考虑摩擦力及试样表面倾角的原子力显微镜扫描模式

原子力显微镜(Atomic force microscopes,AFM)接触模式下的测量结果因受样本表面倾角和针尖一样本表面间摩擦力的影响而存在较大的测量误差.为避免针尖-表面间的摩擦力对AFM测量试样表面形貌的影响,并能够准确测量表面倾角,提出了一种新的AFM工作模式--消除倾角和摩擦力影响模式.在这种工作模式中,扫描方向垂直悬臂的长轴方向,通过测量悬臂的竖向和横向偏转而得到针尖所受的竖向和横向力,并计算得到针尖-试样表面间的van der Waals力及试样表面局部倾角,然后结合针尖项点和扫描器的位置及针尖-试样表面间距可以得到试样表面形貌的测量结果.在上述工作模式下,针尖-试样表面间的摩擦力是可控的,能够避免针尖或试样的损伤.仿真结果证明了这种方法的可行性.     

复合型超精密表面形貌测量仪

研制了基于同一显微镜基体实现原子力探针扫描测量与非接触光学测量两种功能的复合型超精密表面形貌测量仪.分析了基于白光显微干涉原子力探针的测量方法、探针微悬臂变形量与白光干涉条纹移动量的关系以及探针微悬臂测量非线性误差的修正方法,和通过融合垂直扫描系统的位移量和悬臂梁变形量得到了原子力探针的工作方式.研制了三维精密位移系统...     

掘进机在巷道自动掘进中的应用研究

对掘进机的自动化掘进方法、工艺进行研究分析,根据掘进机悬臂的结构特点研究掘进机与巷道顶板和两帮产生干涉的规律以及悬臂的碰撞干涉检测方法,完成了掘进机悬臂作业防干涉掘进规划、悬臂运动关节防干涉掘进规划以及悬臂与巷道之间的避碰处理,为实现掘进机的自动化掘进提供技术支持。     

基于单片机的余弦误差修正系统

阐述了激光干涉测量技术是高精度位移测量的最主要方法之一,具有测量范围大、分辨率高和测量精度高等优点。然而,随着测量距离增大,各项误差也随之增大。其中,余弦误差就在大行程激光干涉测量过程中成为一项不可忽略的误差。分析了余弦误差产生的原因,并设计了一套余弦误差修正系统来消除其误差。     

相移干涉测量中相移误差的自修正

分析了相移干涉测量过程中相移误差产生的原因,研究了基于迭代最小二乘算法的相移误差修正法,实现了任意两幅干涉图间相对移相量的计算和自适应校正.基于光、机、电、算四系统,实现任意步长的3幅以上干涉图像的采集,用迭代最小二乘法计算任意两幅干涉图间的相对移相量,然后将其闭环反馈至硬件相移系统,自动修正相移步长为给定量的特征相移值,从而完成干涉仪相移误差的自修正.构建了相移误差自校正系统,通过实际干涉测量验证了算法的正确性和相移误差自修正系统的可行性.结果表明,自适应修正后相移量相对误差＜5％,面形RMS测量重复性＜λ/1 000,实现了高精度、高效率的相移误差自适应修正.     

多模态动态原子力显微镜系统

动态原子力显微镜(atomic force microscope,AFM)是通过检测悬臂谐振状态的变化来对物体表面形貌进行测量的。通过对谐振状态的三种因素即振幅、相位、频率的检测,动态AFM可以分为三种工作模式,即振幅反馈、相位反馈与频率反馈模式,这三种反馈模式有着不同的扫描特点。基于硅悬臂具有高阶谐振的特性,动态原子力显微镜可以在悬臂工作于高阶谐振状态时对物体进行扫描。综合上述工作模式研制了一套多模态动态AFM,可以在三种反馈模式、不同阶谐振状态下对物体进行扫描测量。利用该系统在不同反馈模式、不同阶谐振状态下进行了扫描测试,结果显示,系统在各模式下具有亚纳米分辨力,其中在相位反馈模式,悬臂二阶谐振时可达到最优灵敏度与分辨力,分别为17.5V/μm和0.29nm,在最优灵敏度与分辨力状态下对光栅试样进行了三维扫描,得到光栅的三维形貌图。     

