共查询到19条相似文献,搜索用时 765 毫秒
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为实现激光棒透射波前的测量,改善一般泰曼型或斐索型干涉仪测量小口径激光棒透射波前时的边缘衍射效应,研究了一种变倾角移相马赫-曾德尔干涉仪。通过调整移相反射镜的倾斜姿态,改变入射到马赫-曾德尔干涉光路的光束倾角,参考光束与测试光束的光程差随之变化,从而在相干光之间引入相移,实现了相移干涉测量。利用该干涉仪测量一根口径为Ф6 mm、长度为60 mm激光棒(Nd:YAG)的透射波前,测量结果的峰谷值(PV)为0.391λ,均方根值(RMS)为0.056λ;使用ZYGO激光干涉仪测量同一根激光棒,其透射波前的峰谷值(PV)为0.370λ,均方根值(RMS)为0.064λ。对比结果表明该干涉仪能实现光学元件透射波前的高精度检测,测试结果的一致性验证了该方案的可行性。该变倾角移相方法具有较高的移相精度和较大的移相范围,且该变倾角干涉系统中光束仅一次透过待测激光棒,可有效抑制多光束干涉现象,改善小口径激光棒的边缘衍射效应。 相似文献
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介绍了两种平衡式干涉仪的光学系统设计方法,分别给出了用于单端测量和双端测量的具体设计方案.由于采用的平衡式光学系统中测量光束和参考光束具有近似相等的光程长度和相似的路径,其光程差仅由被测件的长度或被测表面与测量参考镜之间的距离而引起,因此干涉仪具有很高的稳定性.用双端测量双光程平衡式干涉仪对准零长度试样进行测量,在185 h测量中所得数据的标准偏差为2.1 nm. 相似文献
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为了消除悬臂梁移动时产生的阿贝偏角误差,设计了一种可同时测量角度与位移的精密测量系统.首先,在激光干涉原理的基础上,通过改变光路将角度转换为可以反映干涉系统中光程差变化的位移量.其次,采用压电陶瓷(PZT)驱动柔性铰链机构,产生运动的干涉条纹.最后,采用四细分条纹计数辨向方法,进行运动干涉条纹的接收与处理实验,结果表明:在条纹宽度处于合适值时,系统满足了对阿贝偏角精密测量的要求. 相似文献
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为了有效开展长距离光电测距类仪器的室内检定工作,在50m高精度导轨上利用1组平面反射镜进行光路折叠,搭建了100m室内基线场。对基线系统的测量误差进行了分析,考虑各项误差的调整精度,将误差分析结果应用到实际光路调整过程中,分析得到对基线长度影响更显著的误差量,并对其进行了控制和调整,提高测量光路的平行性调整精度,最后选择双频激光干涉仪作为长度基准开展验证实验。实验结果表明:通过光路折叠方法可以实现2倍光程倍增,基线系统的精度较高,可进行连续测量,有效地解决了室内基线建立过程中所存在的检测效率低、可重复性差等技术问题。 相似文献
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激光偏振干涉光路的非线性分析计算 总被引:6,自引:0,他引:6
偏振干涉光路两臂光程差的变化和合成干涉信号的相位变化,理论上具有线性关系,可以对引起光程差的任何微小量进行测量。实际上光路光学元件性能及调整并不理想,形成了二者的非线性关系。本文分析计算了各光学元件形成的非线性及这些元件综合形成的非线性,给出了适用于各种情况下的计算公式,并提出了光路的调整方法。 相似文献
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提出了一种基于Fabry-Perot板干涉的角位移测量新方法。此方法采用函数近似,只需将初始入射角确定在40°到50°之间,即可由角位移与干涉信号条纹数变化间的函数关系,高精度测量角位移。解决了采用F-P板干涉法测量角位移需精确确定入射光初始角的问题。使用计算机处理采集的干涉信号,对干涉条纹进行细分,实现干涉信号相位测量的高分辨力。理论模拟和实验结果得出本方法可以实现精度为10-5rad数量级的角位移测量。该方法的测量装置采用带尾纤的半导体激光作为光源,由自聚焦透镜准直,出射光束直径为0.5mm,使探测头为小光斑。该装置结构简单,能实现小型化。 相似文献
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激光干涉仪具有测量分辨力高、测量结果可溯源等优点,在纳米测量中的应用日益广泛。介绍纳米测量机和低膨胀材料线膨胀系数测量装置中应用的迈克尔逊型激光干涉仪以及在高准确度位移测量装置中应用的法布里-珀罗型激光干涉仪,并结合这些实例对激光干涉仪光学系统设计、测量环境控制、迈克尔逊干涉仪非线性误差补偿以及法布里-珀罗干涉仪量程扩展等方面的关键问题进行分析和总结。所述原则和方法对实现纳米级测量准确度具有重要意义,可为高准确度激光干涉仪的研制及其在纳米测量中的更广泛应用提供技术参考。 相似文献
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Modified white-light Mach-Zehnder interferometer for direct group-delay measurements 总被引:3,自引:0,他引:3
A modified white-light Mach-Zehnder interferometer based on a single beam splitter is described for direct group-delay measurements. The arms of the interferometer are folded in such a manner that a single beam splitter can be used to split the incoming beam and combine the outgoing beams. This method offers a twofold advantage: The measuring range of the interferometer is twice as large as that of the Michelson interferometer, and the systematic error that is associated with the beam splitter is minimized because of the configuration. We report the results of measurements on various optical components performed in the 555-630-nm spectral region and propose a scheme for the processing of the experimental data. We present a comparison of the data analyzed by the proposed processing scheme along with the theoretical calculations. 相似文献
