A differential laser autocollimation probe for on-machine measurement

An optical probe based on the principle of differential laser autocollimation has been developed for the purpose of on-machine measurement of mirror shapes. The probe is so compact that it can be mounted on diamond lathes. It can be rotated by a stepping motor about an axis perpendicular to the optical axis of measurement, and has been used to measure mirror shapes on an apparatus that imitates the conditions of an on-machine measurement system. The probe can reduce remarkably the measurement errors due to vibrational and thermal noises that could not be avoided previously in on-machine measurement. Estimating from repeatability, accuracy is better than 0.1 μm in measurement of a parabolic curve whose depth is >1 mm and length is ≈ 100 mm.     

固体表面速度相关测量激光传感器光学系统

介绍一种测量固体表面速度的新方法。在阐述激光相关测速基本原理的基础上,详细讨论了激光传感器光学系统的构成、各部分的特点和激光相关测速的特殊要求及关键技术。     

二维光学自准直微角度传感器

为实现表面微形貌测量以及精密平台的定位测量,设计了一种结构简单的小体积二维微角度传感器。该微角度传感器基于激光自准直原理,主要由作为光源的激光二极管、自准直光路和作为位置探测器的四象限光电二极管组成。分析计算发现,角度传感器的灵敏度与光路中物镜的焦距无关,因此选用了焦距较短的物镜,以实现小体积、高灵敏度的目的。四象限光电二极管具有二维位置探测能力,利用其作为光电转换装置,微角度传感器可以同时探测两轴角度变化值。实验结果表明,微角度传感器的体积可达到25×20×13 mm3,角度测量范围±1 200 arcsec,分辨率为0.1 arcsec。实验中利用激光自准直仪进行对照,有效验证了这种新型二维光学自准直微角度传感器的可行性。     

一种激光挠测量系统的实现

本文介绍了一种用于大型土木工程结构的投影式光学挠度测量系统。系统由激光器、光接收器件及其外围信号采集处理电路组成。光接收部分采用特殊的光电接收器件取代传统的CCD或PSD,使测量范围得到扩大;外围电路部分采用现场可编程逻辑阵列FPGA器件作为核心。通过这种设计,系统的量程和可扩展性得到改善,实现了通道复用。实验室证明,系统的测量范围可以达到210mm,分辨率达到0.005mm,可完成结构的静态及动态挠度测量。     

机械制造业中激光测试技术最新研究进展及展望

介绍了激光视觉三维测量、激光振动测量、激光层析成像技术以及激光无损检测技术。概述了国内外激光测试技术在机械制造业中的研究成果及使用情况,并展望了其应用前景。     

同轴度同步旋转测量的空间投影解析

研究了国际上同轴度准直测量的专利发展状况。在这些专利材料研究的基础上,对2轴三维空间准直测量建立数学模型,用三维空间的思想来描述一个运动的准直激光在一个同步旋转轴的垂直二维平面位置测量装置上的投影,解决同轴度测量空间解析问题。通过试验检测同轴测量空间坐标的位置变化。原来的激光光斑在从动轴垂直平面中为椭圆曲线,在位置检测器件坐标中曲线也发生了改变,并且展示了角偏差变化和轴心的位置变化对曲线的影响。     

Problems regarding linearity of data of a laser interferometer with a single-frequency laser

In this paper, the main causes of scale nonlinearity of a laser interferometer with a single-frequency laser and a quadrature fringe detection system are described. The primary causes of scale nonlinearity are quadrature phase shift error and imperfect optical elements in the interferometer and detection unit. A method for measuring this nonlinearity with an optical compensator is described. Nonlinearities arising from quadrature phase shift error, unequal amplitudes, and electronic offsets in the detection unit can be compensated by means of a PC program as described herein. By using a differential interferometer with a resolution of 0.3 nm, the nonlinearity compensation was experimentally verified, and by averaging the measured values for 20 s, a linearity better than ±0.5 nm was achieved.     

激光雷达光纤液位传感系统中光学非接触在线测量方法的研究

将激光雷达与光纤传感技术结合起来，对用于易燃易爆场合液位的光学非接触在线测量方法进行了研究，提出一种具有补偿性能的发射接收共轴式光学系统，对模拟油罐实现了全光无电非接触液位的连续检测，５ｍ量程内精度达０２％，系统稳定性良好。     

CDMS－1型电视线宽测量仪设计与检测

本文介绍了中科院上海光机所研制的CDMS-1型电视线宽测量系统设计及检测。线宽测量技术主要用于集成电路生产的在线测量,以及掩模制造中的质量控制,CDMS-1型电视线宽测量仪利用计算机对集成电路图像进行数字处理,从而保证了仪器测量精度。经检测表明该系统的各项测试指标均达到原设计要求。     