自混合干涉微位移传感器

有许多测量微位移的光干涉方法 ,然而难以实现结构紧凑、价格低的测量系统 ,因为这些传统干涉方法都需要许多光学元器件。提出用激光自混合干涉术测量微位移 ,分析和讨论了自混合干涉信号的产生和处理方法 ,用快速傅立叶变换(FFT)相位探测技术分析自混合干涉信号 ,可提高相位测量精度。提出的传感器可以用于亚微米级位移的测量和控制 ,并给出了 PZT位移的实验结果     

亚纳米精度长度溯源计量型动态模式原子力显微镜

通过与长度溯源三轴激光干涉仪测量系统结合,设计开发计量型动态模式原子力显微镜(AFM).此AFM系统中,三轴激光干涉仪系统用于实时测量AFM测头与试样的相对位移.激光干涉仪系统的x,y,z测量轴正交于AFM探针顶端附近的一点,基本可以避免系统的阿贝误差,使AFM具有极高的测量精度.除此之外,扫描过程中三轴激光干涉仪系统还用于工作台x,y方向位移的反馈控制,完全克服AFM中压电器件的缺陷对水平尺寸测量的影响.分析表明,在对纳米标准栅的平均栅距测量中,AFM系统达到亚纳米的测量精度.     

相位偏移干涉测量波面的一种新算法

本文分析了利用相位依稀干涉的相位计算方法对测量结果准确程度的影响,提出了一种利用相位偏移干涉原理测量波面的新算法（四幅改进算法）。考虑到移相误差是导致相位偏移干涉测量法产生误差的主要因素,本文着重讨论相位偏移干涉测量算法对移相误差的敏感程度。根据对实验测试机构所进行的测量与分析,以实际的数据为基础得出在相位人多干涉测量算法对移相误差的敏感程度,根据实验测试机构所进行的测量与分析,以实际的数据为基础得出在相位偏移干涉测量中新算法的优秀品质。该新算法对移相误差有良好的抑制作用,无论是理论分析速 是实际测量效果都很好。     

润滑油膜光干涉测量系统与技术研究进展

光干涉是润滑油膜厚度测量中最广泛采用的手段,干涉图像的光强与色度学信息反映出接触区内部油膜的厚度与形状。概述光干涉技术在油膜测量领域的发展历程,介绍比色法、光谱分析法、相对光强法等3种典型的光干涉油膜测量方法和新发展的双色光光强调制测量方案。阐述润滑油膜测量光干涉测量系统的理论建模方法和系统设计的关键,并展望光干涉油膜测量系统的发展方向,如开发专用的光干涉油膜测量仪器,实现多光源的同步测量等。     

Rotational positioning system adapted to atomic force microscope for measuring anisotropic surface properties

The diverse atomic configurations induce the anisotropic surface properties. For investigating anisotropic phenomena, we developed a rotational positioning system adapted to atomic force microscope (AFM). This rotational positioning system is applied to revolve the measured sample to defined angular direction, and it composed of an inertial rotational stepper and a visual angular measurement. The inertial rotational stepper with diameter 30 mm and height 7.6 mm can be easily attached to the AFM-system built in any general optical microscope. Based on a clearance less bearing and the inertial driving method, its bidirectional angular resolution reaches 0.005° per step. For realizing a close-loop controlled angular positioning function, the visual measurement method is utilized. Through the feedback control, the angular positioning error is less than 0.01°. For verifying the system performance, we used it to investigate the anisotropic surface properties of graphite. Through a modified cantilever tip, the atomic-scale stick-slip, and the anisotropic friction phenomena can be distinctly detected.     

Improving tapping mode atomic force microscopy with piezoelectric cantilevers

This article summarizes improvements to the speed, simplicity and versatility of tapping mode atomic force microscopy (AFM). Improvements are enabled by a piezoelectric microcantilever with a sharp silicon tip and a thin, low-stress zinc oxide (ZnO) film to both actuate and sense deflection. First, we demonstrate self-sensing tapping mode without laser detection. Similar previous work has been limited by unoptimized probe tips, cantilever thicknesses, and stress in the piezoelectric films. Tests indicate self-sensing amplitude resolution is as good or better than optical detection, with double the sensitivity, using the same type of cantilever. Second, we demonstrate self-oscillating tapping mode AFM. The cantilever's integrated piezoelectric film serves as the frequency-determining component of an oscillator circuit. The circuit oscillates the cantilever near its resonant frequency by applying positive feedback to the film. We present images and force-distance curves using both self-sensing and self-oscillating techniques. Finally, high-speed tapping mode imaging in liquid, where electric components of the cantilever require insulation, is demonstrated. Three cantilever coating schemes are tested. The insulated microactuator is used to simultaneously vibrate and actuate the cantilever over topographical features. Preliminary images in water and saline are presented, including one taken at 75.5 μm/s—a threefold improvement in bandwidth versus conventional piezotube actuators.     

