共查询到19条相似文献,搜索用时 109 毫秒
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介绍了功能梯度薄膜材料的特点和应用 ;比较了功能梯度薄膜常用制备方法 ;概括了功能梯度薄膜制备中的掺杂技术并给出了脉冲激光沉积功能梯度薄膜的模型 ;论述了脉冲激光沉积技术在制备功能梯度薄膜材料方面的应用与最新进展 相似文献
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薄膜研究是近些年来迅速发展的科学技术领域之一,尤其是原子尺度人工超晶格材料的生长,引起了对凝聚态物理和材料科学研究与应用的极大重视与兴趣。脉冲激光沉积被公认为是应用面最广和最好的制膜方法之一。但普通脉冲激光沉积制备的薄膜,存在表面颗粒,难以精确控制层... 相似文献
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Seung Eon Moon Han Cheol Ryu Min Hwan Kwak Young Tae Kim Su‐Jae Lee Kwang‐Yong Kang 《ETRI Journal》2005,27(6):677-684
A phased array antenna was fabricated using four‐element ferroelectric phase shifters with a coplanar waveguide (CPW) transmission line structure based on a Ba0.6Sr0.4TiO3(BST)/MgO structure. Epitaxial BST films were deposited on MgO (001) substrates by pulsed laser deposition. To attain the large differential phase shift and small losses for a ferroelectric CPW phase shifter, an impedance‐matching‐part adding technique between the effective transmission line and connecting cable was used. The return loss and insertion loss for this technique‐adapted BST CPW device were improved with respect to those for a normal BST CPW device. For an X‐band phased array antenna system consisting of ferroelectric BST CPW phase shifters, power divider, dc block, patch antenna, and programmed dc power, the steering beam could be tilted by 15° in either direction. 相似文献
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Ionela Vrejoiu Marin Alexe Dietrich Hesse Ulrich Gösele 《Advanced functional materials》2008,18(24):3892-3906
Functional perovskite materials gain increasing significance due to their wide spectrum of attractive properties, including ferroelectric, ferromagnetic, conducting and multiferroic properties. Due to the developments of recent years, materials of this type can conveniently be grown, mainly by pulsed laser deposition, in the form of epitaxial films, multilayers, superlattices, and well‐ordered arrays of nanoislands. These structures allow for investigations of preparation–microstructure–property relations. A wide variation of the properties is possible, determined by strain, composition, defect contents, dimensional effects, and crystallographic orientation. An overview of our corresponding work of recent years is given, particularly focusing on epitaxial films, superlattices and nanoisland arrays of (anti)ferroelectric and multiferroic functional perovskites. 相似文献
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Bohan Xu Patrick D. Lomenzo Alfred Kersch Tony Schenk Claudia Richter Chris M. Fancher Sergej Starschich Fenja Berg Peter Reinig Kristina M. Holsgrove Takanori Kiguchi Thomas Mikolajick Ulrich Boettger Uwe Schroeder 《Advanced functional materials》2024,34(8):2311825
Since the discovery of ferroelectricity in doped HfO2 and ZrO2 thin films over a decade ago, fluorite-structured ferroelectric thin films have attracted much research attention due to their excellent scalability and complementary metal-oxide semiconductor compatibility compared to conventional perovskite ferroelectric materials. Although various factors influencing the formation of the ferroelectric properties are identified, a clear understanding of the causes of the phase formation have been difficult to determine. In this work, ZrO2 films deposited by atomic layer deposition and chemical solution deposition have resulted in films with completely different structural properties. Regardless of these differences, a general relationship between strain and phase formation is established, leading to a more unified understanding of ferroelectric phase formation in undoped ZrO2 films, which can be applied to other fluorite-structured films. 相似文献
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准分子激光扫描淀积PZT/YBCO结构铁电薄膜 总被引:2,自引:1,他引:1
利用脉冲准分子激光(工作气体XeCl,波长308nm,脉宽28ns)在外延YBCO/LaAlO3(100)单晶基片上淀积了Pb(Zr0.55Ti0.45)O3铁电薄膜,YBCO薄膜既为生长高取向PZT薄膜提供了晶体匹配条件,同时也为PZT铁电薄膜提供了下电极。讨论了工艺参数对晶相结构和表面形貌的影响。用X射线衍射表征了该多层膜的晶相结构,扫描电镜观察其表面形貌。PZT铁电薄膜的剩余极化为21μC/cm2,矫顽场为65kV/cm。 相似文献
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Ashok Kumar M. R. Alam A. Mangiaracina M. Shamsuzzoha 《Journal of Electronic Materials》1997,26(11):1331-1334
Ferroelectric lead-zirconate-titanate (PZT) thin films were deposited by the pulsed laser deposition technique on Pt-coated
(100) Si substrates. This study was focused on the investigation of the PZT film growth on (100) Si substrate at varying deposition
parameters and electrical characterization of the films including hysteresis loop and fatigue properties by RT66A Standardized
Ferroelectric Test System. PZT deposited at higher temperature (575°C in 450 mTorr O2 partial pressure) showed the best crystalline structure. The remnant polarization and the retained polarization of the ferroelectric
capacitors were 13 μC/cm2 and 20 μC/cm2, respectively. The crystallographic properties of the films were determined using the x-ray diffractometer method. The cross-sectional
transmission electron microscope results showed very smooth interfaces among different layers of films. 相似文献