InP/GaAs0.51Sb0.49/InP fully self-aligned double heterojunction bipolar transistors with a C-doped base: a preliminary reliability study

A preliminary reliability study is reported for carbon-doped InP/GaAs_0.51Sb_0.49/InP NpN double heterojunction bipolar transistors (DHBTs) lattice-matched to InP substrates. These DHBTs take advantage of the staggered (“type II”) band lineup at InP/GaAs_0.51Sb_0.49 interfaces: in this system, the GaAs_0.51Sb_0.49 base conduction band edge lies 0.15–0.18 eV above the InP collector conduction band, thus enabling the implementation of InP collectors free of the collector current blocking effect encountered in conventional Ga_0.47In_0.53As base DHBTs. The structure results in very low collector offset voltages, low emitter-base turn-on voltages, and very nearly ideal base and collector current characteristics with excellent junction ideality factors. Cut-off frequencies in excess of 100 GHz have been measured, making InP/GaAsSb DHBTs very attractive for wireless communication systems. InP/GaAs_0.51Sb_0.49 heterojunctions have so far received little attention in the literature, and no reliability information is available for this promising material combination. We have found that electrical stressing at moderate bias in fully self-aligned non-passivated devices results in a rapid, and reversible, degradation of device properties which is manifested through an increase of the base current ideality factor n_B. On the other hand, the collector current remains unchanged, indicating that there is no dopant migration effect under the test conditions used here.     

High-speed InP/InGaAs heterojunction bipolar transistors

Very-high-performance common-emitter InP/InGaAs single heterojunction bipolar transistors (HBTs) grown by metalorganic molecular beam epitaxy (MOMBE) are reported. They exhibit a maximum oscillation frequency (f_T) of 180 GHz at a current density of 1×10⁵ A/cm². this corresponds to an (R_BC_BC)_eff=f _T/(8πf²_max) delay time of 0.12 ps, which is the smallest value every reported for common-emitter InP/InGaAs HBTs. The devices have 11 μm² total emitter area and exhibit current gain values up to 100 at zero base-collector bias voltage. The breakdown voltage of these devices is high with measured BV_CEO and BV_CEO of 8 and 17 V, respectively     

Pseudomorphic AlInP/InP heterojunction bipolar transistors

Novel InP-based heterojunction bipolar transistors (HBTs) using an AlInP pseudomorphic emitter, together with an InP base and collector, have been fabricated. By using InP as both base and collector, the advantage of high electron velocity and high breakdown field of InP collectors are obtained without the problem associated with the energy barrier between the more standard InGaAs/InP base and collector heterojunction. Epitaxial layers were grown by gas-source molecular beam epitaxy (GSMBE). The 200 Å pseudomorphic emitter had an aluminium fraction of 15%, sufficiently suppressing hole injection from the base. The DC gain for 40×40 μm² devices reached 18. The breakdown voltage BV_CEO of 10 V is an improvement over devices with InGaAs base and collector layers     

Ultra-high-speed InP/InGaAs heterojunction bipolar transistors

We report on the microwave performance of InP/In_0.53Ga _0.47As heterojunction bipolar transistors (HBT's) utilizing a carbon-doped base grown by chemical beam epitaxy (CBE). The f_T and f_max of the HBT having two 1.5×10 μm² emitter fingers were 175 GHz and 70 GHz, respectively, at I_C=40 mA and V_CE=1.5 V. To our knowledge, the f _T of this device is the highest of any type of bipolar transistors yet reported. These results indicate the great potential of carbon-doped base InP/InGaAs HBT's for high-speed applications     

InGaP/GaAs0.94Sb0.06/GaAs doubleheterojunction bipolar transistor

A novel InGaP/GaAs_0.94Sb_0.06/GaAs double heterojunction bipolar transistor is presented. It features the use of fully strained pseudomorphic GaAs_0.94Sb_0.06 as the base layer and an InGaP layer as the emitter, which both eliminate misfit dislocations and current blocking, and increase the valence band discontinuity at the InGaP/GaAsSb interface. The device demonstrates a high current gain and a low turn-on voltage     

Effect of collector design on the d.c. characteristics of In0.49Ga0.51P/GaAs heterojunction bipolar transistors

InGaP/GaAs heterojunction bipolar transistors with various collector structures are compared. The dependence of d.c. device characteristics on the thickness of the n⁻ GaAs spacer in the collector of composite collector devices is presented. Results indicate that the spacer thickness significantly affects the performance of the transistor. An n⁺ doping spike on the InGaP side of the collector heterojunction is included in the collector design of the composite collector devices. Standard single-heterojunction d.c. results are compared to abrupt double- and composite collector heterojunction devices. Optimization of the spacer thickness, in conjunction with the n⁺ doping spike, eliminates most of the detrimental effects associated with a double-heterojunction device while retaining the beneficial properties of a wide-gap collector. As expected, the composite collector structure produces devices with higher breakdown voltages and lower offset voltages than single heterojunction devices. In addition, optimizing the spacer thickness can reduce the collector current saturation voltage of the composite collector device below that of a single-heterojunction device. These characteristics make composite collector heterojunction bipolar transistors ideal candidates for high power microwave device applications.     

