Precision machining of micro tool electrodes in micro EDM for drilling array micro holes

Micro electro discharge machining (micro EDM) is suitable for machining micro holes on metal alloy materials, and the micro holes can be machined even to several microns by use of wire electro discharge grinding (WEDG) of micro electrodes. However, considering practicability of micro holes <Φ100 μm in batch processing, the controllable accuracy of holes’ diameter, the consistency accuracy of repeated machining and the processing efficiency are required to be systematically improved. On the basis of conventional WEDG method, a tangential feed WEDG (TF-WEDG) method combined with on-line measurement using a charge coupled device (CCD) was proposed for improving on-line machining accuracy of micro electrodes. In TF-WEDG, removal resolution of micro-electrode diameter (the minimum thickness to be removed from micro electrode) is greatly improved by feeding the electrode along the tangential direction of wire-guide arc, and the resolution is further improved by employing negative polarity machining. Taking advantage of the high removal resolution, the precise diameter of micro-electrode can be achieved by the tangential feed of electrode to a certain position after diameter feedback of on-line measurement. Furthermore, a hybrid process was presented by combining the TF-WEDG method and a self-drilled holes method to improve the machining efficiency of micro electrodes. A cyclic alternating process of micro-electrode repeated machining and micro holes’ drilling was implemented for array micro holes with high consistency accuracy. Micro-EDM experiments were carried out for verifying the proposed methods and processes, and the experimental results show that the repeated machining accuracy of micro electrodes was less than 2 μm and the consistency accuracy of array micro holes was ±1.1 μm.     

Fabrication of disk microelectrode arrays and their application to micro-hole drilling using electrochemical micromachining

Minimal-taper microholes are widely used in modern industries. Electrochemical micromachining (EMM) has been demonstrated to be a feasible method to fabricate these microholes. In this study, based on its unique processing properties and productivity, a disk microelectrode array was fabricated via electrolysis for producing micro-holes. The dimensions of the cathode for hydrolysis were optimized by applying the finite element method to the constructed physical model. A 3 × 3 disk microelectrode array and a 5 × 5 cylindrical microelectrode array with uniform dimensions were then fabricated using the optimized cathode. Micro-holes were drilled on stainless-steel plates using both disk and cylindrical microelectrode arrays. The taper of the resulting micro holes obtained using the new disk microelectrode array was lower than that of the holes formed using the cylindrical microelectrode array. The effects of EMM parameters, including the applied voltage, feeding speed, and pulse-on time, on the hole diameter and taper were also investigated. The results suggest that appropriate machining parameters should be selected in consideration of the effects of these parameters on hole diameter, taper, localization, and material removal rate.     

An investigation into wire electrochemical micro machining of pure tungsten

Tungsten-based microstructures have attracted great interest in many industrial advanced applications. Nevertheless, with a disadvantageous combination of high hardness, toughness and brittleness, the micro machining of pure tungsten poses significant difficulty. In this paper, an investigation into the wire electrochemical micro machining (WEMM) of pure tungsten at low alkaline electrolyte concentration and small pulse duration is presented. Under the optimal machining conditions, tungsten-based microstructures with a side gap of 4 μm, slit width of 18 μm and aspect ratio of 5.6, as well as with a side gap of 5 μm, slit width of 20 μm and aspect ratio of 15, were obtained. In order to improve productivity in the machining of multi-slit microstructures, multi-wire electrochemical micro machining of tungsten was introduced. Using a 3-wire electrode, a 9-slit microstructure with a slit width of approximately 24 μm was produced and the machining efficiency was improved by a factor of three. The results revealed that it was a promising method for the fabrication of tungsten-based periodic or quasi-periodic microstructures, such as the gratings used in the X-ray absorption contrast system of imaging.     

Influences of lubrication conditions and blank holder force on micro deep drawing of C1100 micro conical–cylindrical cup

Lubrication conditions and blank holder force (BHF) are two key processing parameters in deep drawing. This is more obvious in micro forming because of the miniaturization of the specimen size. Micro conical–cylindrical cups with internal conical bottom diameter of only 0.4 mm were well formed. The influences of lubrication conditions and BHF on micro deep drawing of micro conical–cylindrical cups were investigated using a micro blanking–deep drawing compound mold. Pure copper C1100 with a thickness of 50 μm, which was annealed at 450 °C for 2 h in vacuum condition, was chosen as the specimen material. The experiments were conducted on a universal testing machine with a forming velocity of 0.05 mm/s under 4 kinds of lubrication conditions and BHF. The experimental results showed that a micro conical–cylindrical cup with internal conical bottom diameter of only 0.4 mm was well formed, and the limiting drawing ratio (LDR) reached 2.1. The polyethylene (PE) film, which decreased the drawing force and increased the drawing ratio (DR), was superior to castor oil, petroleum jelly and dry friction, and can be chosen as a proper lubricant for micro deep drawing. The rim of the micro cup seriously wrinkled when BHF was less than 4.2 N. The bottom of the micro cup cracked when the BHF was larger than 5.6 N.     

