LaAlO3/BaTiO3超晶格薄膜的生长及结构分析

采用激光脉冲分子束外延技术,在(100)取向的SrTiO3 单晶基片上成功外延生长了LaAlO3/Ba TiO3 超晶格薄膜。在超晶格薄膜生长过程中,采用高能电子衍射技术(RHEED)对LaAlO3/BaTiO3 超晶格薄膜的生长过程以及平面晶格变化进行了分析。通过对超晶格薄膜中各层RHEED衍射条纹的分析计算发现超晶格薄膜存在一个临界厚度,其值约为 17nm,当超晶格薄膜的厚度小于该临界厚度时,晶格畸变在逐渐增加,当厚度超过该临界厚度时,晶格畸变因弛豫现象的产生而逐渐减小。超晶格薄膜中不同层的RHEED衍射条纹的差别说明了由于不同应力的作用使超晶格薄膜中LAO层和BTO层表面粗糙度不同。     

LaAlO3/BaTiO3超晶格薄膜界面结构分析

通过研究发现,利用激光分子束外延技术生长的LaAlO3/BaTiO3超晶格薄膜具有良好的电学性能,其剩余极化可达到25μc/cm2.性能决定于结构,因此本文分析研究了LaAlO3/BaTiO3超晶格薄膜的界面结构.首先通过高能电子衍射技术在薄膜生长过程中对各层的生长及界面状况进行观测,再通过小角X射线衍射曲线及其计算机拟合曲线进一步确定超晶格薄膜的界面及结构参数,如界面的粗糙度、单层厚度等.通过研究发现,由于晶格之间的差异,LaAlO3/BaTiO3超晶格薄膜中LaAlO3和BaTiO3层的生长过程及微结构存在着一定的差异.     

BaTiO3/CoFe2O4/BaTiO3复合磁电薄膜生长及应力研究

用激光分子束外延（LMBE）设备,在SrTiO3（001）基片上外延生长BaTiO3/CoFe2O4/BaTiO3多层复合磁电薄膜结构。通过反射式高能电子衍射（RHEED）对薄膜生长过程进行原位监测,结果显示,随着CoFe2O4厚度的增加薄膜内应力逐渐被释放,并且应力释放的过程导致了薄膜生长模式的变化。高分辨X射线衍射（XRD）发现,随着CoFe2O4厚度的增加,CoFe2O4对BaTiO3薄膜的张应力逐渐增大,BaTiO3晶胞的c轴晶格常数逐渐变小。理论计算给出了BaTiO3面外晶格常数c随CoFe2O4沉积时间的变化规律。原子力显微镜（AFM）对表面形貌进行表征,进一步证明了复合薄膜生长模式的变化。     

激光分子束外延BaTiO3/SrTiO3超晶格的晶格应变研究

采用脉冲激光分子束外延(PLMBE)方法,通过优化的工艺参数,在SrTiO3(100)单晶基片上外延结构为(8/8)的BaTiO3/SrTiO3超晶格薄膜.综合利用反射式高能电子衍射系统(RHEED)、高分辨率X射线衍射(HRXRD)以及高分辨率透射电镜选区电子衍射(SAED)技术,研究超晶格薄膜的晶格应变现象和规律.研究结果表明,在制备的BaTiO3/SrTiO3超晶格薄膜中,BaTiO3晶胞面外晶格增大,面内晶格减小;而SrTiO3晶胞面内及面外方向晶格都被拉伸,但面外晶格拉伸程度较大,SrTiO3晶胞产生了与BaTiO3晶胞方向一致的四方相转变.     

BaTiO3/SrTiO3超晶格的微结构研究

本实验研究利用激光分子束外延法（L－MBE）研究在SrTiO3(STO)(001)基片上生长的BaTiO3(BTO)/SrTiO3(STO)超晶格的微结构,利用小角X射线衍射光谱（SAXRD）的计算机模拟来获得BaTiO3/Sr-TiO3超晶格的微结构参数,如：总的膜厚度,超晶格周期,表面和界面的均方根粗糙度等。实验结果表明超晶格的表面和界面非常平整,均方根粗糙度大约为0.2nm,原子力显微镜（AFM）的实验研究已经证明了超晶格结构的平滑程度,超晶格的＜001＞方向存在着微弱的关联现象。     

外延薄膜生长的实时监测分析研究

利用反射式高能电子衍射(RHEED)在超高真空中对SrTiO3(100)、LaAlO3(100)、Si(100)单晶基片进行分析,讨论了衍射花样与晶体表面结构的对应关系,计算出表面的晶体学参数,同时采用激光分子束外延技术同质外延生长SrTiO3薄膜，根据RHEED衍射图样及强度振荡曲线实时监控薄膜的生长。     

钙钛矿型氧化物SrTiO3/BaTiO3多层膜的激光分子束外延生长研究

用激光分子束外延技术在SrTiO3(001)衬底上外延生长SrTiO3/BaTiO3多层膜,通过反射式高能电子衍射(RHEED)原位实时监测并结合原子力显微镜(AFM),研究了不同基片温度下所生长薄膜的表面平整度,利用X射线衍射(XRD)对外延薄膜进行了结构分析,结果表明薄膜具有二维生长模式,在基片温度为380～470℃之间生长的薄膜具有原子级光滑,并且具有完全C轴取向.同时运用X射线光电子能谱(XPS)研究了薄膜界面的互扩散,结果表明降低制备薄膜时的基片温度有利于减少互扩散.     

