用于微机电系统的SiO2/Si3N4驻极体的制备及电荷稳定性

驻极体微型发电机是近期提出的微电子机械系统开发中的一个新领域,驻极体电荷稳定性则是影响驻极体微型发电机性能的关键.用等离子体增强化学气相沉积(PECVD)方法制备SiO2/ Si3N4双层膜,采用电晕充电和热极化方法对材料进行注极形成驻极体,探讨了器件加工工艺及存储环境对双层膜驻极体电荷稳定性的影响.结果表明,电晕充电后SiO2/ Si3N4双层膜的电荷存储稳定性明显优于SiO2单层膜;传统的电晕注极方法仅适用于大面积驻极体的制备,但对微米量级的材料表面不适用;微器件制备的工艺流程对驻极体电荷稳定性有显著影响,但存储环境对热极化驻极体电荷稳定性的影响很小.     

PECVD SiO2/Si3N4双层膜驻极体性能

本文研究了在带有Cr/Au电极的玻璃衬底上利用PECVD制备的SiO2/Si3N4双层膜驻极体性能.针对这种驻极体提出了一个简单的工艺流程暴露出一部分金属电极,并在电晕注极过程中将底电极引出接地.通过实验改变电晕注极过程中的注极时间、温度等因素,希望得到对PECVD制备的SiO2/Si3N4双层膜驻极体性能的优化.本文证实了PECVD双层膜具备良好的驻极体性能,有望广泛应用于微器件中.     

Si基多孔SiO2薄膜的驻极体性能

通过控制制备工艺条件和充电参数,利用相应条件下样品的等温表面电位衰减,开路热刺激放电电流谱等。考察了利用溶胶－凝胶（sol-gel)方法制备的Si基多孔SiO2薄膜的驻极体性能,分析了各种工艺参数与蓦主极体性质之间的联系,同时利用Gauss拟合及初始上升法对薄膜驻极体的电荷阱深度进行了估算,实验结果表明,反应物中水的含量对薄膜驻极体的陷阱分布具有调节作用,估算出负电晕充电SiO2薄膜驻极体电荷的活化能为0．3 eV和1．0eV;环境湿度对电荷储存稳定性有一定的影响,降低栅压可以提高SiO2薄膜驻极体的电荷储存稳定性。     

电子束与电阻复合蒸发法制备Zr-Cu非晶薄膜及性能表征

主要采用电子束蒸发与电阻蒸发复合镀膜系统制备Zr-Cu二元非晶薄膜,衬底基板无冷却装置。通过X射线衍射仪(XRD)、场发射透射电子显微镜(FE-TEM)、场发射扫描电子显微镜(FE-SEM)、微控四探针测量仪等仪器,系统地研究了样品沉积时间对薄膜厚度、微观结构、表面形貌以及电学性能的影响,另外还分析了与磁控溅射制备的Zr-Cu非晶样品的区别。结果显示,该复合镀膜技术制备的ZrxCu100-x非晶薄膜玻璃形成成分范围为x=30~85;薄膜的结构与性能对沉积时间比较敏感。样品随沉积时间的延长从非晶结构逐渐向非晶纳米晶复合结构转变;相比磁控溅射制备的薄膜样品,复合蒸发法制备的薄膜表面呈现较大尺寸的"团簇"形貌;样品的电阻率和方块电阻随沉积时间的延长逐渐减小。     

基于微孔SiO2栅介质的透明氧化物薄膜晶体管

采用等离子增强化学气相沉积(PECVD)法制备微孔SiO2薄膜并将其作为栅介质,制作了基于微孔SiO2栅介质层的透明氧化物薄膜晶体管。利用场发射扫描电镜、阻抗分析仪以及半导体分析仪对样品进行表征。结果表明,微孔SiO2栅介质具有双电层效应,这种微孔SiO2栅介质透明氧化物薄膜晶体管器件具有工作电压低,开关电流比大,透光性高,稳定性强等良好性能。     

磁性纳米颗粒膜微波物性研究

采用磁控溅射工艺和复合靶技术制备FeCoB-SiO2磁性纳米颗粒膜;利用X射线衍射仪、扫描探针显微镜分析这类薄膜的微结构和形貌特征;采用振动样品磁强计、四探针法、微波矢量分析仪及谐振腔法测量薄膜试样的磁电性能和微波复磁导率;重点对SiO2介质相含量、薄膜微结构对电磁性能产生重要影响的机理做了分析和探讨.结果表明,这类FeCoB-SiO2磁性纳米颗粒膜具有良好的软磁性能和高频电磁性能,2GHz时,磁导率μ＞50,可以应用于高频微磁器件中.     

