Structural and electrical properties of RuO2 thin films prepared by rf-magnetron sputtering and annealing at different temperatures

Conductive ruthenium oxide (RuO₂) thin films have been deposited at different substrate temperatures on various substrates by radio-frequency (rf) magnetron sputtering and were later annealed at different temperatures. The thickness of the films ranges from 50 to 700 nm. Films deposited at higher temperatures show larger grain size (about 140 nm) with (200) preferred orientation. Films deposited at lower substrate temperature have smaller grains (about 55 nm) with (110) preferred orientation. The electrical resistivity decreases slightly with increasing film thickness but is more influenced by the deposition and annealing temperature. Maximum resistivity is 861 μΩ cm, observed for films deposited at room temperature on glass substrates. Minimum resistivity is 40 μΩ cm observed for a thin film (50 nm) deposited at 540°C on a quartz substrate. Micro-Raman investigations indicate that strain-free well-crystallized thin films are deposited on oxidized Si substrates.     

Application of pulsed laser deposited zinc oxide films to thin film transistor device

Transparent zinc oxide (ZnO) thin films were deposited on various substrates using a pulsed laser deposition (PLD) technique. During the PLD, oxygen pressure and substrate temperature were varied in order to find an optimal preparation condition of ZnO for thin film transistor (TFT) application. Dependence of optical, electrical and crystalline properties on the deposition conditions was investigated. The ZnO thin films were then deposited on SiN/c-Si layer structures in order to fabricate a TFT device. The pulsed laser deposited ZnO films showed a remarkable TFT performance: field effect mobility (μ_FE) of 2.4-12.85 cm²/V s and ratio of on and off current (R_on/off) in 2-6 order range. Influence of ZnO preparation conditions on the resulting TFT performance was discussed.     

Low temperature annealing effects on the structure and optical properties of ZnO films grown by pulsed laser deposition

ZnO thin films were deposited on glass substrates at room temperature (RT) ∼500 °C by pulsed laser deposition (PLD) technique and then were annealed at 150-450 °C in air. The effects of annealing temperature on the microstructure and optical properties of the thin films deposited at each substrate temperature were investigated by XRD, SEM, transmittance spectra, and photoluminescence (PL). The results showed that the c-axis orientation of ZnO thin films was not destroyed by annealing treatments; the grain size increased and stress relaxed for the films deposited at 200-500 °C, and thin films densified for the films deposited at RT with increasing annealing temperature. The transmittance spectra indicated that E_g of thin films showed a decreased trend with annealing temperature. From the PL measurements, there was a general trend, that is UV emission enhanced with lower annealing temperature and disappeared at higher annealing temperature for the films deposited at 200-500 °C; no UV emission was observed for the films deposited at RT regardless of annealing treatment. Improvement of grain size and stoichiometric ratio with annealing temperature can be attributed to the enhancement of UV emission, but the adsorbed oxygen species on the surface and grain boundary of films are thought to contribute the annihilation of UV emission. It seems that annealing at lower temperature in air is an effective method to improve the UV emission for thin films deposited on glass substrate at substrate temperature above RT.     

Comparison of high-pressure dc-sputtering and pulsed laser deposition of superconducting YBa2Cu3O x thin films

Superconducting YBa₂Cu₃O_x thin films were deposited on NdGaO₃ (110) substrates using two different techniques: dc sputtering at high oxygen pressure and pulsed laser deposition. The structure, electrical properties, and surface morphology of the obtained films were compared. The superior crystal quality of dc-sputtered films fabricated at the same temperature and at oxygen pressure of the same range as for laser-deposited films can be explained by a lower deposition rate providing time for recrystallization processes. The re-evaporation becomes significant for dc sputtering at high deposition temperatures and results in Badeficient films. The high mobility of atoms on the surface of the growing film during laser deposition helps in the formation of smoothc-oriented areas of the film.     

