基于非接触式热压印技术的微透镜阵列制作

为了降低热压印工艺制作微透镜阵列对模具的要求,提出了非接触式热压印工艺制作微透镜阵列,采用了自主研制的纳米压印样机与光刻工艺制作的通孔式不锈钢模具在PMMA表面压印出微透镜阵列,并分析了压印过程中温度、压力、时间等参数对微透镜阵列表面形貌的影响。研究结果表明,利用非接触式热压印工艺可以制作表面形貌好、位置精度高的微透镜阵列,压印时最佳压印温度为140℃~180℃,最佳脱模温度为80℃,最佳压力为1 500 Pa~3 500 Pa,且采用通孔式模具不需要真空,降低了对环境的要求。     

远场均匀照明的LED排列设计

为了实现远场的照度均匀性,在已设计的LED平面排列组合的基础上,提出了LED白光照明单元的球面排列设计方法。相比平面的排列,把LED照明单元组合排列在半球形表面,在被照接收面上产生更宽角度的照度分布。并对几种不同排列的LED照明单元进行分析,建立了光学模型和设计方程式,模拟出远场的照度分布情况。结果表明在极限角度内LED球形排列具有均匀广泛的远场照度分布。     

用于无模光刻的连续浮雕谐衍射透镜阵列设计

为了获得实时调焦写入以及高的系统分辨力和衍射效率,提出了一种基于连续浮雕谐衍射透镜阵列的无模光刻方法。该方法采用连续浮雕谐衍射透镜阵列作为无模光刻的物镜阵列,在兼顾系统分辨力和衍射效率基础上,由同一衍射透镜阵列实现聚焦写入和检焦;同时利用谐衍射透镜的深浮雕特性调制透镜的环带宽度,降低透镜的制作难度。在分析谐衍射透镜特点以及考虑激光直写制作工艺对连续深浮雕衍射聚焦特性影响的基础上,设计、制作并测试了设计波长为441.6nm,F数为7.5的连续浮雕谐衍射透镜阵列。测试结果表明,该阵列同时具有聚焦写入和检焦功能,且对写入激光和检焦激光的衍射效率均优于70%,有望改善无模光刻的制作质量。     

Development of an analysis system for geometric contour error evaluation in ultra-precision machining for microlens arrays

A basic principle for acquiring precisely shaped machined parts is to create dense tool path data. However, as the density of tool paths increases, the volume of data increases. The significant increase in data consumes more memory and machining time. Therefore, the creation of tool path data of unlimited density is impractical. This paper proposes a contour error evaluation system. The system makes correct decisions based on the expected quality of a workpiece. Specifically, the user creates tool path data by calculating deviations in the contour in relation to variations in the intervals of the tool path. The user can create tool paths by adjusting the amount of tool path data within the desired quality level. Accordingly, before the start of the machining process, the user can predict any machining loss likely to result from the excessive amount of data created in the creation phase. In addition, the tool path data of the proposed system are experimentally compared with the actual shape of a part machined with a microlens array machining system.     

Recording and controlling the 4D light field in a microscope using microlens arrays

By inserting a microlens array at the intermediate image plane of an optical microscope, one can record four-dimensional light fields of biological specimens in a single snapshot. Unlike a conventional photograph, light fields permit manipulation of viewpoint and focus after the snapshot has been taken, subject to the resolution of the camera and the diffraction limit of the optical system. By inserting a second microlens array and video projector into the microscope's illumination path, one can control the incident light field falling on the specimen in a similar way. In this paper, we describe a prototype system we have built that implements these ideas, and we demonstrate two applications for it: simulating exotic microscope illumination modalities and correcting for optical aberrations digitally.     

基于活动的产品车间制造过程碳排量计算方法

借鉴基于活动的成本法思想,提出了一种基于活动的碳排量计算方法.首先介绍了活动碳算法的概念和原理,建立了基于活动的产品车间制造过程碳排量计算模型;分析并给出了计算模型中关键要素的获取和计算方法;最后给出应用实例,验证了所提方法的有效性.研究结果可进一步应用于制造过程的低碳评价和优化.     

Production-flow-value-based job dispatching method for semiconductor manufacturing

In a wafer manufacturing system, the value added to a particular product at a station may differ significantly from that added to a different product at the same station. If an enterprise concentrates mainly on generating profits, throughput becomes a poor performance measurement for a manufacturing system. Job dispatching rules based on maximum throughput no longer guarantee maximizing profit. Hence, profitability would be a good alternative measurement. The main purpose of this study is to develop a production-flow-value-based job dispatching rule (PFV) by the theory of constraints (TOC) for wafer fabrication. This study derives a TOC cost estimation method and a profitability estimate of a WIP-wafer lot. Jobs are then prioritized based on their profitability. Thus the PFV job dispatching rule is developed. For comparison, two job dispatching rules, MCR and MBS, are also arbitrarily selected to perform simulations. The simulation results reveal that the proposed PFV maximizes the production flow value, while MCR and MBS do not.     

