A high performance one-dimensional homodyne encoder and the proof of principle of a novel two-dimensional homodyne encoder

Displacement laser interferometers and interferometric encoders currently are the dominating solutions to the displacement measurement applications which require measurement uncertainties in the order of a few nanometers over hundreds of millimeters of measurement range. But, in comparison with interferometric encoders, to achieve nanometer order or even lower measurement uncertainties, displacement laser interferometers require much stricter environmental control if not vacuum, which will increase their Total Cost of Ownership (TCO). Therefore interferometric encoders are getting more and more preferable. Furthermore, for some applications, the measurement of the out-of-plane displacement is required as well. Therefore, in this work, a one-dimensional interferometric encoder was built and investigated, a novel two-dimensional (one is in-plane, the other one is out-of-plane) interferometric encoder was devised and its principle was proven experimentally. For the one-dimensional encoder, a periodic nonlinearity of ±50 pm with HEIDENHAIN EIB 741 and a periodic nonlinearity of less than ±10 pm with a home built phase meter and off-line Heydemann correction were identified through a comparison measurement with a differential heterodyne interferometer. In addition, this one-dimensional encoder was identified to have a better measurement stability compared to the differential heterodyne interferometer.     

Application of the continuous wavelet transform in periodic error compensation

This paper introduces a new discrete time continuous wavelet transform (DTCWT)-based algorithm, which can be implemented in real time to quantify and compensate periodic error for constant and non-constant velocity motion in heterodyne displacement measuring interferometry. It identifies the periodic error by measuring the phase and amplitude information at different orders (the periodic error is modeled as a summation of pure sine signals), reconstructs the periodic error by combining the magnitudes for all orders, and compensates the periodic error by subtracting the reconstructed error from the displacement signal measured by the interferometer. The algorithm is validated by comparing the compensated results with a traditional frequency domain approach for constant velocity motion. The algorithm demonstrates successful reduction of the first order periodic error amplitude from 4 nm to 0.24 nm (a 94% decrease) and a reduction of the second order periodic error from 2.5 nm to 0.3 nm (an 88% decrease). The algorithm also reduces periodic errors for non-constant velocity motion overcoming limitations of existing methods.     

High-accuracy displacement metrology and control using a dual Fabry-Perot cavity with an optical frequency comb generator

A displacement metrology and control system using an optical frequency comb generator and a dual Fabry-Perot cavity is developed with sub-nm accuracy. The optical frequency comb generator has expanded the displacement measurement range and the dual cavity system has suppressed the environmental fluctuation. We evaluated the absolute uncertainty of the developed displacement measurement system to be approximately 190 pm for the displacement of 14 μm and the accurate displacement control using a phase-locked loop was demonstrated with a resolution of approximately 24 pm.     

Effect of silicon nitride coating thickness on fatigue of silicon microbeams

In this paper, two silicon nitride layers with thickness, 0.2 and 0.4 μm, are coated onto single crystal silicon (SCS) in order to achieve Si₃N₄/Si cantilever microbeams. The effect of LPCVD silicon nitride surface coatings on fatigue properties of SCS cantilever microbeams is investigated. Fatigue testing is conducted at both 40 Hz and 100 Hz. Typical S–N (strain amplitude–fatigue cycle) curves of the beams are achieved and correlated fatigue failure modes are investigated. It is found that thinner Si₃N₄ coating of 0.2 μm results in better fatigue lives of Si₃N₄/Si beams than thicker Si₃N₄ coating of 0.4 μm. Both thinner and thicker coated beams have major fatigue crack planes along {1 1 1} planes; however, thicker coated beams possess specific failure mode of delamination, which is not found in thinner coated beams. Delamination reduces the reinforcing effect of thicker Si₃N₄ coating and leads to its shorter fatigue life. For thicker coated beams, fatigue life at 100 Hz is longer than that at 40 Hz. The mechanism for delamination and the effect of cyclic frequency is investigated, and factors for better fatigue life are proposed.     

