LIGA fabrication of X-ray Nickel lenses

Nickel refractive planar lenses generating line and point X-ray spots were fabricated by LIGA technology. The optimum parameters of the lenses were simulated for a kinoform lens profile and an X-ray energy range from 100 keV to 1 MeV. The focusing elements of the lens are characterised by an aspect ratio of about 200 and a side-wall roughness of less than 5 nm r.m.s. The optical characteristics of the lenses were tested at the ESRF using a photon energy of 212 keV. A focal spot of 10 m size was measured using a X-ray sensitive film as a width at a half maximum of the darkening of this detector. A ratio of appr. 7 of the detector responses of the focused spot to the unfocused radiation was measured. The correspondent characteristics of the focal spot of the lens for the revealed photon flux are FWHM = 6 m and ~20 for the gain.     

A micro cycloid-gear system fabricated by multi-exposure LIGA technique

 In this paper, a prototype of 2 mm-diameter micro-cycloid gear system fabricated by the multi-exposure LIGA technique is presented. The gear system is composed of a casing and three vertically stacked disks and gears. Each part consists of three different levels. The first level, 40 μm high, was fabricated by UV-lithography, and the second as well as the third level, 195 μm and 250 μm high respectively, were processed by aligned deep X-ray lithography (DXL). The alignment error between two DXL-processed layers has been measured to be within ±5 μm range. As a result of the height control process, the deviation of structural height has been maintained within ±3 μm range for the UV-lithography-processed structures, and ±10 μm for the DXL-processed structures. Preliminary tests of gear assembly have been implemented with 125 μm-diameter commercially available glass fiber, and the further efforts are being carried out.     

Color image segmentation: advances and prospects

Image segmentation is very essential and critical to image processing and pattern recognition. This survey provides a summary of color image segmentation techniques available now. Basically, color segmentation approaches are based on monochrome segmentation approaches operating in different color spaces. Therefore, we first discuss the major segmentation approaches for segmenting monochrome images: histogram thresholding, characteristic feature clustering, edge detection, region-based methods, fuzzy techniques, neural networks, etc.; then review some major color representation methods and their advantages/disadvantages; finally summarize the color image segmentation techniques using different color representations. The usage of color models for image segmentation is also discussed. Some novel approaches such as fuzzy method and physics-based method are investigated as well.     

Studies of the adhesion properties of LIGA microstructures by X-ray spectroscopy and mechanical measurements

In the first step of the LIGA process microstructures with high aspect ratios are fabricated by patterning a resist layer with deep etch X-ray lithography. As resist typically PMMA (polymethylmethacrylate) is used. For the following electroforming process and to achieve perfect microstructures the adhesion of the PMMA on the substrates is of great importance. For a better understanding the adhesion mechanism, particular induced through the adhesion promoter MEMO (methacryloxypropyl-trimethoxysilane) was investigated on various substrates. Two methods, namely XANES/EXAFS spectroscopy under grazing incidence and shear stress measurements were modified for the specific needs of microstructures. Our studies proved that the adhesion strength is determined by two factors. A rough surface, which allows mechanical interlocking, increases the adhesion strength by about 10%. The larger part of the adhesion strength is determined by formation of chemical bonds when adding an adhesion promoter. E.g. addition of 5% adhesion promoter increases the adhesion strength by 90%. These results were, as far as possible, confirmed by the X-ray spectroscopical measurements.     

Ultra light-weight and high-resolution X-ray mirrors using DRIE and X-ray LIGA techniques for space X-ray telescopes

We are developing novel ultra light-weight and high-resolution X-ray micro pore optics for space X-ray telescopes. In our method, curvilinear micro pore structures are firstly fabricated by silicon deep reactive ion etching (DRIE) or X-ray LIGA processes. Secondly, side walls of the micro structures are smoothed by magnetic field assisted finishing and/or hydrogen annealing techniques for high reflectivity mirrors. Thirdly, to focus parallel X-ray lights from astronomical objects, these structures are elastically or plastically bent into a spherical shape. Fourthly, the bent structures are stacked to form a multi-stage X-ray telescope. In this paper, we report on fabrication and X-ray reflection tests of silicon and nickel X-ray mirrors using the DRIE and LIGA processes, respectively. For the first time, X-ray reflections were confirmed on both of the mirrors. Estimated rms roughnesses were 5 nm and 3 nm for the silicon and nickel mirrors, respectively.     

