20CrNiMo钢表面空心阴极辉光放电制备类金刚石膜

在真空炉内以石墨为电极,利用空心阴极辉光放电在20CrNiMo上成功地沉积了类金刚石(Diamond-like carbon,DLC)薄膜.利用激光拉曼(Baman)光谱分析了所制备DLC薄膜的结构;利用原子力显微镜(AFM)分析了DLC薄膜的表面形貌;利用划痕仪测量了DLC薄膜与基体的结合力并用扫描电子显微镜(SEM)观察了划痕形貌;利用球-盘摩擦磨损实验仪对DLC薄膜的耐磨性能进行了研究.结果表明:在本实验工艺条件下沉积的类金刚石薄膜厚度约为0.6μm,薄膜均匀且致密,表面粗糙度Ra为7～8 nm.类金刚石薄膜与基体结合较紧密,临界载荷达到52 N.DLC薄膜具有优良的减摩性,20CrNiMo表面沉积DLC薄膜后摩擦系数为0.15,较20CrNiMo基体的摩擦系数0.50明显减小,耐磨性能得到提高.     

类金刚石/碳化钨多层膜的制备及其结构

采用阳极型气体离子源结合非平衡磁控溅射的方法,在单晶硅及Ti6Al4V钛合金基体上制备掺钨类金刚石多层膜(DLC/WC),利用俄歇电子谱(AES)、透射电镜(TEM)、X射线光电子能谱(XPS)及X射线衍射(XRD)等对膜层的过渡层、界面及微观结构进行研究。结果表明:所制备的膜层厚2.7μm,硬度高达3 550HV,摩擦因数为0.139,与Ti6Al4V基体结合力为52 N;W主要以纳米晶WC的形式与非晶DLC形成WC/DLC多层膜,该多层膜仍呈现出类金刚石膜的主要特征。     

盐雾腐蚀条件下Ti合金表面功能薄膜的摩擦磨损性能

目的研究Ti6Al4V合金、铬掺杂类金刚石(Cr-DLC)薄膜、钨掺杂类金刚石(W-DLC)薄膜和氮化钛(TiN)薄膜,在干摩擦和盐雾腐蚀气氛摩擦条件下的摩擦磨损性能。方法在商用Ti6Al4V合金表面通过非平衡磁控溅射制备Cr-DLC薄膜和W-DLC薄膜,通过多弧离子镀技术制备TiN薄膜。利用扫描电镜、显微硬度计、摩擦磨损试验机、白光干涉扫描轮廓仪,对薄膜的形貌、硬度、干摩擦和腐蚀摩擦性能、磨痕形貌进行测试分析。结果干摩擦条件下,Ti6Al4V合金表面沉积Cr-DLC、W-DLC和TiN三种薄膜的摩擦系数均比Ti6Al4V合金低;Ti6Al4V合金及其表面制备的三种薄膜在盐雾腐蚀气氛条件下的摩擦系数都比干摩擦条件下有所增加。与Ti6Al4V合金相比,Cr-DLC、W-DLC和TiN三种薄膜在干摩擦和盐雾腐蚀气氛摩擦条件下均减小了磨损体积。干摩擦条件下,W-DLC薄膜的磨损体积为0.0017 mm~3,耐磨性最好;盐雾腐蚀气氛摩擦条件下,TiN薄膜的磨损体积为0.0028 mm~3,表现出最佳的耐腐蚀磨损性能。通过磨痕形貌可以得出,盐雾腐蚀气氛摩擦条件下,Ti6Al4V合金表面制备的金属掺杂类金刚石薄膜的磨损受到磨粒磨损和腐蚀磨损双重机制的影响。结论三种表面功能薄膜在盐雾腐蚀气氛摩擦条件下都较好地保护了Ti合金,极大地减少了磨损损失。     