Ultrasonic vibration assisted grinding of hard and brittle linear micro-structured surfaces

In this paper, a novel ultrasonic vibration assisted grinding (UVAG) technique was presented for machining hard and brittle linear micro-structured surfaces. The kinematics of the UVAG for micro-structures was first analyzed by considering both the vibration trace and the topological features on the machined surface. Then, the influences of the ultrasonic vibration parameters and the tilt angle on the ground quality of micro-structured surfaces were investigated. The experimental results indicate that the introduction of ultrasonic vibration is able to improve the surface quality (The roughness SR_a was reduced to 78 nm from 136 nm), especially in guaranteeing the edge sharpness of micro-structures. By increasing the tilt angle, the surface roughness can be further reduced to 56 nm for a 59% improvement in total. By using the preferred UVAG parameters realized by orthogonal experiments, a micro cylinder array with surface roughness of less than 50 nm and edge radius of less than 1 μm was fabricated. The primary and secondary sequence of the grinding parameters obtained by the orthogonal experiments are as follows: feed rate, tilt angle of workpiece, depth of grinding, vibration frequency and amplitude. The spindle speed in the range of 1000 rpm–3000 rpm does not significantly affect the machined micro-structured surface roughness. Finally, more micro-structures including a micro V-groove array and a micro pyramid array were machined on binderless WC as well as SiC ceramic by means of the UVAG technique. The edge radius on the V-grooves and pyramids are both less than 1 μm, indicating the feasibility of UVAG in machining hard and brittle micro-structured surfaces for an improved surface quality.     

Electrical discharge machining of the AISI D6 tool steel: Prediction and modeling of the material removal rate and tool wear ratio

In this investigation, response surface method was used to predict and optimize the material removal rate and tool wear ratio during electrical discharge machining of AISI D6 tool steel. Pulse on time, pulse current, and voltage were considered as input process parameters. Furthermore, the analysis of variance was employed for checking the developed model results. The results revealed that higher values of pulse on time resulted in higher values of material removal rate and lower amounts of tool wear ratio. In addition, increasing the pulse current caused to higher amounts of both material removal rate and tool wear ratio. Moreover, the higher the input voltage, the lower the both material removal rate and tool wear ratio. The optimal condition to obtain a maximum of material removal rate and a minimum of tool wear rate was 40 μs, 14 A and 150 V, respectively for the pulse on time, pulse current and input voltage.     

Micro-scale hole profile measurement using rotating wire probe and acoustic emission contact detection

The development of a new probing method to inspect the inner diameter of micro-scale holes is presented in this paper. This was accomplished by contact detection using acoustic emission with a Ø170 μm rotating wire probe tip. Contact is detected when the rotating probe approaches and impacts the hole’s inner surface. The effective diameter of the rotating probe is calibrated by using a high precision grade 0 Mitutoyo gauge block. The wire rotating probe used was fabricated with micro stainless steel wire and micro tubes. The probe’s effective diameter was compensated for in the measurement of the hole. The probe was used to measure the diameter and the roundness of micro-scale holes. Probes used in previous publications have different geometry than the probe in this paper and are used almost exclusively for external dimensions. Micro-scale holes of less than 1.0 mm in diameter and 10 mm in depth are successfully measured and the 3D profile is created accordingly. Also, the out-of-roundness values of each level spacing, 50 μm apart in height, are calculated.     