Influence of annealing on the structural and electrical transport properties of Bi0.5Sb1.5Te3.0 thin films deposited by co-sputtering

Bi_0.5Sb_1.5Te_3.0 thin films were deposited on silicon substrates at room temperature by co-sputtering and the effects of annealing temperatures on structure and thermoelectric properties were investigated. The composition, crystallinity, and microstructure of these thin films were characterized by energy dispersive X-ray spectroscopy, X-ray diffraction, and scanning electron microscopy. The crystalline quality of the thin films was enhanced with a rising annealing temperature. When annealed at 573 K, the layered structure of the Bi_0.5Sb_1.5Te_3.0 thin films with a preferred orientation along the (00l) plane was formed. However, excessive high annealing temperature caused the thin films to become porous due to the separation of substantial Sb-rich precipitates. The electrical transport properties of the thin films, in terms of electrical conductivity and Seebeck coefficient were determined at room temperature. The carrier concentration and mobility were calculated from the Hall coefficient measurement. By optimizing the annealing temperature and time to 573 K for 6 h, the thermoelectric power factor was enhanced to 22.54 μW/(cm K²) at its maximum with a moderate electrical conductivity of 6.21 × 10² S/cm and a maximum Seebeck coefficient of 190.6 μV/K.     

Effects of deposition temperature on structure and properties of mo-doped indium oxide by radio frequency magnetron sputtering

Transparent conductive oxide (TCO) thin films of Mo-doped In₂O₃ (IMO) were prepared on glass substrates by radio frequency magnetron sputtering from the 2 wt% Mo-doped In₂O₃ ceramic target. The depositions were carried out under an oxygen-argon atmosphere by varying the deposition temperature from 200 °C to 350 °C. The crystal structure and thickness of IMO thin films were characterized by X-ray diffraction (XRD) and scanning electron microscopy (SEM). The effects of deposition temperature on the electrical and optical transmittance properties of IMO thin films were investigated by four-point probe Hall system and UV-VIS-NIR spectrophotometer separately. The optimum deposited IMO thin films were obtained with resistivity of 6.9 × 10⁻⁴ Ω cm and carrier mobility 45 cm²v⁻¹s⁻¹ at 350 °C. The average optical transmittance of IMO films on glass substrates are over 80% in the near-infrared region.     

YSZ thin films deposited by e-beam technique

YSZ thin films were grown evaporating cubic and tetragonal phase ZrO₂ stabilized by 8 wt.% of Y₂O₃ (8% of YSZ) ceramic powders by using e-beam deposition technique. Operating technical parameters that influence thin film properties were studied. The influence of substrate crystalline structure on growth of deposited YSZ thin film was analyzed there. The YSZ thin films (1.5-2 μm of thickness) were deposited on three different types of substrates: Al₂O₃, optical quartz (SiO₂), and Alloy 600 (Fe-Ni-Cr). The dependence of substrate temperature, electron gun power, and phase of ceramic powder on thin film structure and surface morphology was investigated by X-ray diffraction (XRD) and scanning electron microscopy (SEM). The substrate temperature was changed in the range of 20-600° C (during the YSZ thin film deposition) and its influence on the crystallinity of deposited YSZ thin films was analyzed. It was found that electron gun power and substrate temperature has the influence on the crystallite size, and texture of YSZ thin films. Also, the substrate has no influence on the crystal orientation. The crystallite size varied between 20 and 40 nm and increased linearly changing the substrate temperature. The crystal phase of evaporated YSZ powder has the influence on the structure of the deposited YSZ thin films.     

Structural,optical, and electrical properties of flash-evaporated copper indium diselenide thin films

