Next-generation lithography for 22 and 16 nm technology nodes and beyond

In this paper, next-generation lithography (NGL) for the 22 and 16 nm technology nodes and beyond is reviewed. A broad range of topics, including history, technologies, critical challenges, and the most plausible candidates are discussed. The 22 and 16 nm technology nodes rely on NGL. NGLs have been extensively studied. Because of technological issues, the semiconductor industry has stopped pursuing several NGLs, such as X-ray proximity lithography, ion projection lithography, and scattering with angular li...     

现代微电子行业的新型湿法清洗工艺

随着半导体技术的不断发展,集成电路的线宽在不断减小,对硅抛光片表面质量的要求也越来越高,为使芯片上的器件功能正常,避免硅片制造中的沾污是绝对必要的。传统的RCA清洗方法已不能满足其需求。因此,必须发展新的清洗方法。本文对传统的RCA清洗方法进行了简单的介绍,在此基础上,介绍新发展的HF/O3清洗法,从而对450mm硅片清洗方法的未来发展方向进行了简单论述。     

Breaking the frame-buffer bottleneck with logic-enhanced memories

Logic-enhanced memory chips that can remove the rasterizer/frame buffer bottleneck which limits the performance of current image-generation architectures are discussed. Putting pixel memory on-chip with rasterizing processors provides the two to three orders of magnitude improvement in access rates needed to support realistic shading models and aliasing in interactive systems. Current high-performance graphics systems and logic-enhanced memory architectural issues are reviewed. The design of the PixelFlow Enhanced Memory Chip (EMC), which exploits advances in semiconductor technology and circuit techniques to build compact, high-performance rasterizers, is described     

现代微电子行业的新型湿法清洗工艺

随着半导体技术的不断发展,集成电路的线宽在不断减小,对硅抛光片表面质量的要求也越来越高,为使芯片上的器件功能正常．避免硅片制造中的沾污是绝对必要的。传统的RCA清洗方法已不能满足其需求。因此,必须发展新的清洗方法。本文对传统的RCA清洗方法进行了简单的介绍,在此基础上,介绍新发展的HF／O3清洗法,从而对450mm硅片清洗方法的未来发展方向进行了简单论述。     

基于单片机LED旋转屏设计

随着半导体材料以及工艺技术的提高,生产量的增加,和科学技术及工艺水平的提升,LED灯的性能进一步地提高。它随着产品价格的不断逐步提高和价格下降,使它将渐渐的可以进入千家万户,给我们的家居生活环境带来一个安全节能,明亮的新生活光源。led这种绿色环保日光灯的节电效率几乎相比普通绿色白炽灯几乎可以做的节电效率高达80%以上,led这种绿色环保日光灯的使用寿命几乎可以是普通绿色白炽灯的光管的10倍以上,它们几乎都可以做的完全是免费电维护,不过我们还是需要经常的使用更换普通白炽光的灯管,镇流器,启辉器等产品来彻底解决这些问题,绿色环保日光灯主要是绿色环保型的一种绿色日光半导体工业照明专用光源,它的主要特点之一是照射光线柔和,光谱纯,有利于绿色日光灯对有害人体和眼睛视力的长期保护和有害植物微生体的健康。将采用单片机处理器控制的led流水灯显示设备稍作一些改进,让它更加灵动起来,就是因为它能神奇地在屏幕上显示各种的字符或图案,其视觉效果如同鱼漂浮在空中一般。之所以能如此,这主要得益于一种人眼的"视觉暂留"的现象,我们可以把它称之为pov(persistenceofvision)。这种LED旋转技术可以运用在各种邻域,如广告设计,酷炫屏幕设计等。     

A versatile layout specification system for the electron beam machine

Device fabrication in the semiconductor industry involves the production of complex layouts by either photolithography or electron beam lithography. Designers normally use computer aided design techniques to compose the final layout of the master. In this paper, a versatile layout generation system that may be used to produce masters using either photolithography or electron beam lithography is described. The flexibility of this configuration is centred around a high level pattern specification language that allows considerable latitude in pattern definition. For example, it is possible to perform algebraic manipulations on operands alongside layout specification in this language. The problems involved in compiling and executing this language are outlined. A process that allows decomposition of line coordinate data into areas suitable for irradiation by an electron beam machine is described. Development and fabrication of the layout may now be carried out in a single continuous operation using this system.     

FPGA单倍线测试方法研究

二十一世纪,计算机技术得到了进一步提高与普及,并已应用于各个行业中,半导体集成电路技术在这一背景下也有了空前发展。用计算机软件来进行FPGA测试方法的设计,使现场可编程门阵列（FPGA）的测试效率得到极大提高。采用美国Xilinx公司的Xilinx软件进行FPGA单倍线资源的测试方法设计,用Visual C＋＋软件进行编程生成测试文件,实现FPGA单倍线资源测试。     

Dual layer photoresist complimentary lithography applied on sapphire substrate for producing submicron patterns