An investigation of accuracy,repeatability and reproducibility of laser micromachining systems

Component technologies of laser micro machining systems are key factors affecting their overall performance. The effects of these technologies on accuracy, repeatability and reproducibility (ARR) in different implementations of such systems have to be investigated to quantify their contributions to the overall processing uncertainty, especially those with the highest impact on beam delivery sub-systems. The aim of this research was to evaluate the capabilities of state-of-the-art machining platforms that were specially designed and implemented for laser micro structuring and texturing. An empirical comparative study was conducted to quantify the effects of key component technologies on ARR of four state-of-the-art systems. In particular, the capabilities of the optical and mechanical axes were investigated when they were utilised separately or in combination for precision laser machining. Conclusions are made about the positional accuracy of the mechanical and optical axes and the importance of their proper calibration on the systems’ overall performance is discussed. It is shown that the laser machining platforms can achieve repeatability and reproducibility better than 2 μm and 6 μm, respectively.     

A 3-axis precision positioning device using PZT actuators with low interference motions

For expected applications of fast tool servo (FTS) and vibration machining, a 3-axis positioning device with low interference motions is proposed in this paper. The positioning device was composed of a XY stage and a Z-axis stage, which were actuated by piezoelectric (PZT) actuators combined with specially-designed symmetric flexure hinges. Through fundamental experiments, when the applied voltage was 50 V, the displacements along the X-, Y-, and Z-axes were measured as 6.35 μm, 6.61 μm, and 10.12 μm, respectively, with the corresponding small percentages of interference displacement of 3.80%, 4.02%, and 3.30%. In addition, the resonant frequencies were obtained as 1.06 kHz, 0.65 kHz, and 0.54 kHz. To examine control performances, a real-time control system considering hysteresis effect of PZT actuators was implemented by the field-programmable gate array (FPGA) modules to conduct tracing controls for sinusoidal waveform, 3D Lissajous motion, and 3D spiral motion. The tracing errors along 3-axis actuations were under 30 nm. The performances of a 3-axis positioning device were well demonstrated. Future work is to perform machining examinations on a machine tool.     

A precision CNC turn-mill machining center with gear hobbing capability

With ever increasing demand for small parts with complex shapes and high dimensional accuracy, many traditional machine tools have become ineffective for machining these miniature components. Typical examples include dental implants, parts used in mechanical watch movements, and parts used in medical endoscopes. This paper introduces our PC-controlled CNC turn-mill machining center. It has 5 axes, an automatic bar feeder, an automatic part collection tray, and a tool changer. It features a special control algorithm for the synchronization of its axes that produces not only higher accuracy but also makes the machine easier to use. In addition, a volumetric error compensation algorithm is implemented to improve accuracy. Based on experiments, the machining error is ±3 μm for turning, ±7 μm for milling and the maximum profile error is less than ±7.5 μm for gear hobbing.     

Research on improvement of machining accuracy of micro-rods with electrostatic induction feeding ECM

Micro-rods were machined by electrochemical machining using the electrostatic induction feeding method, with which ultra-short current pulse duration of several tens of ns can easily be obtained. A tungsten plate and stainless steel (SUS304) rod were used as the tool electrode and workpiece, respectively. To improve the machining accuracy, the machining characteristics when the workpiece is fed in the axial and radial directions were investigated using NaCl aqueous solution as the electrolyte. When fed in the axial direction, the machinable length of the micro-rods was found to peak at the optimum feed speed because of the influence of pitting corrosion and collision between electrodes. When the workpiece was fed in the radial direction, the influence of pitting corrosion decreased, however, the micro-rod was shortened with increasing feed distance in the radial direction because of the stray current flowing through the end of the micro-rod. The simulation results of the material removal process agreed qualitatively with experimental results. Next, machining characteristics were compared between the electrolytes, NaCl and NaNO₃ aqueous solutions, by feeding the workpiece in the axial direction. It was found that the influence of pitting corrosion was eliminated with the NaNO₃ aqueous solution, and there was no machinable length limitation with suitable feed speeds. In addition, the taper angle and gap width were smaller with the NaNO₃ aqueous solution, compared with those of the NaCl aqueous solution. Stainless steel micro-rods of 100 μm in diameter with a high aspect ratio of 20 were fabricated with the NaNO₃ aqueous solution. According to the preliminary research results, the machinable minimum diameter of the micro-rods was investigated and micro-rods with an average diameter of 9 μm and length of 78 μm were machined successfully.     

