铌酸锂晶片的化学机械抛光质量研究

采用化学机械抛光方法，在新型智能抛光机上用自制的抛光液对铌酸锂晶片进行抛光。结果证明选择适当的参数后可以得到一种超平滑表面，几乎无损伤层，且有较高的面形精度和加工效率。采用扫描探针显微镜(SPM)获得了铌酸锂晶片表面微观形貌，并测定了损伤层，分析了铌酸锂晶片的表面形成机理及其表面加工缺陷和损伤层的成因。     

典型功能脆性材料磨削

为了研究典型功能脆性材料钽酸锂和硅片的磨削特性,建立了端面磨削模型来计算晶片的比磨削能及其表面的磨削力的分布,并通过实验分析脆性材料的磨削特性。以进给速度作为变量,选取砂轮端主轴磨削过程中功率增加率作为评价磨削特性的指标进行磨削实验,同时采集砂轮端主轴的功率值信号,滤波后计算晶片比磨削能和磨削力的分布。通过端面磨削模型计算可得:钽酸锂的比磨削能是147.46J/mm~3,比硅的大44%,表明磨削去除相同体积的钽酸锂需要更多的能量,钽酸锂晶片表面分布的磨削力比硅片大。磨削过程的主轴功率增加率是预测钽酸锂加工结果的重要指标,在本实验中一旦增加率大于临界值0.6W/s,钽酸锂表面就会产生裂纹。而在相同加工条件下,无论进给速度如何变化,硅片的磨削主轴的功率增加率始终保持稳定,而钽酸锂的主轴磨削过程的功率增加率则与进给速度呈现线性增加关系,这一现象与钽酸锂的机械性质无关,而与物理性质有关系。     

匀强电场作用下纯铝在480 ℃的拉伸变形行为

从晶体的位错结构出发,研究了电场对纯铝在480℃变形时的作用机理;用光学显微镜和扫描电镜对材料的显微组织和断口形貌进行了分析。结果表明:外加电场可以降低纯铝高温变形时的屈服强度和塑性变形的流变应力,降低了变形时晶粒内的位错密度;同时外加电场有效地抑制了变形时空洞的形成,提高了断裂伸长率;施加匀强电场的强度和极性对于纯铝高温变形过程中位错运动的影响不同。     

球壳形介电弹性体驱动器电致应变特性分析

介电弹性体是电场型电活性聚合物的一种,能够在外加电场的作用下,通过材料内部结构的改变发生伸缩、弯曲、束紧或膨胀等变形,人为控制电压的大小,精确控制变形.基于Neo-Hookean应变能模型,采用ABAQUS有限元软件,开展了材质为丙烯酸聚合物的球壳形介电弹性体驱动器在机电载荷作用下的力学性能有限元模拟,分别分析了无机械预拉伸和有机械预拉伸条件下电致应变特性,进行了球壳形介电弹性体驱动器机电耦合特性的有限元仿真分析,为球壳状介电弹性体驱动器的力电特性、变形失效、稳定性的进一步研究提供了一定的理论依据.     

磨削砂轮参数对球头立铣刀应力场的影响研究

在切削过程中,球头立铣刀的刀槽承载的应力及其应变对刀具的稳定性与磨损程度有很大的影响。根据球头立铣刀磨削仿真加工系统开发的球头立铣刀三维模型,利用有限元分析ANSYS软件对仿真加工的球头立铣刀进行力学特性分析,可以得到如下结论:当铣削条件不变,磨削加工所用砂轮半径越大,球头立铣刀的最大变形量和最大等效应力都同时增大,二者增长趋势几乎相同,变形量变化幅度要大一些;当磨削砂轮安装偏摆角增加时,球头立铣刀的最大变形量和最大等效应力同时减小,二者的减小幅度出现明显不同,球头立铣刀变形量的减小幅度略大一些。     