The study of LIGA technique at NSRL

The activity of LIGA technique was started in the fall of 1993 at National Synchrotron Radiation Laboratory (NSRL), some primary results have been obtained. Micro gearwheels were produced by deep-etch lithography using Hefei light source. The largest diameter of gearwheel is 200 μm, the smallest one only 35 μm, both with thickness of 50 μm. The first metallic structure of nickel was fabricated recently. The mask used in experiments was made by ourselves, it is a composite of kapton membrane as a mask blank, and gold as an absorber. This work was support by National Nature Science Foundation of China     

The study of LIGA technique at NSRL

 The activity of LIGA technique was started in the fall of 1993 at National Synchrotron Radiation Laboratory (NSRL), some primary results have been obtained. Micro gearwheels were produced by deep-etch lithography using Hefei light source. The largest diameter of gearwheel is 200 μm, the smallest one only 35 μm, both with thickness of 50 μm. The first metallic structure of nickel was fabricated recently. The mask used in experiments was made by ourselves, it is a composite of kapton membrane as a mask blank, and gold as an absorber. Received 30 October 1995/Accepted: 25 January 1996     

Cuckoo search: recent advances and applications

Cuckoo search (CS) is a relatively new algorithm, developed by Yang and Deb in 2009, and the same has been found to be efficient in solving global optimization problems. In this paper, we review the fundamental ideas of cuckoo search and the latest developments as well as its applications. We analyze the algorithm and gain insight into its search mechanisms and find out why it is efficient. We also discuss the essence of algorithms and its link to self-organizing systems, and finally, we propose some important topics for further research.     

Studies of the adhesion properties of LIGA microstructures by X-ray spectroscopy and mechanical measurements

In the first step of the LIGA process microstructures with high aspect ratios are fabricated by patterning a resist layer with deep etch X-ray lithography. As resist typically PMMA (polymethylmethacrylate) is used. For the following electroforming process and to achieve perfect microstructures the adhesion of the PMMA on the substrates is of great importance. For a better understanding the adhesion mechanism, particular induced through the adhesion promoter MEMO (methacryloxypropyl-trimethoxysilane) was investigated on various substrates. Two methods, namely XANES/EXAFS spectroscopy under grazing incidence and shear stress measuremsents were modified for the specific needs of microstructures. Our studies proved that the adhesion strength is determined by two factors. A rough surface, which allows mechanical interlocking, increases the adhesion strength by about 10%. The larger part of the adhesion strength is determined by formation of chemical bonds when adding an adhesion promoter. E.g. addition of 5% adhesion promoter increases the adhesion strnegth by 90%. These results were, as far as possible, confirmed by the X-ray spectroscopical measurements. The financial support of this project by the Federal Ministry of Science and Technology (contract No. 05 5P DAX18) is gratefully acknowledged.     

Cartilage proteomics: Challenges, solutions and recent advances

The mammalian skeleton is largely composed of cartilage and bone. The major functions of cartilage are first to provide a transient template for development of the axial and appendicular skeleton and secondly to provide permanent articulating joint surfaces. The unique cartilage extracellular matrix (ECM) is essential for the load-bearing and viscoelastic properties of cartilage tissues. Maintained by the chondrocytes, the ECM contains a myriad of proteins and proteoglycans organized into precise networks. Many cartilage disorders result from genetic disruption of cartilage ECM components, their interactions and/or degradation. Although technically challenging, the proteomic analysis of cartilage in development and disease is now emerging as a clinically important research area. In this article, we will review progress in the proteomic characterization of cartilage-related samples.     

Industrial geometry: recent advances and applications in CAD

Industrial Geometry aims at unifying existing and developing new methods and algorithms for a variety of application areas with a strong geometric component. These include CAD, CAM, Geometric Modelling, Robotics, Computer Vision and Image Processing, Computer Graphics and Scientific Visualization. In this paper, Industrial Geometry is illustrated via the fruitful interplay of the areas indicated above in the context of novel solutions of CAD related, geometric optimization problems involving distance functions: approximation with general B-spline curves and surfaces or with subdivision surfaces, approximation with special surfaces for applications in architecture or manufacturing, approximate conversion from implicit to parametric (NURBS) representation, and registration problems for industrial inspection and 3D model generation from measurement data. Moreover, we describe a ‘feature sensitive’ metric on surfaces, whose definition relies on the concept of an image manifold, introduced into Computer Vision and Image Processing by Kimmel, Malladi and Sochen. This metric is sensitive to features such as smoothed edges, which are characterized by a significant deviation of the two principal curvatures. We illustrate its applications at hand of feature sensitive curve design on surfaces and local neighborhood definition and region growing as an aid in the segmentation process for reverse engineering of geometric objects.     