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介绍容错设计思想在由多路激光干涉仪构成的柔性坐标测量系统中的应用。由于采用了硬件冗余、软件冗余等技术,不但使该测量系统具有自我标定的能力,而且可恢复因测量过程中“丢光”现象而造成的干涉仪丢失的测量数据。并用三路单轴跟踪系统实现了二维坐标测量。 相似文献
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The concept of adaptivity in television holography is discussed, and various realizations of adaptivity are presented. In one possible variation, functions of the components of the optical arrangement may be changed to adapt them to measurement conditions. An additional peculiarity of the technique is that reference waves are produced by holographically reconstructed virtual images. A method, believed to be new, is introduced for synthesizing the phase front of the master object beam that is produced by a simple holographic optical element and is used as a smooth or a speckled reference beam in the electronic speckle-pattern interferometer. An adaptive interferometer is presented as a measuring device for various measuring tasks. Selected applications are shown, demonstrating different aspects of adaptivity. 相似文献
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A common-path interferometer (CPI) system was developed to measure the diffusivity of transparent liquid pairs by real-time visualization of the concentration gradient profile. The CPI is an optical technique that can be used to measure changes in the gradient of the refractive index of transparent materials. The CPI is a shearing interferometer that shares the same optical path from a laser light source to the final imaging plane. Molecular diffusivity of liquids can be determined by use of physical relations between changes in the optical path length and the liquid phase properties. The data obtained by this interferometer are compared with similar results from other techniques. This demonstrates that the instrument is reliable for measurement of the diffusivity of miscible liquids and allows the system to be compact and robust. It can also be useful for studies in interface dynamics as well as other applications in a low-gravity environment. 相似文献
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In this study, an interferometric method was proposed for the simultaneous measurement of phase retardation and fast-axis azimuth angle of a wave plate by using a Mach–Zehnder interferometer. The wave plate to be tested is placed in one of the light passages in the interferometer, and two analyzers with transmission axes at horizontal and vertical orientations are arranged at the two output regions. When a linearly polarized laser light beam is passed through the interferometer, two interference light beams are simultaneously generated. Through an analysis of the intensities of the two light beams, the phase retardation and fast-axis azimuth angle of the tested wave plate can be simultaneously determined using specially derived equations. The feasibility of the proposed method was demonstrated using measurements of zero-order half-wave and zero-order quarter-wave plates. The proposed method is easy to operate, enables rapid measurement, and has high stability and accuracy. 相似文献