An on-machine error calibration method for a laser micromachining tool

In this paper, an on-machine error calibration method, covering error modeling and measurement, is proposed to evaluate and compensate the errors caused by the mechanical and optical system equipped in the micromachining center using the femtosecond laser. Through preliminary tests by dicing silicon wafer, it has revealed that the squareness, laser beam misalign and focal position offset, are the main causes to result in the inaccuracy of micromachining. Consequently, an error modeling method is proposed to evaluate the error distribution in the workspace, and hereafter a comprehensive error vector of the laser beam, combining the squareness errors of Z-axis with the laser beam misalign, is generated by the variable substitution method. Subsequently, an increment error model in the instant local coordinates is established to satisfy the requirement of the programming method commonly used in the laser machine tools. Furthermore, a series of holes and grooves are machined on the femtosecond laser micromachining center to validate the proposed approach and model. The machining dimensions including diameters, distances and angles, are measured on-machine to identify the squareness errors, laser beam misalign and focal position offset according to the proposed error model. Finally, the experimental results show that, comparing to the uncompensated tests, the machining accuracy has been significantly improved with the proposed method.     

全站仪测量自行火炮身管指向的方法改进

在实现自行火炮身管指向测量的各类方法中,全站仪测量法综合性能表现良好。但传统全站仪测量身管指向方法存在缺乏北向基准、存在轴线模拟误差的问题,因此提出了一种基于旋转矩阵的全站仪测量自行火炮身管真实指向方法。然后,利用欧拉-罗德里格斯公式推导出标记点连线与真实轴线指向的偏差公式,进而得到了真实指向相对于各观测量的不确定度模型。随后,为了减小测量方法的误差,研究了全站仪最佳布站位置,并基于蒙特卡罗方法原理进行寻优解算。最后,进行了模拟身管实装实验,实验结果表明,最佳布站方式下的测量不确定度在0.1以内,验证了本方法的可行性和准确性,抑制了由于布站方式引起的测量误差。     

Note: Development of a high resolution six-degrees-of-freedom optical vibrometer for precision stage

A high resolution six degrees of freedom (6-DOF) optical vibrometer is proposed. 6-DOF vibrations can be simultaneously measured using the proposed optical vibrometer, which reduces measurement time and number. The performance of the proposed vibrometer is verified by experiments. The results show that the accuracy of the proposed optical vibrometer is ±30 nm∕200 nm and ±0.04 arcsec∕0.1 arcsec at 1000 Hz.     

电感电压部分补偿交流功率法测量磁心损耗研究

磁性元件作为功率变换器的重要组成部分,其磁心损耗的精确测量对磁性元件的优化具有重要意义。为了提高传统双绕组交流功率法测量高频激磁磁心损耗的测量精度,本文详细分析电感电压补偿交流功率法的测量原理及其误差来源,基于电感电压补偿交流功率法在非完全补偿的情况下测量高阻抗角磁性元件磁心损耗时误差仍很大的问题,本文提出了电感电压部分补偿交流功率法精确测量任意波形激励下的磁性元件磁心损耗。最后建立测量平台,在非完全补偿条件下,该方法测量50 kHz正弦波激磁的金属磁粉芯磁心损耗的最大相对误差为13.54%,50 kHz矩形波激磁的金属磁粉芯磁心损耗的最大相对误差为9.8%,实验验证该方法可精确测量正弦波激磁和方波激磁的高阻抗角金属磁粉芯的磁心损耗。     

The detection of rotary axis of NC machine tool based on multi-station and time-sharing measurement

At present, the detection of rotary axis is a difficult problem in the errors measurement of NC machine tool. In the paper, a method with laser tracker on the basis of multi-station and time-sharing measurement principle is proposed, and this method can rapidly and accurately detect the rotary axis. Taking the turntable measurement for example, the motion of turntable is measured by laser tracker at different base stations. The redundant equations can be established based on the large amount of measured data concerning the distance or distance variation between measuring point and base station. The coordinates of each measuring point during turntable rotation can be accurately determined by solving the equations with least square method. Then according to the error model of rotary axis, the motion error equations of each measuring point can be established, and each error of turntable can be identified. The algorithm of multi-station and time-sharing measurement is derived, and the error separation algorithm is also deduced and proved feasible by simulations. Results of experiment show that a laser tracker completes the accuracy detection of the turntable of gear grinding machine within 3 h, and each error of the turntable are identified. The simulations and experiments have verified the feasibility and accuracy of this method, and the method can satisfy the rapid and accurate detecting requirements for rotary axis of multi-axis NC machine tool.     

