Femtosecond pulsed laser micromachining of glass substrates with application to microfluidic devices

We describe a technique for surface and subsurface micromachining of glass substrates by using tightly focused femtosecond laser pulses at a wavelength of 1660 nm. A salient feature of pulsed laser micromachining is its ability to drill subsurface tunnels into glass substrates. To demonstrate a potential application of this micromachining technique, we fabricate simple microfluidic structures on a glass plate. The use of a cover plate that seals the device by making point-to-point contact with the flat surface of the substrate is necessary to prevent the evaporation of liquids in open channels and chambers. Methods for protecting and sealing the micromachined structures for microfluidic applications are discussed.     

Femtosecond laser speckles

The concept of femtosecond laser speckles is put forward. The theory of a speckle pattern in light of finite bandwidth is applied to describe femtosecond laser speckles. Basic representations of the contrast and the spectral correlation of femtosecond laser speckles are presented. The relationship between the speckle contrast and the bandwidth of a femtosecond laser is given. Experimental results are given that indicate an obvious difference between the speckle patterns produced by a continuous-wave laser and those produced by a femtosecond laser.     

Channel waveguides of insoluble conjugated polymers

We demonstrate a fast and simple technique of patterning insoluble, nonbleachable, conjugated polymer films into channel waveguides by striploading with photoresist. Two types of coupling gratings were tested for this new system. The coupling parameters, the linear losses and the beam confinement are discussed. This technique makes it possible to explore this class of materials in the field of integrated optics. A new data evaluation method for a more precise measurement of losses in slab waveguides is introduced.     

Formation of Si nanocrystals in glass by femtosecond laser micromachining

We report on the precipitation of Si nanocrystals inside a borosilicate glass by using an 800 nm, 250 kHz femtosecond laser irradiation, which was confirmed with X-ray diffraction, Raman spectra and transmission electron microscopy analyses. Refractive index profile reveals that the refractive index of the Si nanocrystals precipitated region increased up to 8.7% in comparison with that of the unirradiated area, leading to a large diffraction efficiency of the fabricated dot structure. Furthermore, the third-order optical nonlinearity of the Si nanocrystals precipitated glass is greatly enhanced based on the Z-scan measurement. These results may find applications for the fabrication diffractive optical devices and optical switches.     

Femtosecond laser nanosurgery of defects in carbon nanotubes

All self-assembled nanostructures, like carbon nanotubes, exhibit structural imperfections that affect their electronic and mechanical properties and constitute a serious problem for the development of novel electronic nanodevices. Very common defects in nanotubes are pentagon-heptagon pairs, in which the replacement of four hexagons by two pentagons and two heptagons disrupts the perfect hexagonal lattice. In this work, we demonstrate that these defects can be eliminated efficiently with the help of femtosecond laser pulses. By performing nonadiabatic molecular dynamics simulations, we show that in the laser-induced electronic nonequilibrium the pentagon-heptagon pair is transformed back into four hexagons without producing any irreversible damage to the rest of the nanotube.     

Noncrystalline micromachining of amorphous alloys using femtosecond laser pulses

Femtosecond laser micromachining of a Zr-based amorphous alloy in air, including measuring the ablation threshold, micro-drilling and trenching, was investigated. The threshold of ablating this amorphous alloy was determined by experiment. Laser-induced ablation and associated damage were examined by means of optical microscope, scanning electron microscopy, transmission electron microscopy and electron diffraction diagram. The results show that conventional processing method induced defects in the vicinity of machined area, such as crystallization, molten trace and spatter, were absent in femtosecond laser ablation area with selected parameters. This indicates that femtosecond laser ablation is a promising method for micromachining amorphous alloys without crystallization.     

Femtosecond laser synthesis of bimetallic Pt-Au nanoparticles

Bimetallic Pt-Au nanoparticles were successfully synthesized by irradiating the metal precursor solution with high intensity femtosecond laser. The intense optical field created by femtosecond laser pulse induced the production of highly charged ions and molecules due to the optical decomposition of metal precursor molecules. Further collisions with molecules result in subsequent growth of the nuclei and codeposition of Pt and Au atoms on the nuclei to form the larger ones. The method is a simple, easy-to-control and environmentally benign process. The average size and morphology of bimetallic nanoparticles were examined by transmission electron microscope. The compositional distributions of Pt and Au of individual Pt-Au nanoparticles were examined by X-ray energy dispersive spectroscopy (EDS).     