A motorized 5 m tape comparator for traceable measurements of tapes and rules

A motorized 5 m tape comparator was constructed in TUBITAK UME for calibration of tapes and rules up to 5 m length in one set-up and further lengths in multiple set-ups. The system is a practical development and provides a cost effective solution for calibration of tapes in which the highest grade’s accuracy requirement in OIML R35-1 e.g. is 600 μm for 5 m length and 1100 μm for 10 m length. It is mainly composed of 6 m rail system, mechanical parts, optical units and an integrated 6 m incremental linear encoder as a reference measurement axis for traceable measurements. The rails are kinematically located on a heavy marble construction and a motorized carriage, which employs a camera for probing of the scales on the tapes, is moved along the rails during the measurement. The image of the scale taken by the camera is viewed on the monitor screen together with the running software. The operator can perform the probing process by simply moving the carriage over the measured scales (tapes or rules) using a joystick. The carriage movement is measured by the incremental linear encoder previously calibrated by a laser interferometer and the software automatically takes the measurement results from the incremental linear encoder, applies correction values previously defined and determines the length of the tapes and rules as well as deviations from nominal lengths. The estimated expanded uncertainty of the steel tape measurement is U = 54 μm in one set-up (for 5 m length) and U = 77 μm in two set-ups (for 10 m length) at the confidence level of approximately 95%. Uncertainty budget for calibration of the device itself and for calibration of the test tapes are explained in detail. The results of extensive experimental work and analysis are provided by demonstrating application of science and technology of measurement and instrumentation. Investigations for long term stability of the system are given with the reported test results for the years of 2003-2011 and participated intercomparison results to validate the device scientifically are illustrated.     

Absolute angle measurement using a phase-encoded binary graduated disk

A new absolute angle measurement method using a phase-encoded binary graduated disk (PE-BGD) is presented. An absolute position binary code (APBC) is encoded by shifting the positions of binary patterns, and can be sub-divided by detecting their positions with sub-pixel resolution of a multi-element detector. Using an n-bit linear shift feedback register, we expressed a recursive APBC dividing the full circle by 2ⁿ − 1 angular positions. An experimental setup was constructed with a microscopic imaging system, a rotation stage having a precision angle encoder, and two kinds of PE-BGDs which employed 10-bit and 13-bit APBC. The resolution of the APBC, which equals to signal period of the PE-BGD, used in each disk is 0.352° and 0.044°, respectively. We evaluated its performance by comparing the readouts of the proposed system and the angle encoder, throughout the full circle range and for one signal period. In the full circle range, the differences between two measurement systems were less than 1/50 of the resolution of the APBC. We also proved that the absolute angle could be measured with small nonlinearity error, which was less than 1/600 of the signal period.     

Constant pressure primary flow standard for gas flows from 0.01 cm3/min to 100 cm3/min (0.007–74 μmol/s)

We describe a flow standard for gas flows in the range from 0.01 sccm to 100 sccm with a relative standard uncertainty (68% confidence) of 0.03% at 1 sccm (1 sccm≡1 cm³/min of an ideal gas at 101325 Pa and 0 °C ≈ 0.74358 μmol/s). The flow standard calibrates a secondary meter by withdrawing a piston from a cylinder held at constant pressure P while gas flows from the secondary meter into the cylinder. The flow standard can operate anywhere in the range 10 kPa<P<300 kPa, and it can act as a flow source as well as a flow receiver. The flow standard incorporated features that improved its convenience and lowered its cost without sacrificing accuracy, specifically (1) dry sliding seals made with commercially available, easily replaced, o-rings, (2) a compact design based on a commercially available, hollow piston, and (3) a linear encoder with a small Abbe error.     

Sensory platform architecture for IN SITU monitoring the thermal comfort in rural environments – The case study at Federal Rural University of Amazonian,Brazil

This research presents an IN SITU sensory platform developed through the integration of air temperature and relative humidity sensors on an ecosystem in order to obtain some thermal characteristic of the rural environments. This sensory platform contains an expert system to detect the behaviors of environmental variables that result in risk or without risk alert to the thermal comfort for human and animal health. For this, the expert system analyses the environmental thermal conditions of the UFRA University, through temperature and humidity index (THI). The THI values estimated (processed) from data of temperature and relative humidity during the year 2012. Four intervals of THI were used to classify human health performance (THI < 74: comfort, 74 ⩽ THI < 79: hot; 79 ⩽ THI ⩽ 84: too hot, and THI > 84: extremely hot), and two intervals to classify animal production (79 ⩽ THI ⩽ 84: dangerous and THI > 84: emergency). The Amazon is located in the equatorial region and has a warm and humid climate that the prevailing mode reveals an alternation of two seasons throughout the year, hot and humid summer and rainy winter. The results that the most critical period occurs between May and October, although it was observed in every day of every year, the THI values during the hottest hours of the day (15:00 pm) range between 75.9 and 86.3, where humans and animals can suffer some degree of thermal stress, affecting negatively both. Therefore, we consider this platform as a good solution for thermal monitoring, which is based on IN SITU measurement technologies for rural environments.     

