究了超精密慢刀伺服车削金刚石刀具的几何参数确定方法;并针对自由曲面零件的可加工性,提出了超精密慢刀伺服车削加工中金刚石刀具选用准则。另外,通过超精密慢刀伺服车削加工实际案例和应用加工试验,证明零件面型分析及金刚石刀具几何参数的合理选用,对实现高效稳定的工业化超精密慢刀伺服车削加工至关重要。     

微结构自由曲面的超精密单点金刚石切削技术概述

回顾了超精密加工技术的发展,主要包括超精密加工设备的开发历程,以及超精密单点金刚石切削技术基础,并对微工程技术作一简要介绍;重点论述微结构自由曲面的微纳切削技术,包括单点金刚石车削(Single point diamond turning, SPDT),快刀伺服加工(Fast tool servo, FTS),金刚石微凿切(Diamond micro chiseling, DMC),光栅铣削等技术。指出微结构自由曲面测量领域面临的挑战和存在的问题,包括接触式测量和非接触式测量。通过几个典型微结构自由曲面的加工及测量的应用进行举例说明;最后介绍我国在超精密加工机床领域内的研制情况,展望了超精密切削技术未来发展趋势。     

非球面曲面超精密加工机床研制成功

2003年5月的一天,一块亮如镜面的铝材凸球面车削样件被小心翼翼地从非球面曲面超精加工机床卸下,送入国家级光学计量检验中心检验。检验结果为:车削加工样件的面形精度PV=0.228μm,表面粗糙度Ra=0.0078μm,这意味着表面粗糙度仅有不到8nm。这是三○三所研制的非球面曲面超精密加工机床在用户西安应用光学研究所进行交付验收时的一个场景。非球面曲面超精密加工机床的成功研制,表明三○三所超精密加工技术国防科技重点实验室比较全面地攻克了非球面曲面光学零件的超精密加工与测量的关键技术,打破了国外的技术封锁,使我国的非球面曲面光学…     

先进光学制造技术最新进展

在激光核聚变、大型天文望远镜等国家大光学工程及各种光机电产品的驱动下,高面形精度、高表面质量、多结构型式光学组件的需求量日益增加,因此,先进光学制造技术显得尤为重要.主要综述了近十年来光学超精密加工技术的发展情况,主要包括超精密车削、磨削和抛光技术.根据光学组件的材料特性、结构特征和加工要求等,阐述了超精密加工技术的具体研究进展,包括传统技术的迭代更新与新型技术的研制开发,并针对典型应用进行举例.最后,展望了超精密光学加工技术的发展趋势.希望能为光学制造领域后续深入研究提供参考.     

工业机器人加工自由曲面光学元件的方法研究

现阶段自由曲面光学元件的加工成为了制约其发展和应用的关键问题,利用高自由度的数控加工设备自动化生产取代传统手工打造已经成为必然趋势。利用工业机器人模拟精密机床动作,搭载合适的工具头对自由曲面光学元件进行研磨,既提高了原本手工研磨的效率,又相对精密机床实现了成本的降低。以Preston理论为支撑,设计并制作了适合工业机器人自动光学研磨的工具头,并用实验和实际加工验证了该方法的可行性。     

超精密非球面镜面模具直轴磨削的研究

研究了非球面镜面模具直轴超精密磨削技术,给出了非球面镜面模具超精密加工机理、算法原理、软硬件结构、系统实现、工艺分析及实例应用,开发了小型超精密非球面镜面加工系统SGTCAM1.0.研究结果表明,系统原理正确,加工出的非球面光学零部件形状误差在100 nm以下,表面粗糙度在5 nm以下,达到纳米级加工精度.开发的系统使用方便,成本低.     

