Deposition and DC electrical characterisation of rf magnetron sputtered silicon nitride thin films

Silicon nitride (Si₃N₄) is an important insulator, frequently used in VLSI technology and for encapsulation. Conventionally it is prepared by low pressure and plasma-enhanced chemical vapour deposition, but may also be successfully deposited by RF sputtering. In the present work the sputtering process was characterised, together with some measurements on the high-field DC electrical properties in sandwich samples with Au electrodes. Films were Ar-sputtered using a Si₃N₄ sputtering target at gas pressures up to 2.12 Pa and RF discharge powers of 60–200 W. The deposition rate R was in the range 0.03–0.19 nm s^− 1 and was directly proportional to the discharge power and varied linearly with the pressure. Au electrodes formed sandwich structures with thicknesses of 50 nm–1 μm. Conductivity was essentially ohmic below 300 nm, while for the thicker films space-charge limited conductivity, dominated by an exponential distribution of traps, was observed. A mobility value of μ = 2.89 × 10^− 6 m² V^− 1 s^− 1 was derived from temperature measurements, and further analysis of the J–V data indicated a thermally generated electron concentration of 3.23 × 10¹⁹ m^− 3 and a trap concentration of 1.57 × 10²⁴ m^− 3. It was concluded that this method is suitable for the deposition of thin films, which have similar electrical properties to those prepared by chemical vapour deposition methods.     

Investigation on third order nonlinear optical,electrical and surface properties of organic stilbazolium crystal of 4-N,N-dimethylamino-N′-methylstilbazolium p-methoxybenzenesulfonate

The third order nonlinear optical, electric and dielectric properties of an organic stilbazolium derivative of 4-N,N-dimethylamino-N′-methylstilbazolium p-methoxybenzenesulfonate (DSMOS) crystal are reported. The nonlinear refractive index (n₂), two photon absorption coefficient (β) and third order optical susceptibility χ⁽³⁾ have been measured by Z-scan technique using Gaussian beam from the Nd:YAG laser at 1064 nm. The results show a large negative nonlinear refractive index (n₂ = −1.122 × 10−9 cm²/W) with a molecular two photon absorption coefficient β value of 3.625 × 10⁻⁶ cm/W. The low dielectric constant observed in the high frequency region indicates the suitability of the sample for electro-optic applications. The surface features are also investigated by atomic force microscopy (AFM).     

Oxygen partial pressure dependence of the structural properties of CdO thin films deposited by a modified reactive vacuum evaporation process

Thin films of cadmium oxide were thermally deposited on glass substrates at partial pressures of oxygen, pO₂ in the range 1.33×10⁻² to 0.133 Pa at a substrate temperature of 160 °C. Energy dispersive analysis of X-ray fluorescence (EDAX) revealed that the CdO films deposited at pO₂ value of 4.00×10⁻² Pa were nearly stoichiometric. X-ray diffractometry (XRD) confirmed the polycrystalline nature of the film structure. All the films showed an fcc structure of the NaCl-type, as the dominant phase. The films exhibited preferred orientation along the (1 1 1) diffraction plane. The texture coefficients calculated for the various planes at different oxygen partial pressures (pO₂) indicated that the maximum preferred orientation of the films occurred along the (1 1 1) plane at an oxygen partial pressure of 4.00×10⁻² Pa. This was interpreted in terms of oxygen chemisorption and desorption processes. The lattice parameters determined from the diffraction peaks were in the range 4.655–4.686 Å. The average lattice parameter a₀ found by extrapolation using the Nelson–Riley function was 4.696 Å. Both the lattice parameter and the crystallite size were found to increase with increased partial pressure of oxygen. On the other hand, the strain and dislocation density were found to decrease as the partial pressure of oxygen was raised. A maximum (80%) in the optical transmittance at λ=600 nm and minimum in the electrical resistivity (9.1×10⁻⁴ Ω cm) of the films occurred at an optimum partial pressure of oxygen of 4.00×10⁻² Pa. The results are discussed.     