Cr基过渡层对钛合金表面类金刚石薄膜摩擦学性能的影响

采用磁控溅射技术在钛合金(Ti6Al4V)表面制备Cr、Cr/Cr N和Cr/Cr N/Cr NC过渡层结构的类金刚石(DLC)薄膜。采用扫描电子显微镜、拉曼光谱仪与原子力显微镜分析薄膜的结构和表面形貌,利用纳米压痕仪、薄膜内应力测试仪、划痕测试仪、摩擦试验机和二维轮廓仪研究薄膜的硬度、内应力、结合力和摩擦磨损性能。结果表明:随着Cr基梯度过渡层的引入,DLC薄膜的内应力逐渐下降,结合力逐渐上升。Cr/Cr N/Cr NC/DLC薄膜具有优异减摩抗磨性能,摩擦因数和磨损率低至0.09±0.02和(1.89±0.15)×10-7 mm3/N·m。试验结果对钛合金表面高性能DLC薄膜制备及应用具有一定的参考价值和指导意义。     

Ti6Al4V合金上类金刚石膜的摩擦学性能及腐蚀行为

采用离子束沉积技术在医用Ti6Al4V合金表面制备类金刚石薄膜(DLC),利用原子力显微镜、Raman光谱、X射线光电子能谱(XPS)及UMT-2摩擦磨损试验机对薄膜的形貌、结构、摩擦学性能进行表征。采用动电位极化对涂层前后基底的耐腐蚀性能进行测试。结果表明:制备薄膜为类金刚石碳结构,基底偏压对薄膜形貌、结构有较大影响;偏压为-100V时制备的薄膜表面粗糙度低(6.5nm),sp3/sp2比值高,摩擦学性能优异;经DLC膜保护的合金基底耐腐蚀性能获得明显改善。     

梯度基体温度法和反应溅射TiC过渡层对钛合金基体沉积金刚石薄膜的影响

以H2和CH4作为反应气体,采用热丝化学气相沉积法(HFCVD)在钛合金(Ti6Al4V)平板基体上制备金刚石薄膜,利用扫描电镜(SEM)、X射线衍射仪(XRD)、激光拉曼光谱(Raman)和洛氏硬度仪分析薄膜的表面形貌、结构、成分和附着性能,研究了高温形核-低温生长的梯度降温法对原始钛合金和反应磁控溅射TiC过渡层的钛合金表面沉积金刚石薄膜的影响。结果表明:原始基体区和TiC过渡层区沉积的金刚石薄膜平均尺寸分别为0.77μm和0.75μm,薄膜内应力分别为-5.85GPa和-4.14GPa,TiC层的引入可以有效提高金刚石的形核密度和晶粒尺寸的均匀性,并减少薄膜残余应力;高温形核-低温生长的梯度降温法可以有效提高金刚石的形核密度和质量,并提高原始基体上沉积金刚石薄膜的附着性能。     

基体材料对TiN薄膜表面液滴及薄膜结合力的影响

采用真空阴极电弧离子镀技术分别在4Cr5 MoSiV1(H13)模具钢、Cr18Ni9Ti(304)不锈钢、YG6硬质合金、Ti6Al4V(TC4)钛合金4种基体表面沉积TiN薄膜.利用扫描电镜(SEM)对薄膜表面液滴进行观察分析,通过划痕仪对薄膜的膜/基结合力进行表征.结果表明:基体材料不同,TiN薄膜上液滴的密度、尺寸存在明显的区别.其中,镀膜后H13钢和304不锈钢表面的液滴数量最多,YG6硬质合金次之,TC4钛合金最少;薄膜的膜/基结合强度依次为YG6硬质合金＞H13钢＞304不锈钢＞TC4钛合金.     

高速钢表面多弧离子镀(Ti,Al)N薄膜及性能研究

采用多弧离子镀技术在W18Cr4V表面制备出(Ti,Al)N硬质薄膜,研究了Al含量对(Ti,Al)N薄膜的形貌、硬度、膜基结合力、耐磨性、摩擦系数的影响。并利用扫描电镜、X射线衍射仪对薄膜进行了分析。结果表明Al含量在25%左右的(Ti,Al)N薄膜硬度达到2780HV0.05,耐磨性好,摩擦系数仅为0.168,且与钢基体结合良好,具有最佳的综合性能。     