A compact CCD‐monitored atomic force microscope with optical vision and improved performances

A novel CCD‐monitored atomic force microscope (AFM) with optical vision and improved performances has been developed. Compact optical paths are specifically devised for both tip‐sample microscopic monitoring and cantilever's deflection detecting with minimized volume and optimal light‐amplifying ratio. The ingeniously designed AFM probe with such optical paths enables quick and safe tip‐sample approaching, convenient and effective tip‐sample positioning, and high quality image scanning. An image stitching method is also developed to build a wider‐range AFM image under monitoring. Experiments show that this AFM system can offer real‐time optical vision for tip‐sample monitoring with wide visual field and/or high lateral optical resolution by simply switching the objective; meanwhile, it has the elegant performances of nanometer resolution, high stability, and high scan speed. Furthermore, it is capable of conducting wider‐range image measurement while keeping nanometer resolution. Microsc. Res. Tech. 76:931–935, 2013. © 2013 Wiley Periodicals, Inc.     

Easy and direct method for calibrating atomic force microscopy lateral force measurements

We have designed and tested a new, inexpensive, easy-to-make and easy-to-use calibration standard for atomic force microscopy (AFM) lateral force measurements. This new standard simply consists of a small glass fiber of known dimensions and Young's modulus, which is fixed at one end to a substrate and which can be bent laterally with the AFM tip at the other end. This standard has equal or less error than the commonly used method of using beam mechanics to determine a cantilever's lateral force constant. It is transferable, thus providing a universal tool for comparing the calibrations of different instruments. It does not require knowledge of the cantilever dimensions and composition or its tip height. This standard also allows direct conversion of the photodiode signal to force and, thus, circumvents the requirement for a sensor response (sensitivity) measurement.     

Control of tip-to-sample distance in atomic force microscopy: a dual-actuator tip-motion control scheme

The control of tip-to-sample distance in atomic force microscopy (AFM) is achieved through controlling the vertical tip position of the AFM cantilever. In the vertical tip-position control, the required z motion is commanded by laser reading of the vertical tip position in real time and might contain high frequency components depending on the lateral scanning rate and topographical variations of the sample. This paper presents a dual-actuator tip-motion control scheme that enables the AFM tip to track abrupt topographical variations. In the dual-actuator scheme, an additional magnetic mode actuator is employed to achieve high bandwidth tip-motion control while the regular z scanner provides the necessary motion range. This added actuator serves to make the entire cantilever bandwidth available for tip positioning, and thus controls the tip-to-sample distance. A fast programmable electronics board was employed to realize the proposed dual-actuator control scheme, in which model cancellation algorithms were implemented to enlarge the bandwidth of the magnetic actuation and to compensate the lightly damped dynamics of the cantilever. Experiments were conducted to illustrate the capabilities of the proposed dual-actuator tip-motion control in terms of response speed and travel range. It was shown that while the bandwidth of the regular z scanner was merely a small fraction of the cantilever's bandwidth, the dual-actuator control scheme led to a tip-motion control system, the bandwidth of which was comparable to that of the cantilever, where the dynamics overdamped, and the motion range comparable to that of the z scanner.     

Influence of Poisson's ratio variation on lateral spring constant of atomic force microscopy cantilevers

Atomic force microscopy (AFM) can be used to measure the surface morphologies and the mechanical properties of nanostructures. The force acting on the AFM cantilever can be obtained by multiplying the spring constant of AFM cantilever and the corresponding deformation. To improve the accuracy of force experiments, the spring constant of AFM cantilever must be calibrated carefully. Many methods, such as theoretical equations, the finite element method, and the use of reference cantilever, were reported to obtain the spring constant of AFM cantilevers. For the cantilever made of single crystal, the Poisson's ratio varies with different cantilever-crystal angles. In this paper, the influences of Poisson's ratio variation on the lateral spring constant and axial spring constant of rectangular and V-shaped AFM cantilevers, with different tilt angles and normal forces, were investigated by the finite element analysis. When the cantilever's tilt angle is 20 degrees and the Poisson's ratio varies from 0.02 to 0.4, the finite element results show that the lateral spring constants decrease 11.75% for the rectangular cantilever with 1muN landing force and decrease 18.60% for the V-shaped cantilever with 50nN landing force, respectively. The influence of Poisson's ratio variation on axial spring constant is less than 3% for both rectangular and V-shaped cantilevers. As the tilt angle increases, the axial spring constants for rectangular and V-shaped cantilevers decrease substantially. The results obtained can be used to improve the accuracy of the lateral force measurement when using atomic force microscopy.     