飞秒激光对聚四氟乙烯表面的影响

主要介绍了一种加工聚四氟乙烯表面的新方法。应用飞秒激光对聚四氟乙烯表面进行改性,得到具有纳米-微米尺度的膨化结构,并对其表面的光学性能及润湿性作了进一步研究。从而说明了飞秒激光是加工聚四氟乙烯一个极其方便、有效、绿色的加工工具,并且可以使聚四氟乙烯表面呈现出超疏水性能。     

Femtosecond laser induced micropatterning of graphene film

Micropatterning of CVD synthesized large area graphene film is demonstrated with femtosecond laser cutting process. Homogenous microribbon or other patterned structure can be fabricated without using any resist or other material containing the graphene surface within a very short duration. Once the suitable laser beam doses are determined, sharp edge profile and clean etching are obtained. Scanning electron microscopic study shows that the patterned microribbon is having 5 μm width and mm in length. The width of the patterned microribbon can be controlled with control of laser energy and preprogramming of laser ablation process. Raman study at the edge of the microribbon shows increase in D peak and appearance of D + G mode, signifying edge defects. The defect can be explained from the breaking of sp² carbon hybridization with oxidation due to laser etching. The Raman study shows no amorphous carbon formation with laser cutting of the graphene film. The presented process shows a simple way to make patterned microribbon on large area graphene sheet which can be extremely necessary for microelectronics fabrication.     

Millimeter-wave filters with laser control in waveguides

A detailed analysis of a microwave reflection pattern that is due to periodically photoexcited layers of semiconductor material in a waveguide is presented. Different photoconductivity profiles that are due to different excitation conditions with different materials are tested. The diffusion of carriers in the direction of propagation can strongly affect the passband-filtering responses, especially the efficiency and the bandwidth. These configurations can be used as light-induced tunable filters and as a variable matching section between different levels of impedances.     

Excimer laser micromachining for rapid fabrication of diffractive optical elements

We demonstrate the fabrication of binary, multilevel, and blazed diffractive structures by a fast and flexible direct-write process by using an excimer-laser-based tabletop micromachining workstation with an integrated optical surface profiler.     

Real-time control of ultrafast laser micromachining by laser-induced breakdown spectroscopy

Ultrafast laser micromachining provides many advantages for precision micromachining. One challenging problem, however, particularly for multilayer and heterogeneous materials, is how to prevent a given material from being ablated, as ultrafast laser micromachining is generally material insensitive. We present a real-time feedback control system for an ultrafast laser micromachining system based on laser-induced breakdown spectroscopy (LIBS). The characteristics of ultrafast LIBS are reviewed and discussed so as to demonstrate the feasibility of the technique. Comparison methods to identify the material emission patterns are developed, and several of the resulting algorithms were implemented into a real-time computer control system. LIBS-controlled micromachining is demonstrated for the fabrication of microheater structures on thermal sprayed materials. Compared with a strictly passive machining process without any such feedback control, the LIBS-based system provides several advantages including less damage to the substrate layer, reduced machining time, and more-uniform machining features.     

Excimer laser micromachining of oblique microchannels on thin metal films using square laser spot

Excimer laser micromachining of thin metal films with a sacrificial polymer coating is a novel technique that produces features with smooth edges. Using this technique, oblique microchannels are fabricated by workpiece dragging and using a square laser spot, where the axis of traverse of the workpiece is not parallel to the edges of the square laser spot. The microchannels have serrated edges that are particular to the shape of the mask producing the spot. The edge roughness of the channels, machined with a square laser spot of side 100 μm, is found to be most affected by the fluence–spot overlap interaction, and the channel width by spot-overlap and the angle of tilt of the traversed path. Polymer coated metal films underwent close to ideal machining, aided by the clamping action of the polymer layer. Through this technique of machining post polymer coating, the edge roughnesses of the microchannels have been curtailed to less than 10 μm, and channel widths to 150 μm. This technique may be used in fabrication of oblique and circular patterns using excimer laser micromachining with rectangular and square laser spots.     

Electrochemistry in nanovials fabricated by combining screen printing and laser micromachining

The coupling of screen-printing and laser micromachining technology has been used to create a nanovial with "built-in" working and reference electrodes. The volume of the nanovial was calculated to be 7.2 nL using dimensions determined by SEM. The electrochemical nanovial was characterized using the ferri/ferrocyanide redox couple. Cyclic voltammetry and chronoamperometry experiments were performed with electrochemical nanovials utilizing 5% (v/v) glycerin in the solutions and a humidified headspace to control evaporation of the small-volume samples. Chronoamperometry experiments gave results consistent with a diffusion-limited process and revealed a working electrode surface area of 2.6 x 10(4) micron 2. The ultrasmall-volume cells represent a simple, reliable, low-cost approach for the fabrication of complete electrochemical nanovials.     