Effect of swift heavy ion beam irradiation on Au–polyaniline composite films

In this paper, two-step electrochemical synthesis method is reported for the fabrication of Au–polyaniline (Au–PANI) composite film. Initially, PANI film was electrochemically synthesized by using chronopotentiometery with optimized process parameters on platinum electrode. The synthesized PANI film acts as working electrode for the decoration of Au particles on the surface of PANI film by using cyclovoltammetry (CV) technique. Later, these films were irradiated under high vacuum (∼5 × 10⁻⁶ Torr) at room temperature with 40 MeV C⁵⁺ ion beam at various fluences ranging from 1 × 10¹¹ to 1 × 10¹³ ions/cm². The Au–PANI composite films were characterized before and after irradiation by using micro-Raman, X-ray diffraction (XRD) and scanning electron microscopy (SEM) techniques. The characteristic peaks of the Raman spectrum of Au–PANI composite films were reduced after irradiation. XRD spectra exhibited the decrease in the peak intensity. Moreover, interchain distance, interplanar distance, micro strain, dislocation density and distortion parameters were calculated. The analysis revealed a significant variation in these parameters with an increase in the ion fluence, which is in line with the Raman analysis. SEM shows the formation of clusters with porous structure after irradiation.     

Effect of oxygen partial pressure on microstructural and optical properties of titanium oxide thin films prepared by pulsed laser deposition

Nanocrystalline titanium oxide (TiO₂) thin films were deposited on silicon (1 0 0) and quartz substrates at various oxygen partial pressures (1 × 10⁻⁵ to 3.5 × 10⁻¹ mbar) with a substrate temperature of 973 K by pulsed laser deposition. The microstructural and optical properties were characterized using Grazing incidence X-ray diffraction, atomic force microscopy, UV–visible spectroscopy and photoluminescence. The X-ray diffraction studies indicated the formation of mixed phases (anatase and rutile) at higher oxygen partial pressures (3.5 × 10⁻² to 3.5 × 10⁻¹ mbar) and strong rutile phase at lower oxygen partial pressures (1 × 10⁻⁵ to 3.5 × 10⁻³ mbar). The atomic force microscopy studies showed the dense and uniform distribution of nanocrystallites. The root mean square surface roughness of the films increased with increasing oxygen partial pressures. The UV–visible studies showed that the bandgap of the films increased from 3.20 eV to 3.60 eV with the increase of oxygen partial pressures. The refractive index was found to decrease from 2.73 to 2.06 (at 550 nm) as the oxygen partial pressure increased from 1.5 × 10⁻⁴ mbar to 3.5 × 10⁻¹ mbar. The photoluminescence peaks were fitted to Gaussian function and the bandgap was found to be in the range ∼3.28–3.40 eV for anatase and 2.98–3.13 eV for rutile phases with increasing oxygen partial pressure from 1 × 10⁻⁵ to 3.5 × 10⁻¹ mbar.     

Structural and optical studies on dc reactive magnetron sputtered Cu2O films

Cuprous oxide (Cu₂O) thin films were deposited by dc reactive magnetron sputtering technique onto glass substrates by sputtering of pure copper target in a mixture of argon and oxygen gases under various oxygen partial pressures in the range 8 × 10^− 3–1 × 10^− 1 Pa at a constant substrate temperature of 473 K and a sputtering pressure of 4 Pa. The dependence of cathode potential on the oxygen partial pressure was explained in terms of cathode poisoning effect. The influence of oxygen partial pressure on the structural and optical properties of Cu₂O films was systematically studied. Single phase films of Cu₂O were obtained at an oxygen partial pressure of 2 × 10^− 2 Pa. The films formed at an oxygen partial pressure of 2 × 10^− 2 Pa were polycrystalline with cubic structure and exhibited an optical band gap of 2.04 eV.     