Stable mounting of beamsplitters for an interferometer

The Basic Angle Monitoring (BAM) system for satellite GAIA (2012–2018) will measure variation on the angle between the lines-of-sight between two telescopes with 2.5 prad uncertainty. It is a laser-interferometer system consisting of two optical benches with a number of mirrors and beamsplitters. The optical components need to be stable with respect to each other within 0.17 pm in position and 60 nrad in angle during measurements over a period of 6 h with 0.1 mK thermal stability. This paper aims at finding the most suitable mounting plane of the fused silica beamsplitters mounted onto the silicon carbide optical bench in the BAM system. These beamsplitters must be clamped mechanically. Based on a force stability analysis, mounting in the plane of light is a more stable solution than mounting on the reflective surface. However, when making a conceptual design the difficulty is making a design which has sufficient alignment stability to survive launch vibrations and a cool-down trajectory is more difficult.     

Development and evaluation of a compact 6-axis force/moment sensor with a serial structure for the humanoid robot foot

In order to walk safely, forces and moments exerted on humanoid robot foot should be measured and used for controlling the robot. This paper describes the development and evaluation of a six-axis force/moment sensor used under humanoid robot foot. The developed sensor is capable of measuring 400 N horizontal force, 1000 N vertical force, 20 N·m moment about the horizontal axis and 10 N·m moment about the vertical axis using rectangular cross-sectional beams. The structure of the sensor is newly modeled, and the sensing elements are simulated by using finite element method (FEM). Then the sensor is fabricated by attaching strain gages onto the beams. Finally, a characteristic test of the developed sensor is carried out, and the output from FEM analysis agrees with those from the characteristic test.     

Development of a gas micro-flow transfer standard

LNE has ability to calibrate gas micro-flow rates using the dilution method for nitrogen flow rates in the range from 2 µg/s to 200 µg/s or helium ones in the range 0.75–30 µg/s. In addition, a primary constant pressure flowmeter for leak rate measurements from 0.05 µg/s to 35 µg/s is also available. This equipment will be used to validate the dilution method below 30 µg/s. In order to compare these reference facilities, LNE is developing a micro-flow transfer standard (µFTS) in collaboration with ATEQ France, a manufacturer of control equipment for leak testing. The flowmeter consists mainly of an array of three stainless steel capillaries designed to cover the ranges from 0.035 µg/s to 0.35 µg/s, 0.35 µg/s to 3.5 µg/s and 3.5 µg/s to 35 µg/s for nitrogen (0.1–100 ml/h). A dynamic model of the µFTS determines the mass flow rate from the input pressure, the differential pressure of the capillary, the gas temperature, viscosity and density and the length and radius of the capillary. A comparison of both reference methods is carried out with the µFTS from 0.35 µg/s to 35 µg/s.     

Measurement of CFRP elastic modulus based on FBG reflectance spectrum analysis

Based on fiber Bragg grating (FBG) reflectance spectrum analysis, one novel method to measure the elastic modulus of carbon fiber reinforced plastics (CFRP) is proposed. Basic theory of the novel method is that CFRP uniform cantilever beam produces linear gradient strain which leads to FBG reflectance spectrum broadening under external loadings. Calculation model of the basic theory is put forward and validated by finite element method (FEM) simulation. In order to obtain actual data about the relationship between elastic modulus and FBG reflectance spectrum, experiment of CFRP uniform cantilever beam under external loadings is implemented. The experiment spectrum corresponding to external weight 20 g is chosen as the specimen to explain data processing procedure by self-adaptive method. 3 dB bandwidth and center wavelength of FBG are selected as the reference indexes in the procedure. Elastic modulus of CFRP which is used in the experiment is extracted and its value is 6.617 GPa. To validate the correctness of the elastic modulus, contrastive analyses between transmission matrix theory calculation and experiment spectrums with external weights 5 g and 10 g are also carried out. Absolute errors of 3 dB bandwidth and center wavelength in the comparison are all less than 5 pm which prove the feasibility and correctness of this novel elastic modulus measurement method.     