Influence of linear-axis error motions on simultaneous three-axis controlled motion accuracy defined in ISO 10791-6

Five-axis machine tools, which combine three linear axes and two rotary axes, are required for accuracy in machining complex shapes. In this paper, to clarify the influence of simultaneous three-axis control motion measurements as specified in ISO 10791-6, the measured results using a ball bar and R-test are compared. As the motion trajectories of the linear axes are not identical in both measurement devices, it is expected that the error motions of the linear axes cause different measurement results depending on the measurement devices. Thus, the squareness errors between the linear axes and the error motions of the linear axes are assumed as error factors that influence the measured results in this study. A mathematical model of a five-axis control machine tool that considers the error motions and squareness errors of the linear axis is constructed, and the influence of those error factors on motion accuracy is examined using an experiment and a simulation. As a result, the squareness errors and error motions of the linear axis are observed to greatly affect simultaneous three-axis controlled motion accuracy.     

正交调制降频相位式激光测距

为了提高激光测距的精度与稳定性,通过改良传统相位激光测距仪,设计了新型正交调制降频与最小二乘法解相位的相位式激光测距仪。使用反射镜实现内外测距光路,通过正交调制技术对发射激光进行幅度调制,接收模块接收到的回波信号经过混频器后再经过低通滤波器将回波信号降频,降低解相难度并提升解相精度。改用分时测量得到距离相位从而消除二次混频方法所产生的附加相移,分别对内外光路低频回波信号采样进行模数转换后使用最小二乘法求解相位。采用多频率调制测量兼顾激光测距范围与测量精度,最后通过超定方程解模糊算法求解多频测距的待测距离。在国家标准基线上进行样机测试,实验结果表明,在60m量程内正交调制激光测距仪的测量平均误差控制在1.5mm以内,测距量程内标准差保持在0.9mm以内。     

Verticality detection algorithm based on local image sharpness criterion

In the high precision image measurement system,the verticality error between the axis of the shooting system and the measured object can bring error of the measurement result.The high demand of the system’s vertical degree is raised by measure system due to the demands of high precision and disposable full field imaging in the micro-parts imaging measurement.The existing method of optical axis verticality detection cannot meet the demand all.In order to achieve the high-precision adjustment of the system optical axis,the algorithm of detecting verticality based on regional image definition is proposed.First,the objected standard image is divided into fixed area.Then,the object plane is moved from the downside to the upside of the focus plane,meanwhile,recording the definition function values of each standard image region at each step,and fitting out the clearest positions of the regions.Finally,according to the inter-regional relations between the locations and the height difference of the each regional clearest position,the small angle between the optical axis and the measured surface can be calculated.The experiment is based on the given image of lithography template with the scale of 10 μm as move unit,and the results show that this method effective reduced the small angle between the system optical axis and the measured body in high-precision image measuring system,the evaluation accuracy is less than 0.1°,meeting the requirements in high-precision measurement.The proposed method of detecting verticality based on regional image definition can evaluate the verticality error between the axis of the shooting system and the measured object accurately,effectively and conveniently.     

基于多波长协作的切削液残留表面激光位移测量误差补偿方法

在加工测量一体化过程中,工件表面切削液残留形成的油膜会严重影响光学在机测量的精度。 现有的误差补偿方法通 常需要获取油膜介质的先验信息,如成分、厚度等。 而这些信息受加工形质、切削液随机分布等因素的影响难以实时获取。 为 此,本文提出一种基于多波长协作的切削液残留表面激光位移测量误差补偿方法。 首先设计并搭建了基于激光三角位移测量 的多波长激光测量系统,可利用多波长激光测量同一被测点位移。 通过引入柯西色散规律,建立光学系统与激光波长的解析关 系,并基于此推导出多波长激光测量内在的差分特性,最终实现误差补偿。 本文依此方法进行了实验。 结果表明补偿后测量误 差绝对值小于 0. 01 mm,与未补偿的测量数据对比,误差降低了至少 92% 。     

Multifunctional measurement system for high precision planetary servo gearhead

As an essential component of a servo system,mechanical properties of high precision planetary servo gearhead direct influence on the validation,stability and accuracy of the servo control system.Howeve...     