薄膜油润滑中电粘度效应影响研究

利用组合滑块油润滑试验考察了双电层的电粘度效应对薄膜润滑性能的影响，采用施加外加电场和添加添加剂两种方法以改变润滑剂中离子浓度进行试验研究。结果表明：双电层引起的电粘度效应对摩擦因数有明显影响，摩擦因数随着外加电场的增强而变大，当外电场增大到一定程度时摩擦因数开始减小；在离子浓度较小时，摩擦因数随着离子浓度的增加而增大，当离子浓度增大到一定程度时摩擦因数开始减小。     

300mm硅片超精密磨床设计与开发

硅片的超精密磨削技术主要用于硅片制备中的硅片平整化和IC后道制程中的背面减薄。随着硅片直径的增大和厚度的减小,硅片超精密磨削技术及设备面临新的挑战:大的进给速度调速范围和高的进给稳定性,对磨床进给系统的结构特性和运动性能提出了较高要求;硅片在磨削中容易翘曲变形,磨削面型精度难以保证;硅片原始厚度的增大和芯片磨后厚度的减小趋势,使硅片表面磨削的材料去除量增大,提高加工效率成为一个亟待解决的问题;硅片减薄后,其表面质量和加工变形对磨削力的变化更加敏感,监控磨削力以提高成品率的问题亟待解决。面向大尺寸薄硅片的超精密磨削技术及设备的需求,针对表面质量和磨削效率这对突出矛盾问题,以提高硅片表面质量、面型精度和加工效率为目的,作者深入研究了精密进给、     

大齿圈成形磨削仿真及余量分配技术研究

大型齿圈成形磨削时不同的磨削余量会影响磨削力及磨削热的大小,从而引起不同的磨削变形,合理的余量分配对于保证齿圈加工质量意义重大。基于磨削接触区域模型、磨削力模型和磨削移动热源理论,分析了齿圈成形磨削在热力耦合作用下的变形预测仿真流程,建立了磨齿余量分配模型。以某大型齿圈为研究对象,以变形控制为目标,对不同磨齿余量进行了磨削变形仿真,得到了较优的余量分配值。研究方法对提高齿圈成形磨削加工精度具有一定的借鉴意义。     

功能材料的力、电、磁耦合行为的实验研究

自行研制成功力—电、力—磁耦合加载设备,实现进行多场耦合实验;研究开发出力—电耦合场和力—磁耦合场下的力学量与电磁学量的量测技术,实现测量过程自动化;从而具备了同时对铁电材料施加应力场和电场的技术,对铁磁材料同时施加应力场和磁场的技术。解决了高电压的绝缘、防电弧放电、防电击穿、电荷测量与数据采集等难题,设计一系列有效的实验装置和实验环境。实验研究了耦合场作用下压／铁电材料的本构关系,提出旨在消除内偏场的冲击极化方式;采用三点弯实验,测试了铁电材料的断裂韧度,发现极化方向对断裂韧度的显著影响。将云纹干涉技术应用于力电耦合场作用下裂尖变形场的测量。首次对预制有贯穿裂纹的铁电材料试件进行电疲劳实验,获得了电致疲劳裂纹扩展曲线,发现一些新的电疲劳损伤现象,例如不同载荷作用下裂纹的扩展模式、疲劳裂纹闭合效应、电致裂纹扩展的磨损与击穿等。实验制备并研究0-3联和1-3联铁电复合材料的介电性能、压电性能。制备PZT／MgO纳米复相铁电陶瓷,在保证其压电性能的前提下,改善铁电材料的韧度。有关铁磁材料的实验研究,量测不同力磁耦合载荷作用下纯镍、6号镍、锰锌铁氧体、Terfenol-D等几种铁磁材料的磁滞回线、磁致应变曲线,获得磁导率、磁致伸缩系数、压磁系数、磁弹性系数等。实验研究磁场对Ni52Mn24Ga24单晶与多晶体相变行为的影响。对于三种导磁率的锰锌铁氧体陶瓷,采用在磁场下的三点弯断裂实验和维氏压痕实验,发现外磁场对材料断裂韧度的影响很小。     