Specific energy and surface roughness of minimum quantity lubrication grinding Ni-based alloy with mixed vegetable oil-based nanofluids

Vegetable oil is a low toxic, excellent biodegradable and renewable energy source used as an ideal lubricating base oil in machining. Castor oil exhibits good lubrication performance but poor mobility, which limits its application especially in precision grinding. The main objective of the work presented to obtain optimal mixed vegetable based-oil and optimal nanoparticles adding concentration in grinding Ni-based alloy with minimum quantity lubrication. An experimental investigation is carried out first to study the different vegetable oils with excellent mobility mixed with castor oil. The lubrication property of the oil was evaluated in terms of grinding force, force ratio, specific grinding energy, and surface roughness. Based on the test conditions, it is found that soybean/castor mixed oil obtained the optimal results (μ= 0.379, U = 83.27 J/mm³ and Ra = 0.325 μm) and lubricating effect compared with castor oil and other mixed base oils. To further explore the lubricating capability of soybean/castor mixed oil, MoS₂ nanoparticles which have excellent lubricating property were added into the soybean/castor mixed oil to prepare different concentrations nanofluids. From the present study, it can be concluded that 8% mass fraction of the oil mixture should be added to obtain the optimal machining results, with the lowest force ratio (0.329), specific energy (58.60 J/mm³), and average grinding temperature (182.6 °C). Meanwhile, better surface microtopography of ground parts and grinding debris morphologies were also observed for the machining conditions.     

Nanometric cutting in a scanning electron microscope

A nanometric cutting device under high vacuum conditions in a scanning electron microscope (SEM) was developed. The performance, tool-sample positioning, and processing capacity of the nanometric cutting platform were studied. The proposed device can be used to realize a displacement of 7 μm, with a closed-loop resolution of 0.6 nm in both the cutting direction and the depth direction. Using a diamond cutting tool with an edge radius of 43 nm formed by focused ion beam (FIB) processing, nanometric cutting experiments on monocrystalline silicon were performed on the developed cutting device under SEM online observation. Chips and machining results of different depths of cut were studied during the cutting process, and cutting depths of less than 10 nm could be obtained with high repeatability. Moreover, the cutting speed was found to exhibit a strong relationship with the brittle–ductile transition depth on brittle material. The experimental results of taper cutting and sinusoidal cutting indicated that the developed device has the ability to perform multiple degrees of freedom (DOFs) cutting and to study nanoscale material removal behaviour.     

Electro-chemical micro drilling using ultra short pulses

Electro-chemical machining (ECM) has been rarely applied in micro machining because the electric field is not localized. In this work, ultra short pulses with tens of nanosecond duration are used to localize dissolution area. The effects of voltage, pulse duration, and pulse frequency on the localization distance were studied. High quality micro hole with 8 μm diameter was drilled on 304 stainless steel foil with 20 μm thickness. Localization distance can be manipulated by controlling the voltage and pulse duration, and various hole shapes were produced including stepped holes and taper free holes.     

Application of Monte Carlo simulation for estimation of uncertainty of four-point roundness measurements of rolls

Large-scale rotors in the paper and steel industry are called rolls. Rolls are reground at regular intervals and roundness measurements are made throughout the machining process. Measurement systems for roundness and diameter variation of large rolls (diameter <2000 mm) are available on the market, and generally use two to four sensors and a roundness measurement algorithm. These methods are intended to separate roundness of the rotor from its movement. The hybrid four-point method has improved accuracy, even for harmonic component amplitudes. For reliable measurement results, every measurement should be traceable with an estimation of measurement uncertainty. In this paper, the Monte-Carlo method is used for uncertainty evaluation of the harmonic components of the measured roundness profile under typical industrial conditions. According to the evaluation, the standard uncertainties for the harmonic amplitudes with the hybrid method are below 0.5 μm for the even harmonics and from 1.5 μm to 2.5 μm for the odd harmonics, when the standard uncertainty for the four probes is 0.3 μm each. The standard uncertainty for roundness deviation is 3.3 μm.     

Optimisation of a nano-positioning stage for a Transverse Dynamic Force Microscope

This paper describes the optimisation of a nano-positioning stage for a Transverse Dynamic Force Microscope (TDFM). The nano-precision stage is required to move a specimen dish within a horizontal region of 1 μm × 1 μm and with a resolution of 0.3 nm. The design objective was to maximise positional accuracy during high speed actuation. This was achieved by minimising out-of-plane distortions and vibrations during actuation. Optimal performance was achieved through maximising out-of-plane stiffness through shape and material selection as well optimisation of the anchoring system. Several shape parameters were optimised including the shape of flexural beams and the shape of the dish holder. Physical prototype testing was an essential part of the design process to confirm the accuracy of modelling and also to reveal issues with manufacturing tolerances. An overall resonant frequency of 6 kHz was achieved allowing for a closed loop-control frequency of 1.73 kHz for precise horizontal motion control. This resonance represented a 12-fold increase from the original 500 Hz of a commercially available positioning stage. Experimental maximum out-of-plane distortions below the first resonance frequency were reduced from 0.3 μm for the first prototype to less than 0.05 μm for the final practical prototype.     