InGaAs/InP composite collector heterostructure bipolar transistors

A high speed bipolar transistor with high breakdown voltage BV/sub CEO/ is described. The structure uses a composite collector of InGaAs and InP. A common emitter gain of 65 is obtained with a base doping of 7*10/sup 19/ cm/sup -3/ and a breakdown voltage in excess of 10 V. The f/sub T/=64 GHz was reached at a collector-emitter voltage of 2 V and a current density of 52 kA/cm/sup 2/. The potential of this structure for very high speed applications is demonstrated by the extracted intrinsic transit time of 0.4 ps.<>     

InP/InGaAs heterojunction bipolar transistors with different g-bridge structures

Several μ-bridge structures for InP-based heterojunction bipolar transistors (HBTs) are reported. The radio frequency measurement results of these InP HBTs are compared with each other. The comparison shows that μ-bridge structures reduce the parasites and double μ-bridge structures have a better effect. Due to the utilization of the double μ-bridges, both the cutoff frequency f_T and also the maximum oscillation frequency f_(max) of the 2×12.5 μm~2 InP/InGaAs HBT reach nearly 160 GHz. The results also show that the μ-bridge has a better effect in increasing the high frequency performance of a narrow emitter InP HBT.     

Low-base-resistance InP/InGaAs heterojunction bipolar transistors with a compositionally graded-base structure

To reduce base resistance of an InP/InGaAs heterojunction bipolar transistor grown by gas-source molecular beam epitaxy, the doping characteristics of carbon-doped InGaAs and the dependence of doping concentration on current gain were investigated. Using a thicker graded base was found to increase current gain significantly, resulting in increased doping level in the InGaAs: C-base layer. In particular, an 80-nm-thick graded base produces a base sheet resistance of 285 Ω/sq and maintains a practically useful current gain of 23 and a high cut-off frequency of 139 GHz.     

Comparative study of InP/InGaAs double heterojunction bipolar transistors with InGaAsP spacer at base-collector junction

In this article, the influence of InGaAsP spacers inserted at base-collector (B-C) junction in the InP/In_0.53Ga_0.47As double heterojunction bipolar transistors is demonstrated by two-dimensional semiconductor simulation. Due to the addition of an InGaAsP spacer layer, two small potential spikes are formed at B-C junction and the current blocking effect is reduced. The results exhibit that the maximum current gain increases from 30 to 374 (375) as the thickness of InGaAsP spacer layer varies from 0 to 100 Å (300 Å). On the other hand, the device with a thicker spacer layer (300 Å) could effectively improve the knee effect of the current-voltage curves as compared the other devices. In addition, the collector-emitter offset voltages less than 10 mV are observed in the three devices.     

Be diffusion in InGaAs/InP heterojunction bipolar transistors

Classic signatures of Be diffusion were observed in InAlAs/InGaAs HBT's after elevated temperature bias stress, i.e., a positive shift in the Gummel plot, higher collector ideality, and higher offset voltage. An activation energy of 1.57 eV was calculated. Lifetimes of 3.3×106 h and 37000 h were extrapolated for low and high power operation, respectively. In contrast, an InP/InGaAs HBT with a C doped base showed no signatures of C diffusion. The results show that Be diffusion is manageable at lower power. They also support the idea that C is more stable than Be in this material system     

Small offset-voltage In0.49Ga0.51P/GaAsdouble-barrier bipolar transistor

In_0.49Ga_0.51P/GaAs double-barrier bipolar transistors (DBBTs) grown by gas-source molecular beam epitaxy (GSMBE) have been fabricated and measured. This structure has two InGaP barrier layers (100 Å in thickness): one is inserted between the emitter-base (e-b) junction and the other between the base-collector (b-c) junction. An offset voltage of 26 mV and a differential current gain of 120 at room temperature were obtained with a heavily doped p⁺ (2×10¹⁹ cm^-3) base (500 Å in thickness). The small offset voltage was attributed to the similar structure of the e-b and b-c junctions and to the suppression of the hole injection current into the collector by the InGaP hole barrier at the b-c junction     

Digital integrated circuit using GaInAs/InP heterojunction bipolar transistors

A divider circuit using GaInAs/InP heterojunction bipolar transistors is reported for the first time. This is the first monolithic digital integrated circuit using these devices. The divider has been clocked at 5 GHz, which is the fastest toggle rate for a bipolar circuit on InP.<>     

Magnetotransport characterization of surface-treated InP/InGaAs heterojunction bipolar transistors

The results of surface modification induced effects on InP/InGaAs single heterojunction bipolar transistors, as revealed by magnetotransport experiments, are described here. The surface treatments included both sulphur-based surface passivation and ion bombardment-induced surface damage. The former is known to improve device characteristics and the latter to degrade device operation. In this work the aim was to assess these techniques for tailoring device performance for surface sensing applications. Device characteristics were found to be sensitive to surface preparation prior to measurements. Measurements revealed that surface treatments that improve device performance also reduce sensitivity to external magnetic fields while treatments that degrade performance make devices more sensitive to externally applied magnetic fields.     