微结构光学功能元件模具的超精密磨削加工技术

微结构光学功能元件在航空航天、机械电子、光学以及光电子领域都具有非常重要的应用价值和极其广阔的应用前景,针对其大批量复制用模具的超精密磨削加工技术也越来越受到重视。微结构光学功能元件模具的超精密磨削加工技术不同于传统的磨削加工技术,是在模具表面加工制造出各种不同形貌、不同尺度、不同维数并具有不同光学功能的微小几何结构。结合目前国内外微结构表面超精密制造技术的研究和发展,对微结构光学功能元件模具的超精密磨削加工技术进行综述。介绍超精密磨削加工技术在微结构表面制造中的应用,分析目前微结构光学功能元件模具超精密磨削加工中存在的关键技术问题,并对微结构光学功能元件模具的超精密磨削加工发展趋势进行预测。     

A theoretical and experimental investigation of design and slow tool servo machining of freeform progressive addition lenses (PALs) for optometric applications

Different from the traditional single or bifocal lens, freeform progressive addition lens (PAL) comprises of a far view zone, a near zone and a progressive zone between the far and near zones. Freeform PAL provides a good solution to correct presbyopia and other disorders of accommodation, which is more widely adopted in the present optometric applications. However, there is still a lack of a standard procedure for the design of a PAL. Besides, the traditional manufacturing of freeform PAL is usually done by the approaches of grinding and polishing one by one, which is not only expensive but also time-consuming. This paper presents the research of a new approach for design and manufacturing technology for freeform PAL by ultra-precision machining approach. Extended polynomial is employed for the representation of freeform surface, which is used for the optimization of optical performance by some commercial optical software such as Zemax. Ultra-precision machining technology based on single-point diamond turning with slow slide servo (3S) machining is used to produce the mould inserts for precision moulding of the freeform PAL. Machining mechanics of 3S is discussed. A freeform PAL with an aspherical surface as front side and a freeform surface as back side has been designed. The precision mould insert of the designed freeform PAL was produced by ultra-precision machining process, and a plastic freeform PAL made of polycarbonate was also produced by precision moulding. Preliminary results obtained show that the new approach for design and fabrication is helpful to advance the design procedure optimization and mass production of PAL in optometry.     

Characterization of surface defects in fast tool servo machining of microlens array using a pattern recognition and analysis method

Microlens array (MLA) is a type of structured freeform surfaces which are widely used in advanced optical products. Fast tool servo (FTS) machining provides an indispensible solution for machining MLA with superior surface quality than traditional fabrication process for MLA. However, there are a lot of challenges in the characterization of the surface defects in FTS machining of MLA. This paper presents a pattern recognition and analysis method (PRAM) for the characterization of surface defects in FTS machining of MLA. The PRAM makes use of the Gabor filters to extract the features from the MLA. These features are used to train a Support Vector Machine (SVM) classifier for defects detection and analysis. To verify the method, a series of experiments have been conducted and the results show that the PRAM produces good accuracy of defects detection using different features and different classifiers. The successful development of PRAM throws some light on further study of surface characterization of other types of structure freeform surfaces.     

光学自由曲面快速刀具伺服车削误差的补偿

受各种误差因素以及周期性变化的切削力的影响,快速刀具伺服金刚石车削技术往往难以用一次车削获得满足光学性能要求的自由曲面。本文提出了一种利用线性差动传感器(LVDT)实现高精度接触式自由曲面在位测量的方法。该方法结合两自由度快速刀具伺服系统,实现了基于快速刀具伺服(FTS)的自由曲面车削加工的误差补偿。试验结果表明,该技术将自由曲面的加工精度提高了20%,表面粗糙度降低18.1%,解决了FTS系统与机床运动的同步问题,可补偿机床xyz三向运动误差,可用于自由曲面加工误差的修正。该方法还可用于不对称幅度较大的曲面或硬脆性材料的加工等,故促进了高精度光学自由曲面的推广应用。     

超精密加工技术研究现状及发展趋势

超精密加工是多种技术综合的一种加工技术,是获得高形状精度、表面精度和表面完整性的必要手段。根据当前国内外超精密加工技术的发展状况,对超精密切削、磨削、研磨以及超精密特种加工及复合加工技术进行综述,简单地对超精密加工的发展趋势进行预测。     

A theoretical and experimental investigation of orthogonal slow tool servo machining of wavy microstructured patterns on precision rollers