In this study, the combined technologies of dual-layer photoresist complimentary lithography (DPCL), inductively coupled plasma-reactive ion etching and laser direct-write lithography are applied to produce the submicron patterns on sapphire substrates. The inorganic photoresist has almost no resistance for chlorine containing plasma and aqueous acid etching solution. However, the organic photoresist has high resistance for chlorine containing plasma and aqueous acid etching solution. Moreover, the inorganic photoresist is less etched by oxygen plasma etching process. The organic and inorganic photoresist deposit sequentially into a composite photoresist on a substrate. The DPCL takes advantages of the complementary chemical properties of organic and inorganic photoresist. We fabricated two structures with platform and non-platform structure. The non-platform structure featured structural openings, the top and bottom diameters and the depth are approximately 780, 500 and 233 nm, respectively. The platform structure featured structural openings, the top and bottom diameters and the depth are approximately 487, 288 and 203 nm, respectively. The precision submicron or nanoscale patterns of large etched area and patterns with high aspect ratio can be quickly produced by this technique. This technology features a low cost but high yield production technology. It has the potential applications in fabrication of micro-/nanostructures and devices for the optoelectronic industry, semiconductor industry and energy industry.     

集成电路技术的发展

回顾了集成电路技术的发展历史,展望了集成电路未来的发展趋势。在微电子技术诞生和发展过程中具有一些里程碑式的发明,如:晶体管、集成电路、集成电路平面工艺、MOS器件、微处理器、光刻技术、铜互连工艺的发明等。集成电路技术一直并将继续以特征尺寸缩小、集成度提高的模式,按摩尔定律预测的指数增长率发展。随着器件特征尺寸逐渐缩小并逼近其物理极限,集成电路技术的发展将受到来自于材料、工艺和物理基础等方面的挑战,呈现出多维发展的趋势,这些挑战涉及了微电子学的理论基础。     

In-situ fabrication of an out-of-plane microlens with pre-definable focal length

Out-of-plane microlenses are an important component for integrated optics. Unlike their in-plane counterparts, the fabrication of out-of-plane microlenses is more complicated, which limits their applications. In this paper, a new technique that is capable of fabricating out-of-plane microlenses is described. The resulting lenses have pre-definable focal length and can focus light beams not only in the horizontal plane, but also in the vertical plane. The fabrication process is completely compatible with the soft lithography technique. The lens chamber with two thin polydimethylsiloxane (PDMS) membranes was designed and fabricated together with microfluidic or other components using the same UV lithography mask. The lens was then formed in an in-situ fashion. Curable polymers were injected into the lens chamber and cured while pneumatic pressure was applied to keep the PDMS membranes deformed in a quasi-spherical profile. Pneumatic pressure and membrane thickness can be adjusted to control the resulting lens focal length. With a group of lens chambers with different membrane thickness, a single pressure line can be used to fabricate microlenses with different focal lengths. Since cured polymer was used as the lens filling material, the resulting lens can be used without a pressure source. Different polymers can be selected for desirable optical properties. The simulation and experimental results have proved the feasibility of this technique and resulting lens showed good focusing ability for a divergent light beam from an on-chip multi-mode optical fiber. The small design footprint, total compatibility with soft lithography and technical versatility of this technique make it particularly useful for intergrating out-of-plane microlens into microfluidic chips, which may open new possibilities for the development of on-chip optical detection system.     

论计算机故障诊断及解决方式

随着人们物质生活水平的不断提高,计算机的应用已经是相当普及,人们的日常生活、学习、娱乐都离不开它,但由于用户的持续增加,计算机形形色色的故障也随之出现,很多客户都依赖于售后服务人员的维护,自己却对故障一无所知,正确理解计算机故障就很有必要。一方面:售后服务人员或修理工技术水平的高低将会直接影响售后服务质量,另一方面:对于使用者来说对故障原理有一些了解可以主动避免故障的发生,从而可以在使用上处于主动地位。本文从实践出发积累多年计算机故障诊断经验,将计算机故障进行划分,并根据故障缘由对应解决方案。     

Integrated data envelopment analysis and neural network model for forecasting performance of wafer fabrication operations

With the rapid change of manufacturing environments, semiconductor fabricators are forced to make continuous investments in advanced technology to maintain their competitive advantage. Wafer fabrication (fab) performance evaluations are important for examining past operations such as the capacity and resource allocation. In addition, forecasting provides useful information for what-if analyses to anticipate useful strategies early to avoid potential losses. However, the integration of performance evaluation and forecast based on a consideration of the relative performance along the time horizon has rarely been addressed. In particular, the part of performance evaluation is to generate the relative performance in a period with rolling data. Then, the forecast part is to build a model for performance prediction based on the result of present performance. This study aimed to construct a performance forecast model by integrating data envelopment analysis and a back-propagation neural network for performance evaluation and forecast, respectively. Empirical data from a leading semiconductor company in Taiwan was used to test the proposed model. The results provide basic information and early alarms to adjust the resource allocation before the future performance declines. The empirical analysis demonstrated the practical feasibility of the proposed approach.     