High-current-gain small-offset-voltage In0.49Ga0.51P/GaAs tunneling emitter bipolar transistors grown by gas sourcemolecular beam epitaxy

Different emitter size, self-aligned In_0.49Ga_0.51 P/GaAs tunneling emitter bipolar transistors (TEBTs) grown by gas source molecular beam epitaxy (GSMBE) with 100-Å barrier thickness and 1000-Å p⁺(1×10¹⁹ cm^-3) base have been fabricated and measured at room temperature. A small-signal current gain of 236 and a small common-emitter offset voltage of 40 mV were achieved without any grading. It is found that the emitter size effect on current gain was reduced by the use of a tunnel barrier. The current gain and the offset voltage obtained were the highest and lowest reported values to date, respectively, in InGaP/GaAs system heterojunction bipolar transistors (HBTs) or TEBTs with similar base dopings and thicknesses     

High fmax InP double heterojunction bipolar transistorswith chirped InGaAs/InP superlattice base-collector junction grown byCBE

We report the performance of InP Double Heterojunction Bipolar Transistors (DHBT's) with a chirped InGaAs/InP superlattice B-C junction grown by CBE. The B-C junction of the DHBT was graded with a 10-period InGaAs/InP chirped superlattice (CSL) between the InGaAs base and the lightly doped InP collector. A highly doped thin layer was also included at the end of the CSL to offset the quasi-electric field arising from the grade and suppress further the carrier blocking effect across the B-C heterojunction. The InP/InGaAs CSL DHBT demonstrated a high BV_CEO of 18.3 V with a typical current gain of 55 with minimal carrier blocking up to high current densities. Maximum cutoff frequencies of f_max=146 GHz and f_r=71 GHz were obtained from the fabricated 2×10 μm²-emitter DHBT     

Extrapolated fmax of heterojunction bipolar transistors

It is shown that the extrapolated f_max of heterojunction bipolar transistors (HBT's) can be written in the form f _max=√f_T/8π(RC)_eff, where f_T is the common-emitter, unity-current-gain frequency, and where (RC)_eff is a general time constant that includes not only the effects of the base resistance and collector-base junction capacitance, but also the effects of the parasitic emitter and collector resistances, and the dynamic resistance 1/g_m, where g_m is the transconductance. Simple expressions are derived for (RC) _eff, and these are applied to two state-of-the-art devices recently reported in the literature. It is demonstrated that, in modern HBT's, (RC)_eff can differ significantly from the effective base-resistance-collector-capacitance product conventionally assumed to determine f_max     

Demonstration of aluminum-free metamorphic InP/In0.53Ga0.47As/InP double heterojunction bipolar transistors on GaAssubstrates

We report, for the first time, the successful fabrication of aluminum-free metamorphic (MM) InP/In_0.53 Ga_0.47 As/InP double heterojunction bipolar transistors (DHBTs) on GaAs substrates with a linearly graded In_xGa_1-xP buffer grown by solid-source molecular beam epitaxy (SSMBE). Devices with 5×5 μm² emitters display a peak current gain of 40 and a common-emitter breakdown voltage (BV_CE0) higher than 9 V, a current gain cut-off frequency (f_T) of 48 GHz and a maximum oscillation frequency (f_max) of 42 GHz. A minimum noise figure of 2.9 dB and associated gain of 19.5 dB were measured at a collector current level of 2.6 mA at 2 GHz. Detailed analysis suggests that the degradation of the base-emitter heterojunction interface and the increase of bulk recombination are the most probable causes for the poorer device performance of current metamorphic HBTs compared with lattice-matched HBTs     

Determination of a collector junction model for planar bipolar transistors

This paper is concerned with the representation of the collector-base junction of planar bipolar transistors by a model capable of accurate characterization of junction capacitance and avalanche breakdown behavior. The model chosen consists of an exponential impurity density profile with cylindrical peripheral region approximation, and is regarded as the simplest representation suitable for the purpose. Objectives are the practical determination of the defining parameters (collector background, impurity density, exponential characteristic length, and collector junction depth) for such a model, and the demonstration of its accuracy for the physical characterization of the device structure. Model parameter determination is carried out in terms of junction capacitance and BVCBOmeasurements, by processes of computer fitting between model and measured data; the procedures used are nondestructive. It is shown, in particular, that the values obtained for the collector resistivity and junction depth are in very good agreement with those derived by 4-point probe measurement and by bevel and stain sectioning, respectively.     

Millimetre-wave InP/InGaAs heterojunction bipolar transistors witha subpicosecond extrinsic delay time

We report the microwave characteristics of InP/InGaAs heterojunction bipolar transistors (HBTs) using a carbon-doped base grown by chemical beam epitaxy (CBE). An extrinsic delay time of 0.856 ps was achieved by nonequilibrium transport in a very thin base layer and extremely small emitter parasitic resistance through the use of silicon δ-doping in the emitter ohmic contact layer. To our knowledge, this is the shortest extrinsic delay time of any bipolar transistors reported. This result indicates the great potential of InP/InGaAs HBTs for applications requiring a very large bandwidth