Micro electrical discharge machining using high electric resistance electrodes

In micro electrical discharge machining (EDM), because the material removal per single pulse discharge mainly determines the minimum machinable size of a micro EDM, decreasing the material removal per single pulse discharge is important. In this study, in order to decrease the material removal per single pulse discharge, high electric resistance materials such as single-crystal silicon are used for electrodes. Analytical results show that when the electrode resistance increases, the peak value of the discharge current decreases, whereas the pulse duration increases. In addition, the discharge energy decreases when increasing the resistance. Silicon is used as a tool electrode, and the effect of resistivity of the silicon tool electrode on the diameter of discharge craters generated on the stainless steel workpiece is examined. Experimental results reveal that with increasing silicon electrode resistivity, the diameter of discharge craters decreases. Because the diameter of discharge craters can be decreased to 0.5 μm, improved finished surfaces of R_z 0.03 μm are obtained.     

The design and optimization of micro polycrystalline diamond ball end mill for repairing micro-defects on the surface of KDP crystal

Micro-milling is a promising approach to repair the micro-defects on the surface of KH₂PO₄ (KDP) crystal. The geometrical parameters of micro ball end mill will greatly influence the repairing process as a result of the soft brittle properties of KDP crystal. Two types of double-edged micro ball end mills were designed and a three-dimensional finite element (FE) model was established to simulate the micro milling process of KDP crystal, which was validated by the milling experiments. The rake angle of −45°, the relief angle of 45° and the cutting edge radius of 1.5–2 μm were suggested to be the optimal geometrical parameters, whereas the rake angle of −25° and the relief angle of 9° were optimal just for micro ball end mill of Type I, the configuration with the rake angles ranging from 0° to 35°, by fully considering the cutting force, and the stress–strain distribution over the entire tool and the cutting zone in the simulation. Moreover, the micro polycrystalline diamond (PCD) ball end mills adopting the obtained optimal parameters were fabricated by wire electro-discharge machining (WEDM) and grinding techniques, with the average surface roughness Ra of tool rake face and tool flank face ∼0.10 μm, and the cutting edge radius of the tool ∼1.6 μm. The influence of tool's geometrical parameters on the finished surface quality was verified by the cutting experiments, and the tool with symmetric structure was found to have a better cutting performance. The repairing outlines with Ra of 31.3 nm were processed by the self-fabricated tool, which could successfully hold the growth of unstable damage sites on KDP crystal.     

Measurement and statistical analysis toward reproducibility validation of AZ4562 cylindrical microlenses obtained by reflow

This paper presents the statistical analysis applied into the shape of microlenses (MLs) for validating the high-reproducibility feature of their fabrication process. The MLs were fabricated with the AZ4562 photoresist, using photolithography and thermal reflow processes. Two types of MLs arrays were produced for statistical analysis purposes: the first with a cross-sectional diameter of 24 μm and the second with a cross-sectional diameter of 30 μm, and both with 5 μm spacing between MLs. In the case of 24 μm diameter arrays, the measurements showed a mean difference in diameter of 2.78 μm with a standard deviation (SD) of 0.22 μm (e.g., 2.78 ± 0.22 μm of SD) before the reflow, and 2.34 ± 0.35 μm of SD after the reflow. For the same arrays, the mean difference in height obtained was, comparatively to the 5.06 μm expected, 0.76 ± 0.10 μm of SD before the reflow and 1.91 ± 0.15 μm of SD after the reflow, respectively. A mean difference in diameter of 2.64 ± 0.41 μm of SD before the reflow, and 1.87 ± 0.34 μm of SD after the reflow was obtained for 30 μm diameter MLs arrays. For these MLs, a mean difference in height of 0.71 ± 0.12 μm of SD before the reflow and 2.24 ± 0.24 μm of SD after the thermal reflow was obtained, in comparison to the 5.06 μm of height expected to obtain. These results validate the requirement for reproducibility and opens good perspectives for applying this fabrication process on high-volume production of MLs arrays.