Third-order nonlinear optical properties of bis(tetrabutylammonium)bis(4,5-dithiolato-1,3-dithiole-2-thione)copper

Bis(tetrabutylammonium)bis(4,5-dithiolato-1,3-dithiole-2-thione)copper (BCDT) was synthesized and its third-order optical nonlinearity was characterized using picosecond Z-scan at 1064 nm. The Z-scan spectra reveal a large negative nonlinear refraction coefficient n₂ as high as 4.0 × 10⁻¹⁸ m²/W and a slight two-photon absorption β, which is determined to be 3.4 × 10⁻¹² m/W. The molecular second-order hyperpolarizability γ was calculated to be 6.5 × 10⁻³² esu. All these results suggest that this material has potential for the application of all-optical switching.     

Studies on the electrochemical preparation of MgCeCo alloy thin films on Cu substrates in urea–DMSO system

Cyclic voltammetry was used to investigate the electrochemical behaviors of Mg(II), Ce(III) and Co(II) in 3.00 mol L^− 1 urea–DMSO (dimethylsulfoxide). The electrode processes of Mg(II), Ce(III) and Co(II) reducing on Pt electrodes were irreversible steps. The transfer coefficient of Mg(II), Ce(III) and Co(II) in 3.00 mol L^− 1 urea–DMSO system was calculated as 0.07, 0.05 and 0.05 at 298.15 K, respectively. The diffusion coefficient of Mg(II), Ce(III) and Co(II) in 3.00 mol L^− 1 urea–DMSO system was calculated as 2.27 × 10^− 10, 1.77 × 10^− 10 and 3.16 × 10^− 10 m² s^− 1 at 298.15 K, respectively. The MgCeCo alloy thin films with smooth, uniform and metallic luster were obtained on Cu substrates by cyclic electrodeposition in 0.01 mol L^− 1 Mg(ClO₄)₂–0.01 mol·L^− 1 Ce(CH₃SO₃)₃₋0.01 mol L^− 1 CoCl₂–3.00 mol L^− 1 urea–DMSO system. The potential sweep rate was found to be important with respect to the adhesion of the thin films.     

Synthesis,z-scan and degenerate four wave mixing characterization of certain functionalized photosensitive polyesters containing ortho-hydroxyazo chromophores

The preparation and NLO characterization of photosensitive polyesters containing azoaromatic residues in the molecular backbone, functionalized with orthohydroxy chromophores is presented. Samples were studied for its UV–vis absorption, FT-IR and intensity dependent nonlinear absorption properties. Nonlinear characterization was carried out with z-scan using frequency doubled, Q-switched Nd:YAG laser operating at 532 nm. The closed aperture z-scan spectra reveal the self defocusing effects of the samples with negative nonlinearity coefficient (n₂) showing values as high as −1.28 × 10⁻¹⁰ (esu) for certain samples and the corresponding third order susceptibility coefficient of the order of 29.9 × 10⁻¹² (esu). Degenerate four wave mixing technique was employed to substantiate the findings. The numerical fits show that the molecules exhibit reverse saturable absorption. A study of beam fluence dependence of nonlinear absorption coefficient (β_eff) has been presented. All phenomena indicate that molecules are reverse saturable absorbers whose optical limiting property gets enhanced with increasing conjugation length.     

Optical and thermal properties of crystalline Tb: KLu(WO4)2

A single crystal of Tb: KLu(WO₄)₂ with dimensions of 40 mm × 40 mm × 18 mm has been grown by the top-seeded solution growth (TSSG) method. The color of the crystal is brown. Absorption and fluorescence spectra were measured at room temperature. The measured specific heat is a little lower than that of Yb: KLW (0.365 J/g K) at 90 °C. The measured mean linear coefficients of thermal expansion are α_a = 17.1643 × 10^− 6 K^− 1_, α_a^⁎ = 14.0896 × 10^− 6 K^− 1, α_b = 8.7938 × 10^− 6 K^− 1, α_c = 23.1745 × 10^− 6 K^− 1, α_c^⁎ = 20.2866 × 10^− 6 K^− 1. The results indicate that the crystal has a large anisotropy. The refractive index was measured.     