汽轮机盘车底座基准面铣削变形的仿真分析与研究

基于盘车底座基准面的铣削工序,建立了装夹和加工受力模型,计算了铣削力值。采用了有限元仿真方法,分别建立了装夹仿真模型和加工仿真模型,对基准面的受力变形进行了仿真分析。采用了工艺试验方法,对相同工况下的仿真结果进行了验证。分析表明:装夹时,千斤顶的使用可以有效减小重力对盘车底座变形的影响,千斤顶在位置③处施加4 000 N力(图6),变形量最大减小85%;仿真中基准面最大变形值为0.010 915 mm;试验中基准面的最大变形量为0.02 mm,均小于基准面平行度要求0.04 mm。     

Minimal Realization of Linear Graph Models for Multi-physics Systems

An engineering system may consist of several different types of components,belonging to such physical"domains"as mechanical,electrical,fluid,and thermal.It is t...     

INTEGRAL EQUATION METHOD＇S APPLICATION IN HOLE-EDGE STRESS OF COMPOSITE MATERIAL PLATE WITH DIFFERENT SHAPED HOLES

The strength of composite plate with different hole-shapes is always one of the most important but complicated issues in the application of the composite material. The holes will lead to mutations and discontinuity to the structure. So the hole-edge stress concentration is always a serious phenomenon. And the phenomenon makes the structure strength decrease very quickly to form dangerous weak points. Most partial damage begins from these weak points. According to the complex variable functions theory, the accurate boundary condition of composite plate with different hole-shapes is founded by conformal mapping method to settle the boundary condition problem of complex hole-shapes. Composite plate with commonly hole-shapes in engineering is studied by several complex variable stress fimction. The boundary integral equations are founded based on exact boundary conditions. Then the exact hole-edge stress analytic solution of composite plate with rectangle holes and wing manholes is resolved. Both of offset axis loadings and its influences on the stress concentration coefficient of the hole-edge are discussed. And comparisons of different loads along various offset axis on the hole-edge stress distribution of orthotropic plate with rectangle hole or wing manhole are made. It can be concluded that hole-edge with continuous variable curvatures might help to decrease the stress concentration coefficient; and smaller angle of outer load and fiber can decrease the stress peak value.     

Non-monotonic material contrast in scanning ion and scanning electron images

30 keV Ga⁺ focused ion beam induced secondary electron (iSE) imaging was used to determine the relative contrast between several materials. The iSE signal compared from C, Si, Al, Ti, Cr, Ni, Cu, Mo, Ag, and W metal layers does not decrease with an increase in target atomic number Z₂, and shows a non-monotonic relationship between contrast and Z₂. The non-monotonic relationship is attributed to periodic fluctuations of the stopping power and sputter yield inherent to the ion–solid interactions. In addition, material contrast from electron-induced secondary electron (eSE) and backscattered electron (BSE) images using scanning electron microscopy (SEM) also shows non-monotonic contrast as a function of Z₂, following the periodic behavior of the stopping power for electron–solid interactions. A comparison of the iSE and eSE results shows similar relative contrast between the metal layers, and not complementary contrast as conventionally understood. These similarities in the contrast behavior can be attributed to similarities in the periodic and non-monotonic function defined by incident particle–solid interaction theory.     

Application of Feature Extraction through Convolution Neural Networks and SVM Classifier for Robust Grading of Apples

This paper proposes a novel grading method of apples,in an automated grading device that uses convolutional neural networks to extract the size,color,texture,an...     

分布动态载荷识别的抗噪处理

针对正交多项式频域法在用多种响应对矩形薄板进行载荷识别中抗噪性较差的问题,综合运用平均法、矩阵预处理和奇异值截断法等方法对之进行改善,并引入空间映射的思想,将该方法的应用范围拓展为复杂的模型.利用仿真算例,证实了该方法具有较好的抗噪性.     