InAs/GaInSb应变层超晶格材料的界面结构

介绍了InAs／GaInSb应变层超晶格材料的界面结合类型及其对材料界面结构和光电性能的影响,分析了在超晶格界面处的原子置换和扩散现象。同时,总结了分子束外延生长过程中控制InAs／GaInSb超晶格界面结构的生长工艺,指出采用原子迁移增强（MEE）外延生长技术,可以有效地抑制界面处原子的置换和扩散现象。     

纳米晶粒受控生长抑制PZNT铁电薄膜中异相形成

在LaAlO3（001）、MgO（001）、SrTiO3（001）衬底以及SrTiO3（001）／PZT（001）种膜上用液相外延方法生长了PZNT薄膜。生长结果表明：在LaAlO3（001）基片PZNT晶粒以三维岛状自发生长。薄膜中有大量的焦绿石异相；在MgO（001）和SrlriO3（001）衬底上，为三维岛状异质外延生长。薄膜中焦绿石异相几乎消失；引入[001]取向的PZT种膜后，岛状三维生长变为二维生长，显著改善了外延膜的质量，获得了完整的PZNT膜。分析了衬底取向对紧邻层纳米尺寸范围的晶粒形成、薄膜晶粒的发育、克服薄膜中异相形成等的影响，总结了获得完整PZNT薄膜的生长条件。     

LaAlO3顶层结构对LaAlO3-BaTiO3铁电超晶格薄膜性能的影响

X射线衍射技术分析发现,通过生长一层较厚的LaAlO3顶层结构,可以把LaAlO3-BaTiO3超晶格中界面处的应变有效地控制在薄膜中,从而增加超晶格薄膜的平均面外晶格常数c.电学性能测试证明LaAlO3顶层结构的存在极大地改善了超晶格薄膜的电学性能,使其剩余极化强度增加了40多倍.     

STO/YBCO薄膜的制备及介电性能研究

采用脉冲激光沉积技术,在(100)LaAlO3单晶基片上生长SrTiO3/Y1Ba2Cu3O7-x(STO/YBCO)多层薄膜。XRD分析表明:YBCO薄膜和STO薄膜均为C轴取向,STO(002)/YBCO(006)衍射峰摇摆曲线半高宽为0.73°。AFM分析表明,STO/YBCO多层薄膜表面平整、均匀,在77K,100kHz的测试条件下,STO薄膜介电损耗tgδ<10-2,在53.6kV/cm电场作用下,介电常数的相对变化为38%。     

生长温度对PLD原位生长SrTiO3薄膜结构与非线性介电性能的影响

采用脉冲激光沉积法 ( PLD ) 制备的Y1B2Cu3O7-x薄膜作为叉指底电极,然后生长 SrTiO3介质薄膜,形成叉指型压控电容结构。通过对 SrTiO3薄膜的原位生长温度与薄膜微观结构及非线性介电性能之间的关系研究,发现随生长温度的升高薄膜晶粒逐步增大然后变小,薄膜的介电常数可调率和本征介电损耗随晶粒大小的增大而增加,而非本征损耗则随晶粒取向的增加而减小。     

低维材料的研究

主要论述了低维材料的制造方法、特异性能及在光电子和微电子器件领域的应用,包括介质超晶格、金属超晶格和一维量子线;介绍了我们分别采用激光分子束外延制备的BaTiO3/SrTiO3介质超晶格及其介电性能、直流磁控溅射法制备的强紫外光反射的Cu/Ti超晶格和宽禁带的一维ZnO量子线;描述了低维材料的发展前景.     