Precision cylinders, or rollers, with patterned microstructures on the surface are the key tooling component in the Roll-to-Roll and Roll-to-Plane fabrication process for precision manufacturing of microstructured plastic films. These films are widely used in optical applications such as the backlight guide and brightness enhancement films in LCD and LED displays. Compared with other fabrication processes, such as lithography, Single-Point Diamond Turning (SPDT), using a Fast Tool Servo (FTS) or Slow Tool Servo (STS) process, is an enabling and efficient machining method to fabricate microstructures. Most studies of the tool servo machining process focus on either machining microstructures in the axial direction for face machining of flat parts or in the radial direction on the surface of a precision roller. There is relatively little research work found on the machining of patterned microstructures on the surface of precision rollers using the tool servo in the axial direction. This paper presents a pilot study on the development of a tool path generator for machining wavy microstructure patterns on precision rollers by using an Orthogonal Slow Tool Servo (OSTS) process. The machining concept of OSTS is first explained, and then the tool path generator is developed in detail for machining wavy microstructure patterns on a roller surface. Modelling and simulation of pattern generation for different microstructures with different wavy patterns and grooves are presented based on the proposed tool path generator. Preliminary experimental work using SPDT on a 4-axis ultra-precision machine tool is presented and clearly shows the generation of unique wavy microstructure patterns on a precision roller. The machined wavy microstructures on the roller surface are measured and analyzed to evaluate the validity of the proposed tool path generator.     

Fabrication of 3D submicron to micro textured surfaces using backside patterned texturing (BPT)

This work presents a novel fabrication method for submicron to micro size textures on flat surfaces using the backside patterned texturing (BPT). The proposed method utilizes the pre-fabricated macro-features on the backside of work material, and thereafter the front side is face turned with a single point diamond tool to generate textured surfaces. Different from existing texturing methods, BPT produces textured surfaces from submicron to micro scale without any external gadgets such as vibration assisted machining or synchronized tool-spindle motion. The miniature feature arises on the diamond turned surface due to the induced residual stresses when the specimen is unleashed from the machine. To demonstrate the efficacy of the method, a series of machining experiments were conducted to fabricate various types of freeform surface textures like water-drop freeform, cylindrical freeform surfaces, etc. The fabrication methodology of different sizes of bumps with precisely controlled surface quality is illustrated. The texture profiles comprising the deformation height from hundreds of nanometer to few micrometers with mirror surface quality were successfully fabricated on the diamond machined surface. The experimental results suggest that the pre-fabricated pattern, workpiece thickness and machining condition play a critical role to determine the final shape and geometry of generated textures.     

Microgrooving on electroless nickel plated materials using a single crystal diamond tool

Diamond tools are used in ultra precision machining for their outstanding hardness and crystalline structure, which enable the fabrication of very sharp cutting edges. Single crystal diamond tools are thus extremely useful to machine electroless nickel-plated dies which are generally used for making molds for optical components. This paper deals with the objective to evaluate the performance and suitability of a single crystal diamond tool during microgrooving on electroless nickel plated workpieces. Effects of different machining parameters on overall machining performance were also investigated. The experimental results revealed that long distance (50 km) machining of microgrooves on electroless nickel is possible with a single crystal diamond tool without any significant tool wear. Some groove wear on the rake face were found after machining 28.5 km. No evidence of chipping or wear had been observed on the flank face during the total machining length. The surface roughness range of the machined workpieces was found to be 4–6 nm. Both thrust and cutting components of the machining forces showed an increasing trend with increasing machining distance, though magnitude of the thrust forces were found to increase more than the cutting forces.     

球面上微透镜阵列超精密慢伺服加工精度影响因素的研究

超精密慢伺服车削可加工出高精度的连续和非连续自由曲面,但是在微透镜阵列的加工过程中,不同位置的透镜加工精度也不同,个别子透镜的质量降低可能引起整个功能部件的失效。为了研究曲面上微透镜阵列超精密慢伺服加工精度的影响因素,本文采用实验的方法分析基面几何形状和子透镜位置对球面上微透镜阵列慢伺服车削加工精度的影响,通过在三种不同球径的基面上加工微透镜阵列,并使用Bruker GT-X白光干涉仪测量所加工的基面和微透镜阵列,分析了不同基面上不同位置的子镜表面粗糙度和形状精度的变化趋势。实验结果表明,同一基面上不同位置的子透镜,慢伺服车削加工表面微观形貌不同,表面粗糙度和形状精度也不同;基面的几何形状也会影响子镜的加工精度,当基面球径从50 mm增大至150 mm时,外圈子镜的表面粗糙度从75.78 nm(Ra)变小为69.08 nm(Ra)。在超精密慢伺服加工微透镜阵列过程中,必须考虑基面几何形状和子透镜位置两个因素对加工精度的影响,这将有助于提高微透镜阵列加工精度的一致性并保证微透镜阵列功能的有效性。