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R. Knizikevi?ius 《Vacuum》2007,81(5):676-679
The chemical etching of Si(100)−(2×1) in I2 ambient is considered. The desorption activation energy of SiI2 molecules is evaluated from experimental data. It is found that the desorption activation energy of SiI2 molecules is equal to . This corresponds to a value of the mean lifetime of adsorbed molecules on the surface of at temperature .  相似文献   

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Leszek Wójcik  Artur Markowski 《Vacuum》2007,81(10):1389-1392
Ion-molecule reactions have been measured for methane-carbon tetrafluoride mixtures of different composition using a quadrupole mass spectrometer with a high-pressure ion source. Concentration of methane in these mixtures ranged from 10% to 90% (at 10% increment). Primary ions , , F+, CF+ and were produced by electrons with energy of 300 eV. Secondary ions , , , , and were observed as the result of ion-molecule reactions. Relative current intensities for primary and secondary ions are presented as a function of both total mixture pressure and concentration of methane in the mixture. Potential of repeller electrode inside the ion source collision chamber was fixed at 5 V for all measurements. Total mixture pressure was changed from 0.7 to 33.3 Pa. Schemes of ion-molecule reactions were proposed.  相似文献   

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Low temperature (115-160 K) adsorption of CO on clean Cu(0 0 1), CO2 on potassium modified Cu(0 0 1) and surface reactions between H2 and CO2 were studied. Pre-adsorption of K leads to strong interaction of the interface with arriving carbon dioxide molecules and linear CO2(phys), bent , CO and are observed as adsorbed species. Annealing of the CO2/K/Cu(0 0 1) interface causes, successively, desorption of the reaction products. Pre-adsorbed hydrogen on the alkali-modified substrate changes the surface reaction channels, mainly with no presence of CO and creation of surface formate species. Details of surface reactions are compared with results for thick potassium film on a copper substrate.  相似文献   

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