Growth and characterization of (Pb,La)TiO3 films with and without a special buffer layer prepared by RF magnetron sputtering

The (Pb, La)TiO₃ (PLT) ferroelectric thin films with and without a special buffer layer of PbO_x have been deposited on Pt/Ti/SiO₂/Si(100) substrates by RF magnetron sputtering technique at room temperature. The microstructure and the surface morphology of the films annealed at 600 °C for 1 h have been investigated by X-ray diffraction (XRD) and atomic force microscope (AFM). The surface roughness of the PLT thin film with a special buffer layer was 4.45 nm (5 μm × 5 μm) in comparison to that of 31.6 nm (5 μm × 5 μm) of the PLT thin film without a special buffer layer. Ferroelectric properties such as polarization hysteresis loop (P–V loop) and capacitance–voltage curve (C–V curve) of the films were investigated. The remanent polarization (P_r) and the coercive field (E_c) are 21 μC/cm² and 130 kV/cm respectively, and the pyroelectric coefficient is 2.75 × 10^− 8 C/cm² K for the PLT film with a special buffer layer. The results indicate that the (Pb, La)TiO₃ ferroelectric thin films with excellent ferroelectric properties can be deposited by RF magnetron sputtering with a special buffer layer.     

Nonlinear optical properties of the PbS nanorods synthesized via surfactant-assisted hydrolysis

PbS nanorods were synthesized by surfactant-assisted homogenous hydrolysis. The products were characterized by UV–vis spectrophotometer, X-ray powder diffraction (XRD) and transmission electron microscope (TEM). PbS nanorods were measured by the Z-scan technique to investigate the third-order nonlinear optical (NLO) properties. The result of the NLO measurements shows that the PbS nanorods have the third-order nonlinear optical properties of both NLO absorption and NLO refraction with self-focusing effects. The nonlinear absorption coefficient and refractive index of the PbS nanorods are 2.16 × 10^− 9 m/W and 3.52 × 10^− 16 m²/W respectively.     

Biopolymer-clay nanoparticles composite system (Chitosan-laponite) for electrochemical sensing based on glucose oxidase

Nanocomposite matrix based on chitosan/laponite was successfully utilized to construct a new type of amperometric glucose biosensor. This hybrid material combined the merits of organic biopolymer, chitosan, and synthesized inorganic clay, laponite. Glucose oxidase (GOD) immobilized in the material maintained its activity well as the usage of glutaraldehyde was avoided. The composite films were characterized by Fourier transform infrared (FT-IR). The parameters affecting the fabrication and experimental conditions of biosensors were optimized. The sensitivity of the proposed biosensor (33.9 mA M^− 1 cm^− 2) permitted the determination of glucose in the concentration range of 1 × 10^− 6–5 × 10^− 5 M with a detection limit of 0.3 μM based on S/N = 3. The apparent Michaelis–Menten constant (K_M^app) for the sensor was found to be 15.8 mM.     

The effect of polymeric wall on the permeability of drug-loaded nanocapsules

The aim of this work was to establish a quantitative correlation between the drug permeability and the polymer concentration in the nanocapsules. Indomethacin ethyl ester-loaded nanoemulsion and nanocapsules containing poly(epsilon-caprolactone) at different concentrations (0, 2, 4, 6, 8 and 10 mg/mL) presented drug loading between 0.981 and 1.005 mg/mL, pH values from 5.0 to 5.4, particle sizes between 232 and 261 nm, polydispersity lower than 0.24 and zeta potentials from − 8.54 mV to − 11.86 mV. An alkaline hydrolysis of indomethacin ethyl ester carried out at the particle/water interface was used to simulate a sink condition of release. The number of particles in each suspension was estimated. The calculated values ranged from 5.84 × 10¹² to 6.60 × 10¹² particles cm^− 3, showing similar concentration of particles in the formulations. The diffusion was proposed as the main mechanism of the indomethacin ester release after fitting the data to the Higuchi model. Applying the Fick's first law, the calculated indomethacin ester fluxes (J) decreased from 2.20 × 10^− 7 to 1.43 × 10^− 7 mg cm^− 2 min^− 1. Then, the drug relative permeability decreased according to the increase in the polymer concentration fitting a power law.     