FSL: a fast structured logic design methodology for high speed GaAs digital integrated circuits

FSL (fast structured logic) is an automated design methodology concept, directed toward the rapid design of III–V integrated circuits and based on the use of small PC orientated workstations. The FSL approach is a flexible and hierarchical design method which offers high levels of integration and performance, and reduced design time while ensuring ‘first pass’ success. Control of onchip high speed interconnects and automatic design verification by construction are important attributes of FSL. This unique chip design approach is technology independent, in that the chip design and functional logic simulation is completed before the semiconductor technology is selected. The chip performance characteristics and topological layout are automatically defined when the GaAs (Gallium arsenide) fabrication process is selected. FSL is a structured logic design approach which allows control of critical parameters through high speed interconnect constraints and significantly shortens the IC development cycle.The design, fabrication and evaluation testing of a 4-bit up/down counter circuit and a 16 stage PN code generator designed with FSL and implemented in GaAs semiconductor technology are described. GaAs chips implemented with FSL have been compared with other design methods. These comparisons indicate packing densities comparable to standard cell approaches, with design cycle times in the order of those required for gate array implementations, while approaching performance levels achieved with handcrafted designs.     

An online collaborative semiconductor yield forecasting system

Yield forecasting is a very important task to a semiconductor manufacturing factory which is a typical group-decision-making environment. Namely, many experts will gather to predict the yields of products collaboratively. To enhance both the precision and accuracy of collaborative semiconductor yield forecasting, an online expert system is constructed in this study. The collaborative semiconductor yield forecasting system adopts the client–server architecture, and therefore the necessity for all experts to gather at the same place is relaxed, which is especially meaningful for a multiple-factory case. To demonstrate the applicability of the collaborative semiconductor yield forecasting system, an experimental system has been constructed and applied to two random-access-memory products in a real semiconductor manufacturing factory. Both the precision and accuracy of forecasting the yields of the two products were significantly improved. Besides, the collaborative semiconductor yield forecasting system was also considered as a convenient platform for the product engineers or quality control staff from different factories to share their opinions about the yield improvement process of a product being manufacturing with the same technology in multiple factories.     

基于N B-IoT网络的物联网安全研究

With the continuous development of technology, the traditional Internet of things has been unable to meet the application of massive equipment, thus NB-IoT emerges. This paper introduces the technical characteristics and system architecture of NB-IoT, points out the security risks in detail, and puts forward the security protection measures. With the continuous development of technol- ogy and the continuous improvement of the Internet of things application ecosystem, NB-IoT is bound to have a profound impact on society.     

基于微服务架构B/S系统的性能分析

传统的单体应用架构系统,随着用户需求和系统功能的变动,出现了单体应用功能模块边界模糊、部署效率低、扩展困难、技术更迭代价高等缺点,尤其是单个模块修改部署效率低的问题.因此,微服务技术得到关注和应用,微服务架构的业务边界确定服务边界,具有高内聚性,易于开发与维护、局部修改部署、技术选择不受限等优势.本文研究微服务应用系统的架构优势,设计了一B/S应用系统进行测试分析.实验设计测试指标为线程响应时间、吞吐量以及部署时间的实验方案,并使用Jmeter性能测试工具进行测试,分析了20个和50个并发用户的测试数据.实验结果表明微服务在响应时间、吞吐量等指标有明显的效率和性能优势.     

From Relays to MPU's

When the IEEE Computer Society was founded twentyfive years ago, the transistor was a laboratory curiosity, and operating computers were assembled from relays or vacuum tubes. Today, a single integrated circuit far surpasses the capability of those early computers, and further progress seems inevitable. The development of semiconductor devices has depended upon a synergism with computers. This is particularly true for integrated circuits, whose development was motivated by the computer applications. With each advance in components, the computers resulting from their use reached a wider market, motivating further advances in the semiconductor technology.     

Holographic data storage

Research into and the development of data storage devices is a race to keep up with the continuing demand for more capacity, more density, and faster readout rates. Improvements in conventional memory technologies-magnetic hard disk drives, optical disks, and semiconductor memories-have managed to keep pace with the demand for bigger, faster memories. However, there is strong evidence that these two-dimensional surface storage technologies are approaching fundamental limits. An alternative approach for next-generation memories is to store data in three dimensions. This article describes developments in holographic 3D memories, in which high density is achieved by superimposing many holograms within the same volume of recording material. Holographic storage is a promising candidate for next-generation storage. Research has demonstrated that holographic storage systems with desirable properties can be engineered. The next step is to build these systems at costs competitive with those of existing technologies and to optimize the storage media     

试论云计算中的关键技术

在计算机技术的基础上,通过对网格计算进行优化和改良从而构建出一种新的计算模型即为云计算.随着计算机技术和网络技术的不断发展,云计算的使用范围也在不断地扩大,这同时也给IT产业提供了相当有利的技术保障.本文对云计算进行了阐述,同时针对其关键技术进行了概述.     

室内温湿度及燃气泄露监测系统

家庭安全—直是人们关注和担心的话题。随着社会的进步,人民生活质量不断提高,家庭安全问题却愈发严重。基于物联网技术的室内温湿度和燃气泄露监测系统能够实时掌握室内的温湿度状况,并在温度过高或可燃气体（一氧化碳）浓度过高时自动报警,能够尽早发现问题并及时处理,为人们的家庭安全保驾护航。