A Pitot tube system for obtaining water velocity profiles with millimeter resolution in devices with limited optical access

An automated, miniature, S-type Pitot tube system was created to obtain fluid velocity profiles at low flows in equipment having limited optical access, which prevents the use of standard imaging techniques. Calibration of this non-standard Pitot tube at small differential pressures with a custom, low-pressure system is also described. Application of this system to a vertical, high-pressure, water tunnel facility (HWTF) is presented. The HWTF uses static flow conditioning elements to stabilize individual gaseous, liquid, or solid particles with water for optical viewing. Stabilization of these particles in the viewing section of the HWTF requires a specific flow field, created by a combination of a radially expanding test section and a special flow conditioner located upstream of the test section. Analysis of the conditioned flow field in the viewing section of the HWTF required measurements across its diameter at three locations at 1 mm spatial resolution. The custom S-type Pitot tube system resolved pressure differences of <100 Pa created by water flowing at 5–30 cm/s while providing a relatively low response time of ~300 s despite the small diameter (<1 mm) and long length (340 mm) of the Pitot tube needed to fit the HWTF geometry. Particle imaging velocimetry measurements in the central, viewable part of the HWTF confirmed the Pitot tube measurements in this region.     

Examining the trend in loss of flexural stiffness of simply supported RC beams with various crack severity using model updating

The flexural stiffness of simply supported cracked reinforced concrete beams was determined by model updating. The beams were 150 mm wide, 250 mm deep and 2200 mm long. Different FE models were created which include a datum and models with a single crack at three different locations along the length of the beam. The mode shape equation was obtained by using non-linear regression. The equation used in the regression was the generalized solution of transverse vibration of a prismatic beam. Local flexural stiffness, EI, at each coordinate point was derived by substituting the regressed data by using the centered-finite-divided-difference formula. Experimental modal analysis was performed on a control beam and beams with load-induced cracks at predetermined loading. Results from FE analyses showed the trend in the loss of stiffness was similar to the results obtained on the experimental beams. The more severe the damage, the higher the loss of stiffness and the loss patterns are similar for damage at different locations along the beam. The updating technique is able to indicate the trend in the loss of stiffness as a result of cracks of varying severity in the RC beams showing good agreement with experimental results.     

Measurement and statistical analysis toward reproducibility validation of AZ4562 cylindrical microlenses obtained by reflow

This paper presents the statistical analysis applied into the shape of microlenses (MLs) for validating the high-reproducibility feature of their fabrication process. The MLs were fabricated with the AZ4562 photoresist, using photolithography and thermal reflow processes. Two types of MLs arrays were produced for statistical analysis purposes: the first with a cross-sectional diameter of 24 μm and the second with a cross-sectional diameter of 30 μm, and both with 5 μm spacing between MLs. In the case of 24 μm diameter arrays, the measurements showed a mean difference in diameter of 2.78 μm with a standard deviation (SD) of 0.22 μm (e.g., 2.78 ± 0.22 μm of SD) before the reflow, and 2.34 ± 0.35 μm of SD after the reflow. For the same arrays, the mean difference in height obtained was, comparatively to the 5.06 μm expected, 0.76 ± 0.10 μm of SD before the reflow and 1.91 ± 0.15 μm of SD after the reflow, respectively. A mean difference in diameter of 2.64 ± 0.41 μm of SD before the reflow, and 1.87 ± 0.34 μm of SD after the reflow was obtained for 30 μm diameter MLs arrays. For these MLs, a mean difference in height of 0.71 ± 0.12 μm of SD before the reflow and 2.24 ± 0.24 μm of SD after the thermal reflow was obtained, in comparison to the 5.06 μm of height expected to obtain. These results validate the requirement for reproducibility and opens good perspectives for applying this fabrication process on high-volume production of MLs arrays.     

Optimisation of a nano-positioning stage for a Transverse Dynamic Force Microscope

This paper describes the optimisation of a nano-positioning stage for a Transverse Dynamic Force Microscope (TDFM). The nano-precision stage is required to move a specimen dish within a horizontal region of 1 μm × 1 μm and with a resolution of 0.3 nm. The design objective was to maximise positional accuracy during high speed actuation. This was achieved by minimising out-of-plane distortions and vibrations during actuation. Optimal performance was achieved through maximising out-of-plane stiffness through shape and material selection as well optimisation of the anchoring system. Several shape parameters were optimised including the shape of flexural beams and the shape of the dish holder. Physical prototype testing was an essential part of the design process to confirm the accuracy of modelling and also to reveal issues with manufacturing tolerances. An overall resonant frequency of 6 kHz was achieved allowing for a closed loop-control frequency of 1.73 kHz for precise horizontal motion control. This resonance represented a 12-fold increase from the original 500 Hz of a commercially available positioning stage. Experimental maximum out-of-plane distortions below the first resonance frequency were reduced from 0.3 μm for the first prototype to less than 0.05 μm for the final practical prototype.     

