共查询到20条相似文献,搜索用时 15 毫秒
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Kanna Aoki Keita Ishiguro Masaki Denokami Yuya Tanahashi Kentaro Furusawa Norihiko Sekine Tadafumi Adschiri Minoru Fujii 《Small (Weinheim an der Bergstrasse, Germany)》2017,13(36)
Although, varieties of micro‐ to nanoscale fabrication technologies have been invented and refined for silicon (Si) processing because Si is the basic material of integrated circuits, the layouts are based on layer‐by‐layer approaches, making it difficult to realize three‐dimensional (3D) structures with complicated shapes normal to the planar surface (along the out‐of‐plane direction) of the wafers used. Here, a novel and direct Si‐processing technology that enables to bend thin layers of Si surfaces into various 3D curved structures at the micrometer scale is introduced. This bending is achieved by porosifying a Si wafer surface using anodic oxidation and then performing conventional photolithography patterning and wet etching. The porosity gradient in the depth direction gives rise to a stress‐internalized layer in which self‐rolling action is induced via subsequent patterning and wet etching. A subsequent oxidation process further enhances the curvature deformation, leading to the formation of tubes, for example. The rolling directions can be controlled by 2D patterning of the porous Si layer, which is explained well from a structural dynamics perspective. This technology has a wide range of capabilities for realizing 3D structures on Si substrates, enabling new design possibilities for Si‐based on‐chip devices. 相似文献
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Organ‐On‐A‐Chip: Biomechanical Strain Exacerbates Inflammation on a Progeria‐on‐a‐Chip Model (Small 15/2017) 下载免费PDF全文
João Ribas Yu Shrike Zhang Patrícia R. Pitrez Jeroen Leijten Mario Miscuglio Jeroen Rouwkema Mehmet Remzi Dokmeci Xavier Nissan Lino Ferreira Ali Khademhosseini 《Small (Weinheim an der Bergstrasse, Germany)》2017,13(15)
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Carbon Nanotubes: On‐Chip Chemical Self‐Assembly of Semiconducting Single‐Walled Carbon Nanotubes (SWNTs): Toward Robust and Scale Invariant SWNTs Transistors (Adv. Mater. 23/2017) 下载免费PDF全文
Vladimir Derenskyi Widianta Gomulya Wytse Talsma Jorge Mario Salazar‐Rios Martin Fritsch Peter Nirmalraj Heike Riel Sybille Allard Ullrich Scherf Maria A. Loi 《Advanced materials (Deerfield Beach, Fla.)》2017,29(23)
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Bioinspired Composites: Hierarchical and Heterogeneous Bioinspired Composites—Merging Molecular Self‐Assembly with Additive Manufacturing (Small 28/2017) 下载免费PDF全文
Anand K. Rajasekharan Romain Bordes Carl Sandström Magnus Ekh Martin Andersson 《Small (Weinheim an der Bergstrasse, Germany)》2017,13(28)
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Biomedicine: Porous Electrospun Fibers with Self‐Sealing Functionality: An Enabling Strategy for Trapping Biomacromolecules (Small 47/2017) 下载免费PDF全文
Jin Zhang Ting Zheng Emine Alarçin Batzaya Byambaa Xiaofei Guan Jianxun Ding Yu Shrike Zhang Zhongming Li 《Small (Weinheim an der Bergstrasse, Germany)》2017,13(47)
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Photonic Crystals: Light‐Patterned Crystallographic Direction of a Self‐Organized 3D Soft Photonic Crystal (Adv. Mater. 42/2017) 下载免费PDF全文
Zhi‐Gang Zheng Cong‐Long Yuan Wei Hu Hari Krishna Bisoyi Ming‐Jie Tang Zhen Liu Pei‐Zhi Sun Wei‐Qiang Yang Xiao‐Qian Wang Dong Shen Yannian Li Fangfu Ye Yan‐Qing Lu Guoqiang Li Quan Li 《Advanced materials (Deerfield Beach, Fla.)》2017,29(42)
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On‐Chip Chemical Self‐Assembly of Semiconducting Single‐Walled Carbon Nanotubes (SWNTs): Toward Robust and Scale Invariant SWNTs Transistors 下载免费PDF全文
Vladimir Derenskyi Widianta Gomulya Wytse Talsma Jorge Mario Salazar‐Rios Martin Fritsch Peter Nirmalraj Heike Riel Sybille Allard Ullrich Scherf Maria A. Loi 《Advanced materials (Deerfield Beach, Fla.)》2017,29(23)
In this paper, the fabrication of carbon nanotubes field effect transistors by chemical self‐assembly of semiconducting single walled carbon nanotubes (s‐SWNTs) on prepatterned substrates is demonstrated. Polyfluorenes derivatives have been demonstrated to be effective in selecting s‐SWNTs from raw mixtures. In this work the authors functionalized the polymer with side chains containing thiols, to obtain chemical self‐assembly of the selected s‐SWNTs on substrates with prepatterned gold electrodes. The authors show that the full side functionalization of the conjugated polymer with thiol groups partially disrupts the s‐SWNTs selection, with the presence of metallic tubes in the dispersion. However, the authors determine that the selectivity can be recovered either by tuning the number of thiol groups in the polymer, or by modulating the polymer/SWNTs proportions. As demonstrated by optical and electrical measurements, the polymer containing 2.5% of thiol groups gives the best s‐SWNT purity. Field‐effect transistors with various channel lengths, using networks of SWNTs and individual tubes, are fabricated by direct chemical self‐assembly of the SWNTs/thiolated‐polyfluorenes on substrates with lithographically defined electrodes. The network devices show superior performance (mobility up to 24 cm2 V?1 s?1), while SWNTs devices based on individual tubes show an unprecedented (100%) yield for working devices. Importantly, the SWNTs assembled by mean of the thiol groups are stably anchored to the substrate and are resistant to external perturbation as sonication in organic solvents. 相似文献