MEMS毫米波滤波器的设计与制作

开展了一种基于MEMS工艺的毫米波带通滤波器结构设计和工艺实现,该滤波器结构采用高阻硅作为衬底材料的薄膜支撑结构,选用平行耦合滤波器形式,使用HFSS分析软件对该结构进行了模拟仿真。设计了中心频率为35.0GHz、带内损耗为2.2dB、30dB抑制带宽为2.2GHz的MEMS毫米波滤波器。给出了一套能降低毫米波损耗的MEMS毫米波带通滤波器工艺流程方案,并针对该工艺流程方案进行了关键参数的工艺误差仿真,实现了MEMS毫米波滤波器的工艺制作和测试。测试结果表明,获得的毫米波滤波器的测试结果与仿真结果比较接近。     

基于ACIS的MEMS工艺几何仿真的关键算法

针对微机械系统(MEMS)工艺几何仿真提出了一种算法,该算法通过设置实体模型上表面的实体和高度两个属性,解决了MEMS工艺几何仿真中产生的多个实体模型之间相对位置定义的问题。该算法在工艺几何仿真系统中的实现表明,使用此算法后,系统运行稳定可靠,仿真速度快。     

全屏蔽硅基腔体MEMS双工器

基于三维高精度微电子机械系统(MEMS)加工工艺,研究了一种全屏蔽硅基腔体MEMS双工器的设计及制备方案。简要分析了关于平行耦合线滤波器的相关设计原理,采用λ/4平行耦合线设计两通道滤波器,结合T型匹配网络实现双工器的设计。该双工器以双层高阻硅片作为衬底材料,采用MEMS工艺制备接地通孔,以提高双工器的隔离度及电磁兼容特性。设计的双工器发射通道工作频率为9～10 GHz,接收通道工作频率为11～12 GHz,最终制备出尺寸为7 mm×7 mm的双层硅基双工器,发射及接收通道的回波损耗≤-18 dB,两个通道之间的隔离度约为-30 dB。测试结果与仿真结果吻合较好,为硅基MEMS微系统的集成设计提供技术支撑。     

适于毫米波应用的新型MEMS实时延时线(英文)

介绍了两种适于毫米波应用的RF MEMS实时延时线的设计。首先,在设计中采用了一种新颖的RF MEMS拓宽调节范围的变容器结构,得到了最大变容比为5.39的在片测试结果。其工艺设计基于表面微机械工艺,采用了由5个掩模版组成的工艺流程。然后,在RF MEMS变容器设计的基础上,完成了用于原理论证的Ka波段RF MEMS实时延时线的仿真设计、工艺流片和在片测试。Ka波段RF MEMS实时延时线的在片测试结果显示,在28GHz时处于下降状态的插入损耗为-2.36dB;两端口在28GHz时的回波损耗都小于-15dB,而在5～40GHz的整个测试频率范围内的回波损耗都小于-10dB。在Ka波段RF MEMS实时延时线设计基础上,60GHz RF MEMS实时延时线的仿真设计已经完成并准备投片。     

交指型MEMS滤波器的优化设计

交指型微机电系统(MEMS)滤波器是采用MEMS工艺制备出的交指型结构滤波器,针对交指型MEMS滤波器电磁优化算法中存在速度慢,占用计算资源大等问题,对交指型MEMS滤波器优化设计方法进行了研究。采用主动空间映射算法,在ADS和HFSS软件中建立滤波器电路结构模型和三维结构电磁模型,并分别将它们用于主动空间映射算法所需的粗糙仿真和精确仿真,仅进行了5次精确仿真就完成了一款Ku波段滤波器的优化设计。结果表明,设计的滤波器中心频率为14 GHz,顶部损耗为1.6 dB,-1 dB带宽为2.2 GHz,满足设计指标要求,同时验证了优化设计方法的可行性。     

基于谐振原理的RF MEMS滤波器的研制

采用与IC工艺兼容的硅表面MEMS加工技术,以碳化硅材料作为结构材料,研制出一种新型的基于谐振原理工作的RF MEMS滤波器。详细介绍了器件的工作原理、制备方法、测试技术和结果,并对测试结果做出分析。该RF MEMS滤波器由弹性耦合梁连接两个结构尺寸和谐振频率完全相同的MEMS双端固支梁谐振器构成,MEMS谐振器的结构决定了滤波器的中心频率,弹性耦合梁的刚度决定了滤波器的带宽。在大气环境下测试器件的频响特性,得到中心工作频率为41.5MHz,带宽为3.5MHz,品质因数Q为11.8。     