CDMS－1型电视线宽测量仪设计与检测

本文介绍了中科院上海光机所研制的ＣＤＭＳ一１型电视线宽测量系统设计及检测。线宽测量技术主要用于集成电路生产的在线测量，以及掩模制造中的质量控制，ＣＤＭＳ一１型电视线宽测量仪利用计算机对集成电路图像进行数字处理，从而保证了仪器测量精度。经检测表明该系统的各项测试指标均达到原设计要求。     

激光超声光学测试仪

提出了一种基于光纤耦合的反射式光偏转原理的激光超声光学检测技术，并成功研制了激光超声光纤传感器。详细讨论了其测试机理。采用该传感器测试了激光超声表面波、兰姆波和纵波，获得了很好的波形。实验结果表明，这种检测技术在测量材料表面微形变方面有较大的发展潜力。     

高精度角度自动测量系统

高精度角度自动测量系统采用自准直平行光管将被测角度转换为焦平面上两十字叉丝的相对位移,经ＣＣＤ摄像机和图像采集卡对叉丝图像采集后进入计算机进行识别和处理,并根据图像的特点采用两次拟合的算法得到高精度的角度值。高精度角度自动测量系统具有测量精度高、自动化程度高、稳定性好、适应性强、可同时进行二维角度测量等特点。系统角度测量分辨率达０－０１″,测量精度为０－１″     

Validation of a single fibre-fed heterodyne laser interferometer with nanometre uncertainty

In this paper the validation of a fiber-fed heterodyne laser interferometer with nanometre uncertainty is presented. The achievable displacement measurement uncertainty is investigated for different polarisation maintaining fibres used in these interferometers. Measurement results are shown for both a range of m as well as a range of 300 mm. It is shown that a (selected) PM-fibre with an extinction ratio of 1:1650 and the use of an external reference allows realising a fibre-fed laser interferometer able to measure displacements with the same uncertainty as a laser interferometer system without fibre. Tests were performed with fibres ranging in length up to 50 m.     

Traceability enhancement in angle measurements

Traceability of angle measurements is based mainly on the standard of the plane angle – prism (polygon) calibrated at appropriate accuracy. Nevertheless, the standard (etalon) of flat angle – polygon has many restrictions for the transfer of angle unit – radian (rad) and other units of angle. It depends on number of angles formed by the flat sides of the polygon. Here is proposed a possibility to create the standard of the plane angle equal to π rad using the circular scale with the rotation axis of very high accuracy and two opposite placed precision reading instruments with appropriate alignment. Proposed method permits an implementation of π rad as primary standard angle and enables to assure a traceability of flat angle measurements at laboratory environment. Short information about the multipurpose angle measurement test bench developed is presented.     

Uncertainty evaluation of trigonometric method for vertical angle calibration of the total station instrument

The total station is an instrument, widely used in civil and environmental engineering, for flat and vertical angle as well as distance measurements. Typically, routine calibration of such an instrument is obligatory, and depending on the local regulations, is performed typically annually or bi-annually. Analysis of previous research shows that undertaking flat angle calibration under laboratory conditions is more common than calibration of vertical angle measuring systems. This paper deals with a trigonometric vertical angle calibration method and research into determining the main sources of uncertainty is described in the paper. The principle of the method is explained, as well as the uncertainty evaluation based on GUM and the advantages as well as the weaknesses of the setup are discussed.     

基于激光雷达的飞机水平测量

介绍了激光雷达测量系统的测量原理,分析了传统飞机水平测量方法的不足.为满足飞机对部件安装准确度的更高要求,提出在全机水平测量工序中采用数字化测量设备--激光雷达.通过分析测量基准、确定激光雷达的摆放位置、建立机体坐标系及利用研发的数据处理软件进行数据分析处理等环节,制定了基于激光雷达的飞机水平测量方案.应用表明,该方案在测量精度、自动化程度和测量数据处理等方面具有明显的优点,并且极大地降低了劳动强度,提高了工作效率.     

衍射法测量细丝直径

利用两次衍射装置，软件编程数字滤波技术代替硬件电路及简单的暗纹位置识别和平均技术，较好解决了衍射测量细丝直径实用中的有关问题，对118μm的漆包线实测结果达到了1μm的重复精度。     

智能光纤液位检测系统

本文介绍了一种光纤液位检测系统。给出了系统检测原理、数据采集及信号处理，并说明了本系统具有防爆等特点。     

小型高精度角度传感器的设计

本文给出了一种小型高精度光栅角度传感器的设计方法，并就角度传感器的设计要点作了详细分析