基于MELTAC-N平台的核电厂安全级DCS环网研究与测试

针对工程实践中环网通讯相关问题的处理缺乏理论基础及国产化安全级DCS平台的开发缺乏成熟经验借鉴问题,对基于MELTAC-N平台核电厂安全级DCS环网的软硬件实现进行了研究。提出了安全级DCS环网双环网冗余设计、光切换开关设计等硬件设计方法,以及以RPR协议为基础,采用全数据收发策略的软件设计方法。在CPR1000安全级DCS平台上对安全级DCS环网的可靠性及实时性进行了评价,并进行了容错能力、响应时间及响应时间稳定性测试验证实验。结果表明,基于MELTAC-N平台安全级DCS环网软硬件设计具有较好的容错能力及响应时间稳定性。     

Short-Term Relay Quality Prediction Algorithm Based on Long and Short-Term Memory

The fraction defective of semi-finished products is predicted to optimize the process of relay production lines, by which production quality and productivity ar...     

End-to-End Multiview Gesture Recognition for Autonomous Car Parking System

The use of hand gestures can be the most intuitive human-machine interaction medium.The early approaches for hand gesture recognition used device-based methods....     

The laboratory simulation of abrasive wear

Abrasive wear has long been recognised as one of the most potentially serious tribological problems facing the operators of many types of plant and machinery; several industrial surveys have indicated that wear by abrasion can be responsible for more than 50% of unscheduled machine and plant stoppages. Locating the operating point of a tribological contact in an appropriate operational ‚map’︁ can provide a useful guide to the likely nature and origins of the surface degradation experienced in use, though care must be exercised in choosing the most suitable parameters for the axes of the plot. Laboratory testing of materials and simulations of machine contacts are carried out for a number of purposes; at one level for the very practical aims of ranking candidate materials or surface hardening treatments in order of their wear resistance, or in an attempt to predict wear lives under field conditions. More fundamentally, tests may be aimed at elucidating the essential physical mechanisms of surface damage and loss, with the longer term aim of building an analytical and predictive model of the wear process itself. In many cases, component surface damage is brought about by the ingress of hard, particulate matter into machine bearing or sealing clearances. These may be running dry although, more usually, a lubricant or service fluid is present at the interface. A number of standardised wear test geometries and procedures have been established for both two- and three-body wear situations, and these are briefly described. Although abrasive wear is often modelled as following an ‚Archard’︁ equation (i.e. a linear increase in material loss with both load and time, and an inverse dependence on specimen hardness) both industrial experience and laboratory tests of particularly lubricated contacts show that this is not always the case: increasing the hardness differential in an abrasively contaminated lubricated pair may not always reduce the rate of damage to the harder surface.     

ANGULAR DISTORTION ALLOWABLE VALUE AND ASSESS METHOD OF WELD ON COKE TOWER

A graph as the new engineering method for estimate the safety of bulging deformation of coke tower is proposed. Through stresses analysis of circumferential weld of coke tower and comparing the stresses produced by pressure with heat stress of steady state, residual stress, bending stress produced by both itself weight and wind loads, it showed that the stresses produced by pressure on the angle distortion are the main factor of equivalent stress of the combined stress. After comparing four kinds of stress controlling conditions, the relation to stress with depth of angular distortion, grade of curvature of angular distortion and half of region of angular distortion has been inferred. Graph of deformation allowable value of coke tower for different condition by angular distortion and half of region of angular distortion has been plotted. The five steps for its engineering use have been explained. The lighter the grade of curvature is, the larger of bulge allowance, may be, and the bigger of depth of angular distortion may pose too. For the coke tower with a popular structure of Dg 5 400 mm×28 mm, the result by graph is nearly more than the result of two formulas formed by other research, the error is less than 7.0%. But, the graph can be easily applied to different size of angular distortion.