钛合金表面W-Mo共渗层耐磨性研究

利用针状等电位空心阴极辉光放电技术,在钛合金(Ti6Al4V)表面进行W-Mo共渗。利用扫描电镜(SEM)观察了W-Mo共渗改性层的表面形貌和截面形貌;采用能谱仪(EDS)检测了改性层元素含量分布;采用X射线衍射仪(XRD)分析了改性层的相结构;利用球-盘摩擦磨损试验仪测试了共渗层在室温和高温干摩擦条件下的耐磨性能。结果表明:在750℃条件下,共渗处理3 h后,在钛合金表面形成了厚度约为23.1μm的W-Mo改性层。改性层主要由Al Mo Ti_2和Ti_xW_(1-x)相组成。相比于Ti6Al4V基体的摩擦系数,在室温和500℃干摩擦条件下改性层的平均摩擦系数仅为0.21和0.38。摩擦系数显著降低,说明耐磨性能显著提高。     

Ti6Al4V合金上类金刚石膜的摩擦学性能及腐蚀行为

采用离子束沉积技术在医用Ti6Al4V合金表面制备类金刚石薄膜（DLC）,利用原子力显微镜、Raman光谱、X射线光电子能谱（XPS）及UMT-2摩擦磨损试验机对薄膜的形貌、结构、摩擦学性能进行表征。采用动电位极化对涂层前后基底的耐腐蚀性能进行测试。结果表明：制备薄膜为类金刚石碳结构,基底偏压对薄膜形貌、结构有较大影响;偏压为–100 V时制备的薄膜表面粗糙度低（6.5 nm）,sp3/sp2 比值高,摩擦学性能优异;经DLC膜保护的合金基底耐腐蚀性能获得明显改善。     

Triode plasma nitriding and PVD coating: A successful pre-treatment combination to improve the wear resistance of DLC coatings on Ti6Al4V alloy

Diamond-like carbon (DLC) coatings have found great applicability in the automotive industry because of their low friction coefficient and high wear resistance. Nevertheless, their tribological performance can be greatly reduced on soft substrates such as titanium alloys. The hard DLC coating cannot usually follow elastic and plastic deformation of the substrate without failing. In order to overcome this property mismatch between hard coating and soft substrate, triode plasma nitriding was applied as a pre-treatment to improve the mechanical properties of the Ti6Al4V alloy and further enhance the load support for the DLC coating. DLC and multilayered TiN/DLC, CrN/DLC CrAlN/DLC coatings were deposited onto “standard” and plasma nitrided Ti6Al4V substrates. Triode plasma nitriding increased the load-bearing capacity of the coating/substrate system, as higher critical adhesion loads were recorded for DLC coatings on plasma nitrided Ti6Al4V substrates. This treatment also reduced the wear rate of the DLC coating/substrate. Further load support and lower wear rates were achieved by using TiN, CrN and CrAlN as intermediate layers on plasma nitrided Ti6Al4V substrates.     

钢表面离子束改性类金刚石膜层性能

离子束沉积类金刚石膜是钢表面改性的一项新技术。类金刚石改性膜层显微硬度和表面电阻率在特定轰击能量下出现峰值 ;双离子束轰击混合界面可以提高膜层显微硬度 ,并使峰值向低能量方向偏移 ,而且大大增强膜基结合强度。在大气环境中 ,改性膜层对钢的摩擦系数达到 0 0 80～ 0 1 80 ,在摩擦过程中起减摩作用。另一方面 ,类金刚石膜层显著提高钢的耐磨性 ,试验表明 ,40Cr钢表面镀膜后其磨损量是镀膜前的 1 /2 74。类金刚石膜由于使 2Cr1 3不锈钢在 3 5%NaCl溶液中的自然电位Ecorr和点蚀击穿电位Eb 增大 ,因而明显增强钢的抗点蚀能力。     

Adhesion improvement of hydrogenated diamond-like carbon thin films by pre-deposition plasma treatment of rubber substrate

For reduction of friction and enhancement of wear resistance of dynamic rubber seals, thin films of hydrogenated diamond-like carbon (DLC) have been deposited on hydrogenated nitrile butadiene rubber (HNBR) via magnetron-enhanced plasma chemical vapor deposition (ME-PCVD). Pre-deposition plasma treatment of HNBR substrate is proved to be crucial for the improvement of film performance due to enhanced interfacial adhesion. The columnar structure and the crack network formed during deposition enhance the flexibility of DLC thin films and exhibit strain tolerance up to 5%. Below 50% stretch strain and after unloading, thin DLC films of ∼ 300 nm thickness still adhere on the rubber substrates and no spallation or delamination is observed. The thin DLC film deposited on Ar-plasma pre-treated rubber at − 400 V substrate bias potential exhibits a very low coefficient of friction of 0.175 (compared to > 1 of uncoated HNBR rubber). After tribotests even under high normal load of 3 N, almost no wear can be seen on the films. Such tribological property is even better than that of 1 µm thick DLC or Me-DLC coated rubbers.     