Equations of exposure time and X-ray mask absorber thickness in the LIGA process

 The LIGA X-ray exposure step was modeled into three inequalities from exposure requirements. From these inequalities, equations for the minimum and maximum exposure times required for a good quality microstructure were obtained. An equation for the thickness of an X-ray mask absorber was also obtained from the exposure requirement of threshold dose deposition. A power function of photon energy, approximating the attenuation length of the representative LIGA resist, PMMA, and the mean photon energy of the X-rays incident upon an X-ray mask absorber were applied to the above mentioned equations. Consequently, the trends of the minimum and maximum exposure times with respect to mean photon energy of X-rays and thickness of PMMA were examined and an equation for the maximum exposable thickness of PMMA was obtained. The trends of the necessary thickness of a gold X-ray mask absorber with respect to photon energy of the X-rays and PMMA thickness ratio were also examined. The simplicity of the derived equations has clarified the X-ray exposure phenomenon and the interplay of exposure times, the attenuation coefficient and the thickness of an X-ray mask absorber, the attenuation coefficient and the thickness of a resist, and synchrotron radiation power density. Received: 22 November 1999/Accepted: 27 January 2000     

Model-based testing of software and systems: recent advances and challenges

Model-based testing is focused on testing techniques which rely on the use of models. The diversity of systems and software to be tested implies the need for research on a variety of models and methods for test automation. We briefly review this research area and introduce several papers selected from the 22nd International Conference on Testing Software and Systems (ICTSS).     

A survey on information visualization: recent advances and challenges

Information visualization (InfoVis), the study of transforming data, information, and knowledge into interactive visual representations, is very important to users because it provides mental models of information. The boom in big data analytics has triggered broad use of InfoVis in a variety of domains, ranging from finance to sports to politics. In this paper, we present a comprehensive survey and key insights into this fast-rising area. The research on InfoVis is organized into a taxonomy that contains four main categories, namely empirical methodologies, user interactions, visualization frameworks, and applications, which are each described in terms of their major goals, fundamental principles, recent trends, and state-of-the-art approaches. At the conclusion of this survey, we identify existing technical challenges and propose directions for future research.     

煤矿物联网研究现状及发展趋势

阐述了国内外煤矿物联网的一些概念及发展历史,分别从系统架构、感知层、传输层、应用层及工程应用方面总结了国内外煤矿物联网研究现状;指出目前煤矿物联网研究存在的主要问题为缺乏低功耗智能传感器及装置、矿井环境能量捕获技术、数据与网络安全方法、公共服务平台以及煤矿物联网相关标准;从嵌入式智能信息传感技术、基于大数据的矿山安全生产云服务平台、安全性方面探讨了煤矿物联网可能的发展方向。     

ginSODA: massive parallel integration of stiff ODE systems on GPUs

The Journal of Supercomputing - Ordinary differential equations (ODEs) are a widespread formalism for the mathematical modeling of natural and engineering systems, whose analysis is generally...     

Fast and accurate X-ray lithography simulation enabled by using Monte Carlo method. New version of DoseSim: a software dedicated to deep X-ray lithography (LIGA)

This paper presents the recent development of a simulation tool for deep X-ray lithography. The simulation tool named DoseSim (Meyer et al. in Rev Sci Instrum 74(2):1113–1119, 2003) is a graphical user interface, working under Windows, specially dedicated to the necessary requirements of X-ray lithography setting at a synchrotron. The previous version included the computation of synchrotron radiation from bending magnets, the effects of the optical properties of materials, single mirror and the necessary parameters for the resist exposure. New functionalities, including among others, the exposure time calculation, the insertion of a double mirror, secondary effects (Fresnel diffraction, dose deposited under the absorber) have been added. Also, DoseSim includes traceability concerning the database and calculations used, and de facto the results obtained. Furthermore, Monte Carlo calculations using the PENetration and Energy LOss of Positrons and Electrons (PENELOPE) (Salvat et al.in OECD/NEA Data Bank, France, NEA N°6416, http://www.nea.fr/lists/penelope.html, 2008) code of the spatial distribution of the dose deposited by an X-ray beam in a resist are used. The PENELOPE results (simulations were done mono-energetically for a large range of energy) are the basis of the DoseSim routines for the calculations of the absorbed dose behind the absorber, and at the interface resist/seed layer/substrate. Example of calculations will be discussed along with the effects on dose from different seed layers and substrates.     

Characterization of gear pumps fabricated by LIGA

 This paper presents the characterization of a positive displacement, magnetically-coupled, self-priming gear pump and a direct drive metal gear pump. In the magnetically coupled design (the in-line pump), the gears are indirectly driven by a electric motor coupled to a pair of magnets. The pump provides a flow rate of 350 μl/min at 5000 rpm, over 140 cm-H₂O (∼2 psi) of head pressure and 28.8 cm-H₂O vacuum on the suction side for a single stage pump. A two stage in-line pump generated 53 cm-H₂O vacuum at its inelt (21″H₂O). Very recently, we demonstrated a direct driven gear pump using a 3 mm smoovy^TM brushless DC motor. The direct driven pump provides a maximum flow rate of 2.5ml/min at 1200 Hz (72 krpm) and 3.6 psi dead head pressure. The direct drive pump provided 18 cm-H₂O vacuum at its inlet due to the large clearances in the first generation device. Received: 25 August 1997 / Accepted: 15 September 1997