Spectroscopic properties of Tm3+/Al3+ co-doped sol–gel silica glass

Tm³⁺/Al³⁺ co-doped silica glass was prepared by sol–gel method combined with high temperature sintering. Glasses with compositions of xTm₂O₃–15xAl₂O₃–(100 − 16x) SiO₂ (in mol%, x = 0.1, 0.3, 0.5, 0.8 and 1.0) were prepared. The high thulium doped silica glass was realized. Their spectroscopic parameters were calculated and analyzed by Judd–Ofelt theory. Large absorption cross section (4.65 × 10⁻²¹ cm² at 1668 nm) and stimulated emission cross section (6.00 × 10⁻²¹ cm² at 1812 nm), as well as low hydroxyl content (0.180 cm⁻¹), long fluorescence lifetime (834 μs at 1800 nm), large σ_em × τ_rad (30.05 × 10⁻²¹ cm² ms) and large relative intensity ratio of the 1.8 μm (³F₄ → ³H₆) to 1.46 (³H₄ → ³F₄) emissions (90.33) are achieved in this Tm³⁺/Al³⁺ co-doped silica glasses. According to emission characteristics, the optimum thulium doping concentration is around 0.8 mol%. The cross relaxation (CR) between ground and excited states of Tm³⁺ ions was used to explain the optimum thulium doping concentration. These results suggest that the sol–gel method is an effective way to prepare Tm³⁺ doped silica glass with high Tm³⁺ doping and prospective spectroscopic properties.     

Synthesis and dc conductivity of Nd2/3TiO2.988

The A-site deficient perovskite Nd_2/3TiO_3 − δ was synthesized under an H₂–CO₂ gas mixture. The sample was found to have slight oxygen deficiency of δ∼0.012. The crystal structure was assigned to a double perovskite structure with orthorhombic space group Pmmm, as in the case of La_2/3TiO_3 − δ. Electrical conductivity measurement has also been performed. The temperature dependence of conductivity shows that electronic transport in Nd_2/3TiO_2.988 is well described by Emin–Holstein adiabatic small polaron model. The polaron density extracted from the conductivity measurement is ∼1.96 × 10²⁰ cm^− 3. This result agrees well with nominal polaron density for Nd_2/3TiO_2.988, ∼2.1 × 10²⁰cm^− 3. We have also derived important quantities for transport in Nd_2/3TiO_2.988.     

Compression behaviour and micro-structure evaluation of Zr57Nb5Cu15.4Ni12.6Al10 bulk metallic glass under high pressure

Compression behaviour and micro-structure evaluation of Zr₅₇Nb₅Cu_15.4Ni_12.6Al₁₀ bulk metallic glass is investigated at room temperature up to 32.8 GPa using in-situ high pressure energy dispersive X-ray diffraction with a synchrotron radiation source. The equation of state of the bulk metallic glass is − ΔV / V = 0.012P − 2.49 × 10^− 4P² − 9.5 × 10^− 7P³ + 5.02 × 10^− 8P⁴. The result shows that the nearest atom pair of the as-quenched bulk metallic glass corresponds to Zr–Zr correlations. And with pressure increasing, the nearest atom pair changes to a new one at 32.8 GPa.     