Ti6Al4V辉光等离子渗铝摩擦磨损性能研究

利用双层辉光等离子渗金属技术在Ti6Al4V上渗铝以提高材料的摩擦磨损性能,对渗铝层的相结构和显微硬度进行了测试.采用球盘滑动磨损试验机对渗层进行摩擦磨损性能测试.结果表明:渗铝后渗层由Al3Ti和Al组成,材料的硬度值较基体Ti6Al4V有了很大的提高;材料摩擦因数和磨损体积减小,耐磨性得到提高.通过磨痕形貌分析可知,渗层磨损机制为粘着磨损.可见采用辉光等离子渗铝技术改善了材料的摩擦磨损性能.     

Improving tribological properties of Ti6Al4V alloy with duplex surface treatment

Ti-doped diamond like carbon films were deposited on both untreated and plasma nitrided Ti6Al4V alloy using Closed Field Unbalanced Magnetron Sputtering (CFUMBS) method and their tribological properties were evaluated by conducting sliding wear conditions. The influence of the nitrided layer on tribological behavior of Ti-DLC films was studied by means of XRD, SEM, scratch tester, microhardness tester and pin-on-disc tribotester. The microhardness results pointed out that the duplex treatment dramatically increased the surface hardness and reduced the plastic deformation of the alloy. Wear tests showed that Ti-DLC coatings on both untreated and nitrided surfaces caused a reduction in the coefficient of friction. The reason of the reduction in the coefficient of friction was found to be the formation of transfer film between the sliding surfaces. Wear rates demonstrated that wear resistance of duplex treated (Ti-DLC coating after nitriding) Ti6Al4V alloy was significantly improved.     

偏压对DLC薄膜结构及摩擦学性能的影响

目的通过调节偏压,改善无氢DLC薄膜的微观结构,提高其力学性能和减摩抗磨性能。方法采用离子束辅助增强磁控溅射系统,沉积不同偏压工艺的DLC薄膜。采用原子力显微镜(AFM)观察薄膜表面形貌,采用拉曼光谱仪对薄膜的微观结构进行分析,采用纳米压痕仪测试薄膜硬度及弹性模量,采用表面轮廓仪测定薄膜沉积前/后基体曲率变化,并计算薄膜的残余应力,采用大载荷划痕仪分析薄膜与不锈钢基体的结合力,采用TRB球-盘摩擦磨损试验机评价薄膜的摩擦学性能,采用白光共聚焦显微镜测量薄膜磨痕轮廓,并计算薄膜的磨损率。结果偏压对DLC薄膜表面形貌、微观结构、力学性能、摩擦学性能都有不同程度的影响。偏压升高导致碳离子能量升高,表面粗糙度呈现先减小后增加的趋势,-400V的薄膜表面具有最小的表面粗糙度且C─C sp^3键含量最多,这也导致了此偏压下薄膜的硬度最大。薄膜的结合性能与碳离子能量大小呈正相关,-800 V时具有3.98 N的最优结合性能。不同偏压工艺制备的薄膜摩擦系数随湿度的增加,均呈现减小的趋势,偏压为-400V时,薄膜在不同湿度环境中均显示出最优的摩擦学性能。结论偏压为-400 V时,DLC薄膜综合性能最优,其表面粗糙度、硬度、结合力和摩擦系数分别为2.5 nm、17.1 GPa、2.81 N和0.11。     