采用联合变换相关的透镜中心偏差测量

基于双相位编码光学联合变换相关技术提出了一种测量透镜中心偏差的方法以确定偏差方向并提高测量精度。在经典联合变换相关原理基础之上,使用两个相位函数分别对参考图像和联合功率谱进行编码,并选用合适的滤波器消除旁瓣干扰,得到单个互相关峰的输出。利用该双相位编码后的联合变换相关技术探测不同目标图像相对于参考图像的位移矢量,并拟合圆。此拟合圆圆心到圆上点的矢量即为经自准直光学系统放大后的偏心矢量,从而同时确定了中心偏差的大小和方向。实验结果表明,通过双相位编码后的相关输出仅保留一个尖锐的相关峰,实现了位移矢量的亚像元探测;使用联合变换相关技术准确地测量了透镜的中心偏差,其测量结果的实验标准差为0.1μm,误差绝对值最大为0.3μm,满足一般透镜中心偏差测量的要求。     

A 6-degree-of-freedom measurement system for the accuracy of X-Y stages

A precision 6-degree-of-freedom measurement system has been developed for simultaneous on-line measurements of six motion errors of an X-Y stage. The system employs four laser Doppler scales and two quadrant photo detectors to detect the positions and the rotations of an optical reflection device mounted on the top of the X-Y stage. Compared to the HP5528A system, the linear positioning accuracy of the developed measurement system is better than ±0.1 μm to the range of 200 mm and the vertical straightness error is within ±1.5 μm for the measuring range of ±0.1 mm. The yaw and pitch errors are about ±1 arcsec, and the roll error is about ±3 arcsec within the range of ±50 arcsec.     

基于标准器的大尺寸测量系统坐标统一化方法

针对大尺寸测量系统坐标统一化过程中公共点的测量误差不可控制的问题,提出了利用可现场溯源的标准器取代传统的独立公共点的方法。设计了一种标准器,并用更高精度等级的三坐标测量机对标准器上各个目标点之间的空间几何位置关系进行标定,把这些几何位置关系作为约束条件。现场应用中多站大尺寸测量仪分别测量标准器上的目标点,计算出各个几何关系与通过标定的约束关系之差,将这个差值与设定的误差限进行比较,确定公共点的测量值是否有效。对该方法进行了理论分析和仿真证明。提出了7参数坐标配准算法对大尺寸测量进行空间坐标数据配准。用激光跟踪仪和激光雷达及4个标准器进行现场实验,实验结果与传统方法相比,坐标配准误差得到降低。为了进一步验证该方法的有效性,把一根经过检定的基准尺放置于测量空间的12个不同位置,使用标准器约束前后的两组坐标配准参数分别计算基准尺长度的平均值和标准差。实验结果表明,使用标准器约束方法能够提高大尺寸测量系统坐标统一化精度。     

基于改进遗传算法实现柔性三坐标测量机参数标定

针对柔性三坐标测量机测量精度低的弊端,提出了误差修正和参数标定的方法.应用Denavit-Hartenberg( DH)法建立了柔性三坐标测量系统的运动学模型和误差模型,考虑系统结构参数标定问题,提出了一种基于优化最小二乘法的改进遗传算法.首先,在最小二乘法中引入变化因子来衡量收敛速度;其次,当该因子趋于稳定时,将产生...     

几种波片位相延迟测量方法的比较

建立了用于波片位相延迟测量的高精度多功能测试系统,实现了在同一测试系统上应用不同的测试方法,使测试具有可比性。对光谱扫描法、Soleil补偿器法及两种光强法进行了比较测量,并结合测试结果对各种方法进行了系统的误差分析。分析结果表明,对本测试系统而言,光谱扫描法适于测量λ/2波片,测量精度主要由单色仪的精度所决定,其误差＜0.032%;Soleil补偿器法测量精度主要由Soleil补偿器精度决定,其误差＜0.18%;光强法误差与待测波片的延迟量有关,且测试光路与偏振器的缺陷对测量精度影响较大。光谱扫描法与Soleil补偿器法测量λ/2波片的结果在误差范围内相符,光强法测量结果产生较大差异的原因来自光路、偏振器及方法本身的缺陷。实验结果为不同条件下选择最佳测量方法提供了参考依据。     