单层二氧化铪（HfO2）薄膜的特性研究

利用电子束蒸发、离子束辅助沉积和离子束反应溅射三种制备方法制备了单层HfO2薄膜,对薄膜样品的晶体结构、光学特性、表面形貌以及吸收特性进行了研究。实验结果表明,薄膜特性与制备工艺有着密切的关系。电子束蒸发和离子束反应溅射制备的薄膜为非晶结构,而离子束辅助制备的薄膜为多晶结构。电子束蒸发制备的薄膜折射率较低,薄膜比较疏松,表面粗糙度较小,吸收相对较小,而离子束辅助以及离子束反应溅射制备的薄膜折射率较高,薄膜的结构比较致密,但表面粗糙度较大,吸收相对较大。不同制备工艺条件下薄膜的光学能隙范围为5.30～5.43eV,对应的吸收边的范围为228.4～234.0nm。     

制备工艺条件对HfO_2薄膜结构和性能的影响

用电子束蒸发、离子束辅助、反应磁控溅射三种方法在石英衬底上制备了氧化铪薄膜.利用掠角X射线衍射和扫描电镜分析了不同制备工艺条件下氧化铪薄膜的晶体结构和显微结构,用紫外.可见分光光度计、椭偏仪、和纳米硬度计分别测试了不同制备工艺条件下氧化铪薄膜的可见透射光谱、光学常数和硬度.结果表明薄膜的晶体结构、显微结构、光学性能和硬度等都与制备工艺有着密切的关系,电子束蒸发制备的薄膜为非晶相,而离子束辅助和反应磁控溅射制备的薄膜为多晶相,三种方法制备的氧化铪薄膜都为柱状结构,电子束蒸发和离子束辅助制备的薄膜色散严重,但反应磁控溅射制备的薄膜吸收较大,反应磁控溅射制备薄膜的硬度远大于电子束蒸发和离子束辅助制备薄膜的硬度.并分别用薄膜成核长大热力学原理和薄膜结构区域模型解释了不同工艺条件下氧化铪薄膜晶体结构和显微结构不同的原因.     

PECVD法玻璃容器内壁沉积SiO_2薄膜的SEM表征

采用自主研制的等离子体增强化学气相沉积(PECVD)专用设备,在玻璃容器内壁沉积SiO2薄膜,用作阻隔涂层。通过设计沉积工艺,在不同的气体流量比例、工作气压和生长时间等生长条件下制备出SiO2薄膜;通过扫描电子显微镜(SEM)测试表征薄膜的形貌和结构,评价薄膜的性能。根据表征结果分析了各种工艺参数对薄膜性能的影响,获得了较为优化的工艺参数,在玻璃容器内壁制备出较高质量的SiO2薄膜。     

聚丙烯薄膜的表面结构与驻极体性能相关性研究

以聚丙烯颗粒为原料、表面纳米化石英玻璃为模板,通过热压法制得表面具有不同形貌的聚丙烯薄膜,再经电晕充电形成驻极体。采用原子力显微镜技术分析了薄膜的表面结构,并用表面电位跟踪和热刺激放电技术测试了不同表面结构聚丙烯薄膜的电荷存储性能。表面电位测试结果表明,其电荷存储性能与薄膜表面的微观结构密切相关,薄膜表面越粗糙,捕获电子的能力越强,但其电荷存储稳定性差异不大。热刺激放电技术测试结果表明,其陷阱能级与表面粗糙度无关。     

Insertion of triangulated surfaces into a meccano tetrahedral discretization by means of mesh refinement and optimization procedures

In this paper, we present a new method for inserting several triangulated surfaces into an existing tetrahedral mesh generated by the meccano method. The result is a conformal mesh where each inserted surface is approximated by a set of faces of the final tetrahedral mesh. First, the tetrahedral mesh is refined around the inserted surfaces to capture their geometric features. Second, each immersed surface is approximated by a set of faces from the tetrahedral mesh. Third, following a novel approach, the nodes of the approximated surfaces are mapped to the corresponding immersed surface. Fourth, we untangle and smooth the mesh by optimizing a regularized shape distortion measure for tetrahedral elements in which we move all the nodes of the mesh, restricting the movement of the edge and surface nodes along the corresponding entity they belong to. The refining process allows approximating the immersed surface for any initial meccano tetrahedral mesh. Moreover, the proposed projection method avoids computational expensive geometric projections. Finally, the applied simultaneous untangling and smoothing process delivers a high‐quality mesh and ensures that the immersed surfaces are interpolated. Several examples are presented to assess the properties of the proposed method.     

Certification Institutions Expected to Update and Transfer Information on Present Standards

Standards are the basis for production enterprises to organize production, ex-factory inspection, trade (delivery) and technical exchanges, product certification, quality arbitration and supervision.……     

From Industry 4.0 to Research 4.0. Development of High Performance Fibers in the Light of Digitization

We associate a variety of innovations with the term ＂Industry 4.0＂. The pioneer of many 4.0 modifications forms the basisfor the trend towards the integrated di...     