Analysis and fabrication of minifeature lamp lens by excimer laser micromachining

A variety of shapes of lamp lenses at the feature millimeter scale have been extensively used in lamp design. To further improve the light efficiency and to reduce the overall dimension of lamps, the lamp lens at the micrometer scale is fabricated by excimer laser cross scanning on a polycarbonate sheet. To verify the proposed method, the influence of an optical system with various shapes and sizes of lamp lenses on the light efficiency is explored in advance by ASAP optical software. The lens with a miniature feature can produce a smaller divergence angle than that with a large-size lens feature. The experiment is carried out at varying laser operating parameters, mask shape, and dimensions. The simulation shows that the desired lamp lens profile can be effectively produced by excimer laser micromachining.     

Broadband flexible waveguides for free-electron laser radiation

We refined flexible waveguides previously developed for CO(2) and Er:YAG laser radiation to transmit free-electron-laser (FEL) radiation. One can tune this laser over several segments of the radiation spectrum. This laser has a high peak power of as much as 10 MW with pulse energy of as much as 100 mJ. We made the waveguides of either Teflon or fused-silica tubes internally coated with metal and dielectric layers. We optimized the internal coatings specifications for transmission of various radiation wavelengths in the mid-IR range and enabled transmission of high-peak radiation. We performed experiments in three major FEL sites in the United States over a more than 1-year period when we measured and examined various characteristics of transmission. We used the analysis of these experiments as feedback to further improve these waveguides. The good preliminary results encourage us to invest more effort to further develop these waveguides until a suitable waveguide is obtained for this type of laser and make possible its introduction to the medical field where its characteristics can be exploited in surgical applications.     

Femtosecond pulsed laser ablation and deposition of titanium carbide

In this work we have evaporated a titanium carbide target by an Nd:glass laser with 250 fs pulse duration. The plasma produced from the ablation has been characterized by Intensified Coupled Charge Device (ICCD) fast imaging, optical emission spectroscopy and quadrupole mass spectrometry, while X-ray Diffraction (XRD), Energy Dispersive X-ray Spectroscopy (EDX), X-ray Photoelectron Spectroscopy (XPS) and Scanning and Transmission Electron Microscopy have been used to study the deposited film morphology and composition. The plume shape and front velocity are very similar to those found in other systems and are typical of femtosecond ablation. In particular the front velocity is 1.1 × 10⁷ cm s^− 1 at a laser fluence of 1.9 J cm^− 2, while the value of the cosine exponent is 4.5 in the same conditions. In the TiC system a delayed emission, found by ICCD imaging and emission spectroscopy, is also present. In fact, although the emission involved in the “traditional” plume ends after about 1 μs, the target is still hot and gives origin to another emission, expanding with a velocity that is about two orders of magnitude lower compared to that of the traditional plume (2.2 × 10⁴ cm s^− 1 at a laser fluence of 1.9 J cm^− 2).The results of the analysis of both the gaseous plume and the deposited films seem to indicate that in the case of TiC system the presence of a large number of particles ejected from the target is responsible for the formation of the films. XPS and EDX data indicate that the stoichiometry of the target is preserved in the films, while XRD analysis shows that the films are amorphous in structure.     

Stable, low-loss optical waveguides and micromirrors fabricated in acrylate polymers

Acrylate-based optical waveguides have been fabricated with optical loss of 0.5 dB/cm at 1300 nm by means of a new material system that ensures stable optical and mechanical properties over a wide temperature range. No increase in loss was measured after 500 h at temperatures up to 150 degrees C, and there was no significant increase in loss during short (<5 min) temperature excursions to 300 degrees C for bonding. Single-mode waveguides were fabricated with refractive indices for core and clad of 1.505 and 1.500, respectively, so that the mode field is very similar to that of single-mode silica fiber. Guides were fabricated on both planar and structured substrates of Si and GaAs as well as on substrates coated with metals and dielectrics. Fabrication involved spin coating and UV exposure to cross-link the polymer, but the substrate temperature did not exceed 180 degrees C. With this method guides could be fabricated on a range of substrates up to 125 cm in diameter, including those with multilayer metallization for multichip modules, providing optical interconnect capability. Microprism reflecting surfaces were fabricated in the waveguides to couple light out normal to the substrate. All the processing was compatible with normal semiconductor fabrication.     

Polarization behaviour of femtosecond laser written waveguides in lithium niobate

In this work, we analysed the polarization of guided light in femtosecond laser written waveguides. The studied waveguides were performed with different laser pulse energies in an x-cut lithium niobate crystal. The guided intensities were experimentally measured and compared with numerical simulations reaching a qualitatively good accordance. This comparison allowed a verification of the “mechanical expansion theory” which is useful to compute the refractive index field. Also, information related to the modelling of waveguides generated with different laser pulse energies was obtained. Both of these facts are keys to design and manufacture optical circuits by using this technological approach.