一种基于间接标靶法的微小推力测量技术

提出了一种基于间接标靶法的微小推力的测量方法。对测量原理进行了分析。利用该测量方法对一系列利用微机械技术 (MEMS)制作的微喷管的性能进行了测量。给出了在不同燃烧室压强和喉部尺寸时 ,微喷管推力的测量结果 ,并与数值研究结果进行了比较     

多晶硅衬底上的RF MEMS开关

在微机械开关与硅IC工艺设计和兼容方面进行了改进,获得了一种可与IC工艺兼容的RF MEMS微机械开关.采用介质隔离工艺技术把这种RF MEMS微机械开关制作在绝缘的多晶硅衬底上,实现了与IC工艺兼容;采用在金属膜桥的端点附近刻蚀一些孔的优化方法,降低了RF MEMS微机械开关的下拉电压.用TE2819电容测试设备测试开关的电容,测得开关的开态电容、关态电容和致动电压分别为0.32pF、6pF和25V.用HP8753C网络分析仪对RF MEMS微机械开关进行了RF特性测试,得出RF MEMS微机械开关在频率1.5GHz下关态的隔离度为35dB,开态的插入损耗为2dB,用示波器测得该开关的开关速度为3μs.     

一种基于间接标靶法的微小推力测量技术

提出了一种基于间接标靶法的微小推力的测量方法.对测量原理进行了分析.利用该测量方法对一系列利用微机械技术(MEMS)制作的微喷管的性能进行了测量.给出了在不同燃烧室压强和喉部尺寸时,微喷管推力的测量结果,并与数值研究结果进行了比较.     

低电压驱动的MEMS F-P可调光学滤波器研究

基于微机电系统（MEMS）技术,研制了一种新颖的光学腔与静电驱动器分离的Fabry-Pérot（F-P）可调谐滤波器。从光学设计、MEMS结构设计、制造工艺与器件测试等开展了F-P可调谐滤波器的研究,成功制备了工作在以1550 nm波长为中心、调谐范围为40 nm和驱动电压低于30 V的MEMS F-P可调滤波器。测试...     

InP基微机械可调滤波器结构特性分析

介绍了一种由静电驱动的InP基微机械可调滤波器,通过模拟此结构中DBR的反射谱和法布里-珀罗(F-P)腔的透射谱分析了其滤波性能.用有限元方法分析了几种典型微机械结构的调制特性和顶镜的动态响应特性.比较了不同结构镜面的平整度行为.为InP基微机械F-P腔的设计优化提供了有效参数依据.     

Application of Adaptive Divided Difference Filter on GPS/IMU Integrated Navigation System

The efficient and accurate approximate nonlinear filters have been widely used in the estimation of states and parameters of dynamical systems. In this paper, an adaptive divided difference filter is designed for precise estimation of states and parameters of micromechanical gyro navigation system. Based on the investigation of nonlinear divided difference filter the adaptive divided difference filter(ADDF) was designed, which takes account of the incorrect time-varying noise statistics of dynamical systems...     

微电子机械系统技术及其应用

微电子机械系统技术的特点是可使制品微型化、集成化并以硅作为加工材料。该技术可分为体微机械加工、表面微机械加工、金属微机械加工和复合微机械加工四类。所采用的基础技术主要有:腐蚀技术、硅键合技术、多层无应力薄膜沉积技术、牺牲层技术、LIGA技术以及以上技术的复合,该项技术应用广泛。本文重点介绍在微传感器、微电机、机械滤波器和谐振滤波器等方面的应用,并探讨了发展方向。     

InAlGaAs bulk micromachined tunable Fabry–Pérot filter for dense WDM systems

In this work we report on micromechanically tunable Fabry–Pérot filter concepts for wavelength division multiplexing (WDM) systems. The optical resonator is designed for a cavity length around 30 μm in order to increase the filter selectivity while relaxing the demands on the required mirror reflectance. The introduction of micromechanical actuators, utilizing electrothermal and electrostatic principles, allows wavelength tuning of the filter over a range of more than 40 nm in the 1.55 μm wavelength regime. The movable Bragg mirror, designed as suspended membrane and fabricated with an InP bulk-micromachining technology, consists of a molecular beam epitaxy-grown InAlGaAs quarter-wavelength multilayer stack. The influence of micromechanical actuation and the effect of intrinsic mechanical stress on the mirror deformation has been investigated systematically to optimize the optical filter performance. Filter losses induced by the light absorption within the epitaxial Bragg mirror have been minimized using a highly doped InGaAs/InAlAs composition. Furthermore, low-loss Fabry–Pérot filters have been fabricated using InAlGaAs/InAlAs Bragg mirrors. The measured full-width at half-maximum (FWHM) is 0.24 nm and a filter insertion loss of 2.8 dB has been observed. The FWHM is kept below 0.35 nm over an entire tuning range of 40 nm for an actuation power of 1.3 mW. The bulk-micromachining technology presented here is open for the future development of WDM components, e.g. tunable receivers or laser diodes.     