Copper indium diselenide (CuInSe₂) compound was synthesized by reacting its elemental components, i.e., copper, indium, and selenium, in stoichiometric proportions (i.e., 1:1:2 with 5% excess selenium) in an evacuated quartz ampoule. Structural and compositional characterization of synthesized pulverized material confirms the polycrystalline nature of tetragonal phase and stoichiometry. CuInSe₂ thin films were deposited on soda lime glass substrates kept at different temperatures (300–573 K) using flash evaporation technique. The effect of substrate temperature on structural, morphological, optical, and electrical properties of CuInSe₂ thin films were investigated using X-ray diffraction analysis (XRD), atomic force microscopy (AFM), optical measurements (transmission and reflection), and Hall effect characterization techniques. XRD analysis revealed that CuInSe₂ thin films deposited above 473 K exhibit (112) preferred orientation of grains. Transmission and reflectance measurements analysis suggests that CuInSe₂ thin films deposited at different substrate temperatures have high absorption coefficient (~10⁴ cm⁻¹) and optical energy band gap in the range 0.93–1.02 eV. Results of electrical characterization showed that CuInSe₂ thin films deposited at different substrate temperatures have p-type conductivity and hole mobility value in the range 19–136 cm²/Vs. Variation of energy band gap and resistivity of CuInSe₂ thin films deposited at 523 K with thickness was also studied. The temperature dependence of electrical conductivity measurements showed that CuInSe₂ film deposited at 523 K has an activation energy of ~30 meV.     

Growth and characterization of La5/8Sr3/8MnO3 thin films prepared by pulsed laser deposition on different substrates

Colossal magnetoresistance La_5/8Sr_3/8MnO₃ (LSMO) thin films were directly grown on MgO(100), Si(100) wafer and glass substrates by pulsed laser deposition technique. The films were characterized using X-ray diffraction (XRD), field emission-scanning electron microscope and atomic force microscopy (AFM). The electrical and magnetic properties of the films are studied. From the XRD patterns, the films are found to be polycrystalline single-phases. The surface appears porous and cauliflower-like morphology for all LSMO films. From AFM images, the LSMO films deposited on glass substrate were presented smooth morphologies of the top surfaces as comparing with the films were deposited on Si(100) and MgO(100). The highest magnetoresistance (MR) value obtained was ?17.21 % for LSMO/MgO film followed by ?15.65 % for LSMO/Si and ?14.60 % for LSMO/Cg films at 80 K in a 1T magnetic field. Phase transition temperature (T_P) is 224 K for LSMO/MgO, 200 K for LSMO/Si and above room temperature for films deposited on glass substrates. The films exhibit ferromagnetic transition at a temperature (T_C) around 363 K for LSMO/MgO, 307 K for LSMO/Si and 352 K for LSMO/Cg thin film. T_C such as 363 and 352 K are the high T_C that has ever been reported for LSMO films deposited on MgO substrate with high lattice mismatch parameter and glass substrates with amorphous nature.     

Effect of substrate temperature on the electrical and optical properties of electron beam evaporated indium antimonide thin films

Thin films of non-stoichiometric indium antimonide (In_0.66Sb_0.34) have been deposited by electron beam evaporation technique on glass substrates at different substrate temperatures, (300?C473 K). The films have polycrystalline nature with zinc blende structure. The decrease in electrical resistivity with increasing temperature shows semiconducting behavior. Hall measurements indicate that the films are of n-type. Optical transmission spectra of as deposited thin films have been measured at different substrate temperatures. All the electrical parameters i.e. electron mobility (??), carrier concentration (n), resistivity (??), activation energy and band gap (E _g ) have been found to be temperature dependent. Suitable explanations are given in the paper.     

The effects of substrates on the thin-film structures of BaTiO3

Barium titanate (BaTiO₃) thin films prepared on magnesia, silicon and strontium titanate substrates by r.f. sputtering has been investigated. As a function of substrate and annealing temperatures, the crystal structure and shape were examined by X-ray diffraction and scanning electron microscopy. Thin films were grown on both MgO and silicon substrates; they were amorphous when deposited on MgO if the substrate temperature was less than 450 °C, while for those grown on silicon the temperature had to be less than 500 °C. Above these elevated temperatures, the films were crystalline, with cubic symmetry. After annealing the thin films on magnesia, the crystal structure changed from cubic to tetragonal phase above 1100 °C; thebe c-axis or annealing thus caused the grain growth of the BaTiO₃. The thin films on SrTiO₃ were found toc-axis oriented tetragonal films for a substrate temperature above 500 °C.     