基于超分辨图像复原的显微圆孔孔径测量方法

为提高圆孔的光学显微测量准确性,研究了基于超分辨图像复原的显微圆孔孔径测量方法。该方法通过超分辨图像复原处理圆孔显微图像,提高了传统光学显微系统对圆孔成像的分辨率,确定了以超分辨复原图像灰度值为0.399作为圆孔物理边缘判据,实现对圆孔边缘的准确探测。理论分析表明该方法可准确测量微米级及以上直径圆孔。核孔膜孔径测量实验中,由二值化图像得到孔径测量结果为6.35μm(测量不确定度为0.08μm),与扫描电镜测量结果6.268μm(测量不确定度为0.083μm)相符,测量误差仅0.08μm。该技术有助于实现对圆孔形状的快速、准确在线测量。     

高灵敏度分束干涉型LCD盒间隙厚度测量仪

本文报道一种高灵敏度分束干涉型ＬＣＤ盒间隙厚度测量仪（以下简称测厚仪），并重点介绍其两项关键技术：干涉条纹级次的彩色识别法和光楔干涉定标法。要精确测量液晶盒间隙厚度，必须准确测定基准和测量这两组干涉条纹间的距离，因而必须准确识别干涉条纹的级次。强度识别法的测量精度易受随机噪声的影响。本文提出条纹级次的彩色识别法，利用这种方法，测量精度可以大幅度提高。定标是测厚仪的另一关键技术。本文提出独特的光楔干涉定标法。文中给出了光楔干涉法定标精度的理论估算，同时制成一光楔并应用于高精度测厚仪的实际定标     

基于双平行平面相机模型的钢板尺寸视觉测量

提出基于双平行平面相机模型的视觉测量方法,用于测量生产线上运动钢板的尺寸。该方法采用数据驱动的方式计算像点在标定平面上投影点的世界坐标;采用k近邻(k-NN)方法生成目标在标定平面上的无畸变投影图像,并建立投影图像与世界坐标系的直接关联。提出了双平行平面模型下相机光心位置标定算法,利用线结构光进行板材厚度测量;在无畸变的投影图像上利用钢板边缘间的平行和垂直性进行钢板边缘特征提取,通过边缘直线的世界坐标方程求取长宽尺寸。最后,给出了针对大尺寸钢板测量的多相机测量系统框架。提出的方法为单目视觉测量方法,相比于其他方法具有现场安装简单和标定工作量小的特点。通过图像分辨率为640×480的相机对尺寸为80mm×50mm×15mm的标准铝块进行了测量,结果显示:厚度测量误差为0.1mm,长度和宽度的误差在0.2mm以内。实际应用中测量精度远高于加工精度,能够满足产品计量的要求。     

使用高精度三坐标测量仪实现透镜定中心

传统的光学测量定中心法受限于光源、转台大小和装调误差传递性而不适用于大口径、多透镜光学系统的装调,为此本文提出了使用三坐标测量仪接触式测定透镜中心的精密机械测量法。介绍了使用三坐标测量仪测量大口径透镜中心偏的原理,即在测量透镜上表面与基准轴等距离各点坐标的基础上拟合得到透镜光轴与基准轴的夹角,从而解算出透镜的中心偏。通过大口径长焦距镜头的装调对该方法进行了检验。检验结果表明:该透镜的装调偏差为6.47″,重复性误差为(1.16×10-4)″。该方法将光学测量变为机械测量,利于装调,可在保证装调精度的同时简化装调难度,提升装调效率,满足大口径多透镜光学系统对高精度装调的要求。     

An online optical system for inspecting tool condition in milling of H13 tool steel and IN 718 alloy

Tool wear adversely affects surface integrity due to higher cutting forces and temperatures. However, an accurate and efficient tool wear measurement is a challenging problem. The traditional direct tool wear measurement methods such as optical microscope and scanning electron microscope (SEM) leads to error of tool reassembly, tool orientation, and low accuracy, while the indirect measurement methods cause poor accuracy. In this paper, tool wear phenomena in milling of tool steel AISI H13 and superalloy Inconel 718 have been studied. A novel online optical system has been developed to integrate with a CNC machine to directly inspect and measure tool wear conditions in milling which minimizes the above-mentioned measurement errors in traditional methods. The evolutions of tool flank wear of PVD-coated inserts in end milling of the two materials were inspected to demonstrate the function of the optical measurement system. The tool wear evolution versus cutting time were obtained and examined. The characteristic images of fast tool wear in milling of Inconel 718 were captured using SEM and compared with the optical images to estimate flank wear. Three basic modes of tool wear—flank wear, nose wear, and crater wear—were compared and analyzed. A two-parameter method has been developed to evaluate both flank wear and nose wear with respect to cutting time in milling of Inconel 718. The advantages of the on-line optical tool inspection system were discussed.