制造网格中资源的层次检索方法研究

分析了传统资源搜索方法应用在制造网格中的局限性，建立了制造网格中资源的信息模型和层次检索模型。在此基础上，提出了一种制造网格中资源的优化检索方法，通过与其他算法比较并结合实例验证了该检索方法的高效性与可行性。     

一种新的液力离合器加工工艺改进方法

介绍了工程机械中液力离合器加工工艺的新方法,并通过计算和大量试验确定了该方法在生产中的可行性与经济 性。     

A practical resource-searching method for manufacturing grid

Manufacturing grid has become more and more popular because it can realize the resource share and collaboration within the worldwide scope. In most cases, the resource and task information in manufacturing grid is fuzzy and uncertain, but the resource-searching methods now are focused on deterministic value and have some limitations for manufacturing grid. This paper proposes a unified information model in which the information parameters are described as a set of interval values, and the conversion rules from the given capability parameters into intervals are discussed. On these bases, a new optimized resource-searching method is designed to find the best required manufacturing resource for the task by calculating the interval distance of the task and the resources. The method is verified to be effective by an instance. Furthermore, it is practical by comparing it with other resource-searching methods.     

Highly uniform and controllable micropatterning of a hydrogel on microcantilevers

This paper reports a novel method for highly controllable local patterning of a hydrogel on microcantilevers. We constructed a dynamic mask lithography setup based on a commercial beam projector and a 3-axis microstage. Dynamic masks generated from the beam projector controlled the shape, size, and position of hydrogel patterns while the 3-axis microstage mainly controlled the thickness of hydrogel patterns. Using the constructed setup, polyethyleneglycol diacrylate (PEGDA) was patterned on microfabricated cantilevers in a highly controlled manner. Currently, the smallest PEGDA patternable is a 5-μm-diameter circle with a thickness of ～10 μm. To confirm thicknesses of patterned PEGDAs, resonance frequencies of microcantilevers were measured before and after each PEGDA patterning. Thicknesses extracted from resonance measurements showed good agreement with measurements using an optical microscope.     

大面积复杂掩模图形的快速光刻仿真研究

大面积复杂掩模图形的光刻仿真,要同时满足高精度和高效率两个要求。为克服现有方法积分区域大,计算效率低等问题,提出了一种基于最有效影响区域的简化计算方法。该方法首先利用波前分割的方法确定影响光刻胶目标场点光强的最有效影响区域,以此局部区域替代原来的整体积分区域作光强的计算,将积分区域由整个掩模图形缩小为图形的一小部分。试验结果表明,该算法与现有方法比较,精度上非常接近,但速度显著加快,且稳定可靠。该方法能够快速准确地对大面积复杂掩模图形进行光刻仿真,具有重要的应用价值。     

面向制造执行系统的功能进化实施方法

为了使制造执行系统功能在其生命周期中能够不断满足企业业务需求的变化,提出一种基于企业业务活动模型与制造执行系统功能模型转换的功能进化实施方法.建立了进化过程模型,并对进化过程进行描述,给出了企业业务活动元模型与制造执行系统功能元模型,以及两者之间的转换框架.通过转换,将企业业务的变化映射到制造执行系统功能模型中,在功能模型驱动下完成系统进化.通过在某航空企业的实施验证了该方法的可行性.     

螺旋叶片新型制作方法推广应用

螺旋叶片是机械工程上经常遇到的一种较难放样的钣金构件，其制作方法繁琐，成本较高。通过采用拉伸制作方法和卷制方法，简便易行，成本较低，卷制方法可实现连续大批量生产。     

增材制造自适应螺旋加工路径规划方法

为避免增材制造传统加工路径生成方法存在的尖角过多、路径相交、间距不均匀性等问题,提出一种自适应螺旋曲线加工路径生成方法.首先,通过放样方法获得螺旋曲线生成的初始控制点;然后根据路径曲率变化情况,在曲率较大的位置自适应插入控制点;最后根据控制点拟合B样条曲线,获得连续光顺且间距均匀的螺旋加工路径.通过模拟仿真路径和路径三维可视化证明了所提方法的可行性和有效性,所产生的螺旋加工路径不仅能够较大地提高加工速度和加工效率,还能够避免增材制造过程材料填充过度或不足的问题,提高加工质量.     

面向工艺领域的制造知识系统化建模方法研究

针对复杂产品工艺领域制造知识的组成和结构,基于知识的信息本质,采用系统的方法对制造知识进行了分析,提出了制造知识的系统化建模方法;从宏观整体性角度,建立了把领域知识自上而下划分为最小粒度知识的分类方法,用知识型谱刻画知识层次结构;从微观相关性角度,建立了制造知识的信息构成关系和拓扑构造方法,用记忆网络刻画制造知识拓扑结构,根据工艺领域制造知识的拓扑结构就可构建知识库.通过在飞机钣金工艺领域制造知识建模中的应用说明了该方法的有效性.     

起重机用均质弹性拉索非线性计算方法的研究

针对起重机用拉索的重要作用,提出了一种求解拉索悬链线的方法,使计算结果符合实际情况。