Prototype cantilevers for quantitative lateral force microscopy

Prototype cantilevers are presented that enable quantitative surface force measurements using contact-mode atomic force microscopy (AFM). The "hammerhead" cantilevers facilitate precise optical lever system calibrations for cantilever flexure and torsion, enabling quantifiable adhesion measurements and friction measurements by lateral force microscopy (LFM). Critically, a single hammerhead cantilever of known flexural stiffness and probe length dimension can be used to perform both a system calibration as well as surface force measurements in situ, which greatly increases force measurement precision and accuracy. During LFM calibration mode, a hammerhead cantilever allows an optical lever "torque sensitivity" to be generated for the quantification of LFM friction forces. Precise calibrations were performed on two different AFM instruments, in which torque sensitivity values were specified with sub-percent relative uncertainty. To examine the potential for accurate lateral force measurements using the prototype cantilevers, finite element analysis predicted measurement errors of a few percent or less, which could be reduced via refinement of calibration methodology or cantilever design. The cantilevers are compatible with commercial AFM instrumentation and can be used for other AFM techniques such as contact imaging and dynamic mode measurements.     

A New AFM Nanotribology Method Using a T-Shape Cantilever with an Off-Axis Tip for Friction Coefficient Measurement with Minimized Abbé Error

A new AFM (atomic force microscopy) nanotribology method using a T-shape cantilever with an off-axis tip (Nat Nanotechnol 2:507–514, 2007) has been developed for measuring friction coefficient at nanometer scale. In this method, signals due to both bending and twisting of the T-shape AFM cantilever are detected simultaneously. For a T-shape AFM cantilever, the bending is caused by the normal load and the twisting is caused by both the normal and the lateral loads. The twisting generated by the normal load is calibrated in advance. Consequently, the twisting only due to the lateral load can be decoupled from the total lateral voltage signal. And the friction coefficient can be finally determined based on a conversion relationship between the normal and lateral voltage signals of the AFM photodetector. A practical procedure for minimizing Abbé error in friction coefficient measurement has also been introduced. The proposed new method is simple and accurate, and requires the least operation for friction coefficient measurement at nanometer scale.     

Anti-drift and auto-alignment mechanism for an astigmatic atomic force microscope system based on a digital versatile disk optical head

In this work, an anti-drift and auto-alignment mechanism is applied to an astigmatic detection system (ADS)-based atomic force microscope (AFM) for drift compensation and cantilever alignment. The optical path of the ADS adopts a commercial digital versatile disc (DVD) optical head using the astigmatic focus error signal. The ADS-based astigmatic AFM is lightweight, compact size, low priced, and easy to use. Furthermore, the optical head is capable of measuring sub-atomic displacements of high-frequency AFM probes with a sub-micron laser spot (~570 nm, FWHM) and a high-working bandwidth (80 MHz). Nevertheless, conventional DVD optical heads suffer from signal drift problems. In a previous setup, signal drifts of even thousands of nanometers had been measured. With the anti-drift and auto-alignment mechanism, the signal drift is compensated by actuating a voice coil motor of the DVD optical head. A nearly zero signal drift was achieved. Additional benefits of this mechanism are automatic cantilever alignment and simplified design.     

Non-optical tip–sample distance control method for scanning near-field optical microscopy using a piezoresistive micro cantilever

A piezoresistive micro cantilever is applied to monitor the displacement of an optical fibre probe and to control tip–sample distance. The piezoresistive cantilever was originally made for a self-sensitive atomic force microscopy (AFM) probe and has dimensions of 400 µm length, 50 µm width and 5 µm thickness with a resistive strain sensor at the bottom of the cantilever. We attach the piezoresistive cantilever tip to the upper side of a vibrating bent optical fibre probe and monitor the resistance change amplitude of the strain sensor caused by the optical fibre displacement. By using this resistance change to control the tip–sample distance, the two-cantilever system successfully provides topographic and near-field optical images of standard samples in a scanning near-field optical microscopy (SNOM)/AFM system. A resonant characteristic of the two-cantilever system is also simulated using a mechanical model, and the results of simulation correspond to the experimental results of resonance characteristics.