MOCVD 生长及 TEM 表征 GaAs/Al_xGa_(1-x)As 量子异质结构材料

本文报道 MOCVD 生长 GaAs/Al_xGa_(1-x)As 量子异质结构材料(超晶格、量子阱及量子共振隧穿二极管),采用横断面透射显微术表征了样品的界面结构。实验表明:多量子阱与超晶格的周期性良好,层与层之间界面清晰,采用[100]带轴入射,观察到超晶格的 TEM 卫星衍射斑,测量到量子阱中电子的子能级跃迁吸收。研究了生长工艺和材料结构的关系,分析了影响 RT 器件的因素。     

Growth and characterization of Ba(Cd1/3Ta2/3)O3 thin films

We have synthesized stoichiometric Ba(Cd_1/3Ta_2/3)O₃ [BCT] (100) dielectric thin films on MgO (100) substrates using Pulsed Laser Deposition. Over 99% of the BCT film was found to be epitaxial [BCT (100) || MgO (100) and BCT (010) || MgO (010)] when grown with an elevated substrate temperature of 635 °C, an enhanced oxygen pressure of 53 Pa and a Cd-enriched BCT target with a 1 mol BCT: 1.5 mol CdO composition. A dielectric constant of 32 was inferred from low-frequency capacitance measurements of a planar interdigital metal pattern. Analysis of ultra violet optical absorption results indicates that BCT has a bandgap of 4.9 eV; while the interference pattern in the visible range is consistent with a refractive index of 2.1. Temperature-dependent electrical measurements indicate that the BCT films have a room temperature conductivity of 3 × 10^− 12 Ω^− 1 cm^− 1 with a thermal activation energy of 0.7 eV. A mean particle size of ~ 100 nm and a root mean square surface roughness of 5 to 6 nm were measured using Atomic Force Microscopy.     

Temperature dependence of dielectric permittivity of perovskite-type artificial superlattices

Perovskite-type BaTiO(3)/SrTiO(3) (BTO/STO) artificial superlattices were fabricated by the molecular beam epitaxy method. The X-Ray diffraction (XRD) profiles and reflection, high-energy, electron diffraction (RHEED) oscillations during the growth of superlattices indicated that crystalline orientation toward [001] direction and two-dimensional layer-by-layer growth were achieved. The capacitance, dielectric loss tangent, and complex admittance were measured up to 145 degrees C and up to the frequency of 100 MHz with the microplaner interdigital electrodes. Dielectric permittivity of superlattices was evaluated from the complex admittance with an electromagnetic field analysis as a function of temperature. The [BTO(10)/STO(10)](4) superlattice showed the enormous relative permittivity of 19,000 at room temperature and the dielectric relaxation was observed. The linear relations in the charge versus voltage curves were observed in these superlattices, and the shape of Q-V curves were not changed as a function of temperature. Temperature dependence of dielectric properties of the BTO/STO superlattices was evaluated. It was found that the BTO/STO superlattices did not show a peak in the dielectric permittivity versus temperature curve, which was different from the behavior of BTO-STO bulk ceramics and normal thin films. These results strongly supported that the high permittivity of the superlattices was caused by temperature-stable anisotropic strains induced in the superlattices.     

Effects of periodicity and oxygen partial pressure on the crystallinity and dielectric property of artificial SrTiO3/BaTiO3 superlattices integrated on Si substrates by pulsed laser deposition method

Epitaxial SrTiO₃(STO)/BaTiO₃(BTO) artificial superlattices have been grown on TiN buffered Si (001) substrates by pulsed laser deposition method and the effects of stacking periodicity and processing oxygen partial pressure on their crystallinity and dielectric properties were studied. The crystal orientation, epitaxy nature, and microstructure of STO/BTO superlattices were investigated using X-ray diffraction and transmission electron microscopy. The TiN buffer layer and superlattice thin films were grown with cube-on-cube epitaxial orientation relationship of [110](001)_films∣∣[110](001)_TiN∣∣[110](001)_Si. The c-axis lattice parameter of the STO/BTO superlattice decreased from 0.412 nm to 0.406 nm with increasing oxygen partial pressure and the dielectric constants, measured at the frequency of 100 kHz at room temperature, of the superlattices with 2 nm/2 nm periodicity increased from 312 at 1 × 10^− 5 Torr to 596 at 1 × 10^− 3 Torr. The dielectric constants of superlattices grown at oxygen partial pressure of 1 × 10^− 3 Torr increased from 264 to 678 with decreasing periodicity of the superlattices from 10 nm/10 nm to 1 nm/1 nm.     

三元正极材料LiNi1/3Co1/3Mn1/3O2的结构及第一性原理计算

以共沉淀法、喷雾干燥法制备了三元正极材料LiNi_(1/3)Co_(1/3)Mn_(1/3)O_2,应用基于密度泛函理论的第一性原理计算方法,与实验制备的LiNi_(1/3)Co_(1/3)Mn_(1/3)O_2进行对比,对3种不同的预想结构模型(堆叠结构、随机排列结构、超晶格结构)进行研究。实验结果表明,两种方法制备的三元材料都具有良好的层状结构,其中共沉淀法制备的层状结构更加明显,而喷雾干燥法制备的材料中过渡金属元素比更接近LiNi_(1/3)Co_(1/3)Mn_(1/3)O_2的化学计量比。计算结果表明,随机排列的结构模型能量最低、最稳定,与实验制备的三元正极材料结构最为相似。