Silicon modulator based on mechanically-active anti-reflectionlayer with 1 mbit/sec capability for fiber-in-the-loop applications

We present a micromechanical modulator for fiber-in-the-loop applications with projected optical bandwidths from 1.3 to 1.55 μm and data rates of several Mbits/sec. The device behaves as a damped oscillator. We have made a device with a ringing frequency of 1.1 MHz and a damping time constant of 1 μs. We indicate that with an appropriate linear filter the device could operate digitally with data rates of 1 Mbit/sec     

Simulation and fabrication of HF microelectromechanical bandpass filter

A high-frequency (HF) micromechanical bandpass filter fabricated using the commercial 0.35 μm complementary metal oxide semiconductor (CMOS) process and the post-process has been investigated in this study. The area of the filter is about 150×200 μm². The filter is composed of two resonators, which are joined by a coupling beam. Each resonator contains a membrane, four supported beams and two fixed electrodes, and the membrane is supported by four supported beams. The filter requires a post-process to etch the sacrificial layer, and to release the suspended structures. The post-process needs only one wet etching to etch silicon dioxide layer. The filter contains a sensing part and a driving part. When applying a driving voltage to the driving part, the sensing part generates a change in capacitance. The capacitance variation of the sensing part is converted into the output voltage by a sensing circuitry. Experiments show that the filter has a center frequency of about 39.6 MHz and a bandwidth of 330 kHz.     

微机械惯性仪表的原理结构与制造技术

介绍了微机械惯性仪表（包括微机械陀螺仪、微机械加速度计及微惯性测量组合）在世界各国的进展，阐述了它们所采用的结构方案、电路原理以及制造工艺，比较了各种主要制造技术的优缺点，提出了在我国开展这一领域研究有实用前途的技术途径     

Design of Spring Coupling for High-$Q$ High-Frequency MEMS Filters for Wireless Applications

A second-order microelectromechanical systems (MEMS) filter with high selectivity and sharp rolloff is required in wireless transceivers used in dense wireless sensor networks (WSNs). These sensors are expected to replace existing wired sensors used in industrial-plant management and environmental monitoring. These filters, together with MEMS-based oscillators and mixers, are expected to replace off-chip components and enable the development of a single-chip transceiver. Such a transceiver will leverage the integrated MEMS components' characteristics to operate at lower power and, hence, longer battery life, making autonomous WSNs more feasible in a wider range of applications. As a result, this paper presents the design and optimization of the coupling beam of wineglass-mode micromechanical disk filters using simulated annealing. The filter under consideration consists of two identical wineglass-mode disk resonators, mechanically coupled by a flexural-mode beam. The coupled two-resonator system exhibits two mechanical-resonance modes with closely spaced frequencies that define the filter passband. A constraint is added on the beam length to eliminate the effect of the coupling-beam mass on the filter's resonant frequency. A new process flow is proposed to realize self-aligned overhanging coupling beams designed in this paper.     

High-Q HF microelectromechanical filters

IC-compatible microelectromechanical intermediate frequency filters using integrated resonators with Q's in the thousands to achieve filter Q's in the hundreds have been demonstrated using a polysilicon surface micromachining technology. These filters are composed of two clamped-clamped beam micromechanical resonators coupled by a soft flexural-mode mechanical spring. The center frequency of a given filter is determined by the resonance frequency of the constituent resonators, while the bandwidth is determined by the coupling spring dimensions and its location between the resonators. Quarter-wavelength coupling is required on this microscale to alleviate mass loading effects caused by similar resonator and coupler dimensions. Despite constraints arising from quarter-wavelength design, a range of percent bandwidths is still attainable by taking advantage of low-velocity spring attachment locations. A complete design procedure is presented in which electromechanical analogies are used to model the mechanical device via equivalent electrical circuits. Filter center frequencies around 8 MHz with Q's from 40 to 450 (i.e., percent bandwidths from 0.23 to 2.5%), associated insertion losses less than 2 dB, and spurious-free dynamic ranges around 78 dB are demonstrated using low-velocity designs with input and output termination resistances of the order of 12 kΩ     

填充料对EMC材料微观热机械应力的影响

本文建立了EMC的微观机械模型，对粒子和树脂基之间的热机械应力进行了深入的分析。对粒子与树脂的热机械应力分布做了模拟，并考虑了粒子浓度和热载荷加载速度对热机械应力的影响。用这种微观机械模型的方法可以详细的描述EMC在承受热载荷时内部单元体的热机械应力的分布和变化情况。