Design and experimental validation of an ultra-precision Abbe-compliant linear encoder-based position measurement system

The design and development of an Abbe-compliant linear encoder-based measurement system for position measurement with a targeted 20 nm uncertainty (k = 2) in machine tools and CMMs is presented. It consists of a linear scale and a capacitive sensor, mounted in line on an interface which is guided in the scale's measurement direction and driven by a linear motor based on the output signal of the capacitive sensor. The capacitive sensor measures the displacement of a target surface on the workpiece table. The functional point, which is the center of a tool or touch probe, is always aligned with the scale and capacitive sensor such that this configuration is compliant with the Abbe principle. Thermal stability is achieved by the application of a thermal center between the scale and capacitive sensor at the tip of the latter, which prevents both components to drift apart. Based on this concept, a prototype of a one-DOF measurement system was developed for a measurement range of 120 mm, together with an experimental setup aimed at verifying the reproducibility of the system for changing ambient conditions of ±0.5 °C and ±5%rh and the repeatability during tracking of a target surface over a short period of time. These experiments have shown that the measurement uncertainty of the one-DOF system is below 29 nm with a 95% confidence level.     

Design and application of fiber Bragg grating (FBG) geophone for higher sensitivity and wider frequency range

The fiber Bragg grating geophone sensor with higher sensitivity and wider frequency range was reported. The methods to increase the sensitivity of the FBG cantilever sensor were presented. The acceleration sensitivity of the optimized FBG geophone is 220 pm/g, and the resonant frequency can reach to 295 Hz. The experiments show that the FBG geophone system has the minimum detectable acceleration of 1 mm/s². Some factual application examples of using this fiber Bragg grating geophone monitoring system for micro seismic monitoring in coal mine were presented.     

Enhancing electrical conductivity and electrical thermal characteristics of a PEDOT:PSS thin layer by using solvent treatment and adding Ag nanoparticle solution

A method of enhancing the electrical conductivity of 3,4-ethylenedioxythiophene:poly styrene sulfonate (PEDOT:PSS) by combining solvent treatment (adding high polar solvent: 5 wt% ethylene glycol) and adding a small amount of silver (Ag) nanoparticles in a solution was investigated. The main purpose of this was to apply a PEDOT:PSS conductive layer to micro-thermal devices driven by electricity and, for this, to reduce the layer thickness (for low stiffness) while maintaining necessary high electrical conductivity. Layers with thicknesses of less than about 10 μm were examined for electrical conductivity and temperature when electricity was applied. The solvent treated PEDOT:PSS had suitable electrical resistance to generate appropriate temperature properties. The added Ag nanoparticles reduced the electrical resistance by 30–70% over the measured thickness range. The electric conductivity applied with this method was 200–260 Ω⁻¹ cm⁻¹ for thicknesses of 1–2 μm (conductive area: 12 mm × 10 mm) and the generated temperature increase was 20–50 °C at applied voltages of 3–5 V. These characteristics are considered to be suitable to use the conductive layer as a heating element. In addition, the method we used scarcely degraded the transparency of the layer. Measurements of the conductive area in a layer with conductive atomic force microscope (AFM) indicated that the added Ag nanoparticles contributed to increasing the conductive areas and distributing them more uniformly.     

Optical fiber distributed acoustic sensing based on the self-interference of Rayleigh backscattering

In order to detect the weak underwater acoustic signal, a Distributed Acoustic Sensing (DAS) scheme based on the self-interference of Rayleigh backscattering is presented. Rayleigh backscattered light which contains a phase change induced by acoustic signal along the sensing fiber which is a standard telecom single-mode fiber is split and fed into an imbalance Michelson interferometer. With the self-interference of two Rayleigh backscattered beams, the phase change is amplified theoretically compared with phase-sensitive OTDR. We designed an experiment to prove the scheme, and successfully restored the acoustic information, meanwhile, the DAS system has preliminary realized around the acoustic phase sensitivity of −151 dB (re rad/μPa) at 600 Hz, and the minimum detectable acoustic pressure of 6 Pa in the experiment.