Negative thermal expansion in silicalite-1 and zirconium silicalite-1 having MFI structure

In situ high temperature X-ray diffraction (HTXRD) studies on monoclinic silicalite-1 (S-1, silica polymorph of ZSM-5) and an orthorhombic metallosilicate molecular sieve, zirconium silicalite-1 (ZrS-1) with MFI structure (Si/Zr = 50) have been carried out using a laboratory X-ray diffractometer with an Anton Parr HTK 1600 attachment. While the structure of the S-1 collapsed at 1123 K forming α-cristobalite. S-1 and ZrS-1 showed a complex thermal expansion behavior in the temperature range 298–1023 K, ZrS-1 was stable. Powder X-ray diffraction (PXRD) data taken in this region have shown strong negative lattice thermal expansion coefficient, α_V = −6.75 × 10⁻⁶ and −17.92 × 10⁻⁶ K⁻¹ in the temperature range 298–1023 K⁻¹ for S-1 and ZrS-1 samples, respectively. The thermal expansion behavior of S-1 and ZrS-1 is anisotropic, with the relative strength of contraction along a axis is more than that along b and c axes. Three different thermal expansion regions could be identified in the overall temperature range (298–1023 K) studied, corroborating with the three steps of weight loss in the TG curve of ZrS-1 sample. While the region between 298 and 423 K, displays positive thermal expansion coefficient with α_V = 2.647 × 10⁻⁶ and 4.24 × 10⁻⁶ K⁻¹, the second region between 423 and 873 K shows strong negative thermal expansion (NTE) coefficient α_V = −7.602 × 10⁻⁶ and −15.04 × 10⁻⁶ K⁻¹, respectively, for S-1 and ZrS-1 samples. The region between 873 and 1023 K, shows a very strong NTE coefficient with α_V = −12.08 × 10⁻⁶ and −45.622 × 10⁻⁶ K⁻¹ for S-1 and ZrS-1, respectively, which is the highest in the whole temperature range studied. NTE seen over a temperature range 298–1023 K could be associated with transverse vibrations of bridging oxygen atoms in the structure which results in an apparent shortening of the Si–O distances.     

High-temperature electrical resistivity and heat capacity studies on nano-crystalline geikielite

We report here for the first time the temperature dependence of the electrical resistivity and heat capacity of nano-crystalline MgTiO₃ geikielite of up to 1000 K. The temperature dependence of heat capacity of nano-crystalline geikielite expressed as C_p = 46.44(5) + 0.0502(2)T − 4.56 × 10⁶T² + 1.423 × 10³T^− 0.5 − 8.672 × 10^− 6T^− 2, where C_p = is specific heat expressed in J/mol. K and T is the temperature in K. Both the electrical resistivity and heat capacity behaviour show that the geikielite (both the natural and synthetic nano-crystalline samples) are stable and remains electrically insulating up to 1000 K.     

Nonlinear optical behavior of alkyne terminated phthalocyanines in solution and when embedded in polysulfone as thin films: Effects of aggregation

We report here for the first time, on the comparative studies of the photophysical and optical limiting behavior of our two novel phthalocyanines namely 2(3), 9(10), 16(17), 23(24)-tetrakis-(4-(5-methylhex-1-yn-3-yloxy)) phthalocyanines 2, and 2(3), 9(10), 16(17), 23(24)-tetrakis-(4-(5-methylhex-1-yn-3-yloxy)) phthalocyaninato zinc (II) (3) in solution and thin films. Nonlinear optical (NLO) properties of the samples in solution and contained in polysulfone (PSU) thin films were evaluated using Z-scan technique at 532 nm and 10 ns pulsed duration. Effects of aggregation and disaggregation on the NLO performance of metal-free phthalocyanine are reported in detail. Our findings showed that the prepared Pcs show larger nonlinear absorption coefficient and lower limiting thresholds when embedded in polysulfone films compared to in solutions. The values of nonlinear susceptibility and hyperpolarizability recorded for 3-PSU in this work are respectively, ∼2.09 × 10⁻⁸ esu and ∼1.02 × 10⁻²⁶ esu. These values are among the largest values reported for phthalocyanines and other macrocycles doped on polymer matrices.