Morphology and growth of e-beam deposited YSZ thin films

Yttria-stabilized zirconium (YSZ) thin films were grown from the tetragonal phase of ZrO₂ stabilized by 8 wt% of Y₂O₃ (8% of YSZ) ceramic powders using e-beam deposition technique (EB-PVD). The influence of the type of substrate on the microstructure of deposited YSZ thin films was analysed. YSZ thin films (2-3 μm of thickness) were deposited on three different types of substrates: optical quartz (SiO₂), porous Ni-YSZ substrates and Alloy 600 (Fe-Ni-Cr). The dependence of the substrate temperature (from 20 to 600 °C) on the thin film structure and the surface morphology were investigated by X-ray diffraction (XRD) and scanning electron microscopy (SEM). It was found that (i) the substrate temperature has an influence on the crystallite size, which varied between 12 and 50 nm, (ii) the substrate type has an influence on the growth mechanism of YSZ thin films, and (iii) a bias voltage applied to the substrate during the deposition of thin films has an influence on the densification of YSZ layers.     

Properties of GaAs films deposited by pulse periodic technique

GaAs is a III-V compound possessing high mobility and a direct band gap of 1.43 eV , making it a very suitable candidate for photovoltaic applications. Thin GaAs films were prepared at room temperature by plating an aqueous solution containing GaCl₃ and As₂O₃ at a pH of 2. The current density was kept as 50 mA cm⁻² and the duty cycle was varied in the range 10–50%. The films were deposited on titanium and tin oxide coated glass substrates. Films exhibited polycrystalline nature with peaks corresponding to single phase GaAs. Optical absorption measurements indicated a direct band gap of 1.40 eV. The surface roughness of the films varied from 3 nm to 6 nm as the duty cycle increased. Raman spectra indicated both the LO and TO phonons for the films deposited at duty cycles above 25%. Photoelectrochemical studies indicated that the current and voltage output are higher than earlier reports on thin film electrodes.     

Effects of annealing on thermoelectric properties of Sb2Te3 thin films prepared by radio frequency magnetron sputtering

Antimony telluride (Sb₂Te₃) thin films were deposited on silicon substrates at room temperature (300 K) by radio frequency magnetron sputtering method. The effects of annealing in N₂ atmosphere on their thermoelectric properties were investigated. The microstructure and composition of these films were characterized using scanning electron microscopy, energy dispersive X-ray spectroscopy and X-ray diffraction, respectively. The electrical transport properties of the thin films, in terms of electrical conductivity and Seebeck coefficient were determined at room temperature. The carrier concentration and mobility were calculated from the Hall coefficient measurement. Both of the Seebeck coefficient and Hall coefficient measurement showed that the prepared Sb₂Te₃ thin films were p-type semiconductor materials. By optimizing the annealing temperature, the power factor achieved a maximum value of 18.02 μW cm^?1 K^?2 when the annealing temperature was increased to 523 K for 6 h with a maximum electrical conductivity (1.17 × 10³ S/cm) and moderate Seebeck coefficient (123.9 μV/K).     

Characterization of electrosynthesized iron diselenide thin films

Iron diselenide (FeSe₂) is an interesting p-type semiconductor with a band gap of 1 eV suitable for solar cell applications. Deposition of FeSe₂ thin films by electrodeposition from aqueous solutions is a low temperature and inexpensive technique. In the present work, FeSe₂ thin films were deposited onto tin oxide coated conducting glass substrates by cathodic electrodeposition technique. The deposited films were characterized by X-ray diffraction, Energy dispersive X-ray analysis, Scanning electron microscope and optical absorption techniques. The effects of electrolyte concentration and deposition potential on the structural, compositional, morphological and optical properties of FeSe₂ thin films are studied. The experimental observations are discussed in detail.     