Ni-P/Ti/DLC多层膜的摩擦磨损性能

目的研究摩擦速度、载荷及加热温度对Ni-P/Ti/DLC多层膜摩擦磨损性能的影响。方法用化学镀镍磷工艺在模具钢基体表面镀上Ni-P层作切削层,采用过滤阴极真空电弧(FCVA)技术分别沉积Ti过渡层和DLC保护层。通过摩擦磨损实验,评价该多层膜的摩擦磨损性能。利用纳米压痕测试和拉曼光谱检测,研究该多层膜在不同加热温度下的硬度、弹性模量和结构成分。利用扫描电镜及表面轮廓仪分别对该多层膜的磨痕形貌和横截面轮廓进行分析。结果随着摩擦速度的增大,Ni-P/Ti/DLC多层膜的摩擦系数呈下降趋势,磨损率和磨损体积呈先减后增的趋势。不同载荷下的摩擦系数变化幅度较小,磨损率和磨损体积随着载荷的增大呈增加的趋势。随着加热温度的升高,摩擦系数呈下降趋势,磨损率和磨损体积呈先增后减的趋势。此外,随着加热温度的升高,多层膜表层DLC膜中石墨相逐渐增多,硬度和弹性模量随之呈先增后减的趋势。结论较高摩擦速度下,多层膜表层DLC膜石墨化趋势增强,摩擦系数变化幅度较大,且表面磨痕宽度和深度显著增加,磨损加剧。多层膜中软质的Ti金属层和硬质的DLC层,能有效提高多层膜在高载荷下的摩擦磨损性能。随着加热温度的升高,多层膜表层DLC膜中石墨相逐渐增多,摩擦过程更易生成转移膜。     

Tribological behaviors of hydrogenated diamond-like carbon films in different testing environments

Hydrogenated diamond-like carbon (DLC) films were deposited on Si substrate using plasma enhanced chemical vapor deposition(PECVD) technique with CH4 plus H2 as the feedstock. The tribological properties of the hydrogenated DLC films were measured on a ball-on-disk tribometer in different testing environments (humid air,dry air, dry O2, dry Ar and dry N2 ) sliding against Si3 N4 balls. The friction surfaces of the films and Si3 N4 balls were observed on a scanning electron microscope (SEM) and investigated by X-ray photoelectron spectroscopy (XPS). The results show that the tribological properties of the hydrogenated DLC films are strongly dependent on the testing environments. In dry Ar and dry N2 environments, the hydrogenated DLC films provide a superlow friction coefficient of about 0. 008 -0.01 and excellent wear resistance (wear life of above 56 km). In dry air and dry O2, the friction coefficient is increased to 0. 025 - 0.04 and the wear life is decreased to about 30 km. When sliding in moist air, the friction coefficient of the films is further increased to 0. 08 and the wear life is decreased to 10. 4 km. SEM and XPS analyses show that the tribological behaviors appear to rely on the transferred carbon-rich layer processes on the Si3 N4 balls and on the friction-induced oxidation of the films controlled by the nature of the testing environments.     

硼掺杂DLC薄膜在海水环境中的腐蚀磨损性能

目的 研究硼（B）掺杂对类金刚石（DLC）薄膜在人工海水介质中耐腐蚀性能和摩擦磨损性能的影响。方法 利用非平衡磁控溅射的方法,通过控制碳化硼靶材和石墨靶材电流,在304不锈钢基底表面沉积了一种无掺杂DLC薄膜和两种不同B含量的DLC薄膜（B的原子数分数分别为7.23%、13.27%）。采用扫描电子显微镜、拉曼光谱仪、纳米压痕仪、划痕仪、摩擦实验机对薄膜的化学成分、显微结构、纳米硬度、结合力及摩擦性能进行研究。通过测试薄膜在人工海水介质中的静态极化曲线和交流阻抗谱以及监测薄膜在摩擦前后和摩擦过程中的开路电位变化,来研究薄膜在人工海水中的摩擦学和耐腐蚀性能。结果 与未掺杂的DLC薄膜相比,掺杂B原子数分数为7.23%的DLC薄膜的硬度和弹性模量变化不明显,但ID/IG增大,与基底的结合力增大到36 N（无掺杂DLC薄膜为20 N）,自腐蚀电位升高,自腐蚀电流密度减小,极化电阻增大,并且在人工海水介质中的摩擦系数降低了10.7%,磨损量降低了37.0%,开路电位大幅升高。掺杂B原子数分数为13.27%的DLC薄膜的摩擦学及耐蚀性能则大幅度下降。结论 在DLC薄膜中掺杂适量的B有助于提高DLC薄膜在人工海水介质中的耐腐蚀性能和磨蚀性能。