Flow calorimeter for enthalpy increment measurements on condensed gases

A flow calorimeter for enthalpy increment measurements on condensed gases is presented. A better knowledge of the properties of the liquefied natural gas is needed, and therefore a liquid loop has been designed for our flow calorimeter. The fluid loop in the calorimeter is designed in order to avoid the two-phase region, since two phases would give compositional disturbances in the measurements. The avoidance of the two-phase region is made possible by increasing the pressure of the test fluid after the measurement section, then heating the fluid at super-critical pressure past the critical point. Finally, the fluid is throttled to the low-pressure gas state at the inlet condition of the compressor that circulates the fluid. To perform the pressure increase, a new cryogenic pump has been designed. To evaluate the new equipment, measurements were taken on liquid ethane over the temperature range 146–256 K at pressure between 0.9 and 5.1 MPa.     

Refrigerators Enter a New Era of Health Preservation Frestech initiates the establishment of China's first standard for household sterilization refrigerators

On November 30, 2007, the China Association for Standardization (CAS) held a press conference at Beijing Diaoyutai State Guest House. Leaders from the China Household Electric Appliance Research Institute, the China Household Electric Appliance Association, and the China Consumers' Association attended and made speeches.……     

Roman iron and steel: A review

ABSTRACT

The production of ferrous metal increased during the Roman Late Republican period, Principate and Empire. The direct bloomery process was used to extract the metal from its ores using slag-tapping and slag-pit furnaces. The fuel was charcoal and an air blast was introduced by bellows-operated tuyères. Iron formed as a bloom, often as a spongy mass of metal, which contained impurities from the smelting process, including unreacted ore, fuel, slag and fragments from the furnace walls, while the metal was often inhomogeneous with varied carbon contents. Blooms were either smithed directly into bars or ingots or they were broken up, which also allowed the removal of gross impurities and a selection of pieces with similar properties to be made. These could then be forge-welded together and formed into characteristically shaped ingots. Making steel in the furnace seems to have been achieved: it depended on the ore and the furnace and conditions within it. Surface carburization was also carried out. Iron and steel were used extensively in construction and for tools and weapons. Fire welding was often used to add pieces of steel to make the edges of tools and weapons, which could be heat-treated by quenching to harden them.     

Optimum-Simulation von Ernteprozessen

Zusammenfassung Bei der Gestaltung von Ernteprozessen — beispielsweise des Prozesses Mähdrusch, Körnertransport und -abnahme — als transportverbundene Fließarbeitsverfahren mit mindestens zwei verschiedenen Arbeitsmitteln gibt es einen großen Optimierungsspielraum. Solche Prozesse sind mehrstufige Bedienungsprozesse mit gemischter Anordnung der Bedienungseinrichtungen. Außerdem besitzen sie stark ausgeprägte räumliche Aspekte. Es wird vor allem gezeigt, welche Merkmale solcher Prozesse in Simulationsmodellen abgebildet sein müssen, welche Zielgrößen in Abhängigkeit von welchen Einflußgrößen unter Berücksichtigung welcher Prozeßbedingungen ermittelt werden sollten und wie der Bewertungsprozeß zur Ermittlung der gewünschten Informationen gestaltet werden muß.     

A study of centrifugal cast high boron high speed steel

In the present study a high‐boron high speed steel (HSS) roll material was designed. Many expensive alloy elements have been substituted by cheap boron alloy, and high‐boron high speed steel roll has been manufactured by centrifugal casting method. The microstructures, mechanical properties and wear resistance of centrifugal casting high‐boron high speed steel roll have been investigated by optical microscopy (OM), scanning electron microscopy (SEM), and X‐ray diffraction (XRD) analysis, hardness test, impact test and wear test. The results indicated that the solidification microstructures of high‐boron high speed steel roll consisted of M₂(B,C), (W,Mo)₂(B,C), M₃(B,C), M₂₃(B,C)₆ type borocarbides and martensite, a small amount of retained austenite. Borocarbides were continuously distributed over the grain boundary. After quenching from 1050 °C, local broken network appeared in partial borocarbides, and fine secondary borocarbide precipitated from the matrix. After tempering from 525 °C, the amount of precipitated borocarbide increased significantly. After heat treatment, the hardness of high‐boron high speed steel roll excelled 60 HRC, and its impact toughness excelled 8.0 J/cm². The single groove steel rolling amount of high‐boron high speed steel rolls increases by 500% than that of bainite cast iron roll, when the rolls are used in K₁ mill housing of bar mill.     

Brainstorming for ISO Strategy 2016-2020

正Responding to ISO’s appeal for survey for the to-be-developed ISO Strategy Plan for 2016-2020,SAC hosted a special workshop over the needs and comments of various fi elds on June 8 in Beijing.The workshop was attended by ISO President-elect and Ansteel General Manager Zhang Xiaogang,SAC Vice-Administrator Yu Xinli,and 30 experts from