Flexible CuInSe2 photovoltaic cells fabricated by non-vacuum techniques

In this work, CuInSe₂ based flexible photovoltaic cells have been fabricated completely using non-vacuum low-cost techniques. Thin films were deposited on molybdenum thin foil substrates by electrodeposition using a buffered aqueous electrolyte with the deposition of subsequent layers performed by spray pyrolysis. In addition, the buffer layer CdS was replaced with a wider bandgap ZnS (3.7 eV) and analysis undertaken of the fabrication pathway, morphological and compositional changes resulting from the different precursor route. The deposited films were annealed in a Se atmosphere at 450 °C. The influence of annealing temperature and time on the properties of the films are briefly discussed. Characterisation of thin films was performed using aqueous electrolyte contacts. Capacitance measurements were made as a function of applied bias on thin films deposited on metal substrates with blocking electrolyte contacts where analysis of the impedance gave values of the space charge capacitance from which the doping density and flat band potential were derived. The structural characterisation was carried out using X-ray diffraction and Raman spectroscopy. The structure and device properties of Mo (SS)/CuInSe₂/ZnS/n⁺-ZnO/Ni were characterized using current-voltage technique and photocurrent spectroscopy.     

Synthesis of nanocrystalline iron oxide ultrathin films by thermal decomposition of iron nitropruside: Structural and optical properties

Ultrathin films of nanocrystalline α-Fe₂O₃ have been deposited on glass substrates from an inorganic precursor, iron nitropruside. This is a novel route of synthesis for iron oxide thin films on glass substrates, by annealing the precursor thin film in air at 650 °C for 15 min. The films were characterized using TG-DTA analysis, X-ray diffraction, UV-visible, FESEM, AFM and Raman measurements. X-ray diffraction and Raman analyses revealed that the deposited films contain α-phase of Fe₂O₃ (hematite). The synthetic route described here provides a very simple and cost-effective method to deposit α-Fe₂O₃ thin films on glass substrates with band gap energy of about 2.75 eV. The deposited films were found to show catalytic effect for the photo-degradation of phenol.     

Structural and optical properties of ZnO films grown on silicon and their applications in MOS devices in conjunction with ZrO<Subscript>2</Subscript> as a gate dielectric

Photoluminescence (PL) properties of undoped ZnO thin films grown by rf magnetron sputtering on silicon substrates have been investigated. ZnO/Si substrates are characterized by Rutherford backscattering (RBS), X-ray diffraction (XRD), Fourier transform infrared (FTIR), and X-ray photoelectron spectroscopy (XPS). ZrO₂ thin films have been deposited on ZnO using microwave plasma enhanced chemical vapour deposition at a low temperature (150°C). Using metal insulator semiconductor (MIS) capacitor structures, the reliability and the leakage current characteristics of ZrO₂ films have been studied both at room and high temperatures. Schottky conduction mechanism is found to dominate the current conduction at a high temperature. Good electrical and reliability properties suggest the suitability of deposited ZrO₂ thin films as an alternative as gate dielectric on ZnO/n-Si heterostructure for future device applications.     

Effect of deposition conditions on the InP thin films prepared by spray pyrolysis method

InP thin films were prepared by spray pyrolysis technique using aqueous solutions of InCl₃ and Na₂HPO₄, which were atomized with compressed air as carrier gas. The InP thin films were obtained on glass substrates. Thin layers of InP have been grown at various substrate temperatures in the range of 450–525°C. The structural properties have been determined by using X-ray diffraction (XRD). The changes observed in the structural phases during the film formation in dependence of growth temperatures are reported and discussed. Optical properties, such as transmission and the band gap have been analyzed. An analysis of the deduced spectral absorption of the deposited films revealed an optical direct band gap energy of 1.34–1.52 eV for InP thin films. The InP films produced at a substrate temperature 500°C showed a low electrical resistivity of 8.12 × 10³ Ω cm, a carrier concentration of 11.2 × 10²¹ cm⁻³, and a carrier mobility of 51.55 cm²/Vs at room temperature.     

Comparative study of In2S3-ITO bilayers deposited on glass and different plastic substrates

In this work ITO thin films have been grown onto glass, polyethylene terephthalate (PET) and Arylite polymer substrates by sputtering at room temperature.The In₂S₃ films were chemically deposited on ITO during different times, forming bilayers for subsequent photovoltaic applications. Optical properties of the films were investigated from the transmittance and the structural properties by XRD. Transmittance of the films varies with deposition time and the different substrates used, the